JP2019071422A - Nozzle management machine - Google Patents

Abstract

To provide a highly practical nozzle management machine.SOLUTION: A nozzle management device 80 for managing suction nozzles used to hold electric components in an electric component mounting machine, includes: a nozzle housing device 100 capable of housing a plurality of suction nozzles; and a nozzle inspection device 106 for inspecting suction nozzles housed in or to be housed in the nozzle housing device. The nozzle inspection device is so configured as to be able of performing both (a) a tip state inspection which is an inspection regarding a state of a tip portion of the suction nozzle; and (b) a necessary reverse force inspection, which is an inspection regarding a force required to retract the tip of the suction nozzle in a case where the tip of the suction nozzle is retractable against a biasing force.SELECTED DRAWING: Figure 5

Description

  The present invention relates to a nozzle management device for managing a suction nozzle used to hold an electrical component in an electrical component mounting machine.

  In many electrical component mounting machines, when the electrical component is mounted on the circuit board, the electrical component is held by a suction nozzle. The use of an appropriate suction nozzle in such an electric component mounting machine is important to maintain high mounting accuracy of the electric component. So far, for example, with regard to cleaning of the adsorption nozzle, the techniques described in the following Patent Document 1 exist, and with regard to inspection of the adsorption nozzle, the techniques described in the following Patent Document 2 and Patent Document 3 exist, respectively. There is.

JP 2012-114237 A JP, 2012-4306, A JP, 2010-258185, A

Problems to be solved by the invention

  As understood from the fact that the patent documents as described above exist, in order to use an appropriate adsorption nozzle, it is necessary to manage the adsorption nozzle appropriately. Therefore, a nozzle management device capable of appropriately managing suction nozzles, in particular, a highly practical nozzle management device is desired. The present invention has been made in view of such circumstances, and an object thereof is to provide a highly practical nozzle management device.

In order to solve the above-mentioned subject, the nozzle management machine of the present invention,
A nozzle management device for managing a suction nozzle used to hold an electric component in an electric component mounting machine, comprising:
A nozzle storage device capable of storing a plurality of suction nozzles;
A nozzle inspection device for inspecting a suction nozzle housed in or housed in the nozzle housing device;
And a defective nozzle placement device for placing a defective nozzle, which is an adsorption nozzle determined to be defective based on the inspection result by the nozzle inspection device.
In the case where the nozzle inspection apparatus is (a) capable of retracting the tip of the suction nozzle against the biasing force after (b) the tip condition inspection which is an inspection regarding the state of the tip of the suction nozzle The apparatus is configured to perform a necessary backward force inspection, which is an inspection regarding the force required to retract the tip of the suction nozzle,
The defective nozzle placement device is
A plurality of detention units for detaining a plurality of defective nozzles determined to be defective for one inspection item are provided corresponding to the inspection items.
Further, another nozzle management device of the present invention is
A nozzle management device for managing a suction nozzle used to hold an electric component in an electric component mounting machine, comprising:
A nozzle storage device capable of storing a plurality of suction nozzles;
A nozzle inspection device for inspecting the suction nozzle housed in or from the nozzle housing device;
(A) The tip state inspection device which performs tip state inspection regarding the state of the tip portion of the suction nozzle from directly below at the tip state inspection position; (b) the tip portion of the suction nozzle is biased Necessary reverse force inspection device which performs reverse necessary force inspection regarding the force required for backward movement of the tip of the suction nozzle in the case where it is made anti-retractable, from the bottom of the necessary reverse force inspection position, (c)
And a moving device capable of moving a suction nozzle to the tip state inspection position and the reverse necessary force inspection position,
It is configured to perform both the tip state inspection and the reverse necessary force inspection.

  According to the present invention, there is provided a nozzle control apparatus provided with a nozzle inspection apparatus for performing both the tip state inspection and the backward necessary force inspection on a suction nozzle accommodated in or from the nozzle accommodation device. Since the machine is realized, the nozzle management machine becomes highly practical.

Aspect of the invention

In the following, inventions that are recognized as claimable in the present application (hereinafter, “claimable inventions”
Some of the embodiments) may be described and described. Each aspect is divided into items, as in the claims, and each item is numbered and described in a format in which the numbers of other items are referred to as necessary. This is for the purpose of facilitating the understanding of the claimable inventions to the last, and is not intended to limit the combination of the constituent elements constituting the inventions to those described in the following sections. That is, the claimable invention should be interpreted in consideration of the description accompanying the following sections, the description of the embodiment, etc., and within the scope of the interpretation, other components are added to the aspects of the sections. The above-described aspect and an aspect in which some of the components are removed from the aspects of the respective sections can also be one aspect of the claimable invention. Then, some aspects of the claimable invention can be claimed inventions.

«Basic configuration»
(1) A nozzle management device for managing a suction nozzle used to hold an electric component in an electric component mounting machine,
A nozzle management device comprising a nozzle accommodation device capable of accommodating a plurality of suction nozzles.

  This aspect is an aspect relating to the basic configuration of a nozzle management device (hereinafter sometimes simply referred to as a “management device”). The above-mentioned nozzle accommodation device (hereinafter, may simply be referred to as “accommodation device”) itself, various measures for the suction nozzle (hereinafter, sometimes referred to simply as “nozzle”) accommodated in the accommodation device A highly practical nozzle management device is realized by providing a means for applying

«Structure of nozzle accommodation device»
The following several aspects are aspects regarding the structure of a nozzle accommodating apparatus. Incidentally, some of those aspects are not the aspect which makes a management machine a category, and even if it is changed to the aspect which only makes an accommodation device a category, that is, the aspect of an accommodation device independent from other components of the management machine Even if it is, the aspect may become an aspect of the claimable invention.

  (11) The nozzle management device according to (1), wherein the nozzle accommodation device includes a plurality of pallets on each of which a plurality of suction nozzles can be mounted.

  The "pallet" in this aspect can be called a nozzle placing device or a container (container), and in this aspect, a plurality of nozzles are accommodated in pallet units. A convenient management machine is realized by being able to carry out the treatment for the loading and unloading from the storage device and the nozzle for each pallet.

  (12) The nozzle management device according to (11), wherein each of the plurality of pallets has a plurality of placement parts on which one suction nozzle is placed.

  By providing the above-described placement portion on the pallet, it becomes possible to hold the nozzles firmly in the pallet. In other words, it is desirable that the above-mentioned placement portion has a structure that can prevent the shift movement of the nozzle.

  (13) The nozzle management device according to (11) or (12), wherein one or more of the plurality of pallets are configured to be capable of mounting a plurality of types of suction nozzles.

  If only one type of nozzle can be placed on one pallet, the type of pallet must be enriched according to the type of nozzle, and the enrichment involves a certain amount of trouble. If a plurality of types of nozzles can be placed on the pallet, the number of types of pallets can be reduced, and the troublesomeness can be avoided or reduced. That is, in this aspect, generalization of the pallet is realized. Also, considering the entire storage device, when preparing a plurality of pallets that can only carry one type of nozzle, the total number of pallets is limited, so the number of pallets for each type of nozzle can not but be reduced It will be. On the other hand, by adopting a pallet on which a plurality of types of nozzles can be mounted, the storage device can be easily operated without being largely influenced by the types of nozzles. From the viewpoint of avoiding the above-mentioned trouble and simplifying the operation of the storage device, it is desirable to adopt a pallet on which all types of nozzles targeted by the management device can be placed.

  Generally, the nozzle has a flange which will be described later, and when viewed from above, has a round shape. When the circular shaped nozzles are arranged side by side on the pallet, the arrangement efficiency is poor with nozzles having a relatively large outer diameter. That is, the area occupied by the nozzles, and in particular the flanges thereof, is relatively small compared to the area of the pallet. In view of that, by arranging the nozzles having a relatively large outer diameter and the nozzles having a relatively small outer diameter in combination, that is, by arranging them alternately, the number of nozzles that can be mounted can be increased. It is possible to Extremely speaking, the arrangement efficiency is greatly improved by arranging the small outer diameter nozzle in the large outer diameter nozzle gap. From this point of view, in this aspect, it is desirable to be able to mount a plurality of types of nozzles having different sizes, in particular, a plurality of types of nozzles having different outer diameters of the flange.

  (14) Each of the plurality of pallets has a plurality of mounting portions on which one suction nozzle is mounted, and the plurality of mounting portions of one or more of the plurality of pallets The nozzle management device according to (13), wherein at least a part of the plurality of suction nozzles can be mounted on at least a part of different types.

  In the pallet according to this aspect, simply speaking, a plurality of types of nozzles can be mounted on one mounting portion. Assuming that the mounting unit can mount only one type of nozzle, when mounting multiple types of nozzles on one pallet, the pallet must be provided with many types of mounting units. In that case, the situation where the nozzle is not placed on many placing parts may occur. That is, the possibility of many empty mounting portions is increased. As in the present embodiment, if a mounting portion shared by a plurality of types of nozzles is provided, it is possible to efficiently mount the nozzles on the pallet while generalizing the pallet. If a plurality of types of nozzles different in size can be mounted on one mounting portion, the nozzles can be mounted on the pallet more efficiently.

(15) The suction nozzle has a flange, and each of the plurality of mounting portions is configured to regulate the radial displacement of the suction nozzle on the outer periphery of the flange,
The nozzle management device according to (14), wherein the at least one portion of the plurality of mounting portions is configured to be capable of mounting a plurality of types of suction nozzles that differ from one another in the outer diameter of the flange.

  This aspect is simply an aspect in which a plurality of types of nozzles having different sizes can be mounted on one mounting portion. In general, the flange is a portion having the largest outer diameter in the nozzle, and if the radial displacement of the nozzle on the outer periphery of the flange, that is, the displacement of the nozzle is restricted, effective restriction becomes possible.

(16) Each of the at least one portion of the plurality of mounting portions has a hole in which the flange of the suction nozzle fits and regulates the outer periphery of the flange in the inner peripheral wall, and the inner peripheral wall of the hole has a depth The nozzle management machine according to (15), wherein a plurality of suction nozzle flanges having different inner dimensions in the direction and different in the outer diameter of the flanges are configured to be fitted into the holes at different depths.

  This aspect is an aspect regarding the structure of the mounting part which can mount several types of nozzles from which the outer diameter of a flange differs, restricting the outer periphery of a flange. Specifically, the hole of the mounting portion may be, for example, a stepped hole having a plurality of steps whose inner dimensions of the inner circumferential wall are different from each other, and the inner dimension of the inner circumferential wall gradually decreases in the axial direction. It may be a tapered hole. If it is set as the mounting part of such a structure, it will become possible to mount each of several types of nozzles which are mutually different in size on a pallet, controlling the displacement of each radial direction firmly.

  (17) The nozzle management device according to any one of (11) to (16), wherein the nozzle housing device includes a pallet moving device for moving the plurality of pallets in the nozzle housing device.

  According to this aspect, by the pallet being movable in the storage device, it is possible to carry out the pallet from the storage device at a specific position and to carry the pallet into the storage device. The pallet moving device in this aspect may be configured to move each of the plurality of pallets alone, or may be configured to move the plurality of pallets simultaneously, that is, together.

  (18) The nozzle management device according to (17), wherein the pallet moving device is a pallet circulating device that circulates and moves the plurality of pallets simultaneously.

  In the pallet moving device in the present embodiment, it is possible to move a plurality of pallets along the same path together while making the structure of the device relatively simple.

(19) Each of the plurality of pallets is arranged in a posture in which the surface on which the suction nozzle is mounted is directed upward,
The nozzle management machine according to the paragraph (18), wherein the pallet circulating device is configured to circulate the plurality of pallets along a vertical plane while keeping each of them in the posture.

  Since the pallet moving device in this aspect can circulate a plurality of pallets in a relatively small space, according to this aspect, it is possible to realize a relatively compact containing device. The pallet circulation device in this aspect can also be considered as a device having a structure such as, for example, a tower type three-dimensional parking lot.

<< pair nozzle treatment execution device, nozzle transfer device >>
The following several aspects are aspects regarding a pair nozzle treatment execution apparatus and a nozzle transfer apparatus.

(21) The nozzle management machine
The device according to any one of (1) to (19), further comprising a pair nozzle treatment execution device for performing some kind of treatment on the suction nozzle housed in or from the nozzle housing device. Nozzle management machine.

The “pair-to-nozzle treatment execution device” in this aspect is a device that performs some treatment on the nozzle, and specifically includes, for example, a nozzle transfer device, a nozzle inspection device, a nozzle cleaning device, etc. Be The nozzle management machine has various functions according to the provided treatment execution device, in addition to the function of accommodating the nozzle, by providing the anti-nozzle treatment execution device (hereinafter sometimes referred to simply as “treatment execution device”). It is possible to

(22) The nozzle management machine
The nozzle management device according to (21), further comprising: a nozzle transfer device for transferring one or more suction nozzles from the nozzle accommodation device to the counter-nozzle treatment execution device.

  The “nozzle transfer device” in this aspect is a device having a function of carrying out the unloading of one or more nozzles (hereinafter sometimes referred to as “nozzle group”) from the containing device and carrying in the nozzle group to the treatment execution device I can think of it. The nozzle transfer device (hereinafter sometimes referred to simply as “transfer device”) enables cooperation between the containing device and the treatment execution device.

  (23) The nozzle management device according to (22), wherein the nozzle transfer device is configured to transfer one or more suction nozzles from the paired-nozzle treatment execution device to the nozzle accommodation device.

  The transfer device in this aspect carries out the delivery of the nozzle group from the process execution device and the delivery of the nozzle group to the storage device in addition to the removal of the nozzle group from the storage device and the transfer of the nozzle group to the treatment execution device described above. It also has a function. That is, the transfer device in this aspect can be considered to have a function of returning the nozzle group.

(24) The nozzle accommodation device includes a plurality of pallets on each of which a plurality of suction nozzles can be mounted,
The nozzle transfer device
The pallet transfer device according to the item (22) or (23), which is a pallet transfer device for transferring a plurality of suction nozzles by transferring one of the plurality of pallets from the nozzle accommodation device to the anti-nozzle treatment execution device. Nozzle management machine as described.

  (25) The nozzle management device according to (24), wherein the pallet transfer device is configured to transfer one of the plurality of pallets from the counter-to-nozzle treatment execution device to the nozzle accommodation device.

  The above two modes are effective modes when the nozzles are placed and stored on a pallet in the storage device, and the transfer device transfers a nozzle group consisting of a plurality of nozzles for each pallet. It is a configured aspect. According to these two aspects, it is possible to relatively easily carry the nozzle group between the containing device and the treatment execution device. The pallet transfer device in the above two modes (hereinafter sometimes simply referred to as "transfer device") is configured to transfer any pallet regardless of the position within the storage device. Alternatively, as will be described later, it may be configured to transport only the pallet located at a specific position. The former configuration is effective in the case where the containing device does not have the pallet moving device.

(26) The nozzle housing device includes a pallet moving device for moving each of the plurality of pallets in the nozzle housing device,
The item (24) or (25), wherein the pallet transfer device is configured to transfer one of the plurality of pallets moved to the set position by the pallet transfer device to the counter-nozzle treatment execution device. The nozzle management device according to the item.

(27) The nozzle management device according to (26), wherein the pallet transfer device is configured to transfer one of the plurality of pallets from the counter-to-nozzle treatment execution device to the set position.

  In the above two aspects, the transfer device has a function of transferring one pallet located at a specific position among a plurality of pallets of the storage device, and in the latter aspect, the transfer device further includes It has a function to return the pallet to the position. In other words, in the above two aspects, when the pallet is moved to a specific station by the pallet moving device in the containing device, the pallet is transferred between the station and the treatment execution device. According to the above two aspects, the structure of the transfer device can be simplified because it is sufficient to transfer the pallet between a specific position in the storage device and the treatment execution device.

«Multiple twin nozzle treatment execution device»
The following several aspects are aspects at the time of providing multiple above-mentioned treatment execution apparatuses.

(31) The nozzle management machine
The nozzle management machine according to any one of the items (21) to (27), comprising a plurality of paired nozzle treatment execution devices each functioning as the paired nozzle treatment execution device.

  In this aspect, a plurality of devices for performing the same treatment are included as the plurality of treatment execution devices, and a plurality of devices for performing different treatments are also included. According to the former aspect, it is possible to realize a large management device of the execution ability of the treatment, and according to the latter aspect, it is possible to realize a multi-functional management device.

  (32) The nozzle management device according to (31), wherein the nozzle management device is configured such that the operation of each of the plurality of paired-nozzle treatment execution devices is performed independently of the operation of the other. .

  When the management machine includes a plurality of treatment execution devices that execute different treatments, for example, the nozzle sequentially passes the plurality of treatment execution devices, and the treatment by each of the plurality of treatment execution devices is performed on the nozzle It is also possible to configure it to be implemented. Unlike this configuration, this aspect can be considered, for example, as an aspect in which a plurality of treatment execution devices are configured to be able to execute treatment in parallel to different nozzles, respectively. According to this aspect, even with a manager capable of performing a plurality of treatments, it is possible to perform the plurality of treatments on one nozzle in a relatively short time.

(33) The nozzle management machine
As a nozzle transfer device provided corresponding to the plurality of paired nozzle treatment execution devices, each transferring one or more suction nozzles from the nozzle accommodation device to a corresponding one of the plurality of paired nozzle treatment execution devices The nozzle management machine according to the items (31) or (32), comprising a plurality of functional nozzle transfer devices.

  This aspect can be considered simply as an aspect provided with a transfer device for each treatment execution device. It is particularly effective in the aspect that the plurality of treatment execution devices described above can operate independently of one another.

(34) The nozzle housing device includes a plurality of pallets on which a plurality of suction nozzles can be mounted, and a pallet moving device for moving the plurality of pallets in the nozzle housing device,
Each of the plurality of nozzle transfer devices is
A pallet transfer device for transferring a plurality of suction nozzles by transferring one of the plurality of pallets from the nozzle accommodation device to the counter-nozzle treatment execution device,
The nozzle management machine
Each of the plurality of pallet transfer devices, one of the plurality of pallets moved by the pallet movement device to the set position set corresponding to each of the plurality of paired nozzle treatment execution devices 33. A nozzle manager as claimed in claim 33, configured to transfer to a corresponding one of the following.

  This aspect is an aspect configured to transport the nozzle together with the pallet in the above aspect. In particular, in this aspect, a plurality of stations may be provided in the storage device, and pallets located at a particular station may be considered to be transported to a particular treatment performing device.

«Nozzle transfer device»
In the EC mounting machine, when mounting several electrical parts on the circuit board, the nozzle used may be replaced according to the size of the EC, etc. Such a nozzle is disposed at a nozzle station provided in the electric component mounting machine in a state of being mounted on a nozzle tray (hereinafter, may be simply referred to as a "tray"). The following several aspects are aspects related to this tray, and more specifically, transfer of the nozzles to the tray, and transfer of the nozzles from the tray.

(41) The electric component mounting machine is configured such that one or more suction nozzles used in the electric component mounting machine are mounted on a nozzle tray that is removably disposed on the electric component mounting machine. ,
The said nozzle management machine is as said anti-nozzle treatment execution device,
Setting transfer for transferring a suction nozzle stored in the nozzle storage device to a nozzle tray located at a set position;
A nozzle transfer device is provided that performs at least one of storage transfer and transfer from the nozzle tray in order to store, in the nozzle storage device, a suction nozzle mounted on a nozzle tray positioned at a set position. (21) The nozzle management machine according to any one of (34).

  The above-mentioned “setting transfer” is, for example, transfer for setting a nozzle to be used from now on in an electric component mounting machine to a tray, and among the plurality of nozzles accommodated in the storage device by setting transfer. Several are arranged in the nozzle tray. On the other hand, the above "storage and transfer" is, for example, transfer for storing the nozzle used in the electric component mounting machine in the storage device, and a plurality of the components mounted on the tray by storage and transfer. At least a portion of the nozzles are removed from the tray. According to this aspect, a management machine capable of effectively supporting preparation, cleaning, and the like of the nozzles in the electric component mounting machine is realized.

  Incidentally, in the setting transfer according to this aspect, the nozzle transfer device (hereinafter sometimes referred to simply as “transfer device”) transfers the nozzles contained in the storage device from the storage device directly to the tray. For example, the concept includes transferring the nozzle, which has been carried out of the storage device by the transfer device described later, onto the tray. Similarly, the storage transfer according to this aspect does not only mean that the nozzle placed on the tray is directly stored in the storage device, but also the transfer device so as to be stored in the storage device by the transfer device. Is a concept that also includes transferring from a tray.

  (42) The nozzle management device according to (41), wherein the nozzle transfer device is configured to execute both the setting transfer and the storage transfer.

  According to this aspect, by enabling both the setting transfer and the storage transfer, a more practical management device is realized.

(43) The nozzle management device includes a nozzle transfer device for transferring one or more suction nozzles from the nozzle accommodation device to the anti-nozzle treatment execution device,
The nozzle transfer device is
The nozzle management device according to Item (41) or (42), wherein transfer of the suction nozzle transferred by the nozzle transfer device is performed at the time of the setting transfer.

(44) The nozzle accommodation device includes a plurality of pallets on each of which a plurality of suction nozzles can be mounted, and the nozzle transfer device accommodates one of the plurality of pallets. A pallet transfer device configured to transfer a plurality of suction nozzles by transferring the device from the device to the anti-nozzle treatment execution device;
The nozzle transfer device is
At the time of the setting transfer, the transfer for the suction nozzle placed on one of the plurality of pallets transferred to the position where the transfer by the nozzle transfer device is possible by the pallet transfer device. 43. A nozzle manager according to clause 43, configured to perform loading.

(45) The nozzle management device includes a nozzle transfer device for transferring one or more suction nozzles from the paired-nozzle treatment execution device to the nozzle accommodation device,
The nozzle transfer device is
At the time of the housing transfer, in any one of the items (41) to (44), the transfer for storing in the nozzle storage device is performed via the nozzle transfer device. Nozzle management machine as described.

(46) The nozzle accommodation device comprises a plurality of pallets on each of which a plurality of suction nozzles can be mounted, and the nozzle transfer device comprises one of the plurality of pallets as the pair of nozzles A pallet transfer device configured to transfer a plurality of suction nozzles by transferring the treatment execution device to the nozzle storage device,
The nozzle transfer device is
At the time of the storage transfer, transfer to one of the plurality of pallets transferred from the nozzle storage device to a position where transfer by the nozzle transfer device is possible by the pallet transfer device 46. A nozzle manager according to clause 45, configured to perform.

  The above four aspects are aspects related to the above-described transfer device, and in those four aspects, transfer of the nozzle transferred from the storage device by the transfer device to the tray, and the nozzle of the nozzle transferred from the tray At least one of the storage in the storage device by the transfer device takes place. In two of the four modes, the transfer device is a pallet transfer device that transfers the nozzles to transfer the nozzles, and transfer is performed between the tray and the pallet.

(47) The suction nozzle is provided with an identifier for recognizing unique information of the suction nozzle,
The nozzle management machine according to any one of (41) to (46), wherein the nozzle transfer device has an identifier reader for reading the identifier.

  The “specific information” in this aspect typically includes, for example, an ID, and widely includes quality information on quality, information on height of ability, and the like. ID is very useful information in grasping the accommodation position of a plurality of nozzles accommodated in the accommodation device, that is, grasping which nozzle is accommodated in which position. According to this aspect including the ID, since the unique information can be read, it is possible to sufficiently manage the accommodated nozzles using the unique information. In that sense, it is desirable that the reading of the identifier is performed at the time of the above-described storage and transfer. By the way, “identifier” can adopt bar code, 2D code (two-dimensional code such as QR code (registered trademark)), etc. “identifier reader” can be an image pickup device such as bar code reader, camera etc. It is possible to adopt.

  (48) The nozzle transfer device according to any one of (41) to (47), including a nozzle holder for holding the suction nozzle and a holder moving device for moving the nozzle holder. Nozzle management machine.

  This aspect is an aspect relating to the specific structure of the nozzle transfer device. The above-mentioned "nozzle holder" can adopt a chuck, a clamp, etc. which can hold the nozzle in a detachable manner. In addition, as the “holder moving device”, various moving devices such as a so-called XYZ type robot and a multi-joint type robot can be adopted widely.

(49) The suction nozzle has an identifier for recognizing unique information of the suction nozzle,
The nozzle transfer device includes an identifier reader for reading the identifier, and the identifier reader is configured to be moved by the holder moving device together with the nozzle holder (48). Nozzle management machine.

  According to this aspect, at the time of transfer of the nozzle, it is possible to easily read the identifier attached to the nozzle, and a management machine having excellent convenience is realized.

«Tray storage device»
The following several aspects are aspects regarding accommodation of the nozzle tray mentioned above.

(51) The nozzle management machine
A tray storage device capable of storing a plurality of nozzle trays, each of which is the nozzle tray;
The nozzle management machine according to any one of (41) to (49), further comprising: a tray transfer device for transferring one nozzle tray between the setting position and the tray holding device.

  The management device of this aspect can be a management device capable of managing trays by including the tray accommodation device and the tray transfer device. For example, in relation to the placement of the nozzles by the above-described placement device, the tray transfer device carries the tray into and out of the tray storage device, thereby realizing a management machine with excellent convenience. Become. Specifically, after the above-described storage transfer, the tray from which the nozzle that has been placed is removed is stored in the tray storage device, or setting transfer is performed to the tray stored in the tray storage device. Is possible. Also, for example, when a defect is found in the tray on which the nozzle is placed, the storage transfer and the setting transfer are used in combination to replace the tray with a defect-free tray. Is also possible.

  (52) The nozzle management device according to (51), wherein the tray accommodation device is configured to be capable of accommodating a nozzle tray on which one or more suction nozzles are placed.

  According to this aspect, since the tray in which the nozzles are set in advance can be accommodated in the tray accommodation device, the tray in which the nozzles are set can be quickly attached when the electrical component attaching machine needs it. Can be supplied to

<< Nozzle inspection device >>
The following several aspects are aspects related to a pair of nozzle treatment execution devices that perform inspection of nozzles. In addition, the following several aspects are not the aspect which makes a management machine a category, Even if it changes into the aspect which only makes an inspection apparatus a category, the aspect of the inspection apparatus independent of the other component of a management machine Even the invention can be an aspect of the claimable invention.

  (61) The nozzle management device according to any one of (21) to (52), wherein the nozzle management device comprises a nozzle inspection device for inspecting a suction nozzle as the anti-nozzle treatment execution device.

  According to this aspect, for example, since the inspection can be performed on the nozzle housed or housed in the housing device, a convenient management machine is realized. In the present embodiment, items of inspection performed by the nozzle inspection apparatus (hereinafter, may be simply referred to as “inspection apparatus”) are not particularly limited, but inspection of various inspection items including inspection of various inspection items listed later Can be performed by the inspection device.

(62) The nozzle inspection device
(A) A passing flow rate inspection, which is an inspection regarding the flow rate of air passing through the suction nozzle, and (b) reading of an identifier for recognizing unique information of the suction nozzle attached to the suction nozzle. Identifier reading inspection which is an inspection related to (c) tip state inspection which is an inspection regarding the state of the tip portion of the suction nozzle, and (d) when the tip portion of the suction nozzle is retractable against the biasing force. (61) The nozzle management device according to (61), configured to perform at least one of the necessary reverse force inspection that is an inspection related to the force required to retract the tip of the suction nozzle.

  The four inspection items listed in the present embodiment are basic inspection items for the nozzle. Individually, to be described in detail, the "passing flow rate inspection" is an inspection to check how much the flow rate of air passing through the nozzle is secured, and is mainly an inspection for checking a nozzle clogging. For example, the flow rate of air is measured in a state where compressed air is continuously blown into the nozzle whose tip is open from the proximal side, and the measured flow rate is smaller than the set threshold flow rate, the nozzle It may be determined that the clogging has occurred. Also, instead of such a method, for example, in a state where compressed air is continuously blown into the nozzle whose tip is opened from the base end side, the pressure of the blown air is measured, and the pressure is set threshold When the pressure is higher than the pressure, it may be determined that the nozzle is clogged and a sufficient air flow rate is not secured.

“Identifier reading inspection” is, for example, an inspection for confirming whether the identifier provided in the nozzle described above, specifically speaking, the identifier provided on the upper surface of the flange can be sufficiently read. For example, an identifier may be actually imaged by an imaging device such as a camera, and the identifier defect may be determined when the unique information to be indicated by the identifier can not be sufficiently acquired from the result of the imaging.

  In the “tip state inspection”, simply speaking, for example, the presence or absence of a shape defect such as bending of the tip of the nozzle, chipping or chipping of the tip, and presence of foreign matter or dirt on the tip, etc. In the inspection, for example, the tip is imaged from the tip side by an imaging device such as a camera, and on the basis of the image data obtained by the imaging, the bending, chipping, crushing, adhesion of foreign matter, etc. It is sufficient to judge the presence or absence of etc.

The "recession force inspection" is an inspection regarding the operation of the nozzle. In general, the tip of the nozzle to which the electric component is attracted is attached to the base end held by the nozzle holding device in order to reduce the impact applied to the electric component when the electric component is placed on the circuit board. And is configured to retreat. That is, the tip of the nozzle is retracted against the biasing force of a spring or the like. For example, the force required to retract the tip (hereinafter referred to as "required force")
It may be said that there is a test to check if the necessary backward force is excessive. Simply put, it can be considered as an inspection to confirm that the nozzle shrinks smoothly. In this inspection, for example, the tip end of the nozzle supported at the base end is pushed toward the base end, and the force required for the pushing at the time when the nozzle starts to retract is measured by a load sensor such as a load cell. When the force exceeds a set threshold value, it may be determined that the operation of the nozzle is abnormal.

  As described later, only one inspection apparatus may be provided in the management machine, or a plurality of inspection apparatuses may be provided. When a plurality of inspection devices are provided, the plurality of inspection devices may have the same inspection items or different inspection items. Furthermore, referring further to the above four inspection items, the inspection device may be configured to perform only one of the four inspection items. In addition, two or more of the four inspection items may be configured to be performed. If the inspection is performed on two or more inspection items, the number of inspection devices to be provided in the management device can be reduced.

  (63) The nozzle management device according to (62), wherein the nozzle inspection apparatus is configured to perform at least both the passing flow inspection and the identifier reading inspection.

  As described above, both the flow rate inspection and the identifier reading inspection are performed on the proximal end side of the nozzle. In other words, the two inspections are performed from the same direction, and in both inspections, the main components for performing the inspection are disposed in the space where the proximal side of the nozzle exists. Therefore, the inspection apparatus in this aspect can inspect the two inspection items with a relatively simple configuration. Specifically, for example, the configuration can be simplified by moving the two main components respectively corresponding to the two inspections by one moving device.

  (64) The nozzle management device according to (62) or (63), wherein the nozzle inspection device is configured to perform at least both the tip state inspection and the necessary reverse force inspection.

  Unlike the previous embodiment, the tip condition check and the necessary reverse force check are performed on the tip side of the nozzle. In other words, the two inspections are performed from the same direction, and in both inspections, the main components for performing the inspection are disposed in the space where the tip of the nozzle is present. Therefore, the inspection apparatus in this aspect can inspect the two inspection items with a relatively simple configuration. Specifically, for example, the configuration can be simplified by moving the two main components respectively corresponding to the two inspections by one moving device.

(65) The nozzle accommodation device includes a plurality of pallets on each of which a plurality of suction nozzles can be mounted;
The nozzle management machine
And a pallet transfer device for transferring a plurality of suction nozzles by transferring one of the plurality of pallets from the nozzle accommodation device to the nozzle inspection device, and
The nozzle inspection apparatus is configured to perform inspection in a state where the plurality of suction nozzles placed on one of the plurality of pallets are placed on the one pallet. (64) The nozzle management device according to any one of (64).

  According to this aspect, the inspection by the inspection device is performed with the nozzle placed on the pallet. Extremely speaking, the inspection of the nozzles takes place in the same way as the nozzles are accommodated in the accommodation device. Therefore, it is possible to inspect easily the nozzle accommodated in the accommodation device.

(66) The nozzle management machine
The nozzle management machine according to any one of (61) to (65), wherein a plurality of nozzle inspection devices, each functioning as the nozzle inspection device and having different inspection items, are provided.

  According to the aspect of this section, a management device capable of executing inspection of many inspection items, that is, a management device capable of executing sufficient inspection is realized.

«Reference subject in inspection»
The following several aspects are the aspects which added the limitation regarding the method of a test | inspection, and the limitation regarding the reference | standard of a test | inspection in detail.

  (71) The nozzle management device according to any one of (61) to (65), wherein a reference target to be referred to in inspection by the nozzle inspection device is provided.

  According to this aspect, since the inspection can be performed with reference to the reference object, the inspection can be made appropriate. Note that reference to the reference target may be performed, for example, each time the inspection is performed, or may be performed periodically. If performed each time the inspection is performed, it may be performed before or after the actual inspection of the nozzle. Also, it may be performed only when some condition changes. Furthermore, it may be performed only when it is determined that the nozzle is defective (hereinafter sometimes referred to as a "defective nozzle") in the actual inspection of the nozzle. That is, the reference timing may be set appropriately in accordance with the purpose of use of the reference target. In addition, in this aspect, the arrangement place of the reference target is not limited. It may be attached to the pallet as will be described later, and may be fixedly or removably attached to the housing of the management machine or the like in the area of the inspection apparatus.

  (72) The nozzle management device according to (71), wherein the reference object is used for at least one of setting of a reference of inspection by the nozzle inspection device and calibration or verification of the nozzle inspection device. .

  This aspect is an aspect in which the purpose of utilization of the above-mentioned reference object is added. The above-mentioned “setting of inspection standard by the nozzle inspection apparatus” includes, for example, setting of a standard of judgment as to whether or not the nozzle to be inspected is a defective nozzle. Specifically, for example, the pressure of the compressed air to be fed in the above-described passing flow rate inspection, that is, the flow rate of the air to be measured by the output pressure of the compressor (hereinafter referred to as "source pressure") When measuring the pressure on the side, the pressure) changes. If the threshold flow rate (the pressure on the proximal side of the nozzle is measured with respect to the flow rate of air to be measured) in advance as a reference object so that the determination of whether it is a defective nozzle does not depend on the change in this source pressure It is desirable to set the threshold pressure). For example, the setting of the threshold flow (threshold pressure) corresponds to the setting of the reference of the inspection. The above-mentioned “calibration of the nozzle inspection device” includes, for example, optimization of the inspection condition of the inspection by the inspection device, the operation of the inspection device, and the like. Specifically, for example, an imaging device such as a camera is used in the above-described identifier reading inspection or tip state inspection. It is possible to perform focus adjustment of this imaging device on a reference target and, after the adjustment of focus, to perform imaging of an actual nozzle. The adjustment of the focus corresponds to the calibration of the nozzle inspection device. The above “verification of the nozzle inspection apparatus” includes, for example, confirming whether or not the inspection apparatus itself is correct. Specifically, for example, in the above-described reverse necessary force inspection, a reference object on which an appropriate force is to be measured is inspected by an inspection device, and the inspection device is used when the measured force is not an appropriate force. It is possible to judge that there is a defect in itself. This judgment corresponds to the inspection of the inspection apparatus.

(73) The nozzle management device according to (71) or (72), wherein the reference object is configured to normally obtain good inspection results when the reference object is inspected by the nozzle inspection device.

  According to this aspect, it is possible to suitably use the reference object for setting the reference of inspection by the above-described nozzle inspection device, calibrating the nozzle inspection device, and verifying the nozzle inspection device.

  (74) The nozzle management device according to any one of (71) to (73), wherein the reference object is a simulated object that imitates a part of a suction nozzle.

  Specifically, the “simulate” in this aspect is created, for example, to simulate only the tip of the nozzle, only the mechanism in which the tip and its tip recede, only the identifier attached to the flange, etc. And the like. As the reference object, it is sufficient to create an appropriate part of the simulated object according to the inspection item, and the creation of the simulated object can be performed relatively easily.

  (75) The nozzle management device according to any one of (71) to (73), wherein the reference object is an actual suction nozzle.

  This aspect is simply an aspect in which a reference nozzle is used as a reference target. According to this aspect, it is possible to simply provide the reference object without creating any reference object separately.

(76) The nozzle accommodation device includes a plurality of pallets on each of which a plurality of suction nozzles can be mounted;
The nozzle management machine
A pallet transfer device for transferring a plurality of suction nozzles by transferring one of the plurality of pallets from the nozzle accommodation device to the nozzle inspection device;
The nozzle inspection apparatus is configured to inspect a plurality of suction nozzles mounted on one of the plurality of pallets in a state of being mounted on the one pallet;
The nozzle management machine according to any one of (71) to (75), wherein the reference object is provided on at least one of the plurality of pallets.

  In this aspect, the reference object may be placed on the pallet, or may be attached to the pallet. The former is particularly effective when the reference object is an actual nozzle, and the latter is effective when the reference object is the above-mentioned mimic. According to this aspect, since the reference target is provided near the nozzle to be inspected, it is possible to fully utilize the reference target.

«Treatment for defective nozzles»
The following several aspects are aspects related to treatment of the defective nozzle when it is determined as a defective nozzle as a result of the inspection by the inspection apparatus.

(81) The nozzle management machine
The nozzle management according to any one of (61) to (76), further comprising a defective nozzle indwelling device for detaining a defective nozzle which is an adsorption nozzle judged to be defective based on the inspection result by the nozzle inspection device. Machine.

When it is determined by inspection that the nozzle is a defective nozzle, it is desirable that the defective nozzle be taken out of the management machine for disposal, repair or the like. In this aspect, the defective nozzle is indwelled in the above-mentioned defective nozzle indwelling device (hereinafter sometimes referred to simply as “indwelling device”). Therefore, according to this aspect, since the defective nozzle can be reliably distinguished from other good nozzles, it can be taken out of the management machine with certainty. In addition, in consideration of the convenience of taking it out, it is preferable that the indwelling device be disposed at a location easy to take out, and that the indwelling device be removed from the management machine so that a defective nozzle can be taken out It is desirable that it be possible.

(82) The defective nozzle placement device is
The nozzle management machine according to (81), further comprising a plurality of indwelling sections for indwelling different defective nozzles in each of the inspection items judged to be defective.

  According to this aspect, since the defective nozzles are sorted by the plurality of indwelling units for each defective inspection item, the operator of the management machine can easily recognize the defective factor of the defective nozzle, and the subsequent repair etc. It leads to the improvement of the convenience of

(83) The nozzle management machine
The nozzle management machine according to the paragraph (81) or (82), further comprising a defective nozzle conveying device for conveying the defective nozzle to the defective nozzle indwelling device.

(84) The electric component mounting machine is configured such that one or more suction nozzles used in the electric component mounting machine are mounted on a nozzle tray that is removably disposed on the electric component mounting machine. ,
The said nozzle management machine is as said anti-nozzle treatment execution device,
A nozzle transfer device for performing setting transfer for transferring a suction nozzle stored in the nozzle storage device to a nozzle tray positioned at a set position;
The nozzle transfer device functions as the defective nozzle carrier device by being configured to carry the defective nozzle stored in the nozzle storage device to the defective nozzle placement device. Nozzle management machine as described.

  The above two modes relate to an apparatus for carrying a defective nozzle. The latter mode is a mode in which the defective nozzle is transported to the indweller using the above-described transfer device. According to the latter aspect, it is possible to temporarily store the defective nozzle in the storage device, and to transport the stored defective nozzle to the indwelling device regardless of the operation of the inspection device. Also, if the defective nozzle is transported to the indwelling unit after the setting transfer by the transfer device, it is necessary to intentionally provide the management machine with a working time only for transporting the defective nozzle. It disappears. In addition, when making a transfer apparatus convey a defect nozzle, it is desirable for a detainer to be arrange | positioned in the range of the operation | movement of the transfer apparatus.

<< Nozzle cleaning device, nozzle drying device >>
The following several aspects are aspects regarding a nozzle cleaning apparatus (Hereinafter, it may only be called a "cleaning apparatus"). In addition, the following several aspects are not the aspect which makes a management machine a category, but even if it changes into the aspect which only makes a washing apparatus a category, the aspect of the washing apparatus independent of the other component of a management machine Even the invention can be an aspect of the claimable invention.

  (91) The nozzle management device according to any one of (21) to (84), wherein the nozzle management device includes a nozzle cleaning device that cleans a suction nozzle as the anti-nozzle treatment execution device.

  It is desirable that the nozzle be cleaned for the purpose of clearing clogging, removing dirt and the like. According to this aspect, since the cleaning of the nozzle can also be performed, a highly practical management device can be realized. In addition, in this aspect, the method of the washing | cleaning by it is not specifically limited by the washing | cleaning apparatus, It is possible to employ | adopt various well-known washing | cleaning methods already.

  (92) The nozzle according to (91), wherein the nozzle cleaning device sprays water from both the tip side and the base end of the suction nozzle toward the suction nozzle to wash the nozzle. Management machine.

  With respect to the nozzles used in electrical component placement machines, many of the prior cleaning devices have been performed by immersing the nozzle or a portion thereof in water. According to this aspect, the cleaning device sprays water for cleaning rather than immersing the nozzle in water, and the cleaning device cleans most of the main part of the nozzle. Since the nozzle is configured to be jetted, the nozzle can be sufficiently cleaned.

  (93) The nozzle management device according to (91) or (92), wherein the nozzle cleaning device sprays high-pressure water toward the adsorption nozzle to perform cleaning.

  In the conventional cleaning apparatus of the nozzle by the method of injecting water, it is configured to inject water using a so-called two-fluid nozzle. In other words, it is configured to atomize and inject water by the force of compressed air. In the cleaning device in this aspect, since water is directly applied to the nozzle, according to this aspect, a cleaning device having a high cleaning ability is realized. The cleaning device of this aspect may be configured, for example, to directly press water by a pump or the like and to jet the pressurized water toward the nozzle.

(94) The nozzle accommodation device includes a plurality of pallets on each of which a plurality of suction nozzles can be mounted;
The nozzle management machine
A pallet transfer device for transferring a plurality of suction nozzles by transferring one of the plurality of pallets from the nozzle housing device to the nozzle cleaning device;
The nozzle cleaning device is configured to perform cleaning in a state where a plurality of suction nozzles placed on one of the plurality of pallets are placed on the one pallet (91) (93) The nozzle management device according to any one of the items.

  (95) The nozzle management device according to any one of (91) to (94), wherein the nozzle management device comprises a nozzle drying device for drying the suction nozzle cleaned by the nozzle cleaning device.

  According to this aspect, since the nozzle cleaned by the cleaning device is dried by the nozzle drying device (hereinafter sometimes simply referred to as "drying device"), for example, the nozzle is housed in the housing device immediately after drying. Even then, the nozzle can be accommodated in a sufficiently dry state. In addition, after washing, it becomes possible to use it without leaving much time. In addition, the drying means which it adopts in this aspect is not specifically limited, It is possible to employ | adopt various well-known drying means already well-known.

  (96) The nozzle management device according to (95), wherein the nozzle drying device is configured to dry the suction nozzle by air blow.

  As in the present embodiment, if the drying device adopts air blow as the drying means, the water adhering to the nozzle can be blown away by the pressure of the air, so that the nozzle can be dried in a considerably short time. . The air to be blown may be cold air or warm air, but from the viewpoint of shortening the drying time, it is desirable that the air has a somewhat high temperature.

(97) The nozzle management machine
The nozzle transfer device is provided to transfer one or more suction nozzles from the nozzle housing device to the nozzle cleaning device, and transfer one or more suction nozzles transferred to the nozzle washing device to the nozzle housing device.
The item (95) or (96), wherein the nozzle drying device is configured to perform drying on at least one adsorption nozzle being transferred from the nozzle cleaning device to the nozzle accommodation device by the nozzle transfer device. Nozzle management machine described in.

  According to this aspect, drying is performed on the nozzle that has been cleaned by the cleaning device and returned to the storage device. Therefore, at an early time after cleaning by the cleaning device, the sufficiently dried nozzle is accommodated in the accommodating device. Since drying can be performed at the time of transfer, it is possible to reduce the time loss of the manager. In addition, the drying apparatus in this aspect is not limited to the thing of a structure which dries a nozzle only in the middle of the transfer by a transfer apparatus. For example, the drying apparatus may perform drying after washing in the washing apparatus and may perform drying outside the washing apparatus even during transfer by the transfer apparatus.

<< Control by control device >>
The following several aspects are aspects regarding control of the said management machine. In other words, it is an aspect regarding the operation method of the manager.

(101) The nozzle management machine is provided with a control device which controls its own control (1) to (97)
The nozzle management machine according to any one of the items.

  The present aspect is a basic aspect relating to control, and the control device is a component that mainly executes the operation of the management device. The control device may be, for example, one configured as a main component of a computer.

(102) The control device is
The nozzle according to (101), further comprising: a nozzle information storage unit in which unique information of each of the plurality of suction nozzles accommodated in the nozzle accommodation device is stored in association with the accommodation position in the nozzle accommodation device. Management machine.

  According to this aspect, since it can be grasped which nozzle is accommodated in which accommodation position in the accommodation device, it becomes possible to appropriately manage the accommodated nozzles. The unique information includes ID information as described above, and by storing the ID information of the nozzles, it is possible to perform sufficient management of individual nozzles.

(103) An adsorption nozzle is provided with an identifier for recognizing unique information of the adsorption nozzle,
The nozzle manager has an identifier reader for reading its identifier,
The nozzle management device according to (102), wherein the nozzle information storage unit is configured to store the unique information of the suction nozzle acquired by reading by the identifier reader.

  As described above, according to the identifier reader, it is possible to easily obtain unique information of each nozzle. Therefore, according to this aspect, it is possible to easily manage the housed nozzles based on the acquired unique information. The identifier reader may be provided in the transfer device as described above. In that case, when at least one of the setting transfer and the storage transfer described above is performed, it becomes possible to acquire the unique information of the transferred nozzle.

(104) The nozzle accommodation device includes a plurality of pallets on each of which a plurality of suction nozzles can be mounted, and a plurality of mountings on which one suction nozzle is mounted on each of the plurality of pallets Have a department,
The item (102) or (103), wherein the nozzle information storage unit is configured to treat which of the plurality of pallets is placed on which of the plurality of placement parts of the plurality of pallets as the accommodation position The nozzle management device according to the item.

  This aspect is a preferred aspect when the containing device has the above-described pallet. According to this aspect, it is possible to grasp which nozzle is accommodated at which position of which pallet, and it is possible to more appropriately manage the accommodated nozzles.

(105) The electric component mounting machine is configured such that one or more suction nozzles used in the electric component mounting machine are mounted on a nozzle tray that is removably disposed on the electric component mounting machine. ,
The nozzle management machine
In order to store the suction nozzle placed on the nozzle tray located at the set position in the nozzle storage device, it has a nozzle transfer device for carrying out storage transfer that is transferred from the nozzle tray,
The controller
By controlling the nozzle transfer device, the suction nozzle placed on the nozzle tray located at the set position is transferred from the nozzle tray, and the transferred suction on the nozzle information storage unit The nozzle management machine according to any one of (102) to (104), further comprising: a nozzle accommodation control section for storing the nozzle specific information in association with the accommodation position of the suction nozzle.

  According to this aspect, at the time of the storage transfer described above, that is, when the nozzle is transferred from the tray and the nozzle is stored in the storage device, the unique information of the nozzle is stored at the storage position in the storage device of the nozzle. It is stored in association with it. Therefore, according to this aspect, it is possible to appropriately manage the nozzles housed in the housing device.

(106) The electric component mounting machine is configured such that one or more suction nozzles used in the electric component mounting machine are mounted on a nozzle tray that is removably disposed on the electric component mounting machine. ,
The nozzle management machine
A nozzle transfer device for performing setting transfer for transferring a suction nozzle stored in the nozzle storage device to a nozzle tray positioned at a set position;
The controller
By controlling the nozzle transfer device, based on the specific information of the plurality of suction nozzles stored in the nozzle information storage unit, the nozzle tray should be placed on the nozzle tray located at the setting position. The nozzle management device according to any one of (102) to (105), further including a nozzle setting control unit for transferring the suction nozzle.

  According to this aspect, at the time of the setting transfer described above, that is, when setting the nozzle stored in the storage device to the tray, the nozzle is arranged on the tray using the stored unique information. . Therefore, according to this aspect, based on the information on the nozzles to be placed on the tray, the proper nozzles can be surely disposed on the tray.

(107) The nozzle transfer device is
In order to store the suction nozzle placed on the nozzle tray located at the set position in the nozzle storage device, the storage transfer that is transferred from the nozzle tray and the suction nozzle stored in the nozzle storage device Are configured to perform setting transfer to transfer to the nozzle tray located at the set position,
The controller
By controlling the nozzle transfer device, the suction nozzle placed on the nozzle tray located at the setting position is transferred from the nozzle tray, and the plurality of suctions stored in the nozzle information storage unit A nozzle resetting control unit for transferring a suction nozzle accommodated in the nozzle housing device of the same type as the suction nozzle transferred on the basis of the unique information of the nozzle onto a nozzle tray positioned at the setting position The nozzle management machine according to any one of (102) to (106), comprising:

  This aspect is simply an aspect capable of carrying out the above-mentioned storage transfer and setting transfer by using unique information. In this aspect, the tray on which the nozzle is placed in housing transfer and the tray on which the nozzle is placed in setting transfer may be the same one, or may be another one of the same type. Good. Further, the nozzle transferred in housing transfer and the nozzle transferred in setting transfer may be the same or may be another type of the same. For example, an aspect in which another nozzle is placed on the same tray is suitable for replacing the nozzles. Then, based on the unique information, only by positioning the tray on which the nozzle is placed at the setting position, the nozzle which has been placed can be automatically exchanged for the same type of nozzle with respect to the tray. It becomes possible. Also, for example, in an aspect in which the same nozzle is placed on another tray, it is suitable for tray replacement. Then, based on the unique information of the tray, simply by positioning the tray on which the nozzle is placed at the above setting position, the nozzle automatically placed on another tray of the same type as the tray is selected. It becomes possible to put it on again. The latter aspect is particularly suitable for the management device equipped with the tray storage device and the tray transfer device described above.

(108) The nozzle resetting control unit
The nozzle management device according to (107), wherein a different suction nozzle is transferred to the nozzle tray located at the setting position instead of the transferred suction nozzle.

  This mode is a mode suitable for replacing the nozzle described above. As described above, by carrying out the housing transfer and the setting transfer on the same tray, only the nozzles are replaced.

(109) The nozzle management machine
A tray storage device capable of storing a plurality of nozzle trays, each of which is the nozzle tray;
And a tray transfer device for transferring one nozzle tray between the setting position and the tray holding device.
The controller
It has a tray replacement control unit that, when it is determined that a problem occurs in the nozzle tray, the nozzle tray is replaced with the nozzle tray stored in the tray storage device by controlling the tray transfer device. (105) The nozzle management device according to any one of the items (108) to (108).

The tray is provided with a detachment prevention mechanism called a so-called shutter mechanism, for example, in order to prevent the detachment of the nozzle from the tray. Further, in order to manage the tray individually, the tray may be provided with an identifier for recognizing unique information. If there is a problem with the operation of the detachment prevention mechanism in a certain tray, or if reading of the identifier becomes difficult, that tray is identified as a defective tray. This embodiment is a preferable embodiment when replacing the defective tray with a good tray. Note that by combining the storage transfer and setting transfer by the transfer device described above in this aspect, the tray on which the nozzles are mounted is placed on another tray on which the same or another nozzle is mounted. It is possible to change.

(110) The nozzle management machine
A nozzle inspection apparatus for inspecting an adsorption nozzle, a defective nozzle indweller for placing a defective nozzle which is an adsorption nozzle judged to be defective based on an inspection result by the nozzle inspection apparatus, and a defective nozzle for the defective nozzle Equipped with a defective nozzle carrier to carry
Each of the defective nozzle indwelling devices has a plurality of indwelling sections for indwelling defective nozzles different from each other in the inspection item determined to be defective,
The controller
A defective nozzle transport control unit is configured to transport the defective nozzle to one of the plurality of indwelling units corresponding to the inspection item determined to be defective for the defective nozzle by controlling the defective nozzle carrier. The nozzle management device according to any one of (101) to (109).

  According to this aspect, as described above, it is possible to cause the management machine to perform an operation for detaining a defective nozzle at another place for each check item determined to be defective.

(111) The nozzle management machine is provided with a nozzle inspection device that inspects the suction nozzle, and the nozzle management device is referred to in the inspection by the nozzle inspection device and can usually obtain good inspection results A configured reference object is provided,
The controller
It has a reference target reference failure nozzle judgment unit that judges that the suction nozzle is a failure nozzle on condition that the inspection result of the suction nozzle by the nozzle inspection device is defective and the inspection result of the reference object is good. 101. The nozzle management device according to any one of the items (110) to (110).

  The present aspect is an aspect related to control for performing an inspection using the reference object described above. In this aspect, it may be considered that the test of the test apparatus described above is performed. That is, in this aspect, when the inspection of the reference object is good, it is determined that there is no problem in the function of the inspection device, and the inspection of the nozzle is performed or the result of the inspection of the performed nozzle is adopted on the premise of the accreditation. is there. Therefore, according to this aspect, the reliability of the inspection by the inspection apparatus is high. For example, in the present embodiment, when the inspection result for a certain nozzle is not good, the inspection of the above-mentioned reference object is performed, and the inspection device operates well when the good result is obtained in the inspection of the reference object It may be determined that the nozzle is a defective nozzle based on the determination. In this embodiment, when a good result is not obtained in the inspection of the reference object, it is judged that the inspection apparatus itself is abnormal, the inspection result for the nozzle is not adopted, or the inspection of the subsequent nozzle is executed It is also possible not to.

(112) The nozzle management device includes a nozzle inspection device that inspects a suction nozzle, and the nozzle management device is provided with a reference target to be referred to in the inspection by the nozzle inspection device,
The controller
Prior to inspection of suction nozzle, reference object-based inspection preparation processing in which at least one of setting of inspection reference by the nozzle inspection device and calibration of the nozzle inspection device is performed as preparation processing using the reference object The nozzle management machine according to any one of (101) to (111), further comprising:

  This aspect is another aspect related to control for performing an inspection using the reference object described above. According to this aspect, the inspection apparatus performs highly reliable inspection.

It is a perspective view which shows the electric component mounting machine in which the adsorption nozzle used as the management object of the nozzle management machine of an Example is used. It is a perspective view showing a representative adsorption nozzle. It is a figure which shows the nozzle tray in which a suction nozzle is mounted in an electrical component mounting machine. It is a perspective view which shows the external appearance of the nozzle management machine of an Example. It is a perspective view which shows the internal structure of a nozzle management machine. It is a perspective view which shows the internal structure of a nozzle management machine from another viewpoint. It is a perspective view for demonstrating the nozzle transfer apparatus with which a nozzle management machine is equipped. It is a perspective view for demonstrating the 1st nozzle inspection device with which a nozzle management machine is provided. It is a perspective view for demonstrating the 2nd nozzle inspection device with which a nozzle management machine is provided. It is a perspective view for demonstrating the nozzle washing | cleaning apparatus and nozzle drying apparatus with which a nozzle management machine is equipped. FIG. 11 is a perspective view showing the nozzle cleaning device and the nozzle drying device shown in FIG. 10 with the housing removed. The nozzle accommodation apparatus with which a nozzle management machine is equipped WHEREIN: It is a figure which shows the nozzle pallet in which a suction nozzle is mounted. It is a figure which shows several adsorption | suction nozzles which a nozzle management machine manages. FIG. 6 is a cross-sectional view of a portion of a nozzle pallet showing a state in which a suction nozzle is placed in a placement hole and another placement hole that can be adopted. It is a schematic diagram for demonstrating the front-end | tip part state test | inspection by the 1st nozzle test | inspection apparatus with which a nozzle management machine is equipped. It is a schematic diagram for demonstrating the reverse necessary force test | inspection by the 1st nozzle test | inspection apparatus with which a nozzle management machine is equipped. It is a schematic diagram for demonstrating the passage flow rate test | inspection by the 2nd nozzle test | inspection apparatus with which a nozzle management machine is equipped, and an identifier reading test | inspection. It is a schematic diagram for demonstrating washing | cleaning and drying of the adsorption nozzle by the nozzle washing | cleaning apparatus with which a nozzle management machine is equipped, and a nozzle drying apparatus. It is a table which shows typically accommodation nozzle information which a control device of a nozzle management machine has memorized. It is a table which shows typically accommodation tray information which a control device of a nozzle management machine has memorized. It is a table which shows typically the nozzle setting information which the control apparatus of a nozzle management machine utilizes in the case of the setting to the nozzle tray of an adsorption | suction nozzle. It is a flowchart which shows the nozzle accommodation program executed in order for a nozzle management machine to perform nozzle accommodation operation. It is a flowchart which shows the nozzle setting program executed in order for a nozzle management machine to perform nozzle setting operation. It is a flowchart which shows the first half of the nozzle re-setting program executed for a nozzle management machine to perform nozzle re-setting operation. It is a flowchart which shows the second half part of the nozzle re-setting program performed in order that a nozzle management machine may perform nozzle re-setting operation. It is a flowchart which shows the nozzle washing | cleaning program performed in order that a nozzle management machine may perform nozzle washing operation. It is a flowchart which shows the 1st nozzle test | inspection program performed in order that a nozzle management machine may perform 1st nozzle test operation. It is a flowchart which shows the 2nd nozzle test | inspection program performed in order that a nozzle management machine may perform 2nd nozzle test operation. It is a block diagram which shows the function structure of the control apparatus with which a nozzle management machine is provided.

  Hereinafter, representative embodiments of the claimable invention will be described in detail by way of example with reference to the drawings. In addition to the embodiments described below, the claimable invention is practiced in various aspects including various modifications and improvements based on the knowledge of those skilled in the art, including the aspect described in the above [Aspect of the invention] section. can do. Moreover, it is also possible to constitute the modification of the following example using the technical matter described in the explanation of each item of [Aspects of the invention].

  The nozzle management device of the embodiment targets a suction nozzle used in the electric component mounting device as a management target. The suction nozzle is a component holder that holds the electric component by suction when the electric component is mounted on the circuit board, by the negative pressure supplied thereto. Before describing the nozzle management machine of the embodiment, the electric component mounting machine and the suction nozzle will be briefly described, and thereafter, the overall configuration of the nozzle management machine and the nozzle management machine are configured for the nozzle management machine of the embodiment. Several operations performed by each device and the nozzle management machine, and the functional configuration of the control device related to those operations will be described sequentially. In the following description, “nozzle management device”, “electrical component mounting device”, “suction nozzle”, “circuit board”, and “electrical component” are simply “management device”, “mounting device”, “ It may be called "nozzle", "substrate" and "part".

[A] Electrical Component Mounting Machine and Suction Nozzle An electronic component mounting machine in which a suction nozzle to be managed by a management machine is used is shown as an example in FIG. In the figure, two mounting machines 10 of the same structure are juxtaposed to the base 12 (in the figure, the exterior panel of the near side is removed). The mounting machine 10 conveys the substrate S and conveys the substrate S from the conveyor-type substrate conveyance device 14, fixes a plurality of feeder-type component supply devices 16 each of which supplies the component P, and supplies them from the component supply devices 16. A mounting head 18 for mounting the component P to be mounted on the fixed substrate S, and a head moving device 20 for moving the mounting head 18 between the component supply device 16 and the fixed substrate S It is done. The mounting head 18 is configured to include an operating shaft 22 to which a suction nozzle N is attached at its lower end, and an operating shaft lifting and rotating device (not shown) for moving the operating shaft 22 up and down and rotating. Incidentally, the mounting head 18 shown in the figure is an index type mounting head, and the operating shaft 22 is capable of mounting a plurality of nozzles N. The component P supplied from the component supply device 16 is held by suction at the tip (lower end) of the nozzle N, and the held component P is held by the nozzle N after the mounting head 18 is moved above the substrate S. When the holding is released, the substrate S is mounted. Incidentally, in order to mount the component P at an appropriate position on the substrate S in an appropriate posture, the component P is imaged from below by the component camera 22 provided in the mounting machine 10 in a state where the component P is held by suction by the nozzle N The data of the holding position and the holding posture obtained by imaging are used at the time of mounting.

The nozzle N is a management target of the management machine, and the nozzle N is as shown in FIG. FIG. 2A is a view of the nozzle N viewed obliquely from above, and FIG. 2B is a view viewed obliquely from below. As can be understood from those figures, the nozzle N has a body cylinder 30 which functions as a main body of the nozzle N in a tubular shape, a suction pipe 32 extending downward from the body cylinder 30, and a periphery of the body cylinder 30. And a flange 34 fixed to the same cylinder 30 in a projecting manner. The upper end portion of the body cylinder 30 functions as a base end portion of the nozzle N, and the upper end portion is held by the above-mentioned operation axis. The suction pipe 32 functions as the tip of the nozzle, and is in the form of a relatively thin pipe. Two hooking pins 36 are extended in the body cylinder 30, and the nozzle N is attached to the operation shaft 22 by using the hooking pins 36. The attachment of the nozzle N using the hooking pin 36 is a general method, and the description here is omitted and in the other drawings.

  Positive pressure and negative pressure are selectively supplied to the suction pipe 32 from the mounting head 18 via the body cylinder 30. The supply of the negative pressure causes the component P to be held by suction at the tip (lower end) of the suction pipe 32, and the supply of the positive pressure causes the component P held by suction to be separated from the suction pipe 32. Although the internal structure is omitted in the figure, the suction pipe 32 is capable of advancing and retracting with respect to the barrel 30. Specifically, in order to reduce the impact applied to the component P when the component P is attached to the substrate S, the tip end of the nozzle N is biased by the force of a spring in the direction of advancing from the barrel 30 When a force exceeding the biasing force is applied, it can be retracted, that is, can be drawn into the barrel 30. The flange 34 functions as a back surface forming member for the imaging of the component P by the component camera 22 described above to be clearly performed, and becomes a portion with the largest outer diameter of the nozzle N. There is. On the upper surface of the flange 34, a 2D code 38 is attached as an identifier for recognizing the unique information of the nozzle N. The 2D code 38 indicates the ID of the nozzle N as a type of unique information, and the ID is used for individual management of the nozzle N.

  Although only one type is shown in the figure, there are a plurality of types of nozzles N that differ from one another in size and shape, and even with the present placement machine 10, several types of nozzles N that differ in size are operated It is possible to attach to 16 and in the mounting machine 10, depending on the component P to be held by suction, it is possible to automatically replace these several types of nozzles. Incidentally, the nozzle N used differs depending on the electric circuit to be manufactured (the one in which the component P is mounted on the substrate S). Further, the plurality of nozzles N used in the mounting machine 10 are disposed in the nozzle tray 50 provided in the mounting machine 10 beside the component supply device 16 in a state of being mounted on the nozzle tray NT.

  The nozzle tray (hereinafter sometimes referred to simply as “tray”) NT functions as a nozzle placement device for placing the nozzles N, and as shown in FIG. There is. Specifically, the tray NT is configured to include the base plate 60 and the cover plate 62 covering the upper surface of the base plate 60, and the cover plate 62 can be slidable to a certain extent with respect to the base plate 60. There is. 3A shows the cover plate 62 shifted relative to the base plate 60, and FIG. 3B shows the cover plate 62 just superimposed on the base plate 60. As shown in FIG. The cover plate 62 is slidable between positions in each of the two states.

  Referring to FIG. 3C which is a cross sectional view and FIG. 3D which is a partial cross sectional view showing a state in which the nozzle N is mounted, the base plate 60 has a mounting portion. Twelve mounting holes 64 are provided. Specifically, two types of nozzles N having different sizes can be mounted on the tray NT, and four mounting holes 64 for mounting the large-sized nozzles N and a small-sized nozzle Four mounting holes 64 for mounting N are provided. The mounting hole 64 is a stepped hole in which the dimensions of the inner peripheral wall differ in depth, and the step surface 66 is a surface on which the flange 34 of the nozzle N is mounted. The inner diameter of the mounting hole 64 on the upper surface of the base plate 60, that is, the maximum inner diameter is slightly larger than the outer diameter of the flange 34, and the mounting hole 64 The outer periphery of the flange 34 is configured to be regulated. Further, the depth to the step surface is a depth at which the flange 34 of the nozzle N placed in the placement hole 64 does not interfere with the cover plate 62. Incidentally, the nozzle N shown in the figure has a flange 34 thinner than the depth to the step surface, and in the state where the nozzle N is placed in the placement hole 64, the upper surface of the flange 34 is the tray NT. It does not protrude from the upper surface of the base plate 60. As can be seen from FIG. 2, the flange 34 is provided with a notch 68 at its outer periphery, which engages with a short pin 69 erected on the step surface 66. The notches 68 and the pins 69 make it possible to mount the nozzle N only in a specific direction, and prevent the nozzle N from rotating in a state of being mounted on the tray NT.

  On the other hand, the cover plate 62 is also provided with an extraction hole 70 corresponding to the mounting hole 64 of the base plate 60. The hole 70 is formed of a circular hole 72 having a circular shape and a slot 74 extending from one side of the circular hole 72. The inner diameter of each circular hole 72 is approximately equal to the maximum inner diameter of the corresponding mounting hole 64. The width of the slot portion 74 is made somewhat larger than the outer diameter of the body cylinder 30 of the nozzle N placed in the corresponding placement hole 64. In the state shown in FIG. 3B, the centers of the circular holes 72 of the extraction holes 70 corresponding to the centers of the mounting holes 64 coincide with each other, and the whole of the mounting holes 64 can be seen from above. On the other hand, in the state shown in FIG. 3A, the centers of the mounting holes 64 and the centers of the arcs present at the tips of the slot portions 74 of the corresponding through holes 70 substantially coincide with each other. , I can only see a part from above. Since the two states are such states, the state of FIG. 3 (b) is hereinafter referred to as the “loading hole open state” and the state of FIG. 3 (a) is referred to as the “loading hole closed state” for convenience. I will say.

  In the placement hole open state, placement of the nozzle N in the placement hole 64 and removal from the placement hole 64 can be performed. On the other hand, when the nozzle N is placed in the placement hole 64, the placement hole is in the closed state, so that the body cylinder 30 of the nozzle N passes through the slot 74 of the extraction hole 70 and the upper surface of the flange 34 Many parts of the cover plate are covered by the cover plate 62. In this state, the nozzle N is prevented from being separated from the placement hole 64. As for the prevention of the detachment of the nozzles N, the tray NT is provided with a mechanism including the cover plate 62, that is, a nozzle detachment prevention mechanism called a so-called shutter mechanism.

  The cover plate 62 is biased by a spring (not shown) so that the placement hole is in a closed state, and the placement hole is opened by sliding the cover plate 62 with a force exceeding the biasing force of the spring. It becomes a state. This sliding is performed by a cover sliding mechanism disposed at the nozzle station 50, which is not shown. Mounting the nozzle N on the operating axis of the mounting head 18, removing the nozzle N from the operating axis, and replacing the attached nozzle N with another nozzle N The mounting hole open state is realized and performed.

  The tray NT is detachably attachable to the nozzle station 50. For example, when starting to manufacture a certain electric circuit, the tray NT on which the nozzle N is previously mounted can be set in the nozzle station 50, and For example, when finishing the production of a certain electric circuit, the nozzle N used can be removed from the nozzle station 50 together with the tray NT. Therefore, the tray NT greatly contributes to speeding up of the setting change of the mounting machine 10 or the like. In the tray NT, at one corner of the base plate 60, a 2D code 76 as an identifier for recognizing unique information of the tray NT is attached. The 2D code 76 indicates the ID of the tray NT as a type of unique information, and the ID is used for individual management of the tray NT.

  The suction nozzle N and the tray NT described above are used in the mounting machine 10. The management machine of the embodiment shown below is not intended only for the nozzle N used in the mounting machine 10, but also targets the nozzle N used for other mounting machines. Also, the tray NT is an example of the tray NT used in the mounting machine 10, and the mounting machine 10 can also use other trays NT that differ in type. Furthermore, the tray NT used differs depending on the mounting machine. As will be described later, the manager of the embodiment also targets the nozzles N placed on or placed on another tray NT.

[B] Overall Configuration of Nozzle Management Machine As the external appearance is shown in FIG. 4, the management machine 80 of the embodiment is generally in the shape of a rectangular parallelepiped and has a relatively compact size. A drawer 82, which will be described in detail later, is provided on the front surface (the left surface in the figure) of the management device 80. Moreover, the controller 84 as a control apparatus of the said management machine 80 is attached to the front upper part. The controller 84 is configured using a computer as a main component, and includes an input / output device such as a display 86, an operation key 88, and a switch 90. The management device 80 in a state in which the exterior panel has been removed is shown in FIG. 5 and the management device 80 seen from the viewpoint of the reverse direction is shown in FIG. The internal structure of the management device 80 will be described below with reference to those figures. Incidentally, the left side in FIG. 5 is the front of the management device 80, and the right side is the rear of the management device 80.

  The management device 80 is configured by combining several devices. Specifically, the nozzle accommodation device 100 for accommodating the nozzle N in a state of being placed on the nozzle pallet (hereinafter may be simply referred to as "pallet") on the rear side is the front of the nozzle accommodation device 100. On the left side, tray accommodation devices 102 for accommodating trays NT are respectively disposed. On the other hand, on the front side of the management machine 80, a pair of nozzles that perform some treatment (hereinafter, may be referred to as "paired nozzle treatment") on the nozzles N housed or housed in the nozzle housing device 102 respectively. As a treatment execution device, a nozzle transfer device 104, a first nozzle inspection device 106, a second nozzle inspection device 108, and a nozzle cleaning device 110 are disposed in order from the top.

  Although the description here will be briefly made, the nozzle transfer device 104 is a device for transferring the nozzle N between the tray NT and the pallet, and the first nozzle inspection device 106 inspects two inspection items. More specifically, an inspection on the state of the tip of the nozzle N (tip state inspection) and an inspection on the force necessary for retracting the tip of the nozzle N (retraction force inspection) are performed. The inspection device 108 performs inspection of two inspection items, specifically, inspection of the flow rate of air passing through the nozzle N (passage flow inspection), and the 2D code 38 as an identifier attached to the flange 34 of the nozzle N. Perform a check on the reading of the (identifier read check). The nozzle cleaning device 110 is a device that cleans the nozzle N with high pressure water. Further, a nozzle drying device 112 for drying the nozzle N cleaned by the nozzle cleaning device 110 is disposed between the nozzle accommodation device 100 and the nozzle cleaning device 110.

  The transfer of the nozzles N between each of the pair of nozzle treatment execution devices and the nozzle accommodation device 100 is performed by each of the nozzle transfer devices corresponding to each of the pair of nozzle treatment execution devices. Since the transfer of the nozzles N is performed in a state of being placed on the above-described pallet, each nozzle transfer device is a pallet transfer device. Specifically, the first pallet transfer device 114 which transfers pallets between the nozzle transfer device 104 and the nozzle housing device 100, and the pallet which is transferred between the first nozzle inspection device 106 and the nozzle housing device 100 2) Pallet transfer device, third pallet transfer device 118 for transferring pallets between second nozzle inspection device 108 and nozzle housing device 100, and pallet transfer between nozzle cleaning device 110 and nozzle housing device 100 The fourth pallet transfer devices 120 are respectively disposed. On the other hand, between the nozzle transfer device 104 and the tray storage device 102, a tray transfer device 122 for transferring the tray NT between them is disposed. In addition, a drive source unit 124 incorporating a power supply, drive circuit, air compressor, high pressure pump and the like for each device described above is disposed at the lower front side of the management machine 10.

In the following description, the nozzle storage device, the tray storage device, the nozzle transfer device, the nozzle inspection device, the nozzle cleaning device, the nozzle drying device, the pallet transfer device, and the tray transfer device are simply referred to as “storage device”, respectively. In some cases, the terms "storage device", "transfer device", "inspection device", "washing device", "drying device", "transfer device", and "transfer device" are used. In the following description, FIG. 7 mainly showing the transfer device 104, FIG. 8 mainly showing the first inspection device 106, and FIG. 9 mainly showing the second inspection device 108, and the cleaning device 110 and the drying device 112. It will be performed with reference also to FIGS. 10 and 11 shown as the center.

[C] Nozzle accommodation device The nozzle accommodation device 100 has a plurality of pallet carriers (hereinafter may be simply referred to as "carriers") 130 in which the above-mentioned pallets are respectively accommodated, and a carrier circulating mechanism for circulating the carriers 130. A pallet moving device (hereinafter referred to as “the circulating mechanism”) which moves a plurality of pallets in the storage device 130 by the plurality of carriers 130 and the circulating mechanism 132. , And may be simply referred to as "mobile device" 134). Hereinafter, the storage device 100 will be described by being divided into the pallet and the moving device 134.

i) Nozzle pallet The pallet NP functions as a nozzle mounting device for mounting the nozzles N, and as shown in FIG. 12, like the tray NT described above, the base plate 140 and the upper surface of the base plate 140 And a cover reput 142 covering the cover. 12 (a) shows the cover plate 142 shifted relative to the base plate 140, and FIG. 12 (b) shows the cover plate 142 just superimposed on the base plate 140. FIG. The cover plate 142 is slidable between the two positions.

  If the management machine 80 treats five types of nozzles N shown in FIG. 13 as objects of management for convenience, all five types of nozzles N can be placed on the pallet NP. It is assumed. The five types of nozzles N are different from each other in shape, and can be classified into three by the outer diameter of the flange 34. FIG. 13 is a view of the nozzles N as viewed from above, and specifically, the nozzles Na of the small size shown in FIG. 13 (a), and the intermediate sizes shown in FIGS. 13 (b) and 13 (c). The nozzles Nb and Nc, and the large nozzles Nd and Ne shown in FIGS. 13 (d) and 13 (e), respectively, can be classified. Similar to the case of the tray NT, the base plate 140 is provided with placement holes 144 each of which constitutes a placement portion. Specifically, there are provided 24 mounting holes 144a in which the small-sized nozzles N are mounted, and 15 mounting holes 144b in which the large-sized nozzles N are mounted, and the mounting holes 144a are provided. The nozzle Na is mounted on the mounting hole 114b, and the nozzles Nb, Nc, Nd and Ne are mounted on the mounting hole 114b.

  The placement hole 144a is the same as the placement hole 64 of the tray NT described above, and has one step surface 146, and thus the description thereof is omitted here. The placement hole 144b will be described in detail with reference to FIG. 14 showing a state in which the nozzle N is placed. The placement hole 144b is a stepped hole in which the dimensions of the inner peripheral wall differ in depth. Is a stepped hole having two step surfaces 146a and 146b. As shown in FIG. 14 (a), the large sized nozzles Nd, Ne are mounted on the step surface 146a located above, while as shown in FIG. 14 (b), the medium sized nozzles Nb, Nc. Is placed on the lower step surface 146b. That is, any step surface 146a, 146b is also the surface on which the nozzle N is placed, and the placement hole 144b has different inner dimensions in the inner circumferential wall in the depth direction and different in the outer diameter of the flange 34 from each other. The flanges 34 of the plurality of types of nozzles N are configured to fit at positions of different depths. Further, the placement holes 144b are configured to regulate the radial displacement (displacement) of the nozzles N in any of the nozzles N, and any step surface 146a, 146b is configured. Also, in order to prevent the nozzle N from rotating, a pin 148 with which the notch 68 of the flange 34 engages is erected.

  Note that, instead of the mounting hole 144b having a shape having the plurality of step surfaces 146 described above, for example, as shown in FIG. 14C, the inner dimension of the inner circumferential wall gradually decreases in the axial direction, that is, in the depth direction. It is also possible to adopt such a tapered hole mounting hole 144c. Even with such mounting holes 144c, the flanges 34 of the plurality of types of nozzles N different in the outer diameter of the flange 34 are configured to fit at portions of different depths. Incidentally, the figure shows a state in which the nozzles Nb and Nc of medium size are mounted, and when the nozzles Nd and Ne of large size are mounted, they are mounted at a position above the nozzles Nb and Nc. It will be

  On the other hand, like the tray NT, the cover plate 142 is provided with extraction holes 154a and 154b having circular hole portions 150 and slot portions 152 respectively corresponding to the mounting holes 144a and 144b of the base plate 140. There is. In the state shown in FIG. 13 (b), the centers of the circular holes 150 of the extraction holes 154 corresponding to the centers of the respective mounting holes 144 coincide with each other, and the mounting hole open state described above is realized. In the state shown in FIG. 13 (a), the centers of the mounting holes 144 and the centers of the arcs present at the tips of the slot portions 74 of the corresponding extraction holes 154 substantially coincide with each other, and the mounting hole closed state is realized. Ru. From such a structure, the pallet NP is also provided with a mechanism configured to include the cover plate 142, that is, a so-called shutter mechanism so as to prevent detachment of the nozzles N. By the way, like the tray NT, the cover plate 142 is biased by a spring (not shown) so that the placement hole is in a closed state, and the cover plate 142 is slid by a force exceeding the biasing force of the spring. As a result, the mounting hole is opened.

  Similar to the tray NT, the pallet NP is provided with a 2D code 156 as an identifier for recognizing unique information of the pallet NP at one corner of the base plate 140. The 2D code 156 indicates the ID of the pallet NT as a type of unique information, and the ID is used for individual management of the tray NT.

  In the pallet NP, a reference nozzle 158 is fixed at one corner of the base plate 140 and a reference pipe 160 passes through the base plate 140 beside the reference nozzle 158. The reference nozzle 158 is an actual nozzle N, specifically the above-mentioned nozzle Nb. On the other hand, the reference pipe 160 is a simulation that imitates a part of the nozzle N, specifically, the body cylinder 30 and the adsorption pipe 32. The reference nozzle 158 and the reference pipe 160 function as reference objects referred to in the inspection by the first inspection device 106 and the second inspection device 108 described above, and the setting of the inspection reference by the inspection devices 106 and 108 and the reference It is used for at least one of calibration and verification of the inspection devices 106 and 108. The specific use will be described in detail later, but the reference nozzle 158 is referred to in the retraction necessity test by the first inspection device 106 and the identifier reading inspection by the second inspection device, while the reference pipe 160 is It is referred to in the tip state inspection by the first inspection device 106 and the passing flow inspection by the second inspection device 108. Incidentally, both the reference nozzle 158 and the reference pipe 160 are configured to obtain good inspection results in the inspection referred to as the reference object. In the present management machine 80, although the reference object is provided on the pallet NP, for example, at a position where the inspection can be performed by the first inspection device 106 or the second inspection device 108, It may be provided in an apparatus or the like.

ii) Pallet Moving Device As described above, the pallet moving device 134 is configured to include a plurality of pallet carriers 130 and a carrier circulating mechanism 132. The carrier 130 is generally in the form of a channel, that is, a member having a U-shaped cross section, and the opening in the channel is directed downward. The carrier 130 has a pair of rails 170 attached at its lower end, in particular at the inside of the lower end of the two flanges in the channel configuration, and the pallet NP described above by its pair of rails 170 It is held so as to be extractable forward and to be insertable from the front.

  The carrier circulation mechanism 132 has a pair of sprocket shafts 172 disposed at the top and the bottom, as can be seen from FIGS. 5 and 6. The sprocket shaft 172 is disposed to extend in the front-rear direction, and has sprockets 174 at each of the front and rear end portions. A chain 176 is wound between the front sprockets 174 of each pair of sprocket shafts 172 and between the rear sprockets 174. On each of the front side chain 176 and the rear side chain 176, a plurality of brackets 178 are extended outward in a posture perpendicular to each of the front side brackets 176, and a tip of each front side bracket 178; One carrier 130 is pivotally supported by the corresponding respective tips of the rear side brackets 178. One of the pair of sprocket shafts 172 is used as a drive shaft, and by rotating one of the pair of sprocket shafts 172, each bracket 178 is rotated. Thereby, the carriers 130 supported by the brackets 178 are circulated at the same time. Incidentally, the pallet NP is held by the carrier 130 in a posture in which the surface on which the nozzle N is placed is upward, that is, the posture in which the carver plate 142 is positioned upward, and the support structure of the carrier 130 by the bracket 178 Is configured such that the pallet NP maintains its posture regardless of the carrier position.

  Since the carrier circulating mechanism 132 has the structure as described above, the pallet moving device 134 simultaneously operates the plurality of pallets NP along the constant path parallel to one vertical plane in the containing device 100. That is, it is set as the pallet circulation system which carries out circulation movement together. In addition, in the moving device 134, as the stop position of each pallet NP, a plurality of setting positions corresponding to each of the above-mentioned paired nozzle treatment execution devices 104 to 108 correspond to the first to fourth pallet transfer devices 114 to 120. Multiple setting positions are set. This set position can be considered as a station in the circulation of the pallet NP, and the management device 80 controls the pallet NP which has been moved to a specific station and stopped, corresponds to that station. The four transfer devices 114 to 120 are configured to transfer to the corresponding paired nozzle treatment execution devices 104 to 108. By the way, when the carrier 130 not holding the pallet NP is located at a specific station, the corresponding to-nozzle treatment execution device 104 ~ is controlled by the first to fourth transfer devices 114 to 120 corresponding to that station. It is possible to transport the pallet NP from 108 to its carrier 130.

  The transfer of the nozzles N between each of the pair of nozzle treatment execution devices and the nozzle accommodation device 100 is performed by a nozzle transfer device corresponding to each of the pair of nozzle treatment execution devices. The transfer of the nozzles N is performed in a state of being placed on the above-described pallet NP, so the nozzle transfer device is a pallet transfer device, and specifically, the nozzle transfer device 104 and the nozzle accommodation device 100 A first pallet transfer device 114 for transferring pallets between the two, a second pallet transfer device for transferring pallets between the first nozzle inspection device 106 and the nozzle accommodation device 100, a second nozzle inspection device 108 and the nozzle accommodation device 100 A third pallet transfer device 118 for transferring the pallets between them and a fourth pallet transfer device 120 for transferring the pallets between the nozzle cleaning device 110 and the nozzle accommodation device 100 are disposed. In addition, it can be considered that the nozzle transfer device has a function of transferring one or more nozzles N as one nozzle group, and each of the nozzle transfer devices 104, which is a pair nozzle treatment execution device, The one-nozzle inspection device 106, the second nozzle inspection device 108, and the nozzle cleaning device 110 perform treatment on the nozzles N included in one nozzle group transferred by the nozzle transfer device, as described in detail later. It is being done.

[D] Tray Containing Device The tray containing device 102 is a device for containing the nozzle tray NT described above, and is a tray moving device similar to the pallet moving device 134 of the nozzle containing device 100 (hereinafter simply referred to as “moving device”. The mobile device 190 is configured as a main component. Similar to the pallet transfer device 134, the transfer device 190 has a plurality of tray carriers (hereinafter may be simply referred to as "carriers") 192 in which the trays NT are stored, respectively, and a carrier circulating mechanism for circulating the carriers 192 ( Hereinafter, it may be simply referred to as “circulation mechanism” 194).

  The carrier 192 is generally in the form of a channel, that is, a member having a U-shaped cross section in the same manner as the pallet carrier 130 described above, and the opening in the channel is directed downward. It is arranged. Similar to the pallet carrier 130, the carrier 192 has a pair of rails 196 attached at its lower end, in particular at the inside of the lower end of the two flanges in the channel shape, and the tray NT has its one pair The rail 196 holds the nozzle N so that the surface on which the nozzle N is mounted is directed upward, is extractable forward, and is insertable from the front.

  Similar to the circulation mechanism 132 of the pallet moving device 134, as shown in FIGS. 5 and 6, the circulation mechanism 194 is extended to a pair of sprocket shafts, a pair of chains, and each chain having two sprockets in front and behind. The plurality of brackets 192 are configured to cause the carriers 192 supported by the brackets to orbit at the same time. The tray moving device 190 having the circulation mechanism 194 having such a structure, like the pallet moving device 134 described above, causes the plurality of pallets NP to be in a fixed path parallel to one vertical plane in the containing device 102. It is considered to be a tray circulating device which circulates along, simultaneously, that is, together. In the tray moving device 190, one setting position corresponding to the above-described nozzle transfer device 104, that is, one setting position corresponding to the tray transfer device 122, is set as the stop position of each tray NT. The tray NT moved to the station, that is, the tray NT moved to the station and stopped is transferred to the transfer device 104 by the tray transfer device 122, and the carrier 192 not holding the tray NT is located at the station. If so, the tray transfer device 122 can transfer the tray NT from the transfer device 104 to the carrier 192 thereof.

[E] Nozzle Transfer Device In the management device 80, the nozzle N is transferred from the pallet NP to the tray NT in order to set the nozzle N stored in the storage device 100 to the tray NT. In order to accommodate the nozzles N in the apparatus 100, the nozzles N are transferred from the tray NT to the pallet NP. When the former is referred to as “setting transfer” and the latter is referred to as “storage transfer”, the setting transfer and storage transfer are performed by the above-described nozzle transfer device 104 located on the front upper side of the management device 80. Done by

  As shown in FIG. 7, the drawer 82 (in a slightly drawn state in the figure) included in the management device 80 has a table 200, and the tray NT to be used for the transfer is placed on the table 200. It is set to one of the fixed stage 202 and the movable stage 204 provided. The fixed stage 202 is fixed to the table 200, and the movable stage 204 is supported by the table 200 slidably in the front-rear direction by a stage slide mechanism 206 provided on the table 200. Incidentally, in the figure, the fixed stage 202 shows a state in which the tray NT is set, and the movable stage 204 shows a state in which the tray NT is not set. Further, in the drawing, the movable stage 204 is shown at the set position which is the front end in the movement range, that is, in the state of being located at the transfer position. Furthermore, the structure regarding holding of the tray NT of each of the stages 202 and 204 and the nozzle N placed on the tray NT are not shown for the sake of simplicity. A cover sliding mechanism (not shown) for sliding the cover plate 62 as a mechanism for bringing the set tray NT into the above-described placement hole opening state is provided for each of the fixed stage 202 and the movable stage 204. It is provided.

  With the drawer 82 drawn out to either the fixed stage 202 or the movable stage 204, the operator can set the tray NT and can remove the set tray NT. Further, in a state where the movable stage 204 is positioned at the rear end position in the movement range, the transfer of the tray NT is possible with the tray accommodating device 102. Specifically, the tray NT is transferred between the movable stage 204 and the carrier 192 located at the above-described set position, that is, the transfer device corresponding station, in the storage device 102. Incidentally, the description of the tray transfer mechanism, which is a mechanism for transferring the tray NT, is omitted. In addition, the movable stage 204, the stage slide mechanism 206, and the tray transfer mechanism, between the set position on the table 2000 and the storage device 102, in short, between the transfer device 104 and the storage device 102. The above-described tray transfer device 122 for transferring the tray NT is configured.

  As can be understood from the above description, the management device 80 not only enables setting transfer to the tray NT brought in from the outside and set on the fixed stage 202 or the movable stage 204, but also allows accommodation The setting transfer to the tray NT accommodated in the apparatus 102 is also possible. Furthermore, the tray NT in which the setting of the nozzles N is completed, and the tray NT brought in from the outside with the nozzles N placed thereon can be accommodated in the accommodation device 102.

  On the other hand, the pallet NP to be provided for setting transfer and storage transfer is from the setting position corresponding to the transfer device 104 in the nozzle storage device 100, that is, from the carrier 130 positioned at the transfer device corresponding station, The first pallet transfer device 114 (the structure will be described later) transfers the nozzle N to a set position at which the transfer device 104 can transfer the nozzle N, that is, to the transfer position. The position where the pallet NP is located in the figure is the transfer position. The pallets NP to be provided for setting transfer and storage transfer are transferred by the first transfer device 114 to the carrier 130 located at the transfer device corresponding station in the storage device 100 after the transfer is completed. To be transported. Incidentally, in the drawing, the nozzles N placed on the pallet NP are omitted for the sake of simplification. A pallet fixing mechanism (not shown) for fixing the pallet NP located at the transfer position at that position is provided in the first transfer device 114, and the pallet NP located at the transfer position is described above. A cover sliding mechanism (not shown) for sliding the cover plate 142 is provided on the table 200 as a mechanism for bringing the mounting hole into the open state.

  The transfer device 104 is disposed above the table 200, and the transfer head 210 and the transfer head 210 are arranged in the left-right direction, the front-rear direction, and the up-down direction (hereinafter referred to as "X direction" and "Y direction", respectively). , And the head moving device 212 having three head moving mechanisms for moving in the “Z direction”. As understood with reference to FIGS. 5 and 6 in addition to FIG. 7, in these figures, the X direction moving mechanism for moving the transfer head 210 in the X direction and the Y direction moving mechanism for moving in the Y direction. Is omitted and only the Z direction moving mechanism 214 is shown. Incidentally, the X-direction moving mechanism and the Y-direction moving mechanism constitute an XY type moving device which is installed at the upper part of the housing of the management machine 80 and moves the slide 216 along a plane perpendicular to the Z direction. The Z-direction moving mechanism 214 is installed on the slide 216.

  At the lower portion of the transfer head 210, a holding chuck 218 as a nozzle holder for holding the nozzle N to be transferred, and 2D codes 38 and 76 attached to the nozzle N, the tray NT, and the pallet NP, respectively. , Camera 156 as an identifier reader for reading. Further, the transfer head 210 has a chuck rotation mechanism for rotating the holding chuck 218 about its axis. Incidentally, the head moving device 212 functions as a holder moving device for moving the holding chuck 218 which is a nozzle holder.

  The basic operation of the transfer device 104 will be briefly described. When at least one of the setting transfer and the storage transfer is performed, the transfer head 210 is moved by the head moving device 212, and the camera 220 is moved. Thus, at least one of the 2D code 76 attached to the tray NT and the 2D code 156 attached to the pallet NP is imaged. Then, the transfer head 210 is moved above the pallet NP or tray NT as the transfer source by the head moving device 212, and the 2D code 38 of the nozzle N to be transferred is imaged by the camera 220, The nozzle N is held by the holding chuck 218, and then the transfer head 210 is moved above the tray NT or pallet NP to be transferred by the head moving device 212, and the held nozzle N is held by the holding chuck 218. , And placed in a specific or optional placement hole 64, 144 of the tray NT or pallet NP.

  On the table 200, a mounting plate 220 such as a base plate 140 of the pallet NP, more specifically, a mounting plate 222 having a number of mounting holes, is installed. For example, when setting the nozzles N on the tray NT or storing the nozzles N in the storage device 100, the nozzles N are temporarily set. In addition, on the table 200, a defective box 224 is removably installed as a nozzle N judged to be defective based on the results of the inspection of the various inspection items, that is, a defective nozzle indweller for detaining the defective nozzle. ing. As can be seen from the figure, the defect box 224 is divided into four spaces 226, and each of the four spaces 226 is an indwelling portion for distinguishing and placing a defect nozzle. The use of the defective box 224 will be described in detail later, but the transportation of the defective nozzle to the defective box 224 is performed after the setting of the nozzle N to the tray NT or regardless of the setting. It is performed by 104. Therefore, the transfer device 104 functions as a defective nozzle carrier device.

[F] First Nozzle Inspection Device The first nozzle inspection device 106 is located below the nozzle transfer device 104, and as described above, the inspection of two inspection items, specifically, the tip state inspection And a device that performs a back-up force check. Referring to FIG. 8, the setting position in the above-mentioned storage device 100, that is, the pallet NP positioned at the first inspection device corresponding station is the second pallet transfer device 116 (for the structure, After being transported to the inspection position by the after-mentioned), the tip state inspection and the necessary reverse inspection for the nozzles N placed on the pallet NP are performed by the first inspection device 106, both from below the nozzles N. It will be. The position of the pallet NP shown in the drawing is the inspection position, and the second transfer device 116 is provided with a pallet fixing mechanism (not shown) for fixing the pallet NP at the inspection position. Incidentally, in the figure, the nozzles N placed on the pallet NP are omitted for the sake of simplification.

The first inspection apparatus 106 includes an inspection unit 235 including a base 230, a camera device 232 and a load measuring device 234 fixed on the base 230, and a unit movement for moving the inspection unit 235. The inspection unit 235 moves in the space below the pallet NP located at the inspection position. The camera device 232 includes a camera body 238, a lens 239, and a ring light 240 disposed so as to surround the lens 239 as a light source. The load measuring device 234 mainly includes the load cell 242. It is configured as an element. The unit moving device 236 includes a movable beam 246 supported by a pair of beams 244 forming a part of a housing of the controller 80 and a belt drive type Y direction moving mechanism 248 for moving the movable beam 246 in the Y direction. And an X direction moving mechanism 252 for moving the slide 250 supported by the movable beam 246 in the X direction, and fixed to the slide 250 to support the inspection unit 235 on the base 230 and move the inspection unit 235 in the Z direction And a Z-direction moving mechanism 254. In summary, according to the first inspection device 106, both the tip state inspection and the backward necessary force inspection are performed on the tip side of the nozzle N, and are the main components for performing each inspection The camera device 232 and the load measuring device 234 are disposed in the space existing on the tip end side of the nozzle N, and are configured to be moved by the unit moving device 236 which is one moving device.

  In the tip state inspection by the first inspection device 106, as shown in FIG. 15A, the position where the inspection unit 235 is positioned directly below the nozzle N to be inspected by the unit moving device 236, the lens 239 of the camera device 232. Be moved to Specifically, the position of the suction tube 32 of the nozzle N in the Z direction can be recognized from the unique information of the nozzle N, and the inspection unit 235 is positioned such that the lens 239 is away from the tip of the suction tube 32 by a set distance. It is done. In that state, the tip of the nozzle N, that is, the suction pipe 32 is imaged by the camera device 232.

  The nozzle N shown in FIG. 15 (a) is a nozzle N whose shape of the suction pipe 32 is normal, and the image taken by the camera device 232 of the suction pipe 32 of the nozzle N is as shown in FIG. It becomes. On the other hand, FIGS. 15 (c) to 15 (e) respectively show the nozzles N having the “curvature”, “tip chipping” and “tip chipping” of the suction pipe 32, respectively. The photographed images of the tube 32 are as shown in FIGS. 5 (f) to 5 (g). In the tip state inspection, whether or not the tip shape abnormality such as “curvature”, “tip missing”, “tip tip collapse” has occurred in the nozzle N is confirmed based on the imaging data of the nozzle N by the camera device 232 Also, although not shown, "adhesion of foreign matter" and "adhesion of dirt" to the tip portion are also confirmed. The nozzle N in which the tip portion shape abnormality occurs and the nozzle N in which foreign matter or dirt is attached to the tip portion are determined as defective nozzles. Although the details will be described later, the camera unit 232 is fixed to the above-mentioned pallet NP each time an abnormality in the state of the end portion of any of the nozzles N is confirmed. The image of the tip of the reference pipe 160 is imaged, and based on the imaging data of the tip of the reference pipe 160, it is confirmed that there is no abnormality in the state of the tip. The nozzle N is identified as a defective nozzle. That is, the reference pipe 160 as a reference object is used for the test of the first inspection device 106, more specifically, the post-test.

  On the other hand, in the backward necessary force inspection by the first inspection device 106, as shown in FIG. 16, the inspection unit 235 positions the center of the load cell 242 of the load measuring device 234 just below the nozzle N to be inspected by the unit moving device 236. Moved to the desired position. At that position, the inspection unit 235 is raised by a set distance based on the unique information of the nozzle N. Specifically, the load measuring device 234 is raised to a position where the suction pipe 32 of the nozzle N is retracted with respect to the barrel 30 by a certain distance.

As described above, the suction pipe 32 is urged in the direction of advancing from the body cylinder 30 by the spring, and when the load measuring device 234 is raised, the tip of the suction pipe 32 is on the upper surface of the load cell 242 When in contact, in that state, the load cell 242 receives a load corresponding to the biasing force of the spring. The load cell 242 measures its load. The biasing force by the spring can be recognized from the specific information of the nozzle N, and when the load cell 242 detects a load exceeding the biasing force, the force necessary for the suction tube 32 to retract is too large. . For example, the adsorption pipe 32 is difficult to be drawn into the body cylinder 30 due to contamination of the nozzle N in the nozzle N, breakage of the body cylinder 30, or the like, and in this case, the necessary backward force becomes excessive. If the required backward force exceeds the threshold power set based on the above-mentioned specific information, it is determined that the necessary backward force is excessive and it is determined that the nozzle N is a defective nozzle. In addition, when performing a necessary reverse force test on the nozzles N placed on one pallet NP, the load on the above-mentioned reference nozzle 158 is measured prior to the test, and the load based on the measured load is measured. Calibration of the load cell 242, that is, adjustment is performed to make the value of the load measured by the load cell 242 equal to the actual value. That is, the reference nozzle 158 as the reference object is used for calibration of the load measuring device 234 performed as preparation processing for the backward necessary force inspection by the first inspection device 106, in other words, for calibration of the first inspection device 106. .

  Note that the above-mentioned tip state inspection and the above-mentioned necessary backward force inspection by the first inspection device 106 may be performed on all the nozzles N placed on one pallet NP, for some of the nozzles N. You may only go there. Also, both of these two tests may be performed, or only one of them may be performed. After the inspection of the mounted nozzles N is completed, the pallet NP, which has been positioned at the inspection position, is positioned by the second transfer device 116 at the first inspection device corresponding station in the storage device 100. Is transferred to the carrier 130.

[G] Second Nozzle Inspection Device The second nozzle inspection device 108 is located below the first nozzle inspection device 106, and as described above, inspects two inspection items, specifically, the passing flow rate inspection And an apparatus for performing an identifier reading check. Referring to FIG. 9, the setting position in the above-mentioned storage device 100, that is, the pallet NP positioned at the second inspection device corresponding station is the third pallet transfer device 118 (for the structure, After being transported to the inspection position by the after-mentioned), the passing flow inspection and the identifier reading inspection for the nozzles N placed on the pallet NP are both performed by the second inspection device 108 from above the nozzles N. The position of the pallet NP shown in the drawing is the inspection position, and the third transfer device 118 is provided with a pallet fixing mechanism (not shown) for fixing the pallet NP at the inspection position. Incidentally, in the figure, the nozzles N placed on the pallet NP are omitted for the sake of simplification.

  The second inspection device 108 includes an inspection head 270 and a head moving device 272 for moving the inspection head 270 along a plane parallel to the top surface of the pallet NP above the pallet NP. On the inspection head 270, an air feeding device 274 and a camera 276 as an identifier reader are provided in parallel. The air feeding device 274 has an air joint 278 connected to the upper end of the body cylinder 30 which is the base end of the nozzle N, and compressed air is fed from the air joint 278 to the nozzle N. Above the air joint 278, an air pressure sensor 280 for measuring the air pressure of the feeding path of the compressed air to be fed is disposed integrally with the air joint 278. In addition, the air feeding device 274 has a joint lifting mechanism 282 for lifting and lowering the air joint 278, and the air joint 278 is lifted and lowered relative to the inspection head 270 by the joint lifting and lowering mechanism 282. The head moving device 272 includes a movable beam 284 supported by a pair of beams 244 described in relation to the first inspection device 106 and a belt drive type Y direction moving mechanism 286 for moving the movable beam 284 in the Y direction. And an X-direction moving mechanism 290 for moving the slide 288 supported by the movable beam 284 in the X direction. In summary, according to the second inspection device 108, both the passing flow inspection and the identifier reading inspection are performed on the proximal end side of the nozzle N, and are air feeding which is a main component for performing each inspection. The feeder 274 and the camera 276 are disposed in the space existing on the proximal end side of the nozzle N, and are configured to be moved by the head moving device 272 which is one moving device.

  In the passing flow rate inspection by the second inspection device 108, the inspection head 270 is moved by the head moving device 272 to a position where the air joint 278 is located directly above the nozzle to be inspected. In that state, the air joint 278 is lowered by the joint lift mechanism 282 so as to be connected to the nozzle N. As shown in FIG. 17A, in the state where the air joint 278 is connected to the nozzle N, the air feeding device 274 feeds compressed air to the nozzle N. The normal nozzle N is allowed to pass air with low resistance to ensure a sufficient flow rate, and the air pressure measured by the air pressure sensor 280 has a relatively low value. On the other hand, for example, when the nozzle N is “clogged”, the passage resistance to air passing through the nozzle N becomes large, and a sufficient flow rate can not be secured. In this situation, the air pressure measured by the air pressure sensor 280 will be a relatively high value. Considering that, in the passing flow rate inspection, when the air pressure measured by the air pressure sensor 280 becomes higher than the threshold pressure, it is determined that the nozzle N is “clogged” and the nozzle N is It is determined that the nozzle is defective. That is, in this passing flow rate inspection, instead of directly measuring the flow rate of air, “clogging” of the nozzle N is recognized by measuring the pressure on the base end side of the nozzle N. In place of the air pressure sensor 280, a flow meter (flow rate sensor) may be provided to directly measure the flow rate of the passing air, and the presence or absence of "clogging" may be determined based on the measurement result.

  The compressed air fed to the nozzle N is supplied to the air feeding device 274 from a compressor (not shown) disposed in the above-mentioned drive source unit 124. For example, the output of the compressor Depending on the pressure, the air pressure measured by the air pressure sensor 280 changes. That is, the air pressure will change depending on the environmental conditions associated with the second inspection device 108. In consideration of this, it is desirable to set the threshold pressure in accordance with the environmental conditions. In this management machine 80, prior to the passing flow rate inspection of the nozzle N, compressed air is fed by the air feeding device 274 to the reference pipe 160 fixed to the pallet NP, at which time it is measured by the air pressure sensor 280 The above threshold pressure is set based on the air pressure. That is, the reference pipe 160 as the reference object is used to set the reference of the inspection performed as a preparation process for the passing flow inspection by the second inspection device 108.

  In the identifier reading inspection by the second inspection device 108, the inspection head 270 is located at a position where the camera 276 is located directly above the 2D code 38 which is an identifier attached to the flange 34 of the nozzle N to be inspected by the head moving device 272. It is moved. In that state, the 2D code 38 is imaged by the camera 276. Incidentally, an image obtained by imaging is as shown in FIG. In the identifier reading inspection, the ID of the nozzle N is recognized based on the image data obtained by the imaging, and when the ID can not be recognized, the nozzle N is determined to be a defective nozzle. Since the ID may not be recognized even if the camera 276 malfunctions or the like, the management device 80 attaches the flange 34 of the reference nozzle 158 fixed to the pallet NP prior to the reading of the 2D code 38 of the nozzle N. The 2D code 38 is captured by the camera 276, and it is confirmed that the identifier reading function of the second inspection apparatus 108 is sufficient based on the image data obtained by the imaging, and the function is sufficient. The identifier reading inspection of the nozzle N is performed on condition of. That is, the reference nozzle 158 which is the reference object is used for the test of the second inspection apparatus 108, that is, the pre-test.

  The above-mentioned passing flow rate inspection by the second inspection device 108 and the above-mentioned identifier reading inspection may be performed on all the nozzles N placed on one pallet NP, and only on some of the nozzles N. You may go. Also, both of these two tests may be performed, or only one of them may be performed. After the inspection of the mounted nozzles N is completed, the pallet NP, which has been positioned at the inspection position, is positioned by the second transfer device 116 at the station corresponding to the second inspection device in the storage device 100. Is transferred to the carrier 130.

[H] Nozzle Cleaning Device and Nozzle Drying Device The nozzle cleaning device 110 is located below the second nozzle inspection device 108, and the nozzle drying device 112 is located between the cleaning device 110 and the above-mentioned storage device 100. doing. The management device 80 is provided with a housing 300 in association with the cleaning device 110 and the drying device 112. FIG. 10 shows the cleaning device 110 and the drying device 112 in the presence of the housing 300, and FIG. 11 shows the cleaning device 110 and the drying device 112 with the housing 300 removed. As described with reference to these drawings, the pallet NP set at the setting position in the storage device 100, that is, the cleaning device corresponding station, is the fourth pallet transfer device 120 described above (the structure will be described later). After being transported to the cleaning position by this, the cleaning by the cleaning device 110 is performed on the nozzles N placed on the pallet NP at that position. Then, after the cleaning, while the pallet NP is transferred to the cleaning device corresponding station by the fourth pallet transfer device 120, the nozzle N placed on the pallet NP and the cleaning is completed by the drying device 112 Drying takes place. The position of the pallet NP shown in the figure is the cleaning position, and the fourth transfer device 120 is provided with a pallet fixing mechanism (not shown) for fixing the pallet NP at the inspection position. Incidentally, in the figure, the nozzles N placed on the pallet NP are omitted for the sake of simplification.

  The cleaning apparatus 110 includes an upper cleaning unit 302 for cleaning the nozzle N from above and a lower cleaning unit 304 for cleaning the nozzle N from below, which have substantially the same structure. It is assumed. Each of the units 302 and 304 includes a support frame 306 attached to the housing 300, an injection nozzle 308 supported by the support frame 306, and a Y-direction moving mechanism 310 for moving the injection nozzle 308 in the Y direction. It is comprised including. The injection nozzle 308 is an elongated rectangular solid disposed so as to extend in the X direction over the entire width of the pallet NP, and a plurality of injection holes 312 are provided on the surface facing the pallet NP. The Y-direction moving mechanism 310 is configured to move the injection nozzle 308 in the Y-direction along the entire length of the pallet NP. High pressure water pressurized by a high pressure pump (not shown) installed in the above-described drive source unit 124 is supplied to the injection nozzle 308, and the high pressure water is loaded from the injection holes 312 on the pallet NP. It is jetted toward the installed nozzle N.

  The drying device 112 is configured to include a plurality of air ducts 314 disposed at the upper and lower portions of the housing 300. Hot air (hot air) is fed to the air flow tubes 314 from a blower (not shown) via a heater (not shown) disposed in the drive source unit 124. Each of the plurality of air flow tubes 314 is provided with a plurality of discharge holes, and the warm air is discharged from the discharge holes toward the nozzle N placed on the pallet NP. The nozzle N is dried by the released warm air.

  The housing 300 described above is installed to prevent adverse effects of high pressure water sprayed by the cleaning device 110 and warm air emitted by the drying device 112 on other devices and the like. The housing 300 is provided on the front side with a transparent window 316 for looking inside, and on the rear side, the shielding plate 318 and the shielding plate 318 are opened only when the pallet NP passes through. The shield plate opening and closing mechanism 320 is provided.

  As shown in FIG. 18, the cleaning by the cleaning device 110 is performed on the nozzles N placed on the pallet NP fixed at the above-described cleaning position. Specifically, the upper cleaning unit 302 sprays high-pressure water from above the nozzle N, that is, from the base end side of the nozzle N, and mainly cleans the upper surfaces of the body cylinder 30, the flange 34, and the like. On the other hand, the lower cleaning unit 304 mainly jets high-pressure water from below the nozzle N, that is, from the tip side of the nozzle N, and mainly cleans the adsorption pipe 32 and the like. In order to obtain a high cleaning effect, the direction of the injection hole 312 is adjusted so that the injection nozzle 308 injects high pressure water not only directly below or directly above but also in various directions. The jet nozzle 308 has a relatively narrow width and can jet high-pressure water only to a part of the nozzle row aligned in the X direction on the pallet NP. At 310, the pallet NP is moved along the entire length in the Y direction. By the way, the injection nozzle 308 is not a two-fluid type nozzle, that is, a nozzle for injecting water dispersedly by compressed air, but injects water pressurized by a pump directly from the injection hole 312 by the pressure of the water. A nozzle configured to Therefore, the cleaning device 110 is considered to have a high cleaning capability.

  The drying device 112 is performed by air blowing using warm air when the fourth transfer device 120 transfers the pallet NP present at the inspection position to the cleaning device corresponding station 130 after the cleaning of the nozzles N is completed. Therefore, the pallet NP can be returned to the storage device 100 in at least a part of the time required for drying, and the time loss in the series of operations such as washing and drying is small. The warm air is a wind having a relatively high speed, and the pressure of the warm air blows off the water droplets adhering to the nozzle N, and the temperature of the warm air dries the water remaining on the nozzle N It is done.

[I] Pallet transfer devices The first to fourth pallet transfer devices 114 to 120, each of which is a nozzle transfer device, are pallets between the containing device 100 and the corresponding paired-nozzle treatment execution device as described above. It is an apparatus for transferring NPs. The first, second and third transfer devices 114, 116 and 118 have substantially the same structure, and the fourth transfer device 120 has some of the first, second and third transfer devices 114 and 116. , 118 have a different structure.

  Referring to FIGS. 5 to 7, each of the first, second, and third transfer devices 114, 116, and 118 is a pair disposed to extend forward from the storage device 100. The pallets NP are supported on the pair of rails 330 so as to straddle them, and slide on the pair of rails 330. In addition, each of the first, second, and third transfer devices 114, 116, 118 moves the pallet NP between the carrier 130 of the storage device 100 and the pair of rails 330 and on the pair of rails 330. The moving mechanism 332 is provided. The moving mechanism 332 includes a guide 334 disposed on the right side of the management device 80 so as to extend forward and backward, and a transport unit 336 supported by the guide 334. The transport unit 336 is configured to be self-propelled along the guide 334 while being supported by the guide 334. Although not shown, the transport unit 336 has an extension which extends to the middle of the pair of rails 330 below the pair of rails 330, and at the tip of the extension, A clamp for gripping the rear end of the pallet NP is provided.

When one carrier 130 of the containing device 100 is located at the above-mentioned set position, that is, a station corresponding to the pair nozzle treatment performing device, the pair of rails 330 and the pair of rails 170 of the carrier 13 Coinciding with each other, the transport unit 336 can be moved to the rear end of the guide 334, with its extension passing below the carrier 130. With the transport unit 336 positioned at the rear end, the clamp described above grips the rear end of the pallet NP contained in the carrier 130, and in the gripped state, the transport unit 336 moves to the front end of the guide 334 By doing this, the pallet NP is transported to the set position described above. After transfer, the clamping by the clamp is released. When transporting the pallet NP located at the set position to the carrier 130, the reverse of the above operation is performed. Incidentally, the setting position means the transfer position, the inspection position, and the cleaning position described above. As described above, each of the first, second, and third transfer devices 114, 116, and 118 has the above-described pallet fixing mechanism for fixing the pallet NP located at the set position to a pair of rails. have.

  The fourth transfer device 120 is different from the first, second, and third transfer devices 114, 116, and 118 in the structure of the guide and the transfer unit. Although detailed description is omitted, the fourth transfer device 120 adopts the guide 338 and the transfer unit 340 having a structure suitable for transferring the pallet NP in the housing 300 as described above. . The structure and operation of the other parts of the fourth transfer device 120 are the same as those of the first, second and third transfer devices 114, 116 and 118, and the description thereof will be omitted. Although each of the first, second, and third transfer devices 114, 116, and 118 is illustrated as having two transfer units 336 in FIG. 5, the transfer unit 336 is the front end of the guide. This is for the sake of convenience to indicate both the position at the rear and the position at the rear, and in fact, the transport unit 336 has only one.

[J] Operations Performed by Nozzle Management Machine The management machine 80 configured as described above performs various operations under the control of the controller 84 which is a control device. Specifically, the controller 84 executes various programs to perform operations in accordance with the executed programs. Also, those operations are performed based on the management information, that is, the information on the nozzles N and tray NT that are created or acquired in managing the accommodated nozzles N and tray NT. In the following, after the management information is illustrated and described, some operations performed by the management device 80 are illustrated and these are sequentially described.

i) Management Information The controller 84 stores “accommodating nozzle information” as management information on the accommodated nozzles N. The housing nozzle information can be schematically represented as the housing nozzle information table of FIG. 19, and simply speaking, what nozzle N is in which mounting hole 144 of which pallet NP housed in which carrier 130 Is information indicating whether or not is accommodated. In other words, the unique information of the accommodated nozzle N is information of an aspect associated with the accommodation position in the accommodation device 100. In the following description, the accommodated nozzle information is treated as being stored in the form of the above table, and based on the table, the accommodated nozzle information will be specifically described.

  In the accommodation nozzle information table shown in the figure, one row and one row corresponds to one placement hole 144 of one pallet NP, that is, to each one of the accommodated nozzles N. In addition, each row of the table corresponds to various information on the nozzles N. Specifically, [Carrier No.] is the number of the carrier 130 in which the pallet NP on which the nozzle N is placed is accommodated, and so on in "# 1", "# 2", etc. The numbers up to the number of carriers 130 included in the containing device 100 are stored. [Pallet ID] is the ID of the pallet NP as unique information of the pallet NP on which the nozzle N is placed. [Placement hole No] is the number of the placement hole 144 as the placement part on which the nozzle N is placed, corresponding to the small placement hole 144a shown in FIG. The numbers “B01” to “B15” are stored in correspondence with the large placement holes 144b. Incidentally, “↓” in the column of “carrier No.” and “pallet ID” indicates for convenience that the same content as the upper row is stored.

  The [Nozzle ID] and the row to the right of that are the unique information of the nozzle N. When describing one by one, [nozzle ID] is the ID of the nozzle N. The fact that [nozzle ID] is "-" means that the ID of the nozzle N can not be recognized, and that "?" Means that the ID of the nozzle N is not recognized I mean. [Nozzle type] represents the type of nozzle N, that is, the type. Specifically, the model of each of the nozzles Na to Ne shown in FIG. 13 is stored. “(...)” Means that the type of nozzle has been estimated. [Washing] indicates whether or not the nozzle N has been washed by the washing device 110, "は" indicates that it is being washed, and "●" indicates that it has not yet been washed. , Respectively.

  [Defect cause] indicates the cause of the defect, that is, in the inspection of the above four items, when the nozzle N is determined to be a defect nozzle, it is determined as the defect nozzle. If it is determined that the nozzle is defective in any of the four items of inspection, the defective nozzle in the four rows of [identifier read], [passing flow rate], [tip state], and [recession force required] An "x" is stored in the column corresponding to the item determined to be present. “O” means that the nozzle was not determined to be a defective nozzle in the inspection of each item, and if neither “O” nor “X” is stored in each row, the inspection has not been performed yet Means

  In addition, the row which is not described at all in the column of [nozzle ID] to [cleaning] is the placement hole 144 corresponding to the row, that is, the placement of the pallet NP accommodated in a certain carrier 130 The hole 144 shows that the nozzle N is not placed.

  Further, the controller 84 stores “accommodation tray information” as management information on the accommodated tray NT. The storage tray information can be schematically represented as the storage tray information table of FIG. 20, and simply stated, it is information indicating which tray N is stored in which carrier 192. In other words, like the accommodation nozzle information, the unique information of the accommodated tray NT is information of an aspect associated with the accommodation position in the accommodation device 102. In the following description, similarly to the accommodation nozzle information, the accommodation tray information is treated as being stored in the form of the table, and the accommodation tray information will be specifically described based on the table.

  In the storage tray information table shown in the figure, one row and one row corresponds to one carrier 192 of the storage device 102, that is, to each one of the stored trays NT. Further, each row of the table corresponds to various information regarding the tray NT. Specifically, [Carrier No.] is the number of the carrier 192 in which the tray NT is stored, and the carrier 192 included in the storage device 102 in the condition of “# 1”, “# 2”,. Numbers up to a number are stored. [Tray ID] is the ID of the tray NT as one of the unique information of the tray NT. The [tray type] represents the type of the tray NT, that is, the type. [Defective] indicates whether or not the tray NT is defective, and "x" means that the tray is a defective tray. [SET] indicates whether or not the nozzle N is set in the accommodated tray NT, “◎” indicates that the nozzle N is set in the tray NT, and the blank indicates an empty tray It indicates that it is NT. Incidentally, a row not described at all in the [tray ID] and [tray type] columns indicates that the tray NT is not accommodated in the carrier 192 corresponding to the row.

Furthermore, the controller 84 uses “nozzle setting information” as management information on the setting of the nozzles N on the tray NT. The nozzle setting information is shown in FIG.
The nozzle setting information table can be schematically represented, and simply stated, it is information indicating which nozzle N is placed in which placement hole 64 of which tray NT. [Placement hole No] is the number of the placement hole 64 as the placement part on which the nozzle N is placed, and the figure shows information on the tray NT shown in FIG. 3 as an example. Specifically, the numbers “a1” to “a8” correspond to the relatively large placement holes 64 corresponding to the relatively small placement holes 64 shown in FIG. It is numbered ".

  The setting of the nozzle N on the pallet NT is started based on the nozzle setting information in which [tray ID] and [nozzle ID] are not described, that is, only [tray type] and [nozzle type] are shown. When the setting is completed, [tray ID] and [nozzle ID] are attached.

  The management information described above is updated, reset, and the like in some operations by the management device 80 described below. In the following description, the operations will be described based on flowcharts of programs related to operations, but in the flowcharts, the notation of processes relating to the update, deletion, addition, etc. is omitted, and the descriptions of those processes are the flowcharts. I will carry out in the explanation of each step.

ii) Nozzle accommodation operation The nozzle accommodation operation is an operation for accommodating the nozzle N placed on the tray NT in the accommodation device 100 for the purpose of cleaning, inspection, storage, etc. of the nozzle N used in the placement machine, for example. The operation is performed by the controller 84 executing the nozzle accommodation program whose flowchart is shown in FIG. After the operator of the management machine 80 opens the drawer 82 described above and sets the tray NT on which the nozzle N is placed on the fixed stage 204 or the movable stage 204 described above, a command to start the operation is issued, The operation is started by inputting using the operation key 88 of the controller 84. When the tray NT is set on the fixed stage 202, the operation is completed with the tray NT remaining after the nozzle N is accommodated. On the other hand, when the tray NT is set on the movable stage 204, whether or not the tray NT is accommodated in the accommodating device 102 after the nozzle N is accommodated is selected based on the input operation using the operation key 88 of the operator. The operation is completed according to its selection.

  In the process according to the nozzle accommodation program, in step 1 (hereinafter, the step is abbreviated as “S”), a stage in which the tray NT is fixed and the placement hole opening state is realized, that is, the tray NT is set. Whether the stage is the fixed stage 202 or the movable stage 204 is identified. Next, at S2, the transfer head 210 is moved above the specified stage, and the 2D code 76 attached to the tray NT is imaged by the camera 220 to acquire the ID of the tray NT. In the subsequent S3, the type of the tray NT is identified based on the acquired ID of the tray NT. Incidentally, the ID information includes information on the type of tray NT. The controller 84 stores data (hereinafter, may be referred to as “tray specification data”) in which specifications such as the number and position of the placement holes 64 of the tray NT are associated with the type of the tray. After the identification, in S4, the 2D code 38 of each nozzle N placed on the tray NT is imaged by the camera 220 according to the specifications of the tray NT grasped based on the model, and the ID of each nozzle N Is acquired. In the subsequent S5, the type of each nozzle N is identified based on the acquired ID. Similar to the tray NT, the ID information of the nozzle N includes information on the type of the nozzle N. In addition, when the ID of the nozzle NT can not be acquired due to dirt or the like of the 2D mark 38, the above-described nozzle setting information created earlier, that is, nozzle setting information when setting the nozzle N on the tray NT of that ID. Is used, and based on the information, the type of the nozzle N which can not obtain an ID is estimated.

  Next, in S6, one pallet NP on which the nozzles N are placed when the nozzles N are accommodated in the accommodation device 100 is a plurality of pallets NP that the accommodation device 100 has, based on the accommodation nozzle information described above. It is selected from Although detailed description of the algorithm for this selection is omitted, in S6, conditions such as the presence of the empty placement hole 144 and the fact that the nozzle N after cleaning has not been placed are satisfied. Among them, one pallet NP is selected based on the viewpoint that the management device 80 can perform some operations as efficiently as possible. In the following S7, the pallet transfer device 134 and the first pallet transfer device 114 are operated to fix the selected pallet NP at the above-described transfer position, and the placement hole open state is realized. That is, the pallet NP is set.

  After setting the pallet NP, prior to the placement of the nozzles N from the tray NT to the pallet NP, a treatment for defective nozzles is performed. Specifically, in S8, whether or not there is a defective nozzle in the set pallet NP is confirmed based on the contained nozzle information, and if there is a defective nozzle, in S9, based on the contained nozzle information, The above-mentioned defect factor for one defective nozzle is identified, and the defective nozzle is transported to the defective box 224 by the transfer device 104 in S10. As described above, the defective box 224 is provided with four spaces 226 partitioned corresponding to the four causes of the defect, and the defective nozzle is identified as the identified defect when carrying the defective nozzle. It is detained in one space 226 corresponding to the factor. Then, when the transportation is completed, the information on the defective nozzle is deleted from the storage nozzle information. Although it is conceivable that there are two or more defect factors for one defective nozzle, in that case, the defective nozzles correspond to the defect factors of the leftmost column in the table shown in FIG. It is detained in the space 226. The processes of S8 to S10 are repeatedly executed until there is no defective nozzle in the set pallet NP, and if there is no defective nozzle or if there is no defective nozzle from the beginning of the set, the next process is performed. S11 is executed.

  In S11, one nozzle N transferable to the set pallet NP is selected from the nozzles N placed in the set tray NT according to the set rule, and in S12, the transfer device At 104, the selected nozzle N is transferred to one of the mounting holes 144 which are empty in the set pallet NP. That is, the above-mentioned accommodation transfer is performed. It is determined according to the set rule based on the above-mentioned accommodation nozzle information, the size of the nozzle N to be placed, etc. which placement hole 144 is placed. At the time of storage transfer of the one nozzle N, the ID for the nozzle N acquired in S4 and the type for the nozzle specified in S5 are stored as storage nozzle information. That is, the stored nozzle information is updated. Specifically, in the row corresponding to one of the rows of the table shown in FIG. 19, that is, the row corresponding to the placement hole 144 in which the nozzle N is placed, the above-mentioned ID, the above-mentioned type, the nozzle N is not cleaned It is written together with the fact that

After the storage transfer of one nozzle N, it is determined in S13 whether the storage transfer of all the nozzles N placed on the set tray NT is completed. If the storage and transfer of all the nozzles N is not completed, it is determined in S14 whether or not the transfer of the nozzles N to the set pallet NP is to be continued. If it is possible to continue the transfer of the nozzle N to the pallet NP, the process returns to S11, and the transfer of the next nozzle N to the pallet NP is performed. For example, if it is determined that the transfer to the pallet NP can not be continued in S14 because the empty mounting hole 144 does not exist, the pallet NP is moved by the first transfer device 114 in S15. , And is returned to the storage device 100, returns to S6, and the next pallet NP is selected. After the treatment for the set of the pallet NP and the defective nozzle placed on the pallet NP is performed, the housing and transfer of the nozzle N to the pallet NP is started. When it is determined that the storage and transfer of all the nozzles N placed on the set tray NT is completed in S13, the set pallet NP is moved by the first transfer device 114 in S16. , Is returned to the storage device 100.

  After storage and transfer of all the nozzles N is completed and the pallet NP is returned, it is determined in S17 whether or not the empty tray NT is to be stored in the tray storage device 102. This determination is made based on which of the fixed stage 202 and the movable stage 204 the tray NT is set as described above. If it is determined that the tray NT is accommodated in the accommodation device 102, the empty tray NT being set is accommodated in the accommodation device 102 by the tray transfer device 122 in S18, and the nozzle accommodation operation is completed. Do. On the other hand, when it is determined in S17 that the empty tray NT is not accommodated in the accommodation device 102, the setting of the tray NT is canceled, and the nozzle accommodation operation is completed. In addition, prior to the storage transfer of the nozzle NT, the 2D code 76 attached to the tray NT is imaged by the camera 22 provided in the transfer device 104, and the ID of the tray NT is acquired, and the tray During storage of the NT in the storage device 102, the ID of the tray NT and the type of the tray NT specified based on the ID are related to the carrier 192 to be stored, and the above-mentioned storage tray is associated. Added to the information.

iii) Nozzle setting operation The nozzle setting operation is an operation for setting the necessary nozzles N in the tray NT for the purpose of preparation of use of the nozzles N in the mounting machine, etc., and the operation is shown in the flowchart in FIG. It is performed by the controller 84 executing the nozzle setting program. In the nozzle setting operation, which of the fixed stage 202 and the movable stage 204 is used to set the nozzle N, the tray NT accommodated in the accommodation device 102 and the tray set by the operator of the management device 80 It is possible to select whether to use the tray NT or to set the tray NT in the storage device 102, and the selection can be made by selecting the operation key 88 of the controller 84 by the operator. It is performed based on the operation used.

  In the process according to the nozzle setting program, first, in S21, the tray NT provided for setting based on the nozzle setting information transmitted or input to the management device 80 or the nozzle setting information already stored. The type and the type of each nozzle N are specified. This nozzle setting information can be considered as information in which [tray ID] and [nozzle ID] are not written in the table shown in FIG.

  Next, in S22, it is specified whether the stage to be set is the fixed stage 202 or the movable stage 204, and if it is determined in S23 that the specified stage is the movable stage 204, the process proceeds to S24. Whether or not to use the tray NT accommodated in the accommodating device 102 is determined. If it is determined that the tray NT stored in the storage device 102 is to be used, one tray NT is selected in S25 based on the nozzle setting information and the storage tray information described above, and the selection is made in S26. The tray NT thus transferred is transferred by the tray transfer device 122 to the loading position and set at the transfer position. On the other hand, if it is determined in S23 that the tray NT set by the operator is to be used, or if it is determined in S22 that the setting is performed on the movable stage 202, the tray NT is already set by the operator. , Selection and setting of tray NT is not performed.

  Next, in S27, it is determined whether the set tray NT is good. The 2D code 76 attached to the set tray NT is imaged by the camera 220 provided in the transfer device 104, and the ID of the tray NT is acquired. If possible, it is determined that the tray NT has a defect. In the set tray NT, the above-mentioned cover sliding mechanism is driven to realize the placement hole open state, but when the operation of the cover sliding mechanism at that time is not smooth, the tray It is determined that there is a problem with NT.

  In the process according to the nozzle setting program, when there is a failure in the set tray NT, a process is performed to replace the tray NT with a good tray NT. In this tray replacement process, first, if it is determined in S27 that there is a problem with the set tray NT, in S28, which of the fixed stage 202 and the movable stage 24 the tray NT is set to It is judged. If it is determined that the tray NT is set on the fixed stage 202, stage change processing is performed in S29 while leaving the tray NT on the fixed stage 202 in order to prohibit the use of the tray NT. That is, a process of changing the stage used for setting the nozzle N from the fixed stage 202 to the movable stage 204 is performed. On the other hand, when it is determined that the tray NT is set on the movable stage 204, the tray NT is returned by the transfer device 122 and stored in the storage device 102 in S30. At this time, the ID and type of the tray NT are related to the carrier 192 in which the tray NT is accommodated, and the fact that the tray NT is a defective tray is added to the above-mentioned accommodation tray information or the accommodation Tray information is updated. After stage change or tray NT accommodation, another tray NT is selected based on the nozzle setting information and the accommodation tray information, and the selected another tray NT is selected in S26. Is set. If it is determined in S27 that the set tray NT is good, the acquired ID of the tray NT is added to the nozzle setting information.

  In a state where a good tray NT is set on the stage, in S31, one pallet NP provided for setting transfer is based on the setting information and the above-mentioned accommodation nozzle information as the nozzle setting information and accommodation nozzle information. Based on the selection, one of the plurality of pallets NP included in the storage device 100 is selected. Although detailed description of the algorithm for this selection is omitted, in S31, at least one nozzle N to be transferred for setting is placed, and inspection of all items for all the nozzles N placed is One pallet NP is selected based on the viewpoint that the setting of the nozzles N can be performed as efficiently as possible from among those satisfying the conditions such as completion. Then, in the subsequent S32, the selected pallet NP is transferred by the first transfer device 114 and set at the above-described transfer position.

  After the setting of the pallet NP, prior to the placement of the nozzle N from the pallet NP to the tray NT, the treatment for defective nozzles similar to the nozzle accommodation operation described above is performed in S33 to S35. The details of this procedure are described above, so the description is omitted here. If S34 and S35 are executed and there is no defective nozzle, or if there is no defective nozzle in the pallet from the beginning when the pallet NP is set, the following S36 is executed.

  In S36, among the nozzles N placed on the set pallet NP, one nozzle that can be placed on the set tray NT is selected based on the storage nozzle information and the nozzle setting information, and In S37, the selected nozzle N is transferred to a specific loading hole 64 of the set tray NT based on the nozzle setting information. That is, the above-described setting transfer is performed. At the time of this setting transfer, the information on the transferred nozzle N is deleted from the storage nozzle information, and the ID of the nozzle N is added to the nozzle setting information. In this setting transfer, the ID of the nozzle N to be transferred is obtained by the camera 220 provided in the transfer device 104, and there is a difference between the obtained ID and the ID stored as the storage nozzle information. A process of confirming absence may be performed, or the acquired ID may be added as it is to the nozzle setting information without performing the process of confirming the absence.

  After setting transfer for one nozzle N, in S38, it is determined whether setting transfer for all the planned nozzles N is completed. If the setting transfer of all the nozzles N is not completed, it is determined in S39 whether the transfer of the nozzles N from the set pallet NP is continued. If the transfer of the nozzles N from the pallet NP can be continued, the process returns to step S36, and the transfer of the next nozzle N from the pallet NP to the next tray NT is performed. For example, if it is determined that the transfer from the pallet NP can not be continued in S39 because the nozzle N which can be transferred does not exist in the pallet NP, the pallet NP is not selected in S40. The transfer device 114 returns it to the storage device 100, returns to S31, and selects the next pallet NP. After the treatment for the set of the pallet NP and the defective nozzle placed on the pallet NP is executed, the setting transfer of the nozzle N from the pallet NP is started. When it is determined in S39 that the setting transfer of all the scheduled nozzles N is completed, the pallet NP being set is returned to the storage device 100 by the first transfer device 114 in S41. Ru.

  After the setting transfer of all the nozzles N is completed and the pallet NP is returned, it is determined in S42 whether or not the tray NT in which the nozzles N are set is accommodated in the tray accommodation device 102. If it is determined that the tray NT is to be accommodated in the accommodation device 102, the tray transfer device 122 accommodates the tray NT which has been set in the accommodation device 102 in S43, and the nozzle accommodation operation is completed. On the other hand, when it is determined in S42 that the tray NT is not accommodated in the accommodation device 102, the setting of the tray NT is canceled and the tray NT is left on the fixed stage 102 or the movable stage 204. The nozzle accommodation operation is completed. In addition, prior to setting transfer of the nozzle NT, the 2D code 76 attached to the tray NT is imaged by the camera 22 provided in the transfer device 104, and the ID of the tray NT is acquired. On storage of the NT in the storage device 102, the ID of that tray NT is related to the carrier 192 to be stored, as is the fact that the tray NT is the tray NT on which the setting of the nozzles N has been completed. Added to the storage tray information. On the other hand, when the operation ends while the tray NT whose setting is completed is left on the movable stage 204, the information about the tray NT included in the accommodation tray information is deleted.

iv) Nozzle re-setting operation The nozzle re-setting operation replaces the nozzles N by setting the tray NT on which the nozzles N have already been set to the stage, and another nozzle having the same type as the nozzles N This is an operation for placing N. In other words, it is an operation of creating nozzle setting information based on the set tray NT, and replacing the nozzles based on the information. The nozzle setting operation is performed by the controller 84 executing a nozzle resetting program whose flow chart is shown in FIGS. In the nozzle setting operation, it is selected whether to set the stage for setting the nozzle N to either the fixed stage 202 or the movable stage 204, or to store the tray NT for which resetting has been completed in the storage device 102 or not. The selection is made based on the operation by the operator using the operation key 88 of the controller 84.

  In the nozzle resetting operation, simply speaking, the nozzle accommodation operation is performed in the first half. Specifically, the nozzle N placed on the set tray NT is accommodated in the accommodation device 100 by the process according to the first half of the nozzle resetting program whose flowchart is shown in FIG. Since the process performed in S51 to S66 of the program is substantially the same as the process performed in S1 to S16 of the above-described nozzle accommodation program, the description of those processes is omitted, but is specified in S53 and S55. Based on the type of tray NT and the type of nozzle N, nozzle setting information is created. Also in this nozzle resetting operation, in S58 to S60, the treatment for the defective nozzle is performed.

  After the nozzle NT placed on the tray NT is accommodated in the accommodating device 100, another nozzle accommodated in the accommodating device 100 is processed by a process according to the second half of the nozzle resetting program whose flowchart is shown in FIG. In principle, N is set to the tray NT on which the nozzles N have been placed. The processing performed in the flow starting from S67 of the program to S85 is substantially the same as the processing performed in the flow starting from S27 of the nozzle setting program described above to S43, so the description of those processing I omit it. In the nozzle resetting operation, the treatment for the defective nozzle is performed also in S75 to S77, and the above-described processing for replacing the tray NT is performed also in this operation and in S67 to S72.

v) Nozzle Cleaning Operation The nozzle cleaning operation is an operation for cleaning and drying the nozzles N placed on one pallet NP in the accommodation device 100 along with the pallet NP. Since the details of the cleaning and drying of the nozzle N have been described above, the flow of the operation will be mainly described here. Incidentally, this operation and the three operations of the first and second inspection operations to be described later are all independently executed with respect to any of the other operations described in this embodiment. That is, regardless of whether or not another operation is being performed, the set conditions are satisfied for the nozzles N placed on the pallet NP other than the pallet NP that is the target of the other operation. As long as any of the three operations can be performed.

  The nozzle cleaning operation is performed by executing a nozzle cleaning program whose flow chart is shown in FIG. In the process according to this program, first, in S101, a pallet NP to be a target of the operation is specified. Specifically, one of the pallets NP satisfying the condition that the number of the non-cleaned nozzles N is set or more is considered as the target pallet in consideration of the efficiency of the operation and other operations. It is determined. In the subsequent S102, the pallet NP is transferred by the fourth pallet transfer device 118 to the above-described cleaning position. Then, in S103, in the state of being positioned at that position, the nozzles N placed on the pallet NP are cleaned by the nozzle cleaning device 110 together with the pallet NP.

  After the end of the cleaning by the cleaning device 110, the speed at which the fourth pallet transfer device 118 returns the pallet NP is determined in S104. As described above, during the return of the pallet NP by the fourth transfer device 118, drying of the nozzles N placed on the pallet NP is performed. Therefore, in S104, the speed of the return is determined based on the environmental temperature, the temperature of the warm air, and the like, in order to secure the time necessary for sufficient drying. After the determination, the nozzles N placed on the pallet NP are dried by the nozzle drying device 112 for each pallet NP while the pallet NP is returned at the determined return speed in S105. . In addition, after completion | finish of drying, the above-mentioned accommodation nozzle information is updated about the nozzle N wash | cleaned. Specifically, in the table shown in FIG. 19, “◎”, which is a symbol indicating that cleaning has been performed, is attached to all the nozzles N placed on the pallet NP, and all inspections are performed. An update is made to treat as an unfinished state.

vi) First nozzle inspection operation In the first nozzle inspection operation, for the nozzles N placed on one pallet NP in the storage device 100, the tip state inspection and the backward necessity inspection by the first inspection device 106 This operation is performed by executing the first nozzle inspection program whose flow chart is shown in FIG. The details of the leading end state inspection and the backward force inspection are described above, so here, the flow of the operation will be mainly described.

  In the process according to the first nozzle inspection program, first, at S111, a pallet NP to be subjected to the operation is specified. Specifically, one of the pallets NP satisfying the conditions such as completion of cleaning of all the mounted nozzles N is considered as a target pallet in consideration of the efficiency of the operation and other operations. It is determined as After the target pallet is determined, the pallet NP is transferred to the inspection position by the second pallet transfer device 116 in S112.

  For each of the nozzles N placed on the pallet NP transferred to the inspection position, the tip state inspection is performed prior to the backward force inspection. The tip state inspection is sequentially performed for each of the nozzles N1. First, in S113, a tip state inspection on one nozzle N is performed. Specifically, as described above, the unit moving device 236 moves the lens 239 of the camera device 232 to a position located immediately below the nozzle N to be inspected, and the tip of the nozzle N is the camera Based on the imaging data captured by the device 232 and obtained by the imaging, whether or not the state of the tip is abnormal is confirmed. Specifically, it is confirmed whether or not the nozzle N has a tip shape abnormality such as “curvature”, “tip chipping”, “tip chipping” or “adhesion of foreign matter or dirt”. If it is determined in S114 that the state of the tip portion is recognized to be abnormal based on the result of the confirmation, then in S115 the tip state inspection of the above-mentioned reference pipe 160 fixed to the pallet NP Is executed. Specifically, the tip of the reference pipe 160 is imaged by the camera device 232, and it is determined whether or not the state of the tip of the reference pipe 160 is abnormal based on the imaging data of the tip obtained by the imaging. It is confirmed. As a result of the check, the determination is made in S116, and if the state of the tip of the reference pipe 160 is normal, it is determined in S117 that the nozzle N is a defective nozzle. On the other hand, if the state of the tip end portion of the reference pipe 160 is abnormal, it is determined in S118 that there is an abnormality in the function related to the inspection of the first inspection device 106, and that effect is displayed on the display 86. The determination on the abnormality of the tip state of the nozzle N is not performed, and the subsequent tip state inspection of the other nozzles N is skipped. If it is determined in S114 that the state of the tip portion is normal, or if it is determined that the nozzle is a defective nozzle in S117, the process for S119 is performed for all the nozzles N placed on the pallet NP. The processes after S113 are repeated until the tip state inspection is completed.

As a result of the above series of processing, when it is determined that the nozzle N is normal in the state of the tip end, "o" is in the [tip end state] row of the nozzle N in the accommodation nozzle information shown in FIG. When it is determined that the nozzle is defective with respect to the state of the tip, "x" is attached to the row. If it is determined that there is an abnormality in the function of the first inspection device 106 related to the inspection, the column of [tip state] of all the nozzles N placed on the pallet P is made blank. That is, the nozzles N placed on the pallet NP are all treated as being not subjected to the tip state inspection.

  After the end state inspection, a necessary reverse force inspection is sequentially performed on each one of the nozzles N placed on the pallet NP. In the process according to the program, prior to the retraction requirement test of each nozzle N, the retraction requirement of the above-mentioned reference nozzle 158 fixed to the pallet NP is measured in S120. That is, when retracting the suction pipe 32 of the reference nozzle 158, the load received by the load cell 242 of the load measuring device 234 is measured. Next, in S121, based on the measurement result, adjustment of the load measuring device 234 (for example, the load by the unit moving device 236) so that the value of the load measured by the load cell 242 becomes equal to the actual value. The setting of the rising distance of the measuring device 234 etc.) is performed.

  After the above-described adjustment of the load measuring device 234, first, in S122, a necessary reversing force inspection for one nozzle N is performed. Specifically, after the load cell 242 is positioned below the nozzle N to be measured, the load measuring device 234 is raised by a set distance, and the load received by the load cell 242 at that time is measured. Then, when the load exceeds the threshold force set for the nozzle N, it is determined that the necessary backward force of the nozzle N is excessive. A determination is made in S123 based on the result of the recognition, and when the necessary backward force is excessive, it is determined in S124 that the nozzle N is a defective nozzle. Then, the process after S122 is repeated until the reverse necessary force inspection for all the nozzles N placed on the pallet NP is completed by the process of S125.

  As a result of the above series of processing, when it is determined that the necessary backward force of the nozzle N is normal, “o” is in the column of [required backward force] of the nozzle N in the accommodation nozzle information shown in FIG. If it is determined that the nozzle needs to be a defective nozzle with respect to the required backward force, "x" is attached to each row. After the backward force inspection of all the nozzles N placed on the pallet NP is completed, the pallet NP is returned to the accommodating device 100 by the second transfer device 116 in S126.

vii) Second nozzle inspection operation The second nozzle inspection operation performs an identifier reading inspection by the second inspection device 108 and a passing flow inspection on the nozzles N placed on one pallet NP in the accommodation device 100. The operation is performed by executing a second nozzle inspection program whose flow chart is shown in FIG. Since the details of the identifier reading inspection and the passing flow inspection are described above, the flow of the operation will be mainly described here.

  In the process according to the second nozzle inspection program, first, in S131, the pallet NP to be subjected to the operation is specified. Specifically, one of the pallets NP satisfying the conditions such as completion of cleaning of all the mounted nozzles N is considered as a target pallet in consideration of the efficiency of the operation and other operations. It is determined as After the target pallet is determined, the pallet NP is transferred to the inspection position by the third pallet transfer device 118 in S132.

  For each of the nozzles N placed on the pallet NP transferred to the inspection position, the identifier reading inspection is performed prior to the passing flow inspection. The identifier reading inspection is sequentially performed for each of the nozzles N1 by the camera 276 included in the second inspection device 108. However, prior to the inspection of each nozzle N, first in S133, the reference nozzle fixed to the pallet NP The 2D code 38 attached to the flange 34 of 158 is imaged by the camera 276, and based on the image data obtained by the imaging, it is confirmed that the function regarding the identifier reading inspection of the second inspection apparatus 100 is sufficient Be done. Then, based on the result of the confirmation, determination is made in S134, and under the condition that the function is sufficient, the identifier reading inspection for each nozzle N is executed in S135 and thereafter. Incidentally, when it is confirmed in the determination of S134 that the function related to the identifier reading inspection is insufficient, the effect is displayed on the display 86 and the identifier reading for each of the nozzles N placed on the pallet NP No examination is performed.

  In the identifier reading inspection of one nozzle N in S135, first, the inspection head 270 is moved by the head moving device 272 to a position where the camera 276 is positioned directly above the 2D code 38 attached to the flange 34 of the nozzle N. The 2D code 38 is imaged by the camera 276 in this state. Then, based on the image data obtained by the imaging, it is confirmed whether or not the ID of the nozzle N can be sufficiently recognized. Based on the result of the confirmation, when the determination is made in S136 and the ID can not be read sufficiently from the imaged 2D code 38, that is, when the reading of the 2D code 38 is difficult, the process is performed in S137. It is determined that the nozzle N is a defective nozzle. Then, the process after S135 is repeated until the identifier reading inspection for all the nozzles N placed on the pallet NP is completed by the process of S138.

  As a result of the above-described series of processing, if the 2D code 38 can be sufficiently read, that is, if the nozzle N is normal for identifier reading, the [identifier read] of the nozzle N in the accommodated nozzle information shown in FIG. If it is determined that "o" is in the column and it is determined that the nozzle is a defective nozzle for identifier reading, "x" is attached to the column. If the function of the second inspection apparatus 108 regarding the inspection is determined to be insufficient and the identifier reading inspection for each nozzle N is not performed, the pallet P is placed on the pallet P to reflect the fact in the accommodation nozzle information. The column of [identifier read] of all the arranged nozzles N is made blank. It should be noted that when the 2D code 38 can not be read when storing and transferring the nozzle N, “?” Is attached to the column of “Nozzle ID” and “(...)” Is attached to the column of If it is determined that the ID of the nozzle N in question is sufficiently recognizable by the identifier reading inspection, the ID read in the inspection is written in the column of [nozzle ID], and based on the ID The nozzle type to be identified is written in the [Nozzle Type] column.

  After the identifier reading inspection, the passing flow rate inspection is sequentially performed on each one of the nozzles N placed on the pallet NP, but in the processing according to the program, the passing flow rate inspection of each nozzle N First, in S139, compressed air is supplied to the above-mentioned reference pipe 160 fixed to the pallet NP by the air feeding device 274, and in that state, measurement of air pressure by the air pressure sensor 280 is performed. Next, in S140, based on the measured air pressure, the above-mentioned threshold pressure to be referred to in the passing flow rate inspection of the nozzle N is set.

  After setting the threshold pressure, first, at S141, a passing flow rate inspection for one nozzle N is performed. Specifically, compressed air is supplied to the nozzle N to be inspected by the air feeding device 274, and in that state, measurement of the air pressure by the air pressure sensor 280 is performed. Then, when the measured air pressure is higher than the set threshold value, it is determined that the flow rate of air passing through the nozzle N is insufficient. A determination is made in S142 based on the result of the recognition, and if the passing flow rate is insufficient, it is determined in S143 that the nozzle N is a defective nozzle. And the process after S141 is repeated until the passing flow rate inspection about all the nozzles N mounted in the pallet NP is completed by the process of S144.

  As a result of the above series of processing, when it is determined that the passing flow rate of the nozzle N is normal, “o” is in the passing flow rate column of the nozzle N in the housing nozzle information shown in FIG. If it is determined that the nozzle is a defective nozzle with respect to, "x" is attached to that row. After the passing flow rate inspection of all the nozzles N placed on the pallet NP is completed, the pallet NP is returned to the accommodating device 100 by the third transfer device 118 in S145.

[K] Functional Configuration of Control Device As described above, control of the management device 80 in the embodiment is performed by the controller 84 which is a control device. Specifically, as shown in FIG. 29, the operation of each of the nozzle accommodation device 100 to the tray transfer device 122 is controlled by the controller 84 while exchanging signals and information with them. Then, under the control of the controller 84, the management device 80 performs the various operations described above. In view of the operation, it can be considered that the controller 84 has a plurality of functional units as shown in FIG. 29, that is, a plurality of functional units realized by execution of various programs.

  Describing each of the plurality of functional units in detail, the controller 84 stores the nozzle information as a functional unit for storing the above-mentioned accommodated nozzle information, nozzle setting information, and accommodated tray information, each of which is management information related to the nozzle N. A portion 400 is included. Specifically, a storage medium such as a hard disk included in a computer which is a main component of the controller 84 plays a role of the nozzle information storage unit 400. Then, the management device 80 performs the above-described operation based on the stored management information.

  Further, the controller 84 has six functional units as functional units that control the above-described operations. Specifically, the nozzle accommodation control unit 402 controls the nozzle accommodation operation, the nozzle setting control unit 404 controls the nozzle setting operation, the nozzle resetting control unit 406 controls the nozzle resetting operation, and the nozzle cleaning operation A nozzle cleaning control unit 408 that performs control, a first nozzle inspection control unit 410 that controls the first nozzle inspection operation, and a second nozzle inspection control unit 412 that controls the second nozzle inspection operation are provided. The control units 402 to 412 are function units realized by execution of the above-mentioned nozzle accommodation program, nozzle setting program, nozzle resetting program, nozzle cleaning program, first nozzle inspection program, second nozzle inspection program, respectively. It is.

  Further, the nozzle accommodation control unit 402, the nozzle setting control unit 404, and the nozzle resetting control unit 406 will be described in detail. Each of the control units 404, 406, and 408 has a defective nozzle placed on the pallet NP. A function unit that controls the treatment for transporting the defective nozzle to place the defective nozzle in the corresponding space 226 partitioned in the defective box 224 according to the inspection item determined to be defective. As a defective nozzle transport control unit 414. The defective nozzle conveyance control unit 414 is a functional unit realized by executing any one of S8 to S10, S33 to S35, S58 to S60, and S75 to S77. Further, each of the nozzle setting control unit 404 and the nozzle resetting control unit 406 controls the tray transfer device 122 to store the tray NT when the tray NT is determined to be defective. A tray replacement control unit 416 is provided as a functional unit to be replaced with the tray NT accommodated in the apparatus 102. The tray replacement control unit 416 is a functional unit realized by executing S27 to S30 and any one of S25 to S26, and S67 to S72 that follow.

Furthermore, if the first nozzle inspection control unit 410 and the second nozzle inspection control unit 412 are described in detail, those control units 410 and 412 have a defect in the inspection result of the nozzle N by the nozzle inspection devices 106 and 108, and A reference target reference defective nozzle determination unit 418 is provided as a functional unit that determines that the nozzle N is a defective nozzle on the condition that the inspection result of the reference nozzle 158 or the reference pipe 160 which is the reference target is good. The reference target reference defective nozzle judging unit 418 is a functional unit realized by executing any of S114 to S117 and S134 to S138. In addition, prior to inspection of the nozzle N, each of the control units 410 and 412 sets the reference of inspection by the nozzle inspection device 106 or 108 using the reference nozzle 158 or the reference pipe 160 which is the reference object, or The reference target-based inspection preparation processing unit 420 is provided as a functional unit that performs calibration of the nozzle inspection devices 106 and 108 as preparation processing. The reference subject-based inspection preparation processing unit 420 is a functional unit realized by executing any of S120 and S121, S139 and S140.

10: electrical component mounting machine 18: mounting head N: suction nozzle 30: barrel cylinder [rear end portion] 32: suction pipe [tip portion] 34: flange 36: hooking pin 38: 2D code [identifier] 50: nozzle station NT: nozzle tray 60: base plate 62: cover plate 64: placement hole (placement portion) 66: step surface 76: 2D code [identifier] 80: nozzle management device 84: controller [control device] 100: nozzle accommodation device 102 : Tray accommodation device 104: Nozzle transfer device [pair nozzle treatment execution device] [defective nozzle conveyance device] 106: first nozzle inspection device [pair nozzle treatment execution device] 108: second nozzle inspection device [pair nozzle treatment execution device 110: Nozzle cleaning device (pair nozzle treatment execution device) 112: Nozzle drying device 114: First pallet transfer device [No. Transfer device] 116: second pallet transfer device (nozzle transfer device) 118: third pallet transfer device (nozzle transfer device) 120: fourth pallet transfer device (nozzle transfer device) 122: tray transfer device 134: pallet transfer device [Pallet circulation device] NP: Nozzle pallet 140: Base plate 142: Cover plate 144: Mounting hole (mounting portion) 146: Stepped surface 156: 2D code [identifier] 158: Reference nozzle [Reference object] 160: Reference pipe [ Reference object] [simulated object] 190: tray moving device [tray circulating device] 202: fixed stage 204: movable stage 210: transfer head 212: head moving device [holder moving device] 218: holding chuck [nozzle holder] 220: Camera (identifier reader) 224: Bad box Indwelling device] 226: Space (dwelling part) 232: Camera device 234: Load measuring device 235: Inspection unit 236: Unit moving device 270: Inspection head 272: Head moving device 274: Air feeding device 276: Camera 302: Upper washing Unit 304: Lower cleaning unit 310: Y direction moving mechanism 312: injection hole 314: blast tube 330: rail 332: moving mechanism 334: guide 336: transport unit 338: guide 340: transport unit 400: nozzle information storage unit 402: nozzle Accommodation control unit 404: Nozzle setting control unit 406: Nozzle resetting control unit 408: Nozzle cleaning control unit 410: First nozzle inspection control unit 412: Second nozzle inspection control unit 414: Defective nozzle transport control unit 416: Tray replacement control Part 418: Standards subject Irregular defective nozzle judgment unit 420: Reference object reliance preparation processing unit

Claims (4)

A nozzle management device for managing a suction nozzle used to hold an electric component in an electric component mounting machine, comprising:
A nozzle storage device capable of storing a plurality of suction nozzles;
A nozzle inspection device for inspecting a suction nozzle housed in or housed in the nozzle housing device;
And a defective nozzle placement device for placing a defective nozzle, which is an adsorption nozzle determined to be defective based on the inspection result by the nozzle inspection device.
In the case where the nozzle inspection apparatus is (a) capable of retracting the tip of the suction nozzle against the biasing force after (b) the tip condition inspection which is an inspection regarding the state of the tip of the suction nozzle The apparatus is configured to perform a necessary backward force inspection, which is an inspection regarding the force required to retract the tip of the suction nozzle,
The defective nozzle placement device is
A nozzle management device having a plurality of detention units for detaining a plurality of defective nozzles determined to be defective with respect to one inspection item, corresponding to the inspection items.   The nozzle management device according to claim 1, wherein the nozzle management device further comprises a nozzle cleaning device for cleaning the suction nozzle housed in or housed in the nozzle housing device.   The nozzle management device according to claim 2, wherein the nozzle cleaning device sprays high-pressure water toward the adsorption nozzle to perform cleaning. A nozzle management device for managing a suction nozzle used to hold an electric component in an electric component mounting machine, comprising:
A nozzle storage device capable of storing a plurality of suction nozzles;
A nozzle inspection device for inspecting the suction nozzle housed in or from the nozzle housing device;
(A) The tip state inspection device which performs tip state inspection regarding the state of the tip portion of the suction nozzle from directly below at the tip state inspection position; (b) the tip portion of the suction nozzle is biased Necessary reverse force inspection device which performs reverse necessary force inspection regarding the force required for backward movement of the tip of the suction nozzle in the case where it is made anti-retractable, from the bottom of the necessary reverse force inspection position, (c)
And a moving device capable of moving a suction nozzle to the tip state inspection position and the reverse necessary force inspection position,
A nozzle management device configured to perform both the tip state inspection and the reverse necessary force inspection.

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