CN214552486U - Tail gas processing apparatus is used in trimethylsilane production - Google Patents
Tail gas processing apparatus is used in trimethylsilane production Download PDFInfo
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- CN214552486U CN214552486U CN202120421697.5U CN202120421697U CN214552486U CN 214552486 U CN214552486 U CN 214552486U CN 202120421697 U CN202120421697 U CN 202120421697U CN 214552486 U CN214552486 U CN 214552486U
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Abstract
The utility model relates to a tail gas processing technology field's a tail gas processing apparatus is used in trimethylsilane production, including the condenser, gas-liquid cyclone, trimethylsilane storage tank, spray column and liquid storage pot, the tail gas export of condenser is linked together with gas-liquid cyclone's air inlet, gas-liquid cyclone's gas vent is linked together with spray column's air inlet, the leakage fluid dram of condenser and gas-liquid cyclone's leakage fluid dram all is linked together with the trimethylsilane storage tank, the spray column top is equipped with the gas collecting channel, upper portion is equipped with except that the fog layer, the middle part is equipped with the multilayer shower, the bottom is equipped with the collecting hopper, the gas collecting channel top is equipped with the exhaust tube, be equipped with active carbon filter and air exhauster on the exhaust tube, the collecting hopper is linked together through drain pipe and liquid storage pot, the liquid storage pot top is equipped with the drawing liquid pump, the drawing liquid pump is linked together with the shower through spraying female pipe. The device can efficiently recover the trimethylsilane in the trimethylsilane production tail gas, and can remove the hydrogen chloride in the tail gas.
Description
Technical Field
The utility model belongs to the technical field of the tail gas treatment, specifically, relate to a tail gas processing apparatus is used in trimethylsilane production.
Background
Trimethylsilane is an important silicon source gas in semiconductor device production and is commonly used for the formation of Ge-Si-C layers in epitaxial chemical vapor deposition. Meanwhile, trimethylsilane can be decomposed at high temperature to generate SiC, so the SiC can be used as a precursor material of the SiC coating. Trimethylsilane has a very important and unique use in both the electronics industry and defense industry.
As a method for producing trimethylsilane, a method of reducing trimethylchlorosilane in a solvent (for example, an aromatic hydrocarbon-based organic solvent) using an appropriate hydrogenating agent (for example, lithium aluminum hydride, lithium hydride, or the like) is generally used. The tail gas discharged by the production of trimethylsilane contains hydrogen chloride and trimethylsilane, and the direct discharge can pollute the environment and cause resource waste, so a tail gas treatment device for trimethylsilane production is urgently needed to purify the tail gas and recover trimethylsilane, thereby realizing energy-saving and environment-friendly production.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model provides a tail gas treatment device for trimethyl silane production, which comprises a condenser, a gas-liquid cyclone separator, a trimethyl silane storage tank, a spray tower and a liquid storage tank, wherein one end of the condenser is provided with a tail gas inlet, the other end is provided with a tail gas outlet, the tail gas outlet is communicated with the gas inlet of the gas-liquid cyclone separator, the gas outlet of the gas-liquid cyclone separator is communicated with the gas inlet of the spray tower, the liquid outlet of the condenser and the liquid outlet of the gas-liquid cyclone separator are both communicated with the trimethyl silane storage tank, the top of the spray tower is provided with a gas collecting hood, the upper part of the spray tower is provided with a defogging layer, the middle part of the spray tower is provided with a plurality of layers of spray pipes, the bottom of the spray tower is provided with a liquid collecting hopper, the top of the gas collecting hood is provided with an exhaust pipe, the exhaust pipe is provided with an active carbon filter and an exhaust fan, and the bottom of the liquid collecting hopper is communicated with the liquid storage tank through a liquid outlet pipe, the device is characterized in that a liquid outlet valve is arranged on the liquid outlet pipe, a liquid supplementing port is formed in the side upper end of the liquid storage tank, a liquid discharging valve is arranged at the bottom side of the liquid storage tank, a liquid drawing pump is arranged at the top of the liquid storage tank and communicated with the spray pipe through a spray main pipe, and a discharging valve is arranged at the bottom side of the trimethylsilane storage tank.
Preferably, a plurality of atomizing spray heads are uniformly distributed on the spray pipe, so that the uniformity of gas-liquid mixing is improved, and the removal efficiency of the hydrogen chloride is improved.
Preferably, a porous flow equalizing plate is arranged above the air inlet of the spray tower and below the spray pipe, so that the uniformity of airflow distribution in the spray tower is improved, and the removal efficiency of the hydrogen chloride is improved conveniently.
Preferably, the defogging layer selects a ridge defogger, so that the content of liquid drops in the waste gas can be reduced.
Preferably, NaOH solution or water can be supplemented into the liquid storage tank through the liquid supplementing port, and the NaOH solution or water is used for neutralizing or absorbing hydrogen chloride in the tail gas.
The utility model also comprises other devices or components which can ensure that the tail gas treatment device for producing the trimethyl silane can be normally used and are conventional technical means in the field; in addition, the device and the component which are not limited in the utility model all adopt the conventional technical means in the field.
The utility model discloses an operating principle is, the tail gas that produces in to trimethylsilane production through the condenser condenses, reduce flue gas temperature, and retrieve partial trimethylsilane in the tail gas, further retrieve remaining trimethylsilane liquid drop in the tail gas through gas-liquid cyclone, trimethylsilane after retrieving is saved to the trimethylsilane storage tank for use in, make after NaOH solution or the water atomization hydrogen chloride in to the tail gas through the spray column and carry out neutralization or absorb, further carry out the desorption to remaining trimethylsilane in the spray column outlet waste gas through the active carbon filter, thereby guarantee the clean emission of tail gas, carry out the pump drainage to tail gas through the air exhauster, guarantee that tail gas flows in order.
The beneficial effects of the utility model are that, this device can carry out high-efficient recovery to trimethylsilane in the trimethylsilane production tail gas, and the hydrogen chloride in the desorption tail gas realizes trimethylsilane's energy-conserving and environmental protection production.
Drawings
The present invention will be further explained with reference to the drawings and examples.
Fig. 1 is a schematic view of the overall structure of the present invention in the embodiment.
Detailed Description
The present invention will be described more clearly with reference to the accompanying drawings and specific embodiments in the embodiments of the present invention, and the description herein is only for explaining the present invention, but not for limiting the present invention. Based on the embodiments of the present invention, any modifications, equivalent replacements, improvements, etc. made by other embodiments obtained by those skilled in the art without creative efforts should be included in the protection scope of the present invention.
Examples
As shown in figure 1, the utility model provides a tail gas treatment device for trimethyl silane production, which comprises a condenser 1, a gas-liquid cyclone separator 2, a trimethyl silane storage tank 3, a spray tower 4 and a liquid storage tank 5, wherein one end of the condenser 1 is provided with a tail gas inlet, the other end is provided with a tail gas outlet, the tail gas outlet is communicated with the gas inlet of the gas-liquid cyclone separator 2, the gas outlet of the gas-liquid cyclone separator 2 is communicated with the gas inlet of the spray tower 4, the liquid outlet of the condenser 1 and the liquid outlet of the gas-liquid cyclone separator 2 are communicated with the trimethyl silane storage tank 3, the top of the spray tower 4 is provided with a gas collecting hood 4-1, the upper part is provided with a demisting layer 4-2, the middle part is provided with a plurality of spray pipes 4-3, the bottom part is provided with a liquid collecting hopper 4-4, the top of the gas collecting hood 4-1 is provided with an air exhaust pipe 4-5, the active carbon filter 4-6 and the exhaust fan 4-7 are arranged on the exhaust pipe 4-5, the bottom of the liquid collecting hopper 4-4 is communicated with the liquid storage tank 5 through a liquid outlet pipe, a liquid outlet valve is arranged on the liquid outlet pipe, a liquid supplementing port 6 is arranged at the side upper end of the liquid storage tank 5, a liquid discharging valve 7 is arranged at the bottom side of the liquid storage tank, a liquid drawing pump 8 is arranged at the top of the liquid storage tank 5, the liquid drawing pump 8 is communicated with the spray pipe 4-3 through a spray main pipe 9, and a discharging valve 10 is arranged at the bottom side of the trimethylsilane storage tank 3.
A plurality of atomizing spray heads are uniformly distributed on the spray pipe 4-3, which is beneficial to improving the uniformity of gas-liquid mixing, thereby improving the removal efficiency of the hydrogen chloride. The porous flow equalizing plate 11 is arranged above the air inlet of the spray tower 4, and the porous flow equalizing plate 11 is arranged below the spray pipes 4-3, so that the uniformity of air flow distribution in the spray tower 4 is improved, and the removal efficiency of hydrogen chloride is improved conveniently. And the defogging layer 4-2 is a ridge type demister, so that the content of liquid drops in waste gas can be reduced. NaOH solution or water can be supplemented into the liquid storage tank 5 through the liquid supplementing port 6, and the NaOH solution or water is used for neutralizing or absorbing hydrogen chloride in the tail gas.
The utility model discloses an operating principle is, carry out the condensation through the tail gas that produces in condenser 1 in to trimethylsilane production, reduce flue gas temperature, and retrieve partial trimethylsilane in the tail gas, further retrieve remaining trimethylsilane liquid drop in the tail gas through gas-liquid cyclone 2, trimethylsilane after retrieving is saved to trimethylsilane storage tank 3 in for use, make after 4 make NaOH solution or the water atomization through spray column and carry out neutralization or absorption to the hydrogen chloride in the tail gas, carry out the desorption through active carbon filter 4-6 steps to remaining trimethylsilane in 4 export waste gases of spray column, thereby guarantee the clean emission of tail gas, carry out the pump drainage to tail gas through air exhauster 4-7, guarantee that tail gas flows in order.
The foregoing description of the embodiments of the invention has been presented for purposes of illustration and not limitation, and is not intended to be exhaustive or limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the illustrated embodiments.
Claims (5)
1. A tail gas processing apparatus is used in trimethylsilane production which characterized in that: the device comprises a condenser, a gas-liquid cyclone separator, a trimethyl silane storage tank, a spray tower and a liquid storage tank, wherein one end of the condenser is provided with a tail gas inlet, the other end of the condenser is provided with a tail gas outlet, the tail gas outlet is communicated with a gas inlet of the gas-liquid cyclone separator, a gas outlet of the gas-liquid cyclone separator is communicated with a gas inlet of the spray tower, a liquid discharge port of the condenser and a liquid discharge port of the gas-liquid cyclone separator are both communicated with the trimethyl silane storage tank, the top of the spray tower is provided with a gas collecting hood, the upper part of the spray tower is provided with a defogging layer, the middle part of the spray tower is provided with a plurality of layers of spray pipes, the bottom of the spray hood is provided with a liquid collecting hopper, the top of the gas collecting hood is provided with an exhaust pipe, the exhaust pipe is provided with an active carbon filter and an exhaust fan, the bottom of the liquid collecting hopper is communicated with the liquid storage tank through a liquid discharge pipe, the liquid discharge valve is arranged on the liquid storage tank, the side upper end of the liquid storage tank is provided with a liquid supplementing port, the bottom side part of the liquid storage tank, and the top of the liquid storage tank is provided with a liquid pump which is communicated with the spray pipe through a spray main pipe, and the bottom side of the trimethylsilane storage tank is provided with a discharge valve.
2. The tail gas treatment device for trimethylsilane production according to claim 1, wherein: and a plurality of atomizing nozzles are uniformly distributed on the spray pipe.
3. The tail gas treatment device for trimethylsilane production according to claim 2, wherein: and a porous flow equalizing plate is arranged above the air inlet of the spray tower and is arranged below the spray pipe.
4. The tail gas treatment device for trimethylsilane production according to claim 1, wherein: and the defogging layer is a ridge defogger.
5. The apparatus according to any one of claims 1 to 4, wherein: NaOH solution or water can be supplemented into the liquid storage tank through the liquid supplementing port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120421697.5U CN214552486U (en) | 2021-02-25 | 2021-02-25 | Tail gas processing apparatus is used in trimethylsilane production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120421697.5U CN214552486U (en) | 2021-02-25 | 2021-02-25 | Tail gas processing apparatus is used in trimethylsilane production |
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| CN214552486U true CN214552486U (en) | 2021-11-02 |
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| CN202120421697.5U Active CN214552486U (en) | 2021-02-25 | 2021-02-25 | Tail gas processing apparatus is used in trimethylsilane production |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116395700A (en) * | 2023-04-17 | 2023-07-07 | 江苏中能硅业科技发展有限公司 | System and method for recycling silane in silane-containing tail gas |
-
2021
- 2021-02-25 CN CN202120421697.5U patent/CN214552486U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116395700A (en) * | 2023-04-17 | 2023-07-07 | 江苏中能硅业科技发展有限公司 | System and method for recycling silane in silane-containing tail gas |
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