KR20100091010A - Liquid collector - Google Patents

Abstract

PURPOSE: A liquid collector is provided to improve the collecting efficiency of moisture and chemical with corrosive materials which are contained in fluid by maximizing a contact area with respect to the fluid. CONSTITUTION: A collection container(2) collects a liquid part of fluid which flows in through an injecting pipe. A liquid collecting tube(3) is arranged on the lower side of the collection container and drains the collected liquid part of the fluid. A draining pipe(4) is arranged at the opposite direction to the injecting pipe, the collected liquid part of the fluid is drained through the draining pipe. A collecting case includes an upper wing, a lower wing, and a collecting net.

Description

Liquid Collector

The present invention relates to a device for capturing corrosive liquid components from a fluid treated in a scrubber or the like for removing waste gas generated in a semiconductor manufacturing process, and more particularly, an inlet pipe through which the fluid is introduced, and the inlet pipe. A collecting tube for collecting a liquid component from the introduced fluid, a liquid collecting tube disposed on a lower surface of the collecting tube for draining the collected liquid component to the outside, and an exhaust pipe disposed in a direction opposite to the inlet tube to discharge the fluid; It includes, the collecting tube is attached to the upper portion of the upper pipe plate extending to a predetermined diameter region of the inlet pipe, the lower wing plate is spaced apart from the upper wing plate, and one end of the lower wing plate And a three-dimensional contact member formed of a mesh in the collecting network to be connected to the collecting network. It relates to an apparatus.

In general, various kinds of reaction gases used for forming or etching thin films on a wafer in a semiconductor manufacturing process include oxidizing components, flammable components, and toxic components. ) Is not only harmful to the human body but also causes environmental pollution. As a result, a scrubber is installed in the exhaust line of the semiconductor facility to remove the oxidized component, the flammable component, the toxic component, and the like of the waste gas and to discharge it to the atmosphere.

As such, scrubbers for removing semiconductor waste gases in the semiconductor manufacturing process can be classified into three categories. Firstly, indirect combustion wet type, heat-wet that burns waste gas by induction heating method and filters it by water once more.

Also called scrubber). Second, as a wet type, the waste gas is collected using water, and then the wet scrubber is also used to purify the water. Thirdly, the direct combustion wet type is a room where waste gas is burned by hot flame and collected by using water.

Also known as burn-wet scrubber.

Among these, the burn-wet scrubber will be described with reference to FIG. 1, and the burn-wet scrubber is generally divided into a heating chamber (b), a wet chamber (c), a drain tank (d), and an exhaust pipe. (e) and duct (f).

An inlet pipe (a) through which the waste gas flows is installed in the heating chamber (b), and a heater is provided inside the heating chamber (b) to oxidize the waste gas in the heating chamber (b) introduced through the inlet pipe (a). It is heated above a certain temperature of 700 ° C to 800 ° C. The wet chamber (c) is installed in the lower portion of the heating chamber (b) is the water supplied from the water supply pipe (g) is injected into the hot waste gas through the spray nozzle. The drain tank (d) is connected to the wet chamber (c), the circulation pump is installed inside to reuse the water dropped from the wet chamber (c), the discharge tank (h) is installed on one side of the drain tank (d) Only the purified water by purifying the waste gas is discharged to the outside. On the other hand, one side of the wet chamber (c) is connected to the exhaust pipe (e) is reacted with water and the purified waste gas is discharged to the duct (f) via the exhaust pipe (e).

At this time, the gas treated from the wet chamber (c) has a problem of corroding the exhaust pipe (e) and the duct (f) by the corrosive water present in the gas when discharged to the exhaust pipe (e). Therefore, in the related art, in order to remove moisture of the waste gas passing through the exhaust pipe (e), a separate device such as a filter member is installed inside the exhaust pipe (e) to prevent moisture from falling before going to the duct (f). There was a limit to the fundamental removal of moisture.

Conventional Patent No. 10-0682621 "Liquid trapping device" (2007. 02. 07. registered) in order to prevent the liquid that is scattered during the wafer cleaning process of the semiconductor manufacturing process mixed with the gas and discharged through the gas pipe A device for capturing scattered liquids mixed with gas, which captures scattered liquids and is limited in capturing liquid components such as moisture contained in waste gases emitted through burn-wet scrubbers. There is no applicable to this, the efficiency needed to be further improved.

The present invention has been made to solve the above problems,

It is an object of the present invention to collect the corrosive water or chemicals contained in the fluid and discharge it after the fluid treated in the scrubber is not immediately discharged, so that the pipe corrodes when the fluid including the corrosive water passes through the pipe. It is to provide a liquid collecting device that can be prevented.

Another object of the present invention is to maximize the contact area with the incoming fluid to collect not only the liquid sucked with the fluid, but also the liquid component in the form of moisture dispersed in the fluid, so that the corrosive water contained in the fluid It is to provide a liquid collecting device that can maximize the efficiency of collecting chemicals.

Liquid collecting device for achieving the above object of the present invention includes the following configuration.

According to an embodiment of the present invention, the liquid collecting device according to the present invention is the inlet pipe into which the fluid is introduced, the collecting container for collecting the liquid component in the fluid introduced through the inlet pipe, disposed on the lower surface of the collecting container And a liquid collecting tube for draining the collected liquid component to the outside, and an exhaust pipe disposed in an opposite direction of the inlet pipe to discharge the fluid, and the collecting tube is attached to an upper portion of the inlet pipe to have a predetermined diameter. And an upper wing plate extending to an area, a lower wing plate positioned to be spaced apart from the upper wing plate, and a collecting network connected to one end of the lower wing plate.

According to another embodiment of the present invention, in the liquid collecting device according to the present invention, the collecting network is characterized in that it comprises at least one contact member therein.

According to another embodiment of the present invention, in the liquid collecting device according to the present invention, the contact member is formed in a three-dimensional shape made of a net, characterized in that the area in which the fluid is contacted while passing therein can be maximized.

According to another embodiment of the present invention, in the liquid collecting device according to the present invention, the collecting container has a front surface to which the inlet pipe is attached, a back surface to which the exhaust pipe is attached, and an upper surface surrounding both the front surface and the rear surface, both side surfaces and the bottom surface. Characterized in that it is formed in a three-dimensional shape comprising a.

According to another embodiment of the present invention, in the liquid collecting device according to the present invention, the lower surface of the collecting container is inclined to extend downward from the front side, the connecting surface of the connection surface is pushed downward from one end of the inclined surface, the connection surface And a horizontal plane extending horizontally from one end to the other end of the rear surface.

According to another embodiment of the present invention, in the liquid collecting device according to the present invention, the upper wing plate is formed in a wave shape, it characterized in that the contact area with the fluid can be widened.

According to another embodiment of the present invention, in the liquid collecting device according to the present invention, the lower wing plate is formed in a wave shape, characterized in that the contact area with the fluid can be widened.

According to another embodiment of the present invention, in the liquid collecting device according to the present invention, the upper wing plate is located at the end of the upper wing plate, characterized in that it comprises a cohesive member including a plurality of voids.

According to another embodiment of the present invention, the liquid collecting device according to the present invention is characterized in that it comprises one or more funnels of truncated cone shape.

The present invention can achieve the following effects by the configuration, combination, and use relationship described above with the present embodiment.

  The present invention is to collect the corrosive water or chemicals contained in the fluid without being discharged immediately from the scrubber to be discharged after collecting the corrosive water or chemicals that corrode the pipeline when the fluid including the corrosive water passes through the pipe. It can prevent.

The present invention is capable of collecting not only liquids scattered and inhaled with the fluid by maximizing the contact area with the inflowing fluid, but also liquid components in the form of moisture dispersed in the fluid. The collection efficiency can be maximized.

Hereinafter, with reference to the accompanying drawings a preferred embodiment of a liquid collecting device according to the present invention will be described in detail.

2 is a perspective view of a liquid collecting device according to an embodiment of the present invention, Figure 3 is a cross-sectional view of the liquid collecting device according to an embodiment of the present invention, Figure 4 is a liquid collecting device according to an embodiment of the present invention 5 is a perspective view of a liquid collecting tube included in a liquid collecting device according to an embodiment of the present invention.

2 to 3, the liquid collecting device according to an embodiment of the present invention is the inlet pipe 1 through which the fluid is introduced, and the collecting container for collecting the liquid component in the fluid introduced through the inlet pipe (1) (2), a liquid collecting tube (3) disposed on the lower surface (25) of the collecting container (2) for draining the collected liquid component to the outside, and disposed in an opposite direction of the inlet tube (1) to provide a fluid It includes an exhaust pipe 4 is discharged, the collecting container 2 is attached to the upper portion of the inlet pipe 1 and the upper wing plate 26 extending to a predetermined diameter region of the inlet pipe 1, and It characterized in that it comprises a lower wing plate 27 which is spaced apart from the upper wing plate 26, and the collecting net 28 connected to one end of the lower wing plate (27).

The inlet pipe (1) is a portion to be a passage for flowing the fluid after the treatment process in the scrubber (100) to the collecting container (2), one end is connected to the scrubber (100) and the other end is the collecting container Connected to (2).

The collecting cylinder 2 is a three-dimensional cylinder for collecting a liquid component in the fluid flowing from the inlet pipe 1, the front surface 21 to which the inlet pipe 1 is attached, the exhaust pipe 4 is attached It is defined as the rear surface 22, the upper surface 23 surrounding the front surface 21 and the rear surface 22, both side surfaces 24 and the lower surface 25, the lower surface 25 is lower from the front surface 21 A horizontal surface extending horizontally from one end of the inclined surface 251 and one end of the inclined surface 251 and the one end of the connecting surface 252 which are inclined to extend toward the other end of the rear surface 22 ( Including the 253, the front surface 21 may be formed in a trapezoidal shape having a smaller area than the rear surface 22, the inner side of the inlet pipe 1 is attached to the upper portion of the inlet pipe 1 An upper wing plate 26 extending to a predetermined diameter region and a lower portion spaced apart from the upper wing plate 26 May include a mess 27 and a collecting mesh (28) is connected to one end of the lower blade (27).

The upper wing plate 26 has only one end thereof attached to the upper side of the front face 21 and the other end thereof up to a predetermined diameter region of the inlet pipe 1 attached to the front face 21 in the direction of the lower face 25. A fluid extending from the inlet pipe 1, which is a plate-shaped member that extends to allow a portion of the fluid introduced from the inlet pipe 1 (fluid in the A direction) to strike the upper wing plate 26. It is desirable to have a wave form in order to ensure the maximum contact area with and to smoothly guide the fluid flow to the bottom surface (25). Therefore, some of the fluid flowing from the inlet pipe (1) hits the upper blade plate 26 toward the lower surface (25) while the loss of pressure and speed occurs. The upper wing plate 26 may include a cohesive member 261 including a plurality of voids at the end thereof.

The agglomeration member 261 is located at the end of the upper wing plate 26, and includes a plurality of pores, these pores are in communication with each other to have a mesh form and the liquid absorption rate so that liquid can penetrate between these pores As high, the liquid formed on the upper wing plate 26 is absorbed by the agglomeration member 261 while flowing on the upper wing plate 26. The liquid absorbed by the agglomeration member 261 gradually agglomerates, becomes a liquid drop, and freely falls into the liquid collecting pipe 3 as the load increases. Any material having a plurality of voids may be used as the agglomeration member 261. A preferred embodiment of the agglomeration member 261 may be a sponge or the like that can absorb liquid.

The lower wing plate 27 is positioned with one end spaced apart from the other end of the upper wing plate 26 by a horizontal distance h1 and extends in the lower surface 25 direction so that the other end thereof is perpendicular to the lower surface 25 and the vertical distance h2. As a plate-shaped member spaced apart as much as possible, it is preferable to have a wave form in order to ensure the maximum contact area with the incoming fluid and to smoothly guide the flow of the fluid to the lower surface (25). Therefore, a part (fluid in the B direction) of the fluid introduced from the inlet pipe 1 impinges on the lower wing plate 27 and serves to guide the fluid flowing along the upper wing plate 26. In addition, a vortex is formed along the periphery so that the liquid component contained in the fluid can be easily collected. Referring to FIG. 3, the horizontal distance h1 is a fluid containing a liquid component of the fluid in the A direction flowing through the upper wing plate 26 smoothly flows into the lower wing plate 27, the fluid in the A direction The pure fluid component does not contain a liquid component is preferably formed to pass through between the upper wing plate 26 and the lower wing plate 27 before entering the lower wing plate 27, The vertical distance h2 is a distance for allowing the fluid in the B direction to flow easily through the lower wing plate 27 to flow in the C direction, and may pass at a constant speed without rapidly increasing the speed of the passing fluid. It is formed to such an extent that the liquid collection efficiency can be increased. The lower wing plate 27 may also include the aggregation member 261 including a plurality of voids at its ends.

The trap network 28 is a portion for finally collecting the liquid component in the fluid flowing in the lower wing plate 27 and passes in the C direction, the rear surface 22 at one end of the lower wing plate 27 It is preferably extended to the shape and the shape is preferably formed in the shape of a net so that the fluid can pass, two or more trapping net 28 may be formed in a layer according to the embodiment. The collection network 28 may also include one or more contact members 29 to increase the area of contact with the passing fluid.

The contact member 29 is a member included between the collecting network 28 to increase the contact area with the fluid passing through the collecting network 28, preferably formed in a three-dimensional shape made of a network As the fluid passes through it, it is possible to maximize the area of contact. Referring to FIG. 4, the contact member 29 may be formed in a three-dimensional shape of a spherical shape in which the outer surface and the inside are formed in a net and not filled in the inside. In this case, the fluid passing through the contact member 29 may be Since the inner surface of the contact member 29 passes through the inner surface of the contact member 29 and passes through the outer surface of the contact member 29, the contact area increases accordingly, and the pressure and speed decrease so that the liquid component contained in the fluid is in contact with the contact member 29. It is formed in the collecting network 28 and when it is aggregated, it falls to the horizontal plane 253 and collects in the liquid collecting tube 3.

The liquid collecting pipe 3 is fixed to the horizontal surface 253 of the lower surface 25 of the collecting container 2 so that the upper wing plate 26, the lower wing plate 27, and the collecting network 28 and the contact member A member which is separated by (29) or the like and discharges free-falling liquid to the outside, and may include a hollow body 31, a diaphragm 32 and one or more funnels 33.

The hollow body 31 is generally a cylindrical tube formed inside the hollow is attached to the horizontal surface 253 of the lower surface 25 of the collecting container 2 extending a predetermined length downward.

The diaphragm 32 is installed to partition the top and bottom at a predetermined position of the hollow body 31 and includes one or more through holes 321 to which the funnel 33 is fixed.

The funnel 33 is a truncated cone-shaped tube is fixedly located in the through hole 321, the upper surface 331 is a shape of a wider cross-sectional area than the bottom surface 332. According to the continuous equation in the basic equation of fluid dynamics, the product of the cross-sectional area and the velocity is constant, so the velocity of the bottom surface 332 having a smaller cross-sectional area than the upper surface 331 is greater than the upper surface 331. In addition, according to the Bernoulli equation, since the top surface 331 is slower than the bottom surface 332, the pressure is higher than the bottom surface 332 of the top surface 331, and the funnel 33 has a property of flowing from a high pressure to a low pressure. ), The liquid can be easily discharged to the outside by the pressure difference.

The exhaust pipe (4) is fixed to the rear surface (22) of the collecting container (2) is a portion that serves as a passage for discharging to the outside after collecting the liquid component from the fluid introduced from the inlet pipe (1) One end is connected to the rear surface 22 of the collecting container 2 and the other end is connected to a pipe (not shown).

Hereinafter, a process of collecting the liquid component included in the fluid in the liquid collecting device according to the exemplary embodiment of the present invention will be described with reference to FIG. 3.

Referring to FIG. 3, the fluid introduced through the inlet pipe 1 forms a flow path in the A direction in which the fluid is introduced from the upper side of the inlet pipe 1 and strikes the upper wing plate 26. And, it is divided into the case of forming a flow path in the B direction to flow from the lower side of the inlet pipe (1) to hit the lower wing plate 27,

In the first case, the fluid flowing along the flow path in the A direction hits the upper blade plate 26 and the pressure and the speed are reduced. At this time, a part of the liquid component contained in the fluid is formed on the upper wing plate 26, the vortex is formed in the process of hitting the upper wing plate 26 formed in a wave form to collect the liquid component more efficiently, the The liquid formed on the upper wing plate 26 flows along the upper wing plate 26 and is absorbed by the agglomeration member 261, and the liquid absorbed by the agglomeration member 261 is agglomerated downwards as the load increases. The free fall is gathered along the inclined surface 251 to the horizontal surface 253. In addition, in the case of a fluid that does not contain a liquid component among the fluid flowing along the upper wing plate 26, A1 between the upper wing plate 26 and the lower wing plate 27 at the end of the upper wing plate 26. In the case of a fluid that can flow in a direction, and contains a liquid component, the fluid continues to flow along the lower wing plate 27 in the direction of the B direction.

In the second case, the fluid flowing along the flow path in the B direction impinges on the lower blade plate 27, thereby reducing the pressure and speed. At this time, a part of the liquid component contained in the fluid is formed in the lower wing plate 27, the vortex is formed in the process of hitting the upper wing plate 26 formed in a wave form to collect the liquid component more efficiently, the When the liquid formed on the lower wing plate 27 flows through the lower wing plate 27 and is agglomerated and the load increases, the liquid falls freely downward and collects on the horizontal plane 253. In addition, the fluid flowing along the lower wing plate 27 passes through the collecting net 28 and the contact member 29 along the flow path in the C direction, and hits the collecting net 28 and the contact member 29. As the pressure and speed are reduced, liquid components contained in the fluid without being collected until the last time are formed in the collecting network 28 and the contact member 29, and in the collecting network 28 and the contact member 29. The condensed liquid is agglomerated to increase the load is freely falling downwards are collected in the horizontal plane (253).

The liquid collected on the horizontal plane 253 is drained outward along the liquid collecting tube 3. Here, since the liquid collecting pipe 3 includes the funnel 33 and acts like a nozzle, the liquid collected according to the continuous equation and Bernoulli theorem described above can be easily discharged to the outside by the pressure difference. do.

The liquid collecting device according to an embodiment of the present invention is introduced by additionally including a three-dimensional contact member 29 formed of a net as well as the upper wing plate 26 and the lower wing plate 27 formed in a wave shape. By increasing the contact area with the fluid, it can efficiently collect not only the liquid sucked with the fluid, but also the liquid component in the form of moisture dispersed in the fluid, effectively preventing corrosion or contamination of the pipe due to corrosive liquid components. It becomes possible.

Hereinafter, the effect of the liquid collecting device according to the present invention through the test using the liquid collecting device according to the present invention.

[Test] collection test of liquid collection device

1. Test Purpose: The purpose of the present invention is to verify the effect by measuring the rate of collection of liquid in the fluid of the liquid collecting device according to the present invention.

2. Test method: A sprayer is installed on the inlet tube side of the liquid collecting device according to the present invention, and an IND46360 manometer of Dwyer Instrument Inc. (USA) is respectively installed in the inlet tube and the exhaust pipe to measure the internal pressure, and the fluid is forced. NILFISK (Denmark) GS83 pump was installed on the exhaust pipe side for discharge. In addition, when the artificial water particles were made by using a nebulizer and supplied to the inlet pipe, the amount of liquid drained into the funnel of the liquid collecting pipe was measured to measure the water collection rate according to the pressure change of the inlet pipe and the exhaust pipe.

3. Test result:

[Photo 1]

Inlet pipe pressure (mmhg) Exhaust Pipe Pressure (mmhg) Supply water distribution (cc) Collected water distribution (cc) Capture rate (%) One 40 60 10000 9920 99.2 2 40 60 10000 9927 99.3 3 45 60 10000 9940 99.4 4 48 60 10000 9965 99.7 5 48 60 10000 9960 99.6

As can be seen in the above Photo 1 and Table 1, although there is a slight difference as the pressure on the inlet pipe fluctuates, it is discharged through the funnel of the liquid collecting tube in the amount of water supplied 10,000cc as a whole The amount, that is, the amount of water to be collected was measured at 9,920 ~ 9960cc, which averaged 99.44% of the collection rate. In particular, the collection rate was 99.7% or more depending on the pressure of the inlet pipe. Has proved to be superior to conventional liquid collection devices.

In the above, the Applicant has described preferred embodiments of the present invention, but these embodiments are merely one embodiment for implementing the technical idea of the present invention, and any changes or modifications may be made as long as the technical idea of the present invention is implemented. Should be interpreted as being within the scope.

1 is a cross-sectional view of a conventional burn-wet scrubber

2 is a perspective view of a liquid collecting device according to an embodiment of the present invention

3 is a cross-sectional view of a liquid collecting device according to an embodiment of the present invention

Figure 4 is a perspective view of the contact member included in the liquid collecting device according to an embodiment of the present invention

5 is a perspective view of a liquid collecting tube included in the liquid collecting device according to an embodiment of the present invention;

* Explanation of the main symbols used in the drawings

1: inlet pipe 2: collecting container 3: liquid collecting pipe 4: exhaust pipe

21: Front 22: Back 23: Top 24: Both Sides 25: Bottom

26: upper wing plate 27: lower wing plate 28: collecting network 29: contact member

251: inclined surface 252: connecting surface 253: horizontal surface 261: flocculating member

31: hollow body 32: plate 33: funnel

321: through hole 331: upper surface 332: bottom

100: scrubber

a: inlet pipe b: heating chamber c: wet chamber d: drain tank

e: exhaust pipe f: duct g: water supply pipe h: discharge pipe

Claims (9)

An inlet tube into which fluid is introduced, a collecting tube for collecting a liquid component from the fluid introduced through the inlet tube, a liquid collecting tube disposed on a lower surface of the collecting tube to drain the collected liquid component to the outside, and the drawing tube An exhaust pipe disposed in an opposite direction of the pipe to discharge the fluid, The collecting tube is attached to the upper portion of the inlet pipe and extending to a predetermined diameter region of the inlet pipe, the lower wing plate is spaced apart from the upper wing plate, and the collection is connected to one end of the lower wing plate Liquid collecting device comprising a net. The method of claim 1, And the collecting network includes at least one contact member therein. The method of claim 2, The contact member is formed in a three-dimensional shape consisting of a net liquid collecting device, characterized in that to maximize the area that the fluid is in contact with the passage. The method according to any one of claims 1 to 3, The collecting container is a liquid collecting device characterized in that it is formed in a three-dimensional shape including a front surface, the back pipe is attached, the exhaust pipe is attached, the upper surface surrounding the front surface and the rear surface, both sides and the bottom surface. The method of claim 4, wherein The bottom surface includes an inclined surface extending inclined downward from the front surface, a connection surface tucked downward from one end of the inclined surface, a horizontal surface extending horizontally from one end of the connection surface to the other end of the rear surface Device. The method according to any one of claims 1 to 3, The upper wing plate is formed in a wave shape, the liquid collection device, characterized in that it can widen the contact area with the fluid. The method according to any one of claims 1 to 3, The lower wing plate is formed in a wave shape, the liquid collection device, characterized in that it is possible to widen the contact area with the fluid. The method according to any one of claims 1 to 3, The upper wing plate is a liquid collecting device, characterized in that it comprises a cohesive member located at the end of the upper wing plate and comprising a plurality of voids. The method according to any one of claims 1 to 3, The liquid collecting pipe is a liquid collecting device, characterized in that it comprises one or more funnels of truncated cone shape.

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