JP2017130594A - Inspection method - Google Patents

Abstract

SOLUTION: To determine, after imaging a nozzle pallet 110 from an upper side, that a suction nozzle 60 is mounted in a mounting hole 112 of the nozzle pallet in the case where a light reflected by a reflector 148 of an irradiation light 222 is not included in image data of the mounting hole or to determine that the suction nozzle is not mounted in the mounting hole in the case where a light obtained by reflecting an irradiation light 220 with the reflector is included in the image data of the mounting hole, to eject air towards the mounting hole in the case where it is determined that the suction nozzle is mounted in the mounting hole since there is a risk that an irradiation light 228 cannot be reflected regularly with interference of water droplets 226 by the reflector, and to determine again whether the light reflected by the reflector is included in the imaging data of the mounting hole.EFFECT: Water droplets that may cause an erroneous determination are blown away by air and then, it can be appropriately determined whether the suction nozzle is accommodated in a nozzle storage part.SELECTED DRAWING: Figure 6

Description

The present invention relates to an inspection method for inspecting whether or not a suction nozzle is housed in a nozzle housing portion.

In an electronic component mounting machine for mounting electronic components on a circuit board, suction nozzles corresponding to the shape, size, etc. of the electronic components are used, and thus many suction nozzles are required. For this reason, a nozzle pallet or the like that can store the suction nozzle is used, and the suction nozzle is managed in a state of being stored in the nozzle pallet. At this time, it is necessary to detect the storage location of the suction nozzle in the nozzle pallet or the like. For this reason, it is inspected whether the suction nozzle is housed in a nozzle housing section such as a nozzle pallet. The following patent document describes a method for inspecting whether or not the suction nozzle is housed in the nozzle housing section using reflected light.

JP 2009-283955 A

According to the inspection method described in the above patent document, it is possible to determine whether or not the suction nozzle is housed in the nozzle housing portion to some extent. However, when foreign matter such as water droplets or dust adheres around the nozzle housing portion, the reflected light may not be reflected in an appropriate direction by the foreign matter. In such a case, even if the suction nozzle is not stored in the nozzle storage unit, it may be erroneously determined that the suction nozzle is stored in the nozzle storage unit. This invention is made | formed in view of such a situation, and the subject of this invention is determining appropriately whether the suction nozzle is accommodated in the nozzle accommodating part.

In order to solve the above problem, an inspection method according to claim 1 of the present application is an inspection method for inspecting whether or not the suction nozzle is housed in the nozzle housing portion, and the inspection method includes: A determination step for determining whether or not the nozzle is stored in the nozzle storage portion, and when it is determined by the determination step that the suction nozzle is stored in the nozzle storage portion, air is ejected toward the storage portion. And a re-determination step of determining whether or not the suction nozzle is housed in the nozzle housing portion after the air is ejected by the air ejection step.

Further, in the inspection method according to claim 2, in the inspection method according to claim 1, each of the determination step and the re-determination step images the nozzle storage portion, and imaging data obtained by imaging. Based on the above, it is a step of determining whether or not the suction nozzle is housed in the nozzle housing portion.

Further, in the inspection method according to claim 3, in the inspection method according to claim 2, the nozzle storage portion penetrates in the vertical direction and is blocked by the suction nozzle when the suction nozzle is stored. A reflection member is provided below the through hole, and each of the determination step and the re-determination step includes the reflected light from the reflection member in the imaging data obtained by imaging. When it is not included, the step of determining that the suction nozzle is stored in the nozzle storage portion and determining that the suction nozzle is not stored in the nozzle storage portion when the reflected light from the reflection member is included It is characterized by being.

Further, in the inspection method according to claim 4, in the inspection method according to claim 2, each of the determination step and the re-determination step is written on the suction nozzle in imaging data obtained by imaging. When the identification symbol is included, it is determined that the suction nozzle is stored in the nozzle storage portion, and when the identification symbol is not included, it is determined that the suction nozzle is not stored in the nozzle storage portion. It is characterized by being.

In the inspection method according to claim 1 of the present application, when it is determined that the suction nozzle is housed in the nozzle housing portion, air is ejected toward the housing portion. Then, after the ejection of air, the presence / absence of storage of the suction nozzle in the nozzle storage portion is again determined. That is, after the foreign matter that causes the erroneous determination is blown off by the air, whether or not the suction nozzle is stored in the nozzle storage portion is determined again. This makes it possible to appropriately determine whether or not the suction nozzle is stored in the nozzle storage unit.

In the inspection method according to claim 2 of the present application, the nozzle storage unit is imaged, and whether or not the suction nozzle is stored in the nozzle storage unit is determined based on imaging data obtained by the imaging. Thereby, it is possible to suitably determine whether or not the suction nozzle is stored in the nozzle storage portion.

In the inspection method according to claim 3 of the present application, the nozzle housing portion penetrates in the vertical direction, and a reflecting member is provided below the nozzle housing portion. Then, when the imaging data obtained by the imaging of the nozzle storage unit does not include the reflected light from the reflecting member, it is determined that the suction nozzle is stored in the nozzle storage unit. On the other hand, when the imaging data includes light reflected by the reflecting member, it is determined that the suction nozzle is not stored in the nozzle storage unit. When such a determination is made, if a foreign object adheres to the reflecting member, the reflected light is not regularly reflected by the foreign object, and erroneous determination is likely to occur. For this reason, in the inspection method described in this section, the effect of blowing off the foreign matters by the ejection of air is fully utilized.

In the inspection method according to claim 4 of the present application, when the identification data written on the suction nozzle is included in the imaging data obtained by imaging the nozzle storage portion, the suction nozzle is stored in the nozzle storage portion. It is determined that On the other hand, when the identification data is not included in the imaging data, it is determined that the suction nozzle is not stored in the nozzle storage unit. When such a determination is made, if a foreign substance is attached to the identification symbol, the identification symbol cannot be read properly and erroneous determination is likely to occur. For this reason, in the inspection method described in this section, the effect of blowing off the foreign matters by the ejection of air is fully utilized.

It is a perspective view which shows an electronic component mounting apparatus. It is a perspective view which shows a suction nozzle. It is a perspective view which shows a nozzle management apparatus. It is a perspective view which shows the internal structure of a nozzle management apparatus. It is a perspective view which shows the pallet moving apparatus in which the nozzle pallet was mounted. It is sectional drawing which shows the nozzle pallet supported by the support arm. It is a perspective view which shows a pallet accommodation apparatus. It is a perspective view which shows an apparatus.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings as modes for carrying out the present invention.

<Configuration of Electronic Component Mounting Device> FIG. 1 shows an electronic component mounting device (hereinafter sometimes abbreviated as “mounting device”) 10. The mounting apparatus 10 includes one system base 12 and two electronic component mounting machines (hereinafter, may be abbreviated as “mounting machines”) 14 adjacent on the system base 12. The direction in which the mounting machines 14 are arranged is referred to as the X-axis direction, and the horizontal direction perpendicular to the direction is referred to as the Y-axis direction.

Each mounting machine 14 mainly includes a mounting machine main body 20, a transport device 22, a mounting head moving device (hereinafter also referred to as “moving device”) 24, a mounting head 26, a supply device 28, and a nozzle station 30. ing. The mounting machine main body 20 includes a frame portion 32 and a beam portion 34 that is overlaid on the frame portion 32.

The transport device 22 includes two conveyor devices 40 and 42. The two conveyor devices 40 and 42 are disposed in the frame portion 32 so as to be parallel to each other and extend in the X-axis direction. Each of the two conveyor devices 40 and 42 conveys a circuit board supported by the conveyor devices 40 and 42 in the X-axis direction by an electromagnetic motor (not shown). The circuit board is fixedly held by a board holding device (not shown) at a predetermined position.

The moving device 24 is an XY robot type moving device. The moving device 24 includes an electromagnetic motor (not shown) that slides the slider 50 in the X-axis direction and an electromagnetic motor (not shown) that slides in the Y-axis direction. A mounting head 26 is attached to the slider 50, and the mounting head 26 is moved to an arbitrary position on the frame portion 32 by operation of two electromagnetic motors.

The mounting head 26 mounts electronic components on the circuit board. A suction nozzle 60 is provided on the lower end surface of the mounting head 26. As shown in FIG. 2, the suction nozzle 60 includes a body cylinder 64, a flange portion 66, a suction pipe 68, and a latch pin 70. The body cylinder 64 has a cylindrical shape, and the flange portion 66 is fixed so as to overhang the outer peripheral surface of the body cylinder 64. A 2D code 71 is marked on the upper surface of the flange portion 66. The 2D code 71 is an identification symbol for identifying unique information of the suction nozzle 60. The suction pipe 68 has a thin pipe shape, and is held by the trunk cylinder 64 so as to be movable in the axial direction while extending downward from the lower end portion of the trunk cylinder 64. The latch pin 70 is provided at the upper end portion of the trunk cylinder 64 so as to extend in the radial direction of the trunk cylinder 64. The suction nozzle 60 is detachably attached to the mounting head 26 using the latch pin 70 with one touch.

Further, the suction nozzle 60 communicates with a positive / negative pressure supply device (not shown) via negative pressure air and positive pressure air passages. Each suction nozzle 60 sucks and holds the electronic component with a negative pressure, and detaches the held electronic component with a positive pressure. The mounting head 26 has a nozzle lifting / lowering device (not shown) that lifts and lowers the suction nozzle 60. The mounting head 26 changes the vertical position of the electronic component to be held by the nozzle lifting device.

The supply device 28 is a feeder-type supply device, and is disposed at the front end of the frame portion 32 as shown in FIG. The supply device 28 has a tape feeder 72. The tape feeder 72 accommodates the taped component in a wound state. The taped component is a taped electronic component. Then, the tape feeder 72 sends out the taped parts by a delivery device (not shown). Thereby, the feeder type supply device 28 supplies the electronic component at the supply position by feeding the taped component.

The nozzle station 30 has a nozzle tray 76 that houses a plurality of suction nozzles 60. In the nozzle station 30, exchange of the suction nozzle 60 attached to the mounting head 26 and the suction nozzle 60 accommodated in the nozzle tray 76 is performed as necessary. The nozzle tray 76 can be attached to and detached from the nozzle station 30, and the collection of the suction nozzle 60 accommodated in the nozzle tray 76 and the replenishment of the suction nozzle 60 to the nozzle tray 76 can be performed outside the mounting machine 14. Is possible.

<Mounting Work by Mounter> With the above-described configuration, the mounter 14 can perform a mounting operation by the mounting head 26 on the circuit board held by the transfer device 22. Specifically, the circuit board is transported to the work position according to a command from a control device (not shown) of the mounting machine 14, and is fixedly held by the board holding device at that position. Further, the tape feeder 72 sends out the taped parts and supplies the electronic parts at the supply position in accordance with a command from the control device. Then, the mounting head 26 moves above the supply position of the electronic component and sucks and holds the electronic component by the suction nozzle 60. Subsequently, the mounting head 26 moves above the circuit board and mounts the held electronic component on the circuit board.

In the mounting machine 14, as described above, the electronic component supplied by the tape feeder 72 is sucked and held by the suction nozzle 60, and the electronic component is mounted on the circuit board. At this time, foreign matters such as solder may adhere to the suction nozzle 60, and an appropriate mounting operation cannot be performed with the suction nozzle 60 to which foreign matter has adhered. Considering this, the nozzle tray 76 is removed from the nozzle station 30 of the mounting machine 14, and the suction nozzle 60 accommodated in the nozzle tray 76 is cleaned in the nozzle management device. Hereinafter, the nozzle management device will be described in detail.

<Configuration of Nozzle Management Device> As shown in FIG. 3, the nozzle management device 80 has a generally rectangular parallelepiped shape, and the nozzle tray 76 is accommodated in the nozzle management device 80 on the front side, or from the nozzle management device 80. A door 82 for taking out the nozzle tray 76 is provided. Above the door 82, a panel 86 for displaying various information, an operation switch 88 for inputting information and the like are disposed.

As shown in FIG. 4, the nozzle management device 80 includes a management device main body 90, a pallet storage device 92, a nozzle cleaning device 94, and a nozzle transfer device 96. FIG. 4 is a perspective view showing a state in which the outer shell member of the nozzle management device 80 is removed, and shows the internal structure of the nozzle management device 80.

(A) Management Device Main Body The management device main body 90 includes a frame unit 100 and a beam unit 102 that is overlaid on the frame unit 100. The frame portion 100 has a hollow structure, and the pallet accommodating device 92 is disposed inside the frame portion 100 with the upper end portion of the pallet accommodating device 92 exposed on the upper surface of the frame portion 100.

(B) Pallet storage device The pallet storage device 92 is a device for storing the nozzle pallet 110 shown in FIG. A plurality of mounting holes 112 are formed in the nozzle pallet 110. As shown in FIG. 6, the mounting hole 112 is a stepped through hole, and the suction nozzle 60 can be mounted on the mounting hole 112. Specifically, the inner diameter of the step surface 114 of the stepped mounting hole 112 is slightly larger than the outer diameter of the flange portion 66 of the suction nozzle 60, and the flange portion 66 of the suction nozzle 60 is placed on the step surface 114. Is done.

The pallet accommodating device 92 is a device that accommodates the nozzle pallet 110 having the above structure. As shown in FIG. 7, the pallet accommodating device 92 has a pallet moving device 130 and a pallet accommodating tower 132, and the pallet moving device 130 and the pallet accommodating tower 132 are arranged so as to face each other. ing.

The pallet moving device 130 includes a support arm 134 and an arm moving mechanism 136. The support arm 134 is generally U-shaped, and the end on the opening side functions as a tip. That is, the tip end portion of the support arm 134 extends into a fork. Further, the distance between the tip portions of the support arm 134 that extends into the fork is smaller than the width of the nozzle pallet 110. Therefore, as shown in FIG. 5, the nozzle pallet 110 is placed on the upper surface of the support arm 134. Further, as shown in FIG. 7, a reflection plate 148 is attached to the lower surface side of the support arm 134.

The arm moving mechanism 136 includes a base 150, an upper cover 152, a guide rail 154, a screw mechanism 156, and a slider 158. The guide rail 154 is disposed so as to extend in the vertical direction, and is fixed to the base 150 at the lower end. An upper cover 152 is fixed to the upper end portion of the guide rail 154. The screw mechanism 156 includes a screw rod 162 and a nut (not shown). A male screw (not shown) is formed on the outer peripheral surface of the screw rod 162, and the screw rod 162 is disposed in parallel with the guide rail 154 so as to extend in the vertical direction. The rod 162 is held by the base 150 and the upper cover 152 so as to be rotatable around its axis. The screw rod 162 rotates around the axis in a controllable manner by driving an electromagnetic motor (not shown).

On the other hand, the nut is screwed into a male screw formed on the outer peripheral surface of the screw rod 162 and is fixed to the slider 158. The slider 158 is formed with a through hole (not shown) penetrating in the vertical direction. The guide rail 154 is inserted through the through hole, and the slider 158 moves along the guide rail 154. With such a structure, the screw rod 162 is rotated by driving of the electromagnetic motor, so that the slider 158 moves along the guide rail 154 to an arbitrary position in the vertical direction. Note that the upper end portion of the pallet moving device 130 is exposed on the upper surface of the frame portion 100. For this reason, when the support arm 134 is raised most by the operation of the screw mechanism 156, it is exposed on the upper surface of the frame portion 100 as shown in FIG. That is, the nozzle pallet 110 supported by the support arm 134 is exposed on the upper surface of the frame unit 100.

Further, as shown in FIG. 7, a support arm 134 is disposed on the upper surface of the slider 158 so as to be slidable in the front-rear direction. As a result, the support arm 134 approaches / separates toward the pallet accommodation tower 132. The support arm 134 slides to an arbitrary position by driving an electromagnetic motor (not shown).

The pallet storage tower 132 is formed with a plurality of pallet storage portions 170. The plurality of pallet storage units 170 are arranged in the vertical direction, and the nozzle pallet 110 is stored in each pallet storage unit 170.

(C) Nozzle cleaning device The nozzle cleaning device 94 is a device for cleaning and drying the suction nozzle 60, and is disposed on the upper surface of the frame portion 100 as shown in FIG. The nozzle cleaning device 94 includes a cleaning / drying mechanism 180 and a cleaning pallet moving mechanism 182. The cleaning / drying mechanism 180 is a mechanism for cleaning and drying the suction nozzle 60 inside. The cleaning pallet moving mechanism 182 moves the cleaning pallet 186 between an exposure position where the cleaning pallet 186 is exposed (a position where the cleaning pallet 186 is illustrated in FIG. 4) and the cleaning / drying mechanism 180. It is. The cleaning pallet 186 has a plurality of mounting holes 188 having the same shape as the mounting hole 112 of the nozzle pallet 110, and the suction nozzle 60 can be mounted on the cleaning pallet 186.

(D) Nozzle transfer device The nozzle transfer device 96 is a device for transferring the suction nozzle 60, and is disposed in the beam unit 102. The nozzle transfer device 96 includes a transfer head 200 and a head moving device 202. At the lower end surface of the transfer head 200, a camera 206 facing downward, a holding chuck 208 for holding the suction nozzle 60, and an air ejector 210 for ejecting air downward are attached. Yes. The head moving device 202 is an XYZ type moving device that moves the transfer head 200 in the front-rear direction, the left-right direction, and the up-down direction on the frame unit 100.

Further, a fixed stage 212 for setting the nozzle tray 76 is provided on the upper surface of the frame unit 100. The nozzle tray 76 set on the fixed stage 212, the nozzle pallet 110 supported by the support arm 134, and The suction nozzle 60 is transferred to and from the cleaning pallet 186 located at the exposure position.

(E) Management of suction nozzles in the nozzle management device In the nozzle management device 80 having the above-described structure, the suction nozzle 60 is cleaned and the cleaned suction nozzle 60 is stored in the pallet storage tower 132. Specifically, the operator sets the nozzle tray 76 on which the suction nozzle 60 is mounted on the fixed stage 212. Then, the holding chuck 208 of the nozzle transfer device 96 moves above the nozzle tray 76 by the operation of the head moving device 202, and the suction nozzle 60 mounted on the nozzle tray 76 is held by the holding chuck 208.

When the suction nozzle 60 is held by the holding chuck 208, the holding chuck 208 is moved above the exposed position of the cleaning pallet moving mechanism 182 by the operation of the head moving device 202. At this time, in the cleaning pallet moving mechanism 182, the cleaning pallet 186 is moved to the exposure position by the operation of the cleaning pallet moving mechanism 182. Then, the holding chuck 208 moves downward, and the suction nozzle 60 is mounted on the cleaning pallet 186. When the mounting of the suction nozzle 60 on the cleaning pallet 186 is completed, the cleaning pallet 186 is moved into the cleaning / drying mechanism 180 by the operation of the cleaning pallet moving mechanism 182. Then, the suction nozzle 60 is cleaned and dried inside the cleaning / drying mechanism 180.

When the cleaning and drying of the suction nozzle 60 by the cleaning / drying mechanism 180 is completed, the cleaning pallet 186 is moved to the exposure position by the operation of the cleaning pallet moving mechanism 182. Then, the holding chuck 208 is moved above the cleaning pallet 186 by the operation of the head moving device 202, and the suction nozzle 60 after cleaning is held by the holding chuck 208. Subsequently, the holding chuck 208 is moved above the pallet moving device 130 by the operation of the head moving device 202. At this time, in the pallet moving device 130, the support arm 134 that supports the nozzle pallet 110 is moved upward most by the operation of the screw mechanism 156.

Then, in order to mount the suction nozzle 60 held by the holding chuck 208 in the mounting hole 112 of the nozzle pallet 110, the mounting hole 112 where the suction nozzle 60 is not mounted is detected. That is, it is determined whether or not the suction nozzle 60 is already mounted in the mounting hole 112 of the nozzle pallet 110. Specifically, as described above, the reflection plate 148 is disposed below the support arm 134 that supports the nozzle pallet 110. Further, the mounting hole 112 of the nozzle pallet 110 passes therethrough. Therefore, as shown in FIG. 6, when the suction nozzle 60 is not placed in the placement hole 112 of the nozzle pallet 110, the irradiation light 220 from above the nozzle pallet 110 passes through the placement hole 112. And reflected by the reflector 148. On the other hand, when the suction nozzle 60 is placed in the placement hole 112, the irradiation light 222 from above the nozzle pallet 110 is blocked by the suction nozzle 60 and is not reflected by the reflector 148. Therefore, when the nozzle pallet 110 supported by the support arm 134 is imaged from above by the camera 206 and the reflected light is included in the imaging data of the placement hole 112 of the nozzle pallet 110, the placement hole 112 is captured. It is possible to determine that the suction nozzle 60 is not placed on the surface. On the other hand, when the reflected light is not included in the imaging data of the placement hole 112, it can be determined that the suction nozzle 60 is placed in the placement hole 112.

However, the suction nozzle 60 mounted on the nozzle pallet 110 is dried after cleaning in the cleaning / drying mechanism 180, but in the cleaning / drying mechanism 180, the suction nozzle 60 is mounted on the cleaning pallet 186. Since drying is performed, there is a possibility that moisture adheres to the suction nozzle 60. For this reason, the water adhering to the suction nozzle 60 falls to the nozzle pallet 110, the dropped water droplets adhere to the reflector 148, and whether or not the suction nozzle 60 is placed in the placement hole 112 by the water drops. May not be properly determined.

Specifically, as shown in FIG. 6, water droplets 226 are attached to the reflector 148, and when light is irradiated from above the nozzle pallet 110 toward the water droplets, the irradiation light 228 is caused by the water droplets 226. It may be refracted and not regularly reflected. In such a case, even if the suction nozzle 60 is not mounted in the mounting hole 112 of the nozzle pallet 110, the reflected light is not included in the imaging data of the mounting hole 112. That is, when the suction nozzle 60 is not mounted in the mounting hole 112 of the nozzle pallet 110, it is erroneously determined that the suction nozzle 60 is mounted in the mounting hole 112.

In view of the above, when it is determined that the suction nozzle 60 is mounted in the mounting hole 112 based on the imaging data of the mounting hole 112, the air ejector 210 causes the mounting hole 112 to be mounted. After air is jetted out, whether or not the suction nozzle 60 is mounted in the mounting hole 112 is determined again. Specifically, when it is determined that the suction nozzle 60 is mounted in the mounting hole 112 based on the imaging data of the mounting hole 112, the air ejector 210 is operated by the operation of the head moving device 202. Then, it moves above the mounting hole 112 to be determined. Subsequently, air is ejected by the air ejector 210 toward the mounting hole 112 to be determined. Then, the camera 206 re-images the nozzle pallet 110 and re-determines whether the suction nozzle 60 is mounted in the mounting hole 112 based on the image data. That is, after the water droplet 226 that causes an erroneous determination is blown off, whether or not the suction nozzle 60 is mounted in the mounting hole 112 is determined again. Thereby, it is possible to appropriately determine whether or not the suction nozzle 60 is mounted in the mounting hole 112.

When it is determined whether or not the suction nozzle 60 is mounted in the mounting hole 112 according to the above procedure, the suction nozzle 60 is held above the mounting hole 112 determined that the suction nozzle 60 is not mounted. The chuck 208 is moved by the operation of the head moving device 202, and the suction nozzle 60 is mounted in the mounting hole 112. When the mounting of the suction nozzle 60 to the nozzle pallet 110 is completed, the support arm 134 that supports the nozzle pallet 110 is lowered by the operation of the screw mechanism 156. At this time, the support arm 134 is lowered so that the nozzle pallet 110 supported by the support arm 134 faces the pallet storage unit 170 to be stored. Then, the support arm 134 moves in a direction approaching the pallet accommodation tower 132. Thereby, the nozzle pallet 110 supported by the support arm 134 is accommodated in the pallet accommodating part 170 to be accommodated.

The suction nozzle 60 is an example of a suction nozzle. The 2D code 71 is an example of an identification symbol. The mounting hole 112 is an example of a nozzle storage unit. The reflection plate 148 is an example of a reflection member. In addition, a step of determining whether or not the suction nozzle 60 is mounted in the mounting hole 112 based on the image data captured by the camera 206 is an example of a determination step. The step of ejecting air toward the placement hole 112 by the air ejector 210 after it is determined that the suction nozzle 60 is not mounted in the placement hole 112 is an example of the air ejection step. The step of re-determining whether or not the suction nozzle 60 is mounted in the mounting hole 112 based on the image data captured by the camera 206 after the air is ejected toward the mounting hole 112 is an example of a redetermination step. It is.

The present invention is not limited to the above-described embodiments, and can be implemented in various modes with various modifications and improvements based on the knowledge of those skilled in the art. Specifically, for example, in the above-described embodiment, whether or not the suction nozzle 60 is mounted in the mounting hole 112 is determined using the reflected light from the reflection plate 148. It is possible to determine whether or not the suction nozzle 60 is mounted in the mounting hole 112 using the identification symbol.

Specifically, the mounting hole 112 of the nozzle pallet 110 is imaged by the camera 206, and it is determined whether or not the data related to the 2D code 71 of the suction nozzle 60 is included in the imaging data. If the data related to the 2D code 71 of the suction nozzle 60 is included in the imaging data, it is determined that the suction nozzle 60 is mounted in the mounting hole 112, and the data related to the 2D code 71 of the suction nozzle 60 is included in the imaging data. Is not included, it is determined that the suction nozzle 60 is not mounted in the mounting hole 112. At this time, if it is determined that the suction nozzle 60 is not mounted in the mounting hole 112, the air ejector 210 ejects air toward the mounting hole 112. Then, after the air is ejected, the mounting hole 112 of the nozzle pallet 110 is imaged by the camera 206, and it is determined whether or not the data related to the 2D code 71 of the suction nozzle 60 is included in the imaging data. As a result, it is possible to appropriately determine whether or not the suction nozzle 60 is mounted in the mounting hole 112 after blowing off dust, water droplets, or the like that cause erroneous determination.

In the above embodiment, whether or not the suction nozzle 60 is mounted in the mounting hole 112 is determined using the image data obtained by the camera 206. However, the mounting of the suction nozzle 60 is performed using an optical sensor. It is possible to determine whether or not the hole 112 is mounted. Specifically, for example, when the distance between the sensor placement position and the mounting hole 112 is measured by a distance sensor, the measurement distance when the suction nozzle 60 is mounted in the mounting hole 112. Is shorter than the measurement distance when the suction nozzle 60 is not mounted in the mounting hole 112. Using this fact, it is possible to determine whether or not the suction nozzle 60 is mounted in the mounting hole 112.

In the above embodiment, the nozzle management device 80 inspects whether or not the suction nozzle 60 is mounted on the nozzle pallet 110, but the mounting machine 14 determines whether or not the suction nozzle 60 is mounted on the nozzle tray 76. It is possible to inspect.

              60: Adsorption nozzle 71: 2D code (identification symbol) 112: Placement hole (nozzle housing) 148: Reflector (reflecting member)

Claims (4)

In the inspection method for inspecting whether or not the suction nozzle is stored in the nozzle storage portion, the inspection method includes a determination step for determining whether or not the suction nozzle is stored in the nozzle storage portion, and the determination step. When it is determined that the suction nozzle is housed in the nozzle housing portion, an air ejection process for ejecting air toward the housing portion, and after the air is ejected by the air ejection process, the suction nozzle is moved to the nozzle A re-determination step of determining whether or not it is stored in the storage unit. Each of the determination step and the re-determination step images the nozzle storage portion and determines whether or not the suction nozzle is stored in the nozzle storage portion based on imaging data obtained by imaging. The inspection method according to claim 1, wherein: The nozzle housing portion penetrates in the vertical direction and has a through hole that is closed by the suction nozzle when the suction nozzle is housed, and a reflective member is provided below the through hole, Each of the determination step and the re-determination step determines that the suction nozzle is stored in the nozzle storage portion when the reflected light from the reflection member is not included in the imaging data obtained by imaging, The inspection method according to claim 2, wherein when the reflected light from the reflecting member is included, the suction nozzle is a step of determining that the suction nozzle is not housed in the nozzle housing portion. Each of the determination step and the re-determination step determines that the suction nozzle is stored in the nozzle storage unit when the imaging data obtained by imaging includes the identification symbol written on the suction nozzle. The inspection method according to claim 2, wherein when the identification symbol is not included, it is a step of determining that the suction nozzle is not housed in the nozzle housing portion.