JP2019115871A - Gas treatment device - Google Patents

Abstract

To reduce the frequency of maintenance for a first pipe and a collection vessel.SOLUTION: A gas treatment device includes: a first pipe having an inlet part and an outlet part, through which a first gas containing an organic substance and water flow; a collection vessel connected to the outlet part of the first pipe to collect the organic substance; and a second pipe connected to the collection vessel, through which a second gas for cleaning and discharging the first gas from the collection vessel flows.SELECTED DRAWING: Figure 1

Description

  The present disclosure relates to a gas processing apparatus that cleans gas generated in, for example, a manufacturing process of a solar cell element.

  For example, when a solar cell element is manufactured, a conductive paste containing an organic component is disposed on a semiconductor substrate, and then the conductive paste is fired in a firing furnace to form an electrode on the semiconductor substrate. I have a process to do. At this time, it is necessary to evacuate the gas containing the organic matter generated in the baking furnace as a clean gas in the gas processing apparatus.

  As the above-mentioned gas treatment apparatus, for example, in a water storage tank having a function of collecting dust in the atmosphere, organic substances can be collected from the gas, so it is possible to use a wet dust collector equipped with such a water storage tank (See, for example, Patent Document 1 below).

  However, in the vicinity of the gas inlet in the water storage tank, and between the gas inlet of the water storage tank and the exhaust piping from the baking furnace, etc., the organic matter in the gas is liquefied or liquefied because It is easy to solidify. For this reason, the frequency of maintenance in the exhaust pipe and in the water storage tank tends to be high (the number of times of maintenance is large).

JP 2005-329370 A

  Gas processing equipment has room for improvement in terms of reducing maintenance frequency.

  In the gas processing device according to one aspect of the present disclosure, a first pipe for flowing a first gas containing organic matter and water, and the first pipe are connected to introduce the first gas and the organic matter And a second pipe connected to the collection container for flowing a second gas exhausted from the collection container.

  According to the gas processing device of the above configuration, the maintenance frequency of the first pipe and the collection container can be reduced.

FIG. 1 is a schematic configuration view schematically showing a gas treatment apparatus according to an embodiment. FIG. 2 is a schematic cross-sectional view showing an example of the collection container. FIG. 3 is a schematic configuration view schematically showing a gas treatment apparatus according to another embodiment. Fig.4 (a) to FIG.4 (c) is a cross-sectional schematic diagram which shows the structural example of the 1st pipe | tube 2, respectively.

  For example, when a PERC (Passivated Emitter and Rear Cell) type solar cell element is manufactured, a passivation layer, a protective layer, and a back electrode are formed on the back surface of a semiconductor substrate made of a semiconductor material such as silicon. It may be formed in the order of description. Here, the passivation layer is made of, for example, an oxide such as aluminum oxide or a nitride such as silicon nitride. Moreover, the method etc. which apply | coat the insulating paste containing the siloxane resin which is organic substance, and the drying in a baking furnace etc. may be applied for a protective layer, for example.

  In the formation of the surface electrode of the solar cell element, first, for example, a conductive paste containing a metal powder, a glass component, and an organic vehicle which is an organic substance is first formed by screen printing etc. It is applied. In addition, also in the formation of the back surface electrode, a conductive paste similarly containing a metal powder, a glass component, and an organic vehicle which is an organic substance is applied onto the protective layer so as to have a desired shape.

  For example, as a conductive paste used for an electrode of a solar cell element, a metal powder such as silver or aluminum, a glass frit, an organic vehicle or the like mixed with a minor component such as a dispersant is used. As the organic vehicle, for example, one obtained by dissolving a binder comprising ethyl cellulose or a phenol resin in an organic solvent such as terpineol, diethylene glycol monobutyl ether acetate, diethylene glycol diethyl ether or 2-ethoxyethanol is used.

  The semiconductor substrate coated with the conductive paste is fired in a firing furnace to form electrodes on the front and back sides of the solar cell element. Further, by firing the conductive paste, the surface electrode penetrates the antireflective film and is electrically connected to the semiconductor substrate, and a part of the back electrode penetrates the protective layer and the passivation layer to electrically connect the semiconductor substrate to the semiconductor substrate. Connected to

  The firing of the electrodes on the front surface side and the back surface side and the drying of the insulating paste containing the siloxane resin to be a protective layer in a firing furnace may be performed simultaneously in one firing.

  As described above, the surface electrode, the protective layer, the back surface electrode, and the like are formed in a baking furnace with an insulating paste containing an organic substance and a conductive paste containing an organic substance. At this time, in the firing furnace in a high temperature state, the organic substance in the insulating paste and the conductive paste becomes a gas, which is mixed with air or the like to generate a gas containing the organic substance. In the baking furnace, for example, when the temperature of the silicon wafer to which the conductive paste is applied is raised to about 300 ° C. to about 500 ° C., the applied conductive paste causes debinding to generate gas. Furthermore, also in heating and solidification of the siloxane resin at the time of firing, a certain amount of the siloxane component is vaporized together with the binder removal, and a siloxane-containing gas is generated together with the binder gas.

  For this reason, it is necessary to remove as much as possible of the organic matter from the gas containing the organic matter generated in the firing furnace by the gas treatment apparatus and exhaust the cleaned gas.

  However, the binder gas or the siloxane-containing gas generated in the calciner gradually cools and becomes solid or liquid when reaching a certain temperature or less (for example, 100 ° C. to 150 ° C. or less). For example, when a conventional wet type dust collector is used as a gas processing device, in the vicinity of the gas inlet in the water storage tank constituting the dust collector and between the gas inlet of the water storage tank and the exhaust piping from the baking furnace, etc. Since the temperature is lower than that of the calcining furnace, the organic substance in the gas tends to liquefy or solidify.

  As a result, the organic substance may gradually become large lumps and adhere to the gas inlet port of the water storage tank, the exhaust pipe and the like with the passage of time, and may easily stagnate, thereby reducing the flow rate of gas flowing to the water storage tank. Therefore, the frequency of maintenance in the exhaust pipe and in the water storage tank is high (the number of maintenances is large). In addition, if the solidified or liquefied component of the gas adheres to the exhaust pipe and the inner wall of the water storage tank, etc., the inside of the exhaust pipe and the water storage tank becomes narrow, and the gas flow rate decreases. It was necessary to remove a fixed thing etc. many times.

  Therefore, the inventor has created a technology that can lower the maintenance frequency of the collection container for collecting the organic matter and the piping connected thereto (reduce the number of maintenance times) in the gas processing device.

  Hereinafter, an embodiment of a gas treatment apparatus according to the present disclosure will be described with reference to the schematically shown drawings.

  As shown in FIG. 1, the gas processing device S has a gas inlet and a gas outlet, and a first pipe 2 for flowing a first gas G1 containing an organic substance and a first supply water H1. , A clean vessel 1 connected to the outlet of the first pipe 2 and connected to the collection vessel 1 having a dust collecting function and the collection vessel 1 to purify and exhaust the first gas G1 from the collection vessel 1 And a second pipe 3 for flowing the second gas G2.

  The first tube 2 is, for example, a flow path of the first gas G1 containing an organic substance from a baking furnace (not shown) for forming the protective layer or electrode of the above-described PERC type solar cell element. A water supply pipe 2B for supplying a first supply water H1 connected to a gas pipe 2A and a water supply pipe from tap water or ground water or the like, for flowing both the first gas G1 and the first supply water H1 And the supply pipe 2C. The first gas pipe 2A and the supply pipe 2C of the first pipe 2 are both made of metal such as aluminum or stainless steel, for example, and are formed of a pipe having an inner diameter of about 50 mm to 300 mm.

  The first gas pipe 2A may be directly connected to the firing furnace for efficient purification of the gas, or may be indirectly connected to the firing furnace via an exhaust pipe from the firing furnace or the like. Good. In addition, the first gas G1 containing an organic substance other than the baking furnace may flow in the first gas pipe 2A constituting the first pipe 2, and the first gas G1 may be used as the exhaust gas from the baking furnace. It shall not be limited.

The first gas pipe 2A, for example, so that can be supplied per minute 10 m ³ / min to 200 meters ³ / min about the first gas G1 into the collection vessel 1. In the example shown in FIG. 1, the first gas pipe 2 </ b> A is connected to the collection vessel 1 in the vicinity of the collection vessel 1 from the state in the vertical direction to the state in the horizontal direction. However, the first gas pipe 2A may be connected to the collection container 1 in a state of being inclined with respect to the horizontal direction from the state of the vertical direction in the vicinity of the collection container 1. Furthermore, a water supply pipe 2B is connected in the middle of the first gas pipe 2A. The water supply pipe 2B penetrates the first gas pipe 2A, and one end thereof reaches the inside of the first gas pipe 2A. The material of the water supply pipe 2B may be a pipe having an inner diameter of about 10 mm to about 30 mm made of a resin such as vinyl chloride, at a portion outside the first gas pipe 2A. Also, for example, the portion inserted inside the first gas pipe 2A is changed to a metal such as stainless steel halfway so as to withstand the high temperature of the exhaust gas. Furthermore, a spray nozzle 4 made of, for example, stainless steel or the like is attached to a tip end portion of a water supply pipe 2B inserted inside the first gas pipe 2A in order to supply water to the first gas G1. For example, the first gas G1 can be sprayed from the spray nozzle 4 so as to spray the first supply water H1 of about 3 liters / minute to about 10 liters / minute.

  According to such a structure, the first gas G1 flowing through the inside of the first gas pipe 2A is rapidly dropped by the first supply water H1 sprayed from the spray nozzle 4 before reaching the collection container 1 It is cooled. Thereby, the organic substance contained in the first gas G1 becomes an aggregate mixed with water. For example, the temperature of the first gas G1 from the calcining furnace is, for example, 50 ° C. or less by coming into contact with the first supply water H1 in the first pipe 2 at a high temperature (eg, about 150 ° C. to 250 ° C.). Go down to the extent.

  In the test conducted repeatedly by the inventor, when the first gas G1 containing an organic substance is gradually cooled in a flow passage such as an exhaust pipe, the organic matter component contained in the first gas G1 becomes the first gas pipe 2A. And, in the state of being fixed to the inner wall of the collection vessel 1, it coagulates and solidifies, and can not be easily removed.

  On the other hand, as described above, in the aggregate formed by mixing the organic component of the first gas G1 and water by spraying the first supply water H1 to the high temperature first gas G1, the first gas pipe is used. It becomes difficult to adhere to the inner wall of 2 A and the collection container 1. Thereby, the aggregate formed by mixing the organic component of the first gas G1 with water can reach the collection container 1 from the supply pipe 2C and can be easily recovered from the collection container 1. In particular, when siloxane or the like is contained in the first gas G1, when the first gas G1 is gradually cooled by a flow passage such as an exhaust pipe, the first gas pipe 2A and the inner wall of the collection container 1 are further strengthened. The gas treatment device of the present embodiment functions effectively because it is easily aggregated and solidified in a fixed state.

  Further, the second pipe 3 is connected to the collection container 1 and provided for exhausting the second gas G2 purified by removing as much organic matter and dust as possible from the first gas G1 by the collection container 1. .

  The collection container 1 should just have a function which takes out the organic substance from the 1st gas G1, for example, may be a water storage tank etc. which are used for publicly known wet dust collectors. The collection container 1 has, for example, a configuration as shown in FIG. 2, and the outlet side of the first pipe 2 is connected to the gas inlet of the collection container 1. In the example shown in FIG. 1, the outlet side of the first gas of the supply pipe 2 </ b> C and the first feed water H <b> 1 is connected to the gas inlet of the collection container 1. In addition, an exhaust port for exhausting the second gas G2 is located above the gas introduction port of the collection container 1. The second pipe 3 which is a pipe for exhausting the second gas is connected to the exhaust port.

  Further, as shown in FIG. 1, the second supply water H 2 is supplied to the collection container 1 in advance from a water supply pipe from tap water or ground water via the supply pipe 11. Further, the drainage pipe 12 is connected to the lower position of the collection container 1 so that the water can be discharged from the collection container 1 so that the treated water H3 can be discharged. In FIG. 1, L1 and L2 indicate water levels.

The size, structure, and the like of the collection container 1 may be appropriately determined in consideration of the flow rate of the gas to be processed, the collection performance to be obtained, and the like. For example, the outer wall portion of the collection container 1 is mainly a container made of stainless steel, and its capacity is about 2 m ³ to 10 m ³ . Below the inside of the collection container 1, for example, water having a temperature of about 10 ° C. to 50 ° C. is contained. In the collection container 1, a large number of partitions 15 are disposed. The partition 15 is made of, for example, stainless steel. In the example of FIG. 2, the first partition 15A and the second partition 15B are positioned on the gas inlet side of the collection container 1. At the position between these partitions, the central portion of the collection container 1 is The third partition 15C is positioned. Between the first partition 15A and the second partition 15B, a funnel shape is introduced to guide the exhaust gas 16 made of gas, dust, organic matter, etc., which has entered the collection container 1 to the third partition 15C. . In addition, the third partition 15C is configured to face the first partition 15A and the second partition 15B, and is generated in the collection container 1 in cooperation with the first partition 15A, the second partition 15B, and the like. It plays a role of causing a lump in which organic matter or the like is aggregated to fall below the collection container 1. 19 in FIG. 2 is a lump dropped into water. With such a structure, the flow path of the gas is narrowed between the first partition 15A and the second partition 15B, so the flow velocity of the exhaust gas 16 which has passed through this portion is increased. Therefore, as the water in the collection container 1 located below this portion is wound up, exhaust gas is generated in the gap between the first partition 15A and the second partition 15B and the third partition 15C. A region 17 where the water 16 mixes with the water 16 is formed, and the remaining organic components contained in the exhaust gas 16 can be aggregated into a mass.

  Further, the fourth partition 15D is disposed in the vicinity of the inner side of the exhaust port to which the second pipe 3 is connected, and mist containing water from the area 17 where the exhaust gas 16 and water mix is mixed with the second pipe 3 It plays a role of suppressing entering.

  As described above, since the gas processing apparatus S particularly includes the first pipe 2 and the collection container 1, in the first pipe 2 in a low temperature state, the organic matter in the first gas G1 is It is hard to fix what solidified on the inner wall of the 1 pipe | tube 2, and it becomes difficult to retain the solidified organic substance. In addition, the solidified organic matter is less likely to be fixed to the inner wall portion in the vicinity of the inlet of the first gas of the collection container 1. Thereby, the function of the collection container 1 can be easily maintained over a long period of time, and the maintenance frequency of the collection container 1 and the first pipe 2 can be reduced.

  In addition, the gas processing apparatus S may further include a third pipe 5 connected to the collection container 1 for introducing a third gas G3, which is air whose flow rate has been adjusted. The second gas G3 may be nitrogen gas, argon gas or the like in addition to air.

  The third gas G3 may use, for example, a gas flow control valve 14 capable of variably controlling the gas flow such as a butterfly valve provided in the third pipe 5. Heretofore, it has been necessary to design and manufacture the collection container 1 by determining in advance the specified exhaust air volume by the exhaust fan 9 and the pressure difference between the intake side and the exhaust side of the collection container 1. According to the gas processing apparatus S of the present embodiment, the differential pressure between the gas pressure in the third pipe 5 and the gas pressure in the collection vessel 1 can be adjusted, so the design of the capacity and internal structure of the collection vessel 1 Can expand the degree of freedom of

  Further, even if the gas processing apparatus S is further connected to the second pipe 3, the first gas G1 further includes the separator 6 for separating water from the second gas G2 purified by the collection vessel 1. Good. In this case, a fourth pipe 8 is connected to the separator 6 for exhausting the second gas G2 (a fourth gas G4 described later) from which water has been separated from the separator 6. Here, the fourth pipe 8 may exhaust the clean fourth gas G4 from the fifth pipe 10 through the blower fan 9.

  The separator 6 is preferably, for example, a mist separator capable of removing the mist from the gas by separating and collecting the mist (droplet) contained in the second gas G2 purified by the collection container 1. Used. The separator 6 has, for example, a structure in which a filter is disposed in a container to which the second pipe G2 is connected, the mist is collected outside the filter, and the air passing through the filter is exhausted to the outside of the container It is.

  The separator 6 can further remove at least components such as droplets (moisture) contained in the water in the second gas G2, which can not be removed by the collection container 1. Thus, the purified gas can be exhausted to the outside.

  The separator 6 may be provided with a first drain pipe 7A for draining the water separated from the second gas G2 from the separator 6 to the outside. As shown in FIG. 1, the first drain pipe 7A may be water-sealed by bending the pipe in an S-shape. Here, by performing water sealing with a U-shaped pipe, drainage is possible even if the pressure in the separator 6 is negative.

  Further, as shown in FIG. 3 of the other embodiment of the first drain pipe, the separator 6 is connected to the separator 6 and the water separated from the second gas G2 is separated from the separator 6 from the collection container 1 You may provide the 1st drain pipe 7B which is a drain piping for returning. According to this embodiment, by connecting the first drain pipe 7B to the collection container 1, drainage to the collection container 1 becomes possible even if negative pressure in the separator 6 may occur, The water can be effectively used in the collection container 1 without wasting it.

  As shown in FIGS. 1 and 3, a second drainage pipe 12 may be connected to a lower portion of the collection container 1 in order to drain the collection container 1. Thus, the solidified organic matter and the like can be discharged simultaneously with the drainage from the second drain pipe 12. Further, as shown in FIG. 1 and FIG. 3, the second water supply pipe 11, which is a pipe for supplying the second supply water H 2 to the collection container 1, is located below the collection container 1. It may be connected. Thereby, the water inside the collection container 1 reduced by the drainage etc. from the 2nd drain pipe 12 can be supplemented.

  In FIG. 1 to FIG. 3, for example, valves, flow meters, etc. for controlling the gas intake amount, the exhaust amount, the water supply amount, the drainage amount and the like are omitted. If necessary, valves, flow meters, etc. may be attached.

<Modification>
The present disclosure is not limited to the above-described embodiment, and various changes, improvements, and the like can be made without departing from the scope of the present disclosure.

  In the above embodiment, the configuration of the first pipe 2 may be an aspect shown in each of FIGS. 4 (a) to 4 (c).

  As shown in FIG. 4 (a), in the first pipe 2, for example, a portion of the water supply pipe 2B is inserted into a first gas pipe 2A extending in the vertical direction, and a spray having a nozzle outlet at the lower side The nozzle 4 may be located, for example, at a central portion in the width direction of the first gas pipe 2A.

  Thereby, it can be made to contact with the 1st feed water H1 without weakening the flow of the 1st gas G1, and mixing of the gas and water inside collection container 1 can be promoted.

  Further, as shown in FIG. 4B, in the first pipe 2, for example, a part of the water supply pipe 2B is inserted in the first gas pipe 2A extending in the vertical direction, and the nozzle outlet is The spray nozzle 4 may have a central portion in the width direction of the first gas pipe 2A.

  As a result, the direction in which the first supply water H1 is sprayed from the spray nozzle 4 is opposed to the flow direction of the first gas G1, and the first supply water H1 and the first gas G1 are more positively mixed. It is possible to promote aggregation and solidification of the organic substance in the first gas G1.

  Further, as shown in FIG. 4 (c), in the first pipe 2 of the embodiment shown in FIG. 1, the connection between the first gas pipe 2A and the supply pipe 2C is T-shaped in cross section, and one end of the supply pipe 2C. The portion may be sealed by a sealing plate 18 made of a stainless steel plate or the like. Furthermore, a water supply pipe 2B for flowing water into the first pipe 2 may be inserted into the inside of the supply pipe 2C so as to penetrate the sealing plate 18. Furthermore, instead of the spray nozzle 4, the tip of the water supply pipe 2B may be bent downward from the horizontal direction. Thus, by positioning the water supply pipe 2B in the first pipe 2, water flows at least to the lower inner wall portion of the supply pipe 2C.

  As a result, it is difficult for the solidified organic matter to stagnate at least on the lower inner wall of the supply pipe 2C. In addition, even if the organic matter solidified or the like falls downward from the upper inner wall of the supply pipe 2C, it can be flushed to the collection container 1 by the flowing water from the water supply pipe 2B.

1: Collection container 2: First pipe 2A: first exhaust pipe 2B: water supply pipe 2C: supply pipe 2Ca: lower inner wall 3: second pipe 4: spray nozzle 5: third pipe 6: separator 7A, 7B: First drain pipe 8: fourth pipe 9: blower fan 10: fifth pipe 12: second drain pipe 14: gas flow control valve 15: partition 15A: first partition 15B: second partition 15C: third partition 15D: Fourth partition 16: Exhaust gas 18: Sealing plate S: Gas treatment device

Claims (7)

A first pipe having an inlet portion and an outlet portion for flowing a first gas containing organic matter and water;
A collection vessel connected to the outlet of the first pipe for collecting the organic matter;
A second pipe connected to the collection vessel for flowing a second gas which purifies and exhausts the first gas from the collection vessel;
Gas processing equipment equipped with. A gas treatment apparatus according to claim 1, wherein
The gas processing device, wherein the first gas generated in the firing furnace is introduced into the first pipe. The gas processing apparatus according to claim 1 or 2, wherein
The gas processing device, further comprising: a third pipe connected to the collection vessel for introducing a third gas whose flow rate is adjusted. A gas treatment apparatus according to any one of claims 1 to 3, wherein
A separator connected to the second pipe for separating water from the second gas;
A gas processing apparatus, further comprising: a fourth pipe connected to the separator for exhausting the second gas from which the moisture is separated from the separator. The gas processing apparatus according to claim 4, wherein
The gas processing device, further comprising: a drain pipe connected to the separator for returning moisture obtained in the separator from the separator to the collection container. A gas treatment apparatus according to any one of claims 1 to 5, wherein
The gas processing device, further comprising a nozzle for supplying water to the first gas in the first pipe. A gas treatment apparatus according to any one of claims 1 to 6, wherein
The gas processing device, further comprising a water supply pipe for flowing water into the first pipe.

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