JP2019021737A - 磁気検出素子 - Google Patents
磁気検出素子 Download PDFInfo
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- JP2019021737A JP2019021737A JP2017138073A JP2017138073A JP2019021737A JP 2019021737 A JP2019021737 A JP 2019021737A JP 2017138073 A JP2017138073 A JP 2017138073A JP 2017138073 A JP2017138073 A JP 2017138073A JP 2019021737 A JP2019021737 A JP 2019021737A
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次に、本実施形態に係る磁気測定装置について説明する。
Claims (4)
- 基板と、
前記基板の表面に形成され、前記表面からの傾斜角度が異なる複数の側面を備えた平面視で多角形状の凹部と、
前記凹部の外側の前記表面と複数の前記側面の各々に重なるように形成され、前記表面と前記側面との境目にジョセフソン接合を有する複数の超伝導ループと、
を有する磁気検出素子。 - 前記凹部を内側に含むように前記表面に形成され、前記凹部の外側の前記超伝導ループの各々を接続する第1の超伝導コイルと、
前記第1の超伝導コイルを内側に含むように前記表面に形成され、かつ前記第1の超伝導コイルに接続された第2の超伝導コイルとを更に有することを特徴とする請求項1に記載の磁気検出素子。 - 前記第1の超伝導コイルと前記第2の超伝導コイルはジョセフソン接合を含まないことを特徴とする請求項2に記載の磁気検出素子。
- 前記凹部の内側に形成され、複数の前記超伝導ループの各々に接続された複数の第1の超伝導パッドと、
前記凹部の外側に形成され、複数の前記超伝導ループのいずれかに接続された第2の超伝導パッドとを更に有することを特徴とする請求項2に記載の磁気検出素子。
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2000195837A (ja) * | 1998-12-24 | 2000-07-14 | Hitachi Ltd | 微細加工方法、磁気力顕微鏡用プローブおよび電場センサ |
JP2003224311A (ja) * | 2002-01-25 | 2003-08-08 | Univ Of Maryland | サファイア基板上の高性能段差型超伝導量子干渉素子およびその作製方法 |
JP2017028163A (ja) * | 2015-07-24 | 2017-02-02 | 富士通株式会社 | 超伝導磁気センサ |
JP2018125358A (ja) * | 2017-01-30 | 2018-08-09 | 富士通株式会社 | 磁気検出素子、これを用いた磁気測定装置、及び磁気検出素子の作製方法 |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2000195837A (ja) * | 1998-12-24 | 2000-07-14 | Hitachi Ltd | 微細加工方法、磁気力顕微鏡用プローブおよび電場センサ |
JP2003224311A (ja) * | 2002-01-25 | 2003-08-08 | Univ Of Maryland | サファイア基板上の高性能段差型超伝導量子干渉素子およびその作製方法 |
JP2017028163A (ja) * | 2015-07-24 | 2017-02-02 | 富士通株式会社 | 超伝導磁気センサ |
JP2018125358A (ja) * | 2017-01-30 | 2018-08-09 | 富士通株式会社 | 磁気検出素子、これを用いた磁気測定装置、及び磁気検出素子の作製方法 |
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