JP2019109260A5 - - Google Patents

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JP2019109260A5
JP2019109260A5 JP2019070985A JP2019070985A JP2019109260A5 JP 2019109260 A5 JP2019109260 A5 JP 2019109260A5 JP 2019070985 A JP2019070985 A JP 2019070985A JP 2019070985 A JP2019070985 A JP 2019070985A JP 2019109260 A5 JP2019109260 A5 JP 2019109260A5
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Japan
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dimensional
movement
coarse
fixed
movement amount
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JP2019070985A
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Japanese (ja)
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JP2019109260A (ja
JP6735382B2 (ja
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JP2019070985A 2019-04-03 2019-04-03 ３次元微動測定装置 Active JP6735382B2 (ja)

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Application Number Priority Date Filing Date Title
JP2019070985A JP6735382B2 (ja) 2019-04-03 2019-04-03 ３次元微動測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019070985A JP6735382B2 (ja) 2019-04-03 2019-04-03 ３次元微動測定装置

Related Parent Applications (1)

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JP2014141057A Division JP2016017862A (ja) 2014-07-09 2014-07-09 ３次元微動装置

Publications (3)

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JP2019109260A JP2019109260A (ja) 2019-07-04
JP2019109260A5 true JP2019109260A5 (zh) 2019-08-15
JP6735382B2 JP6735382B2 (ja) 2020-08-05

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JP2019070985A Active JP6735382B2 (ja) 2019-04-03 2019-04-03 ３次元微動測定装置

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JP (1) JP6735382B2 (zh)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08254540A (ja) * 1995-03-16 1996-10-01 Hitachi Constr Mach Co Ltd 走査型プローブ顕微鏡
JP2001188035A (ja) * 1999-03-17 2001-07-10 Seiko Instruments Inc 走査型プローブ顕微鏡
JP2001135561A (ja) * 1999-11-05 2001-05-18 Canon Inc ステージ装置、露光装置およびデバイス製造方法
JP2002214111A (ja) * 2001-01-17 2002-07-31 Seiko Instruments Inc プローブ顕微鏡
CN1259558C (zh) * 2004-09-07 2006-06-14 中国科学院上海光学精密机械研究所 模块化原子力显微镜
JP2006234507A (ja) * 2005-02-23 2006-09-07 Hitachi Constr Mach Co Ltd 走査型プローブ顕微鏡とその測定方法
KR101678041B1 (ko) * 2010-02-17 2016-11-21 삼성전자 주식회사 원자간 힘 현미경 및 이를 이용한 시료 측정방법

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