JP2018535831A5 - - Google Patents
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- Publication number
- JP2018535831A5 JP2018535831A5 JP2018541576A JP2018541576A JP2018535831A5 JP 2018535831 A5 JP2018535831 A5 JP 2018535831A5 JP 2018541576 A JP2018541576 A JP 2018541576A JP 2018541576 A JP2018541576 A JP 2018541576A JP 2018535831 A5 JP2018535831 A5 JP 2018535831A5
- Authority
- JP
- Japan
- Prior art keywords
- opposing
- groove
- slits
- slit
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB1519445.9A GB201519445D0 (en) | 2015-11-03 | 2015-11-03 | Liquid removal |
| GB1519445.9 | 2015-11-03 | ||
| GB1600887.2 | 2016-01-18 | ||
| GBGB1600887.2A GB201600887D0 (en) | 2016-01-18 | 2016-01-18 | Liquid removal |
| PCT/GB2016/053395 WO2017077291A1 (en) | 2015-11-03 | 2016-11-02 | Liquid removal |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018535831A JP2018535831A (ja) | 2018-12-06 |
| JP2018535831A5 true JP2018535831A5 (OSRAM) | 2019-12-12 |
| JP6984812B2 JP6984812B2 (ja) | 2021-12-22 |
Family
ID=57570083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018541576A Active JP6984812B2 (ja) | 2015-11-03 | 2016-11-02 | 液体隔離装置 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6984812B2 (OSRAM) |
| KR (1) | KR20180078278A (OSRAM) |
| CN (1) | CN108449936B (OSRAM) |
| TW (1) | TWI760316B (OSRAM) |
| WO (1) | WO2017077291A1 (OSRAM) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114877666A (zh) * | 2022-02-25 | 2022-08-09 | 南京华易泰电子科技有限公司 | 一种适用于面板干燥用的双缝气刀结构及其加工工艺 |
| CN114713563B (zh) * | 2022-03-01 | 2023-03-07 | 长沙振安机电设备有限公司 | 马达清洁设备 |
| CN115682649B (zh) * | 2022-10-24 | 2023-08-08 | 深圳市行知行机器人技术有限公司 | 抹干机构及清洗装置 |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE241981C (OSRAM) * | 1910-05-24 | |||
| US2423768A (en) * | 1943-01-13 | 1947-07-08 | Warren S D Co | Apparatus for coating flexible webs |
| US3002700A (en) * | 1958-07-26 | 1961-10-03 | Mohring Gustav | Nozzle on heat-treatment machines for textile fabrics and the like |
| JPS5425066A (en) * | 1977-07-28 | 1979-02-24 | Chugai Ro Kogyo Kaisha Ltd | Nonncontact type shape correcting and holding method of beltlike material and its device |
| US4551926A (en) * | 1984-05-23 | 1985-11-12 | C. Keller Gmbh U. Co. Kg Maschinenfabrik | Nozzle box for heat treatment of veneering |
| US4848633A (en) * | 1986-02-28 | 1989-07-18 | Thermo Electron Web Systems, Inc. | Non-contact web turning and drying apparatus |
| EP0513632B1 (de) * | 1991-05-17 | 1995-07-19 | SUNDWIGER EISENHÜTTE MASCHINENFABRIK GmbH & CO. | Vorrichtung zum Entfernen von Flüssigkeit von der Oberfläche eines bewegten Bandes |
| JP2528669Y2 (ja) * | 1991-08-19 | 1997-03-12 | 三菱重工業株式会社 | テンタオーブン用プレナムダクト |
| JP2552595B2 (ja) * | 1991-09-17 | 1996-11-13 | 株式会社東京機械製作所 | 走行ウエブの制振方法及び制振装置 |
| CH687957A5 (de) * | 1994-09-06 | 1997-04-15 | Schneider Consulting & Dev | Verfahren zum Entfernen von Staubpartikeln von einer bewegten Materialbahn sowie Vorrichtung hierzu. |
| US6726777B1 (en) * | 1999-06-24 | 2004-04-27 | Sumitomo Heavy Industries Ltd. | Cleaning method and apparatus using fluid spraying |
| JP4352194B2 (ja) * | 2000-04-04 | 2009-10-28 | 株式会社日立ハイテクノロジーズ | 基板乾燥装置及び基板乾燥方法 |
| JP2001335205A (ja) * | 2000-05-24 | 2001-12-04 | Mitsubishi Heavy Ind Ltd | 両面フロータ式乾燥機,両面フロータ式冷却機及び両面フロータ式加湿機 |
| TWI236944B (en) * | 2001-12-17 | 2005-08-01 | Tokyo Electron Ltd | Film removal method and apparatus, and substrate processing system |
| EP1775034B1 (en) * | 2004-08-05 | 2010-12-15 | Kabushiki Kaisha Kobe Seiko Sho | Deposit removing device |
| WO2008084224A2 (en) * | 2007-01-11 | 2008-07-17 | Peter Philip Andrew Lymn | Liquid treatment apparatus |
| KR20080090070A (ko) * | 2007-04-04 | 2008-10-08 | 삼성전자주식회사 | 에어나이프 및 이를 포함하는 기판 건조 장치 |
| KR101020779B1 (ko) * | 2008-07-31 | 2011-03-09 | 주식회사 디엠에스 | 에어나이프 장치 |
| NL2006389A (en) * | 2010-04-15 | 2011-10-18 | Asml Netherlands Bv | Fluid handling structure, lithographic apparatus and a device manufacturing method. |
| EP2381310B1 (en) * | 2010-04-22 | 2015-05-06 | ASML Netherlands BV | Fluid handling structure and lithographic apparatus |
| GB2500564A (en) * | 2012-01-26 | 2013-10-02 | Peter Philip Andrew Lymn | Web processing machine |
| JP2013256384A (ja) * | 2012-06-14 | 2013-12-26 | Japan Steel Works Ltd:The | エア噴出ノズル |
| CN103851887B (zh) * | 2012-12-07 | 2016-01-27 | 深南电路有限公司 | Pcb干燥机 |
| CN104043613B (zh) * | 2014-06-19 | 2016-01-06 | 张家港市超声电气有限公司 | 风切吹干装置 |
| CN104117504A (zh) * | 2014-06-26 | 2014-10-29 | 苏州一合光学有限公司 | 玻璃风刀清洗机的风刀装置 |
| CN104990383A (zh) * | 2015-07-31 | 2015-10-21 | 北京七星华创电子股份有限公司 | 一种在线风刀吹干装置 |
-
2016
- 2016-11-02 JP JP2018541576A patent/JP6984812B2/ja active Active
- 2016-11-02 KR KR1020187015107A patent/KR20180078278A/ko not_active Ceased
- 2016-11-02 CN CN201680076531.6A patent/CN108449936B/zh active Active
- 2016-11-02 WO PCT/GB2016/053395 patent/WO2017077291A1/en not_active Ceased
- 2016-11-03 TW TW105135698A patent/TWI760316B/zh active
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