JP2018506183A - ブロックコポリマーの秩序膜(ordered film)の限界寸法均一性を向上させるための方法 - Google Patents
ブロックコポリマーの秩序膜(ordered film)の限界寸法均一性を向上させるための方法 Download PDFInfo
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- JP2018506183A JP2018506183A JP2017537908A JP2017537908A JP2018506183A JP 2018506183 A JP2018506183 A JP 2018506183A JP 2017537908 A JP2017537908 A JP 2017537908A JP 2017537908 A JP2017537908 A JP 2017537908A JP 2018506183 A JP2018506183 A JP 2018506183A
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
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- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L53/00—Compositions of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Compositions of derivatives of such polymers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/002—Processes for applying liquids or other fluent materials the substrate being rotated
- B05D1/005—Spin coating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/02—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
- B05D3/0254—After-treatment
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- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F212/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring
- C08F212/02—Monomers containing only one unsaturated aliphatic radical
- C08F212/04—Monomers containing only one unsaturated aliphatic radical containing one ring
- C08F212/06—Hydrocarbons
- C08F212/08—Styrene
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- C—CHEMISTRY; METALLURGY
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- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
- C08F220/12—Esters of monohydric alcohols or phenols
- C08F220/14—Methyl esters, e.g. methyl (meth)acrylate
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F297/00—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer
- C08F297/02—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer using a catalyst of the anionic type
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/18—Manufacture of films or sheets
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D153/00—Coating compositions based on block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Coating compositions based on derivatives of such polymers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2353/00—Characterised by the use of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2453/00—Characterised by the use of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2203/00—Applications
- C08L2203/16—Applications used for films
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2205/00—Polymer mixtures characterised by other features
- C08L2205/02—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2205/00—Polymer mixtures characterised by other features
- C08L2205/02—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group
- C08L2205/025—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group containing two or more polymers of the same hierarchy C08L, and differing only in parameters such as density, comonomer content, molecular weight, structure
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Wood Science & Technology (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Graft Or Block Polymers (AREA)
- Manufacture Of Macromolecular Shaped Articles (AREA)
Abstract
Description
− TODTを有する少なくとも1種のブロックコポリマーとTODTを有さない少なくとも1種の化合物とを溶媒中で混合する工程と、
− この混合物を表面上に成膜する工程と、
− 表面上に成膜した混合物を、ブロックコポリマーの最大のTgと混合物のTODTとの間の温度で硬化させる工程と
を含む方法に関する。
− N.P.Balsaraら、Macromolecules 1992、25、3896−3901。
− N.Sakamotoら、Macromolecules 1997、30、5321−5330、及びMacromolecule 1997、30、1621−1632
− J.K.Kimら、Macromolecules 1998、31、4045−4048。
動的機械分析(dynamical mechanical analysis)による秩序−無秩序転移温度分析
2種の異なる分子量のブロックコポリマーPS−b−PMMAは、従来からのアニオンによる方法によって合成するか、又は市販製品を使用することができる。生成物の特性評価を表1に示す。
ブロックコポリマーの誘導自己組織化に関する厚さ及び欠陥率:
2.5×2.5cmのシリコン基板を、例えばピラニア溶液のような公知の技術によって適切に清浄化し、次いで蒸留水で洗浄した後に使用した。
a) SEC(サイズ排除クロマトグラフィー、ポリスチレン標準)によって決定される場合
b) 1H NMRによって決定される
c) DMA(実施例1に記載するような動的機械分析)によって決定される。コポリマー3及び4のTODTは存在しない。
Claims (12)
- ブロックコポリマーを含む秩序膜の限界寸法均一性を向上させることを可能とする方法であって、前記秩序膜が、秩序−無秩序転移温度(TODT)及び少なくとも1つのTgを有する少なくとも1種のブロックコポリマーと、TODTを有さない少なくとも1種のブロックコポリマーとの混合物を含み、この混合物が、ブロックコポリマー単独のTODTより低いTODTを有し、以下の工程:
− TODTを有する少なくとも1種のブロックコポリマーとTODTを有さない少なくとも1種のブロックコポリマーとを溶媒中で混合する工程と、
− この混合物を表面上に成膜する工程と、
− 表面上に成膜した混合物を、TODTを有さないブロックコポリマーの最大のTgと混合物のTODTとの間の温度で硬化させる工程と
を含む、方法。 - TODTを有するブロックコポリマーがジブロックコポリマーである、請求項1に記載の方法。
- ジブロックコポリマーのブロックのうち一方がスチレンモノマーを含み、他方のブロックがメタクリル酸モノマーを含む、請求項2に記載の方法。
- ジブロックコポリマーのブロックのうち一方がスチレンを含み、他方のブロックがメタクリル酸メチルを含む、請求項3に記載の方法。
- TODTを有さないブロックコポリマーがジブロックコポリマーである、請求項1に記載の方法。
- ジブロックコポリマーのブロックのうち一方がスチレンモノマーを含み、他方のブロックがメタクリル酸モノマーを含む、請求項5に記載の方法。
- ジブロックコポリマーのブロックのうち一方がスチレンを含み、他方のブロックがメタクリル酸メチルを含む、請求項6に記載の方法。
- 表面がフリーである、請求項1に記載の方法。
- 表面がガイドされる、請求項1に記載の方法。
- TODTを有する少なくとも1種のブロックコポリマーと、TODTを有さない少なくとも1種のブロックコポリマーとを含む組成物。
- リソグラフィーのマスク又は秩序膜を生成するための、請求項1から9の何れか一項に記載の方法の使用。
- 請求項11によって得られたリソグラフィーのマスク又は秩序膜。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1550466A FR3031749B1 (fr) | 2015-01-21 | 2015-01-21 | Procede d'amelioration de l'uniformite de dimension critique de films ordonnes de copolymeres a blocs |
FR1550466 | 2015-01-21 | ||
PCT/FR2016/050113 WO2016116705A1 (fr) | 2015-01-21 | 2016-01-21 | Procédé d'amélioration de l'uniformité de dimension critique de films ordonnés de copolymères à blocs |
Publications (1)
Publication Number | Publication Date |
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JP2018506183A true JP2018506183A (ja) | 2018-03-01 |
Family
ID=52779889
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2017537908A Pending JP2018506183A (ja) | 2015-01-21 | 2016-01-21 | ブロックコポリマーの秩序膜(ordered film)の限界寸法均一性を向上させるための方法 |
Country Status (9)
Country | Link |
---|---|
US (2) | US20180203348A1 (ja) |
EP (1) | EP3247747A1 (ja) |
JP (1) | JP2018506183A (ja) |
KR (1) | KR20170118744A (ja) |
CN (1) | CN107406660A (ja) |
FR (1) | FR3031749B1 (ja) |
SG (1) | SG11201705896UA (ja) |
TW (1) | TWI598395B (ja) |
WO (1) | WO2016116705A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018505275A (ja) * | 2015-01-21 | 2018-02-22 | アルケマ フランス | ブロックコポリマーの秩序膜の組織化時間を短縮するための方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3075800B1 (fr) * | 2017-12-21 | 2020-10-09 | Arkema France | Couches anti adhesives pour les procedes d'impression par transfert |
US20220236639A1 (en) * | 2021-01-22 | 2022-07-28 | Tokyo Electron Limited | Directed self-assembly |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110147983A1 (en) * | 2009-12-18 | 2011-06-23 | Joy Cheng | Methods of directed self-assembly and layered structures formed therefrom |
JP2012033534A (ja) * | 2010-07-28 | 2012-02-16 | Toshiba Corp | パターン形成方法及びポリマーアロイ下地材料 |
JP2013072896A (ja) * | 2011-09-26 | 2013-04-22 | Toshiba Corp | パターン形成方法 |
JP2013524546A (ja) * | 2010-04-14 | 2013-06-17 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィで使用される自己組織化可能な重合体の秩序化された層を提供する方法 |
JP2013166933A (ja) * | 2012-02-10 | 2013-08-29 | Dow Global Technologies Llc | ジブロックコポリマーブレンド組成物 |
JP2014055291A (ja) * | 2012-08-31 | 2014-03-27 | Rohm & Haas Electronic Materials Llc | 基体上にパターンを調製するための組成物および方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4127682B2 (ja) * | 1999-06-07 | 2008-07-30 | 株式会社東芝 | パターン形成方法 |
US8133534B2 (en) * | 2004-11-22 | 2012-03-13 | Wisconsin Alumni Research Foundation | Methods and compositions for forming patterns with isolated or discrete features using block copolymer materials |
US20110111170A1 (en) * | 2008-05-30 | 2011-05-12 | Canon Kabushiki Kaisha | Block copolymer film and method of producing the same |
FR2983773B1 (fr) | 2011-12-09 | 2014-10-24 | Arkema France | Procede de preparation de surfaces |
-
2015
- 2015-01-21 FR FR1550466A patent/FR3031749B1/fr active Active
-
2016
- 2016-01-21 SG SG11201705896UA patent/SG11201705896UA/en unknown
- 2016-01-21 WO PCT/FR2016/050113 patent/WO2016116705A1/fr active Application Filing
- 2016-01-21 US US15/545,068 patent/US20180203348A1/en not_active Abandoned
- 2016-01-21 TW TW105101872A patent/TWI598395B/zh active
- 2016-01-21 EP EP16703591.4A patent/EP3247747A1/fr not_active Withdrawn
- 2016-01-21 KR KR1020177023124A patent/KR20170118744A/ko not_active Application Discontinuation
- 2016-01-21 CN CN201680017108.9A patent/CN107406660A/zh active Pending
- 2016-01-21 JP JP2017537908A patent/JP2018506183A/ja active Pending
-
2019
- 2019-10-17 US US16/656,103 patent/US20200057368A1/en not_active Abandoned
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110147983A1 (en) * | 2009-12-18 | 2011-06-23 | Joy Cheng | Methods of directed self-assembly and layered structures formed therefrom |
JP2013524546A (ja) * | 2010-04-14 | 2013-06-17 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィで使用される自己組織化可能な重合体の秩序化された層を提供する方法 |
JP2012033534A (ja) * | 2010-07-28 | 2012-02-16 | Toshiba Corp | パターン形成方法及びポリマーアロイ下地材料 |
JP2013072896A (ja) * | 2011-09-26 | 2013-04-22 | Toshiba Corp | パターン形成方法 |
JP2013166933A (ja) * | 2012-02-10 | 2013-08-29 | Dow Global Technologies Llc | ジブロックコポリマーブレンド組成物 |
JP2014055291A (ja) * | 2012-08-31 | 2014-03-27 | Rohm & Haas Electronic Materials Llc | 基体上にパターンを調製するための組成物および方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018505275A (ja) * | 2015-01-21 | 2018-02-22 | アルケマ フランス | ブロックコポリマーの秩序膜の組織化時間を短縮するための方法 |
Also Published As
Publication number | Publication date |
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TWI598395B (zh) | 2017-09-11 |
KR20170118744A (ko) | 2017-10-25 |
CN107406660A (zh) | 2017-11-28 |
WO2016116705A1 (fr) | 2016-07-28 |
US20180203348A1 (en) | 2018-07-19 |
SG11201705896UA (en) | 2017-08-30 |
US20200057368A1 (en) | 2020-02-20 |
FR3031749A1 (fr) | 2016-07-22 |
FR3031749B1 (fr) | 2018-09-28 |
EP3247747A1 (fr) | 2017-11-29 |
TW201700593A (zh) | 2017-01-01 |
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