JP2019060763A - センサ素子 - Google Patents
センサ素子 Download PDFInfo
- Publication number
- JP2019060763A JP2019060763A JP2017186590A JP2017186590A JP2019060763A JP 2019060763 A JP2019060763 A JP 2019060763A JP 2017186590 A JP2017186590 A JP 2017186590A JP 2017186590 A JP2017186590 A JP 2017186590A JP 2019060763 A JP2019060763 A JP 2019060763A
- Authority
- JP
- Japan
- Prior art keywords
- region
- impurity
- sensor element
- piezoresistive
- substrate
- Prior art date
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- 239000012535 impurity Substances 0.000 claims abstract description 38
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 238000001514 detection method Methods 0.000 abstract description 8
- 239000000126 substance Substances 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 4
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000002354 daily effect Effects 0.000 description 1
- 230000003203 everyday effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Abstract
Description
図1は、本開示の一実施形態に係るセンサ素子1の概略構成を示す上面図である。図2は、図1に示すI−I線に沿ったセンサ素子1の断面図である。
10,10A 基板
11 ダイヤフラム
12 感応膜
13,14 第1領域
15 第2領域
20,21,22,23 ピエゾ抵抗部
30,31,32,33 配線
30A,31A,32A,33A 配線
Claims (3)
- 第1導電型の第1不純物及び第2導電型の第2不純物を含む基板を備え、
前記基板は、前記第2不純物を含む少なくとも1つのピエゾ抵抗部と、前記ピエゾ抵抗部を囲むとともに前記第1不純物を含む第1領域と、前記第1領域を囲むとともに前記第1不純物を含む第2領域とを有し、
前記第1領域の前記第1不純物の濃度は、前記第2領域の前記第1不純物の濃度よりも高い、センサ素子。 - 請求項1に記載のセンサ素子であって、
前記基板は、互いに対向する2つの前記ピエゾ抵抗部を有し、
前記2つのピエゾ抵抗部をそれぞれ囲む前記第1領域の間に、前記第2領域が位置する、センサ素子。 - 請求項1又は2に記載のセンサ素子であって、
前記ピエゾ抵抗部に電気的に接続される配線をさらに備える、センサ素子。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017186590A JP6971109B2 (ja) | 2017-09-27 | 2017-09-27 | センサ素子 |
Applications Claiming Priority (1)
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---|---|---|---|
JP2017186590A JP6971109B2 (ja) | 2017-09-27 | 2017-09-27 | センサ素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019060763A true JP2019060763A (ja) | 2019-04-18 |
JP6971109B2 JP6971109B2 (ja) | 2021-11-24 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2017186590A Active JP6971109B2 (ja) | 2017-09-27 | 2017-09-27 | センサ素子 |
Country Status (1)
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JP (1) | JP6971109B2 (ja) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6122975A (en) * | 1997-11-25 | 2000-09-26 | Institue Of Microelectronics | CMOS compatible integrated pressure sensor |
JP2008082835A (ja) * | 2006-09-27 | 2008-04-10 | Oki Electric Ind Co Ltd | 半導体歪測定装置、歪測定方法、圧力センサ及び加速度センサ |
JP2012122918A (ja) * | 2010-12-10 | 2012-06-28 | Panasonic Corp | 圧力センサ |
WO2014196606A1 (ja) * | 2013-06-05 | 2014-12-11 | 独立行政法人物質・材料研究機構 | 抗体または抗原を固定化した膜型表面応力センサとその製造方法並びにこれを用いた免疫測定方法 |
JP2015045657A (ja) * | 2010-05-24 | 2015-03-12 | 独立行政法人物質・材料研究機構 | 表面応力センサ |
-
2017
- 2017-09-27 JP JP2017186590A patent/JP6971109B2/ja active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6122975A (en) * | 1997-11-25 | 2000-09-26 | Institue Of Microelectronics | CMOS compatible integrated pressure sensor |
JP2008082835A (ja) * | 2006-09-27 | 2008-04-10 | Oki Electric Ind Co Ltd | 半導体歪測定装置、歪測定方法、圧力センサ及び加速度センサ |
JP2015045657A (ja) * | 2010-05-24 | 2015-03-12 | 独立行政法人物質・材料研究機構 | 表面応力センサ |
JP2012122918A (ja) * | 2010-12-10 | 2012-06-28 | Panasonic Corp | 圧力センサ |
WO2014196606A1 (ja) * | 2013-06-05 | 2014-12-11 | 独立行政法人物質・材料研究機構 | 抗体または抗原を固定化した膜型表面応力センサとその製造方法並びにこれを用いた免疫測定方法 |
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JP6971109B2 (ja) | 2021-11-24 |
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