JP6612453B2 - Ｘ線放射装置に関するターゲットアセンブリ及びｘ線放射装置 - Google Patents

Ｘ線放射装置に関するターゲットアセンブリ及びｘ線放射装置 Download PDF

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Publication number
JP6612453B2
JP6612453B2 JP2018530498A JP2018530498A JP6612453B2 JP 6612453 B2 JP6612453 B2 JP 6612453B2 JP 2018530498 A JP2018530498 A JP 2018530498A JP 2018530498 A JP2018530498 A JP 2018530498A JP 6612453 B2 JP6612453 B2 JP 6612453B2
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Japan
Prior art keywords
target assembly
target
conductive wall
assembly according
insulating element
Prior art date
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JP2018530498A
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English (en)
Japanese (ja)
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JP2018536978A5 (enExample
JP2018536978A (ja
Inventor
イアン・ジョージ・ヘイグ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Metrology NV
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Nikon Metrology NV
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Publication of JP2018536978A publication Critical patent/JP2018536978A/ja
Publication of JP2018536978A5 publication Critical patent/JP2018536978A5/ja
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/065—Field emission, photo emission or secondary emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/02—Vessels; Containers; Shields associated therewith; Vacuum locks
    • H01J5/06—Vessels or containers specially adapted for operation at high tension, e.g. by improved potential distribution over surface of vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/02—Electrical arrangements
    • H01J2235/023—Connecting of signals or tensions to or through the vessel
    • H01J2235/0233—High tension
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/088—Laminated targets, e.g. plurality of emitting layers of unique or differing materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/16—Vessels
    • H01J2235/165—Shielding arrangements
    • H01J2235/168—Shielding arrangements against charged particles

Landscapes

  • X-Ray Techniques (AREA)
JP2018530498A 2015-12-23 2016-12-21 Ｘ線放射装置に関するターゲットアセンブリ及びｘ線放射装置 Active JP6612453B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1522885.1A GB2545742A (en) 2015-12-23 2015-12-23 Target assembly for an x-ray emission apparatus and x-ray emission apparatus
GB1522885.1 2015-12-23
PCT/EP2016/082133 WO2017108923A1 (en) 2015-12-23 2016-12-21 Target assembly for an x-ray emission apparatus and x-ray emission apparatus

Publications (3)

Publication Number Publication Date
JP2018536978A JP2018536978A (ja) 2018-12-13
JP2018536978A5 JP2018536978A5 (enExample) 2019-10-31
JP6612453B2 true JP6612453B2 (ja) 2019-11-27

Family

ID=55359023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018530498A Active JP6612453B2 (ja) 2015-12-23 2016-12-21 Ｘ線放射装置に関するターゲットアセンブリ及びｘ線放射装置

Country Status (6)

Country Link
US (1) US10614990B2 (enExample)
EP (1) EP3394876B1 (enExample)
JP (1) JP6612453B2 (enExample)
CN (1) CN108701575B (enExample)
GB (1) GB2545742A (enExample)
WO (1) WO2017108923A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3396697B1 (en) * 2015-12-25 2024-07-17 Nikon Corporation X-ray generating device, structure manufacturing method, and structure manufacturing system
JP7048396B2 (ja) * 2018-04-12 2022-04-05 浜松ホトニクス株式会社 Ｘ線管
GB202011389D0 (en) * 2020-07-23 2020-09-09 Nikon Metrology Nv Target assembly, x-ray apparatus, structure measurement apparatus, structure measurement method, and method of modifying a target assembly
US12278080B2 (en) * 2022-01-13 2025-04-15 Sigray, Inc. Microfocus x-ray source for generating high flux low energy x-rays
US12360067B2 (en) 2022-03-02 2025-07-15 Sigray, Inc. X-ray fluorescence system and x-ray source with electrically insulative target material

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3142281A1 (de) 1981-10-24 1983-05-05 Philips Patentverwaltung Gmbh, 2000 Hamburg Roentgenroehre mit einem metallteil und einer gegenueber dem metallteil positive hochspannung fuehrenden elektrode
JP2634369B2 (ja) * 1993-07-15 1997-07-23 浜松ホトニクス株式会社 Ｘ線装置
WO1998048899A2 (en) 1997-04-28 1998-11-05 Newton Scientific, Inc. Miniature x-ray unit
US6125169A (en) * 1997-12-19 2000-09-26 Picker International, Inc. Target integral heat shield for x-ray tubes
US6775354B1 (en) * 2000-09-20 2004-08-10 Ge Medical Systems Global Technology Company, Llc Method and apparatus for reducing high voltage breakdown events in X-ray tubes
US20030002627A1 (en) * 2000-09-28 2003-01-02 Oxford Instruments, Inc. Cold emitter x-ray tube incorporating a nanostructured carbon film electron emitter
JP2002218610A (ja) * 2001-01-18 2002-08-02 Toshiba Corp ガス絶縁機器
JP4339724B2 (ja) 2004-03-12 2009-10-07 三菱電機株式会社 スイッチギヤおよびスイッチギヤの製造方法
CN101536135A (zh) * 2006-11-21 2009-09-16 株式会社岛津制作所 X射线发生装置
US7949099B2 (en) * 2007-07-05 2011-05-24 Newton Scientific Inc. Compact high voltage X-ray source system and method for X-ray inspection applications
CN101101848B (zh) * 2007-08-10 2011-04-27 东南大学 场致发射阴极x射线管
JP2009245806A (ja) * 2008-03-31 2009-10-22 Hamamatsu Photonics Kk Ｘ線管及びこのｘ線管を具備したｘ線発生装置
DE102009017924B4 (de) * 2009-04-16 2012-05-31 rtw RÖNTGEN-TECHNIK DR. WARRIKHOFF GmbH & Co. KG Isolator für Röntgenröhren und Verwendung von zweiphasigem Aluminium-Nitrid als Isolator für Röntgenröhren
JP2017054679A (ja) * 2015-09-09 2017-03-16 東芝電子管デバイス株式会社 固定陽極型ｘ線管装置

Also Published As

Publication number Publication date
US20180301312A1 (en) 2018-10-18
EP3394876B1 (en) 2019-09-11
CN108701575B (zh) 2020-07-03
GB201522885D0 (en) 2016-02-10
JP2018536978A (ja) 2018-12-13
CN108701575A (zh) 2018-10-23
WO2017108923A1 (en) 2017-06-29
EP3394876A1 (en) 2018-10-31
US10614990B2 (en) 2020-04-07
GB2545742A (en) 2017-06-28

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