JP2018503750A - 熱の放散を増加させるための特別な設計を有する真空チャンバ - Google Patents
熱の放散を増加させるための特別な設計を有する真空チャンバ Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4411—Cooling of the reaction chamber walls
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
- C23C16/463—Cooling of the substrate
- C23C16/466—Cooling of the substrate using thermal contact gas
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
- H01J37/32495—Means for protecting the vessel against plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
- H01J37/32651—Shields, e.g. dark space shields, Faraday shields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3441—Dark space shields
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
Abstract
Description
− 少なくとも1つの基板10を処理することができる真空チャンバの処理領域への熱供給のための熱供給要素と、
− 内側および外側チャンバ壁面を有する、処理領域から熱を除去することができるチャンバ壁20と、
− チャンバ壁20と処理領域との間に配置されるシールド壁30であって、処理領域に関して回避されたシールド壁面が内側チャンバ壁面に対向して配置されるシールド壁30と
を有する真空チャンバであって、
− 内側チャンバ壁面に対向して配置されたシールド壁面は少なくとも部分的に、好ましくは大部分が第1のコーティング31を塗布され、第1のコーティング31は放射率ε≧0.65を有する
ことを特徴とする真空チャンバを開示する。
− 50μm以下のコーティング厚さ、
− できる限りコーティングによるアウトガスが全くないような高密度コーティング構造、
− 良好な熱伝達を保証するためのキャリア材料に対する良好な接着性、
− 高い温度で、好ましくは少なくとも600℃までの温度でコーティング処理を実施することを可能にする高い温度安定性、および
− コーティングが「過酷な製造環境」で急速に消耗しないような良好な耐磨耗性
のうちの少なくとも1つを有することが好ましい。
Claims (14)
- 物質の処理のための真空チャンバであって、少なくとも以下の要素:
少なくとも1つの基板(10)を処理可能な前記真空チャンバの処理領域へ熱を供給する熱供給要素と、
内側チャンバ壁面および外側チャンバ壁面を有するチャンバ壁(20)であって、該チャンバ壁(20)を通して前記処理領域から熱が除去可能なチャンバ壁(20)と、
前記チャンバ壁(20)と前記処理領域の間に配置されるシールド壁(30)であって、前記処理領域に対して反対側のシールド壁面が、前記内側チャンバ壁面に対向して配置されるシールド壁(30)と
を有する真空チャンバにおいて、
前記内側チャンバ壁面に対向して配置された前記シールド壁面が、少なくとも部分的に、好適には大部分を第1のコーティング(31)で塗布されており、前記第1のコーティング(31)が放射率ε≧0.65を有することを特徴とする、真空チャンバ。 - 前記内側チャンバ壁面が、少なくとも部分的に、好適には少なくとも大部分を第2のコーティング(21)で塗布されており、前記第2のコーティング(21)が放射率ε≧0.65を有することを特徴とする、請求項1に記載の真空チャンバ。
- 前記チャンバ壁(20)が一体型冷却システム(15)を有することを特徴とする、請求項1または2に記載の真空チャンバ。
- 前記第1のコーティング(31)の放射率が0.80以上であること、好適には0.90以上であることを特徴とする、請求項1から3までのいずれか一項に記載の真空チャンバ。
- 前記第1のコーティング(21)の放射率が0.80以上であること、好適には0.90以上であることを特徴とする、請求項1から4までのいずれか一項に記載の真空チャンバ。
- 前記第1のコーティング(31)および/または前記第2のコーティング(21)が、PVD処理および/またはPA−CVD処理によって少なくとも部分的に堆積されたものであることを特徴とする、請求項1から5までのいずれか一項に記載の真空チャンバ。
- 前記第1のコーティング(31)および/または前記第2のコーティング(21)が、アルミニウムおよび/またはチタンを含むことを特徴とする、請求項1から6までのいずれか一項に記載の真空チャンバ。
- 前記第1のコーティング(31)および/または前記第2のコーティング(21)が、窒素および/または酸素を含むことを特徴とする、請求項1から7までのいずれか一項に記載の真空チャンバ。
- 前記第1のコーティング(31)および/または前記第2のコーティング(21)が、窒化チタンアルミニウムまたは窒化アルミチタニウムを含むことを特徴とする、請求項7に記載の真空チャンバ。
- 前記第1のコーティング(31)および/または前記第2のコーティング(21)が、酸化アルミニウムを含むことを特徴とする、請求項8または9に記載の真空チャンバ。
- 請求項1から10のいずれか一項に記載の真空チャンバをコーティングチャンバとして備えるコーティングシステム。
- 前記コーティングチャンバがPVDコーティングチャンバとして確立されていることを特徴とする、請求項11に記載のコーティングシステム。
- 前記シールド壁(30)が、前記PVDコーティングチャンバ内でPVD処理を行う間の前記内側チャンバ壁面のコーティングを低減または回避するために設けられていることを特徴とする、請求項12に記載のコーティングシステム。
- 前記PVDコーティングチャンバの上面および底面が熱的に絶縁されていることを特徴とする、請求項12または13に記載のコーティングシステム。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201562104918P | 2015-01-19 | 2015-01-19 | |
US62/104,918 | 2015-01-19 | ||
US201562117571P | 2015-02-18 | 2015-02-18 | |
US62/117,571 | 2015-02-18 | ||
PCT/EP2016/050841 WO2016116384A1 (de) | 2015-01-19 | 2016-01-15 | Vakuumkammer mit besonderer gestaltung zur erhöhung der wärmeabführung |
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JP2018503750A true JP2018503750A (ja) | 2018-02-08 |
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JP2017555841A Pending JP2018503750A (ja) | 2015-01-19 | 2016-01-15 | 熱の放散を増加させるための特別な設計を有する真空チャンバ |
JP2017555840A Active JP6998214B2 (ja) | 2015-01-19 | 2016-01-15 | 真空アシストコーティングプロセスを行うためのコーティングチャンバ、熱シールド、およびコーティングプロセス |
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JP2017555840A Active JP6998214B2 (ja) | 2015-01-19 | 2016-01-15 | 真空アシストコーティングプロセスを行うためのコーティングチャンバ、熱シールド、およびコーティングプロセス |
Country Status (5)
Country | Link |
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US (2) | US20180016675A1 (ja) |
EP (2) | EP3247818A1 (ja) |
JP (2) | JP2018503750A (ja) |
CN (2) | CN107406973A (ja) |
WO (2) | WO2016116383A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
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EP3247818A1 (de) * | 2015-01-19 | 2017-11-29 | Oerlikon Surface Solutions AG, Pfäffikon | Beschichtungskammer zur durchführung eines vakuum gestützten beschichtungsverfahrens, wärmeschild, sowie beschichtungsverfahren |
EP3662094B1 (en) | 2017-08-02 | 2021-11-17 | Oerlikon Surface Solutions AG, Pfäffikon | Coating device for conducting high efficient low temperature coating |
DE102017222624A1 (de) * | 2017-12-13 | 2019-06-13 | SKF Aerospace France S.A.S | Beschichtete Lagerkomponente und Lager mit einer solchen Komponente |
US11810766B2 (en) * | 2018-07-05 | 2023-11-07 | Applied Materials, Inc. | Protection of aluminum process chamber components |
US11923178B2 (en) * | 2018-11-16 | 2024-03-05 | Ulvac, Inc. | Vacuum processing apparatus |
KR102050786B1 (ko) * | 2019-01-21 | 2019-12-03 | 주식회사 와인 | 화학 기상 증착용 챔버 |
JP7223738B2 (ja) * | 2020-11-12 | 2023-02-16 | 株式会社アルバック | スパッタリング装置 |
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JPS60117855U (ja) * | 1984-01-20 | 1985-08-09 | 株式会社リコー | 真空蒸着装置の加熱源 |
DE3930832A1 (de) * | 1989-09-15 | 1991-03-28 | Nishibori Mineo | Vorrichtung und verfahren zum beschichten von werkstuecken mittels bogenentladung |
US5518593A (en) * | 1994-04-29 | 1996-05-21 | Applied Komatsu Technology, Inc. | Shield configuration for vacuum chamber |
US6046439A (en) * | 1996-06-17 | 2000-04-04 | Mattson Technology, Inc. | System and method for thermal processing of a semiconductor substrate |
US6120660A (en) * | 1998-02-11 | 2000-09-19 | Silicon Genesis Corporation | Removable liner design for plasma immersion ion implantation |
US20040206804A1 (en) * | 2002-07-16 | 2004-10-21 | Jaeyeon Kim | Traps for particle entrapment in deposition chambers |
US20050147742A1 (en) * | 2004-01-07 | 2005-07-07 | Tokyo Electron Limited | Processing chamber components, particularly chamber shields, and method of controlling temperature thereof |
KR102134276B1 (ko) * | 2008-04-16 | 2020-07-15 | 어플라이드 머티어리얼스, 인코포레이티드 | 웨이퍼 프로세싱 증착 차폐 컴포넌트들 |
KR101115697B1 (ko) * | 2009-12-02 | 2012-03-06 | 웅진폴리실리콘주식회사 | 에너지 효율을 높여주는 복사열 차단막을 갖는 화학기상증착 반응기 |
DE102010045314B4 (de) * | 2010-09-14 | 2021-05-27 | Bayerische Motoren Werke Aktiengesellschaft | Thermisches Beschichtungsverfahren |
JP6140539B2 (ja) * | 2013-06-13 | 2017-05-31 | 株式会社アルバック | 真空処理装置 |
CN103383155A (zh) * | 2013-06-21 | 2013-11-06 | 中国科学院上海技术物理研究所 | Ti合金氮化物选择性吸收膜系及其制备方法 |
EP3247818A1 (de) * | 2015-01-19 | 2017-11-29 | Oerlikon Surface Solutions AG, Pfäffikon | Beschichtungskammer zur durchführung eines vakuum gestützten beschichtungsverfahrens, wärmeschild, sowie beschichtungsverfahren |
-
2016
- 2016-01-15 EP EP16700882.0A patent/EP3247818A1/de active Pending
- 2016-01-15 CN CN201680007066.0A patent/CN107406973A/zh active Pending
- 2016-01-15 JP JP2017555841A patent/JP2018503750A/ja active Pending
- 2016-01-15 US US15/544,430 patent/US20180016675A1/en not_active Abandoned
- 2016-01-15 CN CN201680016515.8A patent/CN107406974B/zh active Active
- 2016-01-15 WO PCT/EP2016/050840 patent/WO2016116383A1/de active Application Filing
- 2016-01-15 JP JP2017555840A patent/JP6998214B2/ja active Active
- 2016-01-15 EP EP16700769.9A patent/EP3247817A1/de not_active Withdrawn
- 2016-01-15 US US15/544,428 patent/US20180265968A1/en not_active Abandoned
- 2016-01-15 WO PCT/EP2016/050841 patent/WO2016116384A1/de active Application Filing
Also Published As
Publication number | Publication date |
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WO2016116384A1 (de) | 2016-07-28 |
WO2016116383A1 (de) | 2016-07-28 |
JP6998214B2 (ja) | 2022-01-18 |
EP3247817A1 (de) | 2017-11-29 |
CN107406974A (zh) | 2017-11-28 |
US20180265968A1 (en) | 2018-09-20 |
CN107406974B (zh) | 2021-02-12 |
EP3247818A1 (de) | 2017-11-29 |
CN107406973A (zh) | 2017-11-28 |
US20180016675A1 (en) | 2018-01-18 |
JP2018503749A (ja) | 2018-02-08 |
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