JP2018536978A5 - - Google Patents

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Publication number
JP2018536978A5
JP2018536978A5 JP2018530498A JP2018530498A JP2018536978A5 JP 2018536978 A5 JP2018536978 A5 JP 2018536978A5 JP 2018530498 A JP2018530498 A JP 2018530498A JP 2018530498 A JP2018530498 A JP 2018530498A JP 2018536978 A5 JP2018536978 A5 JP 2018536978A5
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JP
Japan
Prior art keywords
target assembly
assembly according
conductive wall
target
insulating element
Prior art date
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Granted
Application number
JP2018530498A
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English (en)
Japanese (ja)
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JP2018536978A (ja
JP6612453B2 (ja
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Publication date
Priority claimed from GB1522885.1A external-priority patent/GB2545742A/en
Application filed filed Critical
Publication of JP2018536978A publication Critical patent/JP2018536978A/ja
Publication of JP2018536978A5 publication Critical patent/JP2018536978A5/ja
Application granted granted Critical
Publication of JP6612453B2 publication Critical patent/JP6612453B2/ja
Active legal-status Critical Current
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JP2018530498A 2015-12-23 2016-12-21 Ｘ線放射装置に関するターゲットアセンブリ及びｘ線放射装置 Active JP6612453B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1522885.1A GB2545742A (en) 2015-12-23 2015-12-23 Target assembly for an x-ray emission apparatus and x-ray emission apparatus
GB1522885.1 2015-12-23
PCT/EP2016/082133 WO2017108923A1 (en) 2015-12-23 2016-12-21 Target assembly for an x-ray emission apparatus and x-ray emission apparatus

Publications (3)

Publication Number Publication Date
JP2018536978A JP2018536978A (ja) 2018-12-13
JP2018536978A5 true JP2018536978A5 (enExample) 2019-10-31
JP6612453B2 JP6612453B2 (ja) 2019-11-27

Family

ID=55359023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018530498A Active JP6612453B2 (ja) 2015-12-23 2016-12-21 Ｘ線放射装置に関するターゲットアセンブリ及びｘ線放射装置

Country Status (6)

Country Link
US (1) US10614990B2 (enExample)
EP (1) EP3394876B1 (enExample)
JP (1) JP6612453B2 (enExample)
CN (1) CN108701575B (enExample)
GB (1) GB2545742A (enExample)
WO (1) WO2017108923A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3396697B1 (en) * 2015-12-25 2024-07-17 Nikon Corporation X-ray generating device, structure manufacturing method, and structure manufacturing system
JP7048396B2 (ja) * 2018-04-12 2022-04-05 浜松ホトニクス株式会社 Ｘ線管
GB202011389D0 (en) * 2020-07-23 2020-09-09 Nikon Metrology Nv Target assembly, x-ray apparatus, structure measurement apparatus, structure measurement method, and method of modifying a target assembly
US12278080B2 (en) * 2022-01-13 2025-04-15 Sigray, Inc. Microfocus x-ray source for generating high flux low energy x-rays
US12360067B2 (en) 2022-03-02 2025-07-15 Sigray, Inc. X-ray fluorescence system and x-ray source with electrically insulative target material

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3142281A1 (de) 1981-10-24 1983-05-05 Philips Patentverwaltung Gmbh, 2000 Hamburg Roentgenroehre mit einem metallteil und einer gegenueber dem metallteil positive hochspannung fuehrenden elektrode
JP2634369B2 (ja) * 1993-07-15 1997-07-23 浜松ホトニクス株式会社 Ｘ線装置
WO1998048899A2 (en) 1997-04-28 1998-11-05 Newton Scientific, Inc. Miniature x-ray unit
US6125169A (en) * 1997-12-19 2000-09-26 Picker International, Inc. Target integral heat shield for x-ray tubes
US6775354B1 (en) * 2000-09-20 2004-08-10 Ge Medical Systems Global Technology Company, Llc Method and apparatus for reducing high voltage breakdown events in X-ray tubes
US20030002627A1 (en) * 2000-09-28 2003-01-02 Oxford Instruments, Inc. Cold emitter x-ray tube incorporating a nanostructured carbon film electron emitter
JP2002218610A (ja) * 2001-01-18 2002-08-02 Toshiba Corp ガス絶縁機器
JP4339724B2 (ja) 2004-03-12 2009-10-07 三菱電機株式会社 スイッチギヤおよびスイッチギヤの製造方法
CN101536135A (zh) * 2006-11-21 2009-09-16 株式会社岛津制作所 X射线发生装置
US7949099B2 (en) * 2007-07-05 2011-05-24 Newton Scientific Inc. Compact high voltage X-ray source system and method for X-ray inspection applications
CN101101848B (zh) * 2007-08-10 2011-04-27 东南大学 场致发射阴极x射线管
JP2009245806A (ja) * 2008-03-31 2009-10-22 Hamamatsu Photonics Kk Ｘ線管及びこのｘ線管を具備したｘ線発生装置
DE102009017924B4 (de) * 2009-04-16 2012-05-31 rtw RÖNTGEN-TECHNIK DR. WARRIKHOFF GmbH & Co. KG Isolator für Röntgenröhren und Verwendung von zweiphasigem Aluminium-Nitrid als Isolator für Röntgenröhren
JP2017054679A (ja) * 2015-09-09 2017-03-16 東芝電子管デバイス株式会社 固定陽極型ｘ線管装置

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