JP2018501119A5 - - Google Patents
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- Publication number
- JP2018501119A5 JP2018501119A5 JP2017552006A JP2017552006A JP2018501119A5 JP 2018501119 A5 JP2018501119 A5 JP 2018501119A5 JP 2017552006 A JP2017552006 A JP 2017552006A JP 2017552006 A JP2017552006 A JP 2017552006A JP 2018501119 A5 JP2018501119 A5 JP 2018501119A5
- Authority
- JP
- Japan
- Prior art keywords
- abrasive article
- magnetic
- magnetic member
- main surface
- abrasive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 claims 32
- 238000005498 polishing Methods 0.000 claims 12
- 239000011159 matrix material Substances 0.000 claims 6
- 229910010272 inorganic material Inorganic materials 0.000 claims 5
- 239000011147 inorganic material Substances 0.000 claims 5
- 239000000853 adhesive Substances 0.000 claims 3
- 230000001070 adhesive effect Effects 0.000 claims 3
- 238000000034 method Methods 0.000 claims 3
- 238000000926 separation method Methods 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 239000000919 ceramic Substances 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 229910003460 diamond Inorganic materials 0.000 claims 1
- 239000010432 diamond Substances 0.000 claims 1
- 239000003302 ferromagnetic material Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201462095090P | 2014-12-22 | 2014-12-22 | |
| US62/095,090 | 2014-12-22 | ||
| PCT/US2015/065772 WO2016106020A1 (en) | 2014-12-22 | 2015-12-15 | Abrasive articles with removable abrasive member and methods of separating and replacing thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2018501119A JP2018501119A (ja) | 2018-01-18 |
| JP2018501119A5 true JP2018501119A5 (https=) | 2019-01-17 |
Family
ID=55178322
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017552006A Pending JP2018501119A (ja) | 2014-12-22 | 2015-12-15 | 取り外し可能な研磨部材を有する研磨物品並びに取り外し可能な研磨部材を分離する方法及び交換する方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20180001441A1 (https=) |
| EP (1) | EP3237146A1 (https=) |
| JP (1) | JP2018501119A (https=) |
| KR (1) | KR20170096025A (https=) |
| CN (1) | CN107257721A (https=) |
| SG (1) | SG11201704838TA (https=) |
| TW (1) | TW201700218A (https=) |
| WO (1) | WO2016106020A1 (https=) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114714245B (zh) | 2016-04-06 | 2025-03-04 | 贰陆特拉华股份有限公司 | 化学-机械平面化垫调节器 |
| US11701755B2 (en) | 2017-12-20 | 2023-07-18 | 3M Innovative Properties Company | Abrasive articles including a saturant and an anti-loading size layer |
| KR102674027B1 (ko) * | 2019-01-29 | 2024-06-12 | 삼성전자주식회사 | 재생 연마패드 |
| US20220388116A1 (en) * | 2021-06-04 | 2022-12-08 | Applied Materials, Inc. | Method of detecting chemical mechanical polishing conditioning disk orientation |
| CN113618620A (zh) * | 2021-09-07 | 2021-11-09 | 玉溪精工数控机床有限公司 | 一种数控车床主轴箱铲刮面研磨专用工装 |
| JP2024535408A (ja) * | 2021-09-29 | 2024-09-30 | インテグリス・インコーポレーテッド | ポリマーバッキングプレートを備えるパッドコンディショナー |
| KR20240061651A (ko) * | 2021-09-29 | 2024-05-08 | 엔테그리스, 아이엔씨. | 양면 패드 컨디셔너 |
| US12521841B2 (en) | 2022-02-21 | 2026-01-13 | Applied Materials, Inc. | Pad carrier assembly for horizontal pre-clean module |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1058502A (en) | 1965-05-06 | 1967-02-15 | Merit Products Inc | Mounting abrasive disks on a drive member |
| US4222204A (en) | 1979-06-18 | 1980-09-16 | Benner Robert L | Holder for an abrasive plate |
| JPS5698554U (https=) * | 1979-12-27 | 1981-08-04 | ||
| JPS5815089Y2 (ja) * | 1980-06-30 | 1983-03-26 | 東洋研磨材工業株式会社 | 研削といし |
| JPH0771788B2 (ja) * | 1986-07-29 | 1995-08-02 | 三菱マテリアル株式会社 | 砥 石 |
| AU689827B2 (en) * | 1993-11-12 | 1998-04-09 | Minnesota Mining And Manufacturing Company | Abrasive grain and method for making the same |
| JPH0929633A (ja) * | 1995-07-18 | 1997-02-04 | Toshiba Mach Co Ltd | ポリッシング研磨布用ドレッシング工具 |
| JP3981199B2 (ja) * | 1998-02-10 | 2007-09-26 | 八千代マイクロサイエンス株式会社 | 両面ラップ盤用回転定盤 |
| US6123612A (en) * | 1998-04-15 | 2000-09-26 | 3M Innovative Properties Company | Corrosion resistant abrasive article and method of making |
| US6224474B1 (en) * | 1999-01-06 | 2001-05-01 | Buehler, Ltd. | Magnetic disc system for grinding or polishing specimens |
| JP2001071273A (ja) * | 1999-09-01 | 2001-03-21 | Hitachi Maxell Ltd | 研磨シ―ト |
| US7377836B1 (en) * | 2000-10-10 | 2008-05-27 | Beaver Creek Concepts Inc | Versatile wafer refining |
| US6815052B2 (en) * | 2000-12-01 | 2004-11-09 | P1 Diamond, Inc. | Filled diamond foam material and method for forming same |
| JP2002254316A (ja) * | 2001-02-28 | 2002-09-10 | Hitachi Maxell Ltd | 研磨シ―ト |
| JP2006205316A (ja) * | 2005-01-28 | 2006-08-10 | Hitachi Maxell Ltd | 磁性層研磨用ラッピングテープ |
| KR101279819B1 (ko) * | 2005-04-12 | 2013-06-28 | 롬 앤드 하스 일렉트로닉 머티리얼스 씨엠피 홀딩스 인코포레이티드 | 방사-편향 연마 패드 |
| WO2008027714A1 (en) * | 2006-08-30 | 2008-03-06 | 3M Innovative Properties Company | Extended life abrasive article and method |
| TW201350267A (zh) * | 2012-05-04 | 2013-12-16 | 聖高拜磨料有限公司 | 用於同雙側化學機械平坦化墊修整器一起使用之工具 |
| JP5919157B2 (ja) * | 2012-10-01 | 2016-05-18 | 株式会社荏原製作所 | ドレッサー |
-
2015
- 2015-12-15 JP JP2017552006A patent/JP2018501119A/ja active Pending
- 2015-12-15 SG SG11201704838TA patent/SG11201704838TA/en unknown
- 2015-12-15 WO PCT/US2015/065772 patent/WO2016106020A1/en not_active Ceased
- 2015-12-15 EP EP15826084.4A patent/EP3237146A1/en not_active Withdrawn
- 2015-12-15 KR KR1020177019967A patent/KR20170096025A/ko not_active Withdrawn
- 2015-12-15 CN CN201580070047.8A patent/CN107257721A/zh active Pending
- 2015-12-15 US US15/537,970 patent/US20180001441A1/en not_active Abandoned
- 2015-12-21 TW TW104143006A patent/TW201700218A/zh unknown
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