GB2545742A - Target assembly for an x-ray emission apparatus and x-ray emission apparatus - Google Patents
Target assembly for an x-ray emission apparatus and x-ray emission apparatus Download PDFInfo
- Publication number
- GB2545742A GB2545742A GB1522885.1A GB201522885A GB2545742A GB 2545742 A GB2545742 A GB 2545742A GB 201522885 A GB201522885 A GB 201522885A GB 2545742 A GB2545742 A GB 2545742A
- Authority
- GB
- United Kingdom
- Prior art keywords
- electrode
- suppressive
- target assembly
- target
- conductive wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004846 x-ray emission Methods 0.000 title claims abstract description 23
- 238000010894 electron beam technology Methods 0.000 claims abstract description 30
- 230000001133 acceleration Effects 0.000 claims abstract description 6
- 239000004020 conductor Substances 0.000 claims description 33
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 230000005855 radiation Effects 0.000 claims description 3
- 230000015556 catabolic process Effects 0.000 abstract description 10
- 239000000463 material Substances 0.000 description 8
- 238000013459 approach Methods 0.000 description 6
- 238000010276 construction Methods 0.000 description 6
- 230000005684 electric field Effects 0.000 description 6
- 239000004411 aluminium Substances 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 230000001965 increasing effect Effects 0.000 description 5
- 238000003384 imaging method Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 239000004697 Polyetherimide Substances 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 229920001601 polyetherimide Polymers 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
- H01J35/065—Field emission, photo emission or secondary emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/02—Vessels; Containers; Shields associated therewith; Vacuum locks
- H01J5/06—Vessels or containers specially adapted for operation at high tension, e.g. by improved potential distribution over surface of vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/02—Electrical arrangements
- H01J2235/023—Connecting of signals or tensions to or through the vessel
- H01J2235/0233—High tension
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/088—Laminated targets, e.g. plurality of emitting layers of unique or differing materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/16—Vessels
- H01J2235/165—Shielding arrangements
- H01J2235/168—Shielding arrangements against charged particles
Landscapes
- X-Ray Techniques (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1522885.1A GB2545742A (en) | 2015-12-23 | 2015-12-23 | Target assembly for an x-ray emission apparatus and x-ray emission apparatus |
| EP16820256.2A EP3394876B1 (en) | 2015-12-23 | 2016-12-21 | Target assembly for an x-ray emission apparatus and x-ray emission apparatus |
| US15/776,716 US10614990B2 (en) | 2015-12-23 | 2016-12-21 | Target assembly for an x-ray emission apparatus and x-ray emission apparatus |
| JP2018530498A JP6612453B2 (ja) | 2015-12-23 | 2016-12-21 | Ｘ線放射装置に関するターゲットアセンブリ及びｘ線放射装置 |
| PCT/EP2016/082133 WO2017108923A1 (en) | 2015-12-23 | 2016-12-21 | Target assembly for an x-ray emission apparatus and x-ray emission apparatus |
| CN201680073027.0A CN108701575B (zh) | 2015-12-23 | 2016-12-21 | 用于x射线发射装置的靶组件和x射线发射装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1522885.1A GB2545742A (en) | 2015-12-23 | 2015-12-23 | Target assembly for an x-ray emission apparatus and x-ray emission apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| GB201522885D0 GB201522885D0 (en) | 2016-02-10 |
| GB2545742A true GB2545742A (en) | 2017-06-28 |
Family
ID=55359023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1522885.1A Withdrawn GB2545742A (en) | 2015-12-23 | 2015-12-23 | Target assembly for an x-ray emission apparatus and x-ray emission apparatus |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10614990B2 (enExample) |
| EP (1) | EP3394876B1 (enExample) |
| JP (1) | JP6612453B2 (enExample) |
| CN (1) | CN108701575B (enExample) |
| GB (1) | GB2545742A (enExample) |
| WO (1) | WO2017108923A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017109981A1 (ja) | 2015-12-25 | 2017-06-29 | 株式会社ニコン | 荷電粒子装置、構造物の製造方法および構造物製造システム |
| JP7048396B2 (ja) * | 2018-04-12 | 2022-04-05 | 浜松ホトニクス株式会社 | Ｘ線管 |
| GB202011389D0 (en) * | 2020-07-23 | 2020-09-09 | Nikon Metrology Nv | Target assembly, x-ray apparatus, structure measurement apparatus, structure measurement method, and method of modifying a target assembly |
| DE112023000574T5 (de) * | 2022-01-13 | 2024-10-24 | Sigray, Inc. | Mikrofokus-röntgenquelle zur erzeugung von röntgenstrahlen mit hohem fluss und niedriger energie |
| US12360067B2 (en) | 2022-03-02 | 2025-07-15 | Sigray, Inc. | X-ray fluorescence system and x-ray source with electrically insulative target material |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0634885A1 (en) * | 1993-07-15 | 1995-01-18 | Hamamatsu Photonics K.K. | X-ray apparatus |
| US6125169A (en) * | 1997-12-19 | 2000-09-26 | Picker International, Inc. | Target integral heat shield for x-ray tubes |
| US6775354B1 (en) * | 2000-09-20 | 2004-08-10 | Ge Medical Systems Global Technology Company, Llc | Method and apparatus for reducing high voltage breakdown events in X-ray tubes |
| WO2008062519A1 (fr) * | 2006-11-21 | 2008-05-29 | Shimadzu Corporation | Générateur de rayons x |
| WO2009006592A2 (en) * | 2007-07-05 | 2009-01-08 | Newton Scientific, Inc. | Compact high voltage x-ray source system and method for x-ray inspection applications |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3142281A1 (de) * | 1981-10-24 | 1983-05-05 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Roentgenroehre mit einem metallteil und einer gegenueber dem metallteil positive hochspannung fuehrenden elektrode |
| WO1998048899A2 (en) | 1997-04-28 | 1998-11-05 | Newton Scientific, Inc. | Miniature x-ray unit |
| US20030002627A1 (en) * | 2000-09-28 | 2003-01-02 | Oxford Instruments, Inc. | Cold emitter x-ray tube incorporating a nanostructured carbon film electron emitter |
| JP2002218610A (ja) * | 2001-01-18 | 2002-08-02 | Toshiba Corp | ガス絶縁機器 |
| JP4339724B2 (ja) * | 2004-03-12 | 2009-10-07 | 三菱電機株式会社 | スイッチギヤおよびスイッチギヤの製造方法 |
| CN101101848B (zh) | 2007-08-10 | 2011-04-27 | 东南大学 | 场致发射阴极x射线管 |
| JP2009245806A (ja) * | 2008-03-31 | 2009-10-22 | Hamamatsu Photonics Kk | Ｘ線管及びこのｘ線管を具備したｘ線発生装置 |
| DE102009017924B4 (de) * | 2009-04-16 | 2012-05-31 | rtw RÖNTGEN-TECHNIK DR. WARRIKHOFF GmbH & Co. KG | Isolator für Röntgenröhren und Verwendung von zweiphasigem Aluminium-Nitrid als Isolator für Röntgenröhren |
| JP2017054679A (ja) * | 2015-09-09 | 2017-03-16 | 東芝電子管デバイス株式会社 | 固定陽極型ｘ線管装置 |
-
2015
- 2015-12-23 GB GB1522885.1A patent/GB2545742A/en not_active Withdrawn
-
2016
- 2016-12-21 WO PCT/EP2016/082133 patent/WO2017108923A1/en not_active Ceased
- 2016-12-21 EP EP16820256.2A patent/EP3394876B1/en active Active
- 2016-12-21 CN CN201680073027.0A patent/CN108701575B/zh active Active
- 2016-12-21 US US15/776,716 patent/US10614990B2/en active Active
- 2016-12-21 JP JP2018530498A patent/JP6612453B2/ja active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0634885A1 (en) * | 1993-07-15 | 1995-01-18 | Hamamatsu Photonics K.K. | X-ray apparatus |
| US6125169A (en) * | 1997-12-19 | 2000-09-26 | Picker International, Inc. | Target integral heat shield for x-ray tubes |
| US6775354B1 (en) * | 2000-09-20 | 2004-08-10 | Ge Medical Systems Global Technology Company, Llc | Method and apparatus for reducing high voltage breakdown events in X-ray tubes |
| WO2008062519A1 (fr) * | 2006-11-21 | 2008-05-29 | Shimadzu Corporation | Générateur de rayons x |
| WO2009006592A2 (en) * | 2007-07-05 | 2009-01-08 | Newton Scientific, Inc. | Compact high voltage x-ray source system and method for x-ray inspection applications |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108701575B (zh) | 2020-07-03 |
| JP6612453B2 (ja) | 2019-11-27 |
| JP2018536978A (ja) | 2018-12-13 |
| US10614990B2 (en) | 2020-04-07 |
| CN108701575A (zh) | 2018-10-23 |
| EP3394876A1 (en) | 2018-10-31 |
| US20180301312A1 (en) | 2018-10-18 |
| GB201522885D0 (en) | 2016-02-10 |
| EP3394876B1 (en) | 2019-09-11 |
| WO2017108923A1 (en) | 2017-06-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |