JP2018186061A - Anisotropic Conductive Sheet - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an anisotropic conductive sheet capable of suppressing conduction of an adjacent anisotropic conductive portion.SOLUTION: An anisotropic conductive sheet 1 for electrically connecting an inspected device 41 and an inspection device 42 to each other, includes: an insulating layer 3 having a through hole 16 penetrating in the vertical direction; and an anisotropically conductive portion 2 having a conductor portion 4 disposed in the through hole 16. An upper surface of the conductor portion 4 and the peripheral side surface of the through hole 16 define a first recess 33.SELECTED DRAWING: Figure 2

Description

  The present invention relates to an anisotropic conductive sheet, and more particularly to an anisotropic conductive sheet used for electrically connecting a device to be inspected and an inspection device to each other.

  Conventionally, before a semiconductor element is mounted on a circuit board, a function test (continuity test) is performed to determine whether or not the semiconductor element and the circuit board function normally. In functional inspection, it is necessary to electrically connect terminals of an inspected device such as a semiconductor element or a circuit board to an inspection device such as a probe tester. For this purpose, anisotropic conductive sheets (connectors) are used. . Specifically, the anisotropic conductive sheet is sandwiched between the inspection apparatus and the inspection apparatus, the connection portion on one side of the anisotropic conductive sheet is brought into contact with the terminal of the inspection apparatus, and the connection section on the other side is connected to the inspection apparatus. By bringing them into contact with the probe terminals, they are securely connected electrically.

  For example, Patent Document 1 discloses such an anisotropic conductive sheet. The composite conductive sheet described in Patent Document 1 is filled with each of the insulating sheet in which a plurality of through holes are formed, and the rigidity is arranged so as to protrude from both sides of the insulating sheet. And a conductor.

JP 2007-220534 A

  By the way, in the composite conductive sheet, in order to protect the rigid conductor, it is considered to provide a plating layer on the surface of the rigid conductor or to provide a conductive elastic part (cushion part) containing conductive particles and resin. Is done.

  However, in the composite conductive sheet described in Patent Document 1, since the rigid conductor protrudes from the sheet surface, when the plating layer or the conductive elastic portion is formed, the plating layer or the concave portion is formed between the adjacent rigid conductors. The conductive elastic part is likely to adhere. As a result, there is a problem that adjacent rigid conductors are likely to conduct (short-circuit) through the plating layer and the conductive elastic portion.

  An object of the present invention is to provide an anisotropic conductive sheet that can suppress conduction between adjacent anisotropic conductive portions.

  The present invention [1] is an anisotropic conductive sheet for electrically connecting a device to be inspected and an inspection device to each other, and is disposed in the insulating layer having a through hole penetrating in the thickness direction, and the through hole. An anisotropic conductive portion having a conductive portion, and one side in the thickness direction of the conductor portion and a peripheral side surface of the through hole include an anisotropic conductive sheet that defines a first recess.

  According to such an anisotropic conductive sheet, since one side in the thickness direction of the conductor portion and the peripheral side surface of the through hole define the first recess, the plating layer or conductive elasticity is provided on one side in the thickness direction of the anisotropic conductive portion. When arranging the part, the plating layer and the conductive elastic part can be accommodated in the first recess. Therefore, a plating layer or the like is hardly attached to one surface in the thickness direction of the insulating layer, and as a result, it is possible to suppress conduction between conductor portions of adjacent anisotropic conductive portions.

  In the present invention [2], the insulating layer has a fitted portion that is recessed in the surface direction orthogonal to the thickness direction in the through hole, and the conductor portion is a fitted portion that fits into the fitted portion. The anisotropic conductive sheet according to [1] is included.

  According to such an anisotropic conductive sheet, since the conductor portion is fitted in the insulating layer, the conductor portion is fixed to the insulating layer by the fitting portion. Accordingly, even when the conductor portion is pressurized from both sides in the thickness direction by the device to be inspected and the inspection device during the inspection of the device to be inspected, it is possible to prevent the conductor portion from falling off. As a result, durability is excellent.

  This invention [3] contains the anisotropic conductive sheet as described in [2] in which the said conductor part is provided with the inclination part extended in the cross direction which cross | intersects both the thickness direction and a surface direction.

  According to such an anisotropic conductive sheet, since the conductor portion is inclined, the first recess can be formed more reliably.

  This invention [4] contains the anisotropic conductive sheet as described in [3] in which the said conductor part is further provided with the edge part extended in a surface direction from the surface direction edge of the said inclination part.

  According to such an anisotropic conductive sheet, since the conductor portion can fit the end portion extending from the inclined portion to the fitted portion of the insulating layer, the conductor portion is more firmly formed on the insulating layer. Can be fixed. As a result, the conductor part can be more reliably prevented from falling off. Therefore, the durability is further improved.

  As for this invention [5], the said 1st recessed part has a taper shape from which opening cross-sectional area becomes large as it goes to the thickness direction one side, The anisotropic conductivity as described in any one of [1]-[4]. Includes a sheet.

  According to such an anisotropic conductive sheet, the terminal of the device to be inspected can be easily electrically connected to the conductor portion from one side in the thickness direction during the inspection of the device to be inspected.

  In the present invention [6], the other surface in the thickness direction of the conductor portion is located on one side in the thickness direction than the other surface in the thickness direction of the insulating layer, and the other side surface in the thickness direction of the conductor portion and the peripheral side surface of the through hole However, the anisotropic conductive sheet as described in any one of [1]-[5] which divides a 2nd recessed part is included.

  According to such an anisotropic conductive sheet, since the other side surface of the conductor portion in the thickness direction and the peripheral side surface of the through hole define the second recess, the plating layer or the conductive elastic portion is provided on the other side surface in the thickness direction of the conductive portion. When arrange | positioning, a plating layer and a conductive elastic part can be accommodated in a 2nd recessed part. Accordingly, the plating layer or the like is hardly attached to the other surface in the thickness direction of the insulating layer, and as a result, it is possible to suppress conduction between the conductor portions of adjacent anisotropic conductive portions.

  The present invention [7] includes the anisotropic conductive sheet according to [6], wherein the second recess has a tapered shape in which an opening cross-sectional area increases toward the other side in the thickness direction.

  According to such an anisotropic conductive sheet, the terminal of the inspection apparatus can be easily electrically connected to the conductor portion from the other side in the thickness direction when inspecting the apparatus to be inspected.

  As for this invention [8], the said anisotropic conductive part is further equipped with a plating layer in the thickness direction one side and thickness direction other side of the said conductor part, It is described in any one of [1]-[7]. An anisotropic conductive sheet is included.

  According to such an anisotropic conductive sheet, since the oxidation of the conductor portion can be suppressed, the durability is excellent.

  This invention [9] is arrange | positioned at the thickness direction one side of the said conductor part, and is further equipped with the electroconductive elastic part containing electroconductive particle and resin, It is described in any one of [1]-[8]. An anisotropic conductive sheet is included.

  According to such an anisotropic conductive sheet, since the conductive elastic portion is filled in the first recess, even if the height of the plurality of terminals of the device to be inspected varies. When the device under test is pressed against the anisotropic conductive sheet, the conductive elastic portion can be compressed or deformed depending on the height of these terminals. As a result, when the heights of the plurality of terminals are not uniform, the inspection can be reliably performed.

  The conductive elastic portion absorbs excessive pressure from the device under test and avoids direct contact between the conductor portion and the device under test. Therefore, durability is excellent.

  As for this invention [12], the thickness direction one surface of the said plating layer and the surrounding side surface of the said through-hole partition the 3rd recessed part, The volume ratio of the said electroconductive elastic part is with respect to the volume of the said 3rd recessed part. The anisotropic conductive sheet according to [9], which is 20% or more and 200% or less.

  According to such an anisotropic conductive sheet, even when the heights of the plurality of terminals included in the device to be inspected are not uniform, the inspection can be performed more reliably. Further, since the conductive elastic portion can surely relieve pressure and impact on the anisotropic conductive portion, the durability is further improved.

  According to the anisotropic conductive sheet of the present invention, conduction between adjacent anisotropic conductive portions can be suppressed.

FIG. 1: shows the top view of one Embodiment of 1st Embodiment of the anisotropically conductive sheet of this invention. FIG. 2 is a partially enlarged side sectional view taken along line AA in FIG. FIG. 3 is a sectional side view when the anisotropic conductive sheet shown in FIG. 1 is used. 4 shows a sectional side view of an anisotropic conductive sheet with a plating layer using the anisotropic conductive sheet shown in FIG. FIG. 5 is a side sectional view of an anisotropic conductive sheet with a conductive elastic part using the anisotropic conductive sheet shown in FIG. FIG. 6 shows a side sectional view of a modified example of the anisotropic conductive sheet shown in FIG. 1 (a mode in which the cover insulating layer covers the entire upper surface of the flange). FIG. 7 shows a side cross-sectional view of a modified example of the anisotropic conductive sheet shown in FIG. 1 (a configuration in which the second concave portion is reduced in diameter toward the lower side). FIG. 8 shows a side cross-sectional view of a modified example of the anisotropic conductive sheet shown in FIG. 1 (the first base layer is not provided, and the lower surface of the central portion is flush with the lower surface of the second base layer). FIG. 9 shows a side cross-sectional view of a modified example of the anisotropic conductive sheet shown in FIG. 1 (the first base layer is not provided and the central portion protrudes downward). FIG. 10: shows the partial expanded side sectional view of one Embodiment of 2nd Embodiment of the anisotropic conductive sheet of this invention. FIG. 11 shows a side cross-sectional view of an anisotropic conductive sheet with a plating layer using the anisotropic conductive sheet shown in FIG. FIG. 12 is a side sectional view of an anisotropic conductive sheet with an elastic portion using the anisotropic conductive sheet shown in FIG. FIG. 13: shows the partial expanded side sectional view of one Embodiment of 3rd Embodiment of the anisotropically conductive sheet of this invention. 14 shows a side sectional view of an anisotropic conductive sheet with a plating layer using the anisotropic conductive sheet shown in FIG. FIG. 15: shows the partial expanded side sectional view of one Embodiment of 4th Embodiment of the anisotropically conductive sheet of this invention. FIG. 16: shows the partial expanded side sectional view of one Embodiment of 5th Embodiment of the anisotropically conductive sheet of this invention. FIG. 17: shows the partial expanded side sectional view of one Embodiment of 6th Embodiment of the anisotropically conductive sheet of this invention.

  1, the paper thickness direction is the vertical direction (thickness direction, first direction), the front side of the paper is the upper side (thickness direction one side, the first direction one side), and the back side of the paper surface is the lower side (the other in the thickness direction). Side, the other side in the first direction). Further, the left and right direction on the paper surface is the left and right direction (second direction orthogonal to the first direction), the left side of the paper surface is the left side (one side in the second direction), and the right side of the paper surface is the right side (the other side in the second direction). Further, the vertical direction of the paper surface is the front-back direction (a third direction orthogonal to the first direction and the second direction), the lower side of the paper surface is the front side (the third direction one side), and the upper side of the paper surface is the rear side (the other in the third direction) Side). Specifically, it conforms to the direction arrow in each figure.

<First Embodiment>
1. Anisotropic conductive sheet With reference to FIGS. 1-3, one Embodiment of the anisotropic conductive sheet of 1st Embodiment of this invention is described.

  As shown in FIG. 1, the anisotropic conductive sheet 1 has a substantially rectangular flat plate shape in plan view extending in the surface direction (front-rear direction and left-right direction). The anisotropic conductive sheet 1 includes a plurality of anisotropic conductive portions 2.

  The plurality of anisotropic conductive portions 2 are disposed adjacent to the substantially central portion in plan view of the anisotropic conductive sheet 1 so as to be aligned in the front-rear direction and the left-right direction. Specifically, the anisotropic conductive sheet 1 is formed of only a plurality of anisotropic conductive portions 2 except for the peripheral end portion. That is, the anisotropic conductive sheet 1 is formed from a plurality of continuous anisotropic conductive portions 2.

  As shown in FIG. 2, each of the plurality of anisotropic conductive portions 2 includes an insulating layer 3 and a conductor portion 4. The insulating layer 3 is formed with a through hole 16 having a fitted portion 32 extending in the surface direction, and the conductor portion 4 is disposed in the through hole 16 and is fitted to the fitted portion 32. The fitting part 31 is provided.

  Specifically, the insulating layer 3 includes a base insulating layer and a cover insulating layer (cover layer) 7 as a third insulating portion. The base insulating layer integrally includes a first base insulating layer (first base layer) 5 as a first insulating portion and a second base insulating layer (second base layer) 6 as a second insulating portion. Yes.

  The first base layer 5 is located at the lowermost part of the insulating layer 3 and is disposed below the lower surface (the other surface in the thickness direction) of the central portion 21 (described later) of the conductor portion 4. Specifically, the first base layer 5 is formed on the lower surface of the second base layer 6 so that the upper surface (one surface in the thickness direction) of the first base layer 5 is continuous (contacted) with the lower surface of the second base layer 6. Has been placed. The lower surface of the first base layer 5 is exposed.

  The first base layer 5 has a first opening 11 that penetrates the first base layer 5 in the vertical direction. The first opening 11 has a circular shape in a bottom view, and has a tapered shape in which the opening cross-sectional area increases as it goes downward in a side cross-sectional view. In other words, the first opening 11 has a substantially truncated cone shape that increases in diameter toward the lower side. The first opening 11 communicates with the second opening 12 on the upper side.

  The second base layer 6 is located in the middle of the insulating layer 3 in the vertical direction and is disposed on the upper side of the first base layer 5. Specifically, the second base layer 6 is such that the lower surface of the second base layer 6 is continuous with the upper surface of the first base layer 5 and the upper surface of the second base layer 6 is continuous with the lower surface of the cover layer 7. It is disposed on the upper surface of the first base layer 5 and the lower surface of the cover layer 7.

  The second base layer 6 includes an inclined surface 17 that partitions a second opening 12 (described later) and an upper end surface 18 that continues from the upper end of the inclined surface 17 to the outside of the second opening 12. The second base layer 6 covers the lower surface of the peripheral side portion of the conductor portion 4. Specifically, the second base layer 6 has its inclined surface 17 in contact with the entire lower surface of the inclined portion 22 (described later) and its upper end surface 18 in contact with the entire lower surface of the flange portion 23 (described later). The lower surface of the conductor part 4 is covered.

  The second base layer 6 has a second opening 12 that penetrates the second base layer 6 in the vertical direction. The second opening 12 has a circular shape in a bottom view, and has a tapered shape in which the opening cross-sectional area increases as it goes upward in a side sectional view. That is, the second opening 12 has a substantially truncated cone shape that increases in diameter as it goes upward. The second opening 12 communicates with the first opening 11 on the lower side, and communicates with the third lower opening 14 on the upper side. The opening at the lower end of the second opening 12 coincides with the opening at the lower end of the first opening 11.

  The cover layer 7 is located on the uppermost part of the insulating layer 3 and is disposed on the upper side of the second base layer 6. Specifically, the cover layer 7 is disposed on the upper surface of the second base layer 6 so that the lower surface of the cover layer 7 is continuous with the upper surface of the second base layer 6. The cover layer 7 is disposed above the lower surface of the flange portion 23 (described later) of the conductor portion 4. Further, the upper surface of the cover layer 7 is exposed. The cover layer 7 has a side cross-sectional shape and covers the peripheral side surface and the top surface of the conductor portion 4 (specifically, the entire peripheral side surface and the entire top surface of the flange portion 23).

  The cover layer 7 has a third opening 13 that penetrates the cover layer 7 in the vertical direction. The third opening 13 includes a third lower opening 14 that defines the lower side of the third opening 13 and a third upper opening 15 that defines the upper side of the third opening 13.

  The third lower opening 14 has a substantially circular shape in plan view and a substantially rectangular shape in side sectional view. That is, the third lower opening 14 has a substantially cylindrical shape. The third lower opening 14 communicates with the second opening 12 on the lower side, and communicates with the third upper opening 15 on the upper side. The opening at the lower end of the third lower opening 14 is wider than the opening at the upper end of the second opening 12, and the third lower opening 14 includes the second opening 12 when projected in the vertical direction. .

  The third upper opening 15 has a substantially circular shape in plan view, and has a tapered shape in which the opening cross-sectional area increases toward the upper side in a side sectional view. That is, the third upper opening 15 has a substantially truncated cone shape that increases in diameter toward the upper side. The third upper opening 15 communicates with the third lower opening 14 on the lower side. The opening at the lower end of the third upper opening 15 is narrower than the opening at the upper end of the third lower opening 14, and when projected in the vertical direction, the third upper opening 15 becomes the third lower opening 14. include.

  The first opening portion 11, the second opening portion 12, and the third opening portion 13 communicate with each other in the vertical direction, and form a through hole 16 that penetrates the insulating layer 3 in the vertical direction.

  The first base layer 5, the second base layer 6 and the cover layer 7 are respectively made of, for example, polyimide resin, polyamideimide resin, acrylic resin, polyether resin, nitrile resin, polyethersulfone resin, polyethylene terephthalate resin, polyethylene naphthalate. It is formed from a synthetic resin such as a resin or polyvinyl chloride resin, and is preferably formed from a polyimide resin.

  The diameter (surface direction length) L1 of the opening at the lower end of the first opening 11 (the lower end of the through hole 16) is, for example, 5 μm or more, preferably 15 μm or more, and for example, 120 μm or less, preferably 50 μm or less.

  The diameter L2 of the opening at the lower end of the second opening 12 (the upper end of the first opening 11) (that is, the diameter of the central portion 21) is, for example, 5 μm or more, preferably 15 μm or more, and for example, 100 μm. Hereinafter, it is preferably 50 μm or less. The ratio of L1 to L2 (L1 / L2) is, for example, 1.0 or more, and for example, 2.0 or less, preferably 1.5 or less.

  The diameter L3 of the opening at the upper end or the lower end of the third lower opening 14 (that is, the diameter of the entire conductor portion 4) is, for example, 15 μm or more, preferably 21 μm or more, and for example, 190 μm or less, preferably 70 μm or less.

  The diameter L4 of the opening at the lower end of the third upper opening 15 is, for example, 5 μm or more, preferably 15 μm or more, and for example, 100 μm or less, preferably 50 μm or less.

  The diameter L5 of the opening at the upper end of the third upper opening 15 (the upper end of the through hole 16) is, for example, 5 μm or more, preferably 15 μm or more, and for example, 100 μm or less, preferably 50 μm or less. The ratio of L5 to L2 (L5 / L2) is, for example, 1.0 or more, and is, for example, 3.0 or less, preferably 2.0 or less.

  The length L6 in the surface direction in which the second base layer 6 covers the lower surface of the flange 23 (that is, the length in the surface direction of the flange 23) is, for example, 1 μm or more, preferably 5 μm or more. For example, it is 50 μm or less, preferably 15 μm or less. The ratio of L6 to L3 (L6 / L3) is, for example, 0.06 or more, preferably 0.1 or more, and for example, 0.35 or less, preferably 0.30 or less. If the length L6 and the ratio are within the above ranges, the first base layer 5 can securely fix the flange portion 23 from below, so that the conductor portion 4 can be more firmly fixed.

  The radial length L7 that the cover layer 7 covers the upper surface of the flange portion 23 (conductor portion 4) is, for example, 1 μm or more, preferably 3 μm or more, and for example, 20 μm or less, preferably 10 μm. It is as follows. If the length L7 is in the above range, the first base layer 5 can reliably fix the flange 23 from above, and thus the conductor 4 can be more firmly fixed.

  The thickness (length in the vertical direction) T1 of the first base layer 5 (that is, the depth of the first opening 11) is, for example, 1 μm or more, preferably 5 μm or more, and for example, 50 μm or less, preferably 30 μm or less.

  The thickness T2 of the second base layer 6 (that is, the depth of the second opening 12) is, for example, 2 μm or more, preferably 3 μm or more, and for example, 25 μm or less, preferably 18 μm or less.

  The thickness T3 of the cover layer 7 (that is, the depth of the third opening 13) is, for example, 3 μm or more, preferably 6 μm or more, and for example, 45 μm or less, preferably 28 μm or less.

  The thickness T4 (that is, the depth of the third upper opening 15) on the upper surface of the flange portion 23 of the cover layer 7 is, for example, 1 μm or more, preferably 3 μm or more, and for example, 20 μm or less, preferably 10 μm or less.

  The total thickness T5 of the insulating layer 3 (that is, the depth of the through hole 16) is, for example, 100 μm or less, preferably 50 μm or less, more preferably 40 μm or less, and for example, 10 μm or more. If the thickness of the insulating layer 3 is less than or equal to the above upper limit, it is easy to flex in the vertical direction, so that the shape and warpage of the device under test 41 can be easily followed. Therefore, inspection at a lower pressure is possible.

  The conductor portion 4 is disposed in the through hole 16. Specifically, the conductor 4 is filled in the second opening 12 and the third opening 13. The conductor part 4 has a substantially circular shape in plan view. The conductor portion 4 is disposed at the central portion 21 disposed in the radial direction (surface direction center) of the conductor portion 4, the inclined portion 22 disposed on the radially outer side of the central portion 21, and the radially outer side of the inclined portion 22. And a flange portion 23 (flange portion) as an end portion.

  The central portion 21 is disposed inside the second opening 12. That is, the central portion 21 is filled in the second opening 12. The central part 21 has a substantially circular shape in plan view and a substantially rectangular shape in side sectional view. That is, the center part 21 has a disk shape. The peripheral edge of the central portion 21 coincides with the opening at the upper end of the first opening 11. Further, the upper surface and the lower surface of the central portion 21 are exposed from the insulating layer 3 (second base layer 6).

  The inclined portion 22 is disposed inside the second opening 12 and the third lower opening 14. That is, the inclined portion 22 is filled in the second opening 12 and the third lower opening 14. The inclined portion 22 has a substantially annular shape in plan view and a substantially rectangular shape in side sectional view. The inclined portion 22 has an inner edge that is continuous with the peripheral edge (surface direction edge) of the central portion 21, and an outer peripheral edge that is continuous with the inner peripheral edge of the flange portion 23. 23 is integrated continuously. The inclined portion 22 is formed so as to extend from the peripheral edge of the central portion 21 in a crossing direction that intersects both the vertical direction and the radial direction (plane direction) in a side sectional view. Specifically, the inclined portion 22 is formed so as to extend linearly from the peripheral edge of the central portion 21 in an oblique direction inclined upward as it goes radially outward.

  The inner peripheral edge of the inclined portion 22 coincides with the opening at the lower end of the second opening portion 12, and the outer peripheral edge of the inclined portion 22 coincides with the opening at the upper end of the second opening portion 12. The upper surface of the inclined portion 22 is exposed, and the lower surface of the inclined portion 22 is covered with the second base layer 6.

  The flange 23 is disposed inside the third lower opening 14. That is, the flange portion 23 is filled in the outer peripheral portion of the third opening portion 13. The flange 23 has a substantially annular shape in plan view and a substantially rectangular shape in side sectional view. The flange portion 23 is integrally continuous with the inclined portion 22 such that the inner edge thereof is continuous with the outer peripheral edge of the inclined portion 22. The collar portion 23 is formed so as to extend in the radial direction (surface direction) from the outer peripheral edge (surface direction edge) of the inclined portion 22 in a side sectional view.

  The inner peripheral edge of the flange 23 coincides with the opening at the upper end of the second opening 12, and the outer peripheral edge of the flange 23 coincides with the opening of the third lower opening 14.

  The upper surface and outer peripheral side surface of the flange portion 23 are covered with the cover layer 7, and the lower surface of the flange portion 23 is covered with the second base layer 6. Specifically, a part of the upper surface (outer portion) of the flange portion 23 and the entire outer peripheral side surface of the flange portion 23 are in contact with the cover layer 7, and the entire lower surface of the flange portion 23 is the second base layer 6. In contact with the entire surface. For this reason, the collar part 23 is divided by the 2nd base layer 6 and the cover layer 7, and is fitted in the outer peripheral part of the 3rd lower side opening part 14 dented in a surface direction. That is, the flange portion 23 constitutes the fitting portion 31, and the outer peripheral portion of the third lower opening portion 14 constitutes the fitted portion 32 into which the fitting portion 31 is fitted.

  The thickness T6 of the central portion 21 and the thickness T7 of the flange portion 23 are each 2 μm or more, preferably 3 μm or more, for example, 25 μm or less, preferably 18 μm or less.

  The inclination angle θ of the inclined portion 22 with respect to the central portion 21 (that is, the angle formed between the lower surface of the second base layer 6 and the inclined surface 17) is, for example, 30 ° or more, preferably 45 ° or more. , 80 ° or less, preferably 65 ° or less.

  In the anisotropic conductive portion 2, the upper surface of the conductor portion 4 and the peripheral side surface of the through hole 16 define the first recess 33. Specifically, the upper surface of the central portion 21 and the inclined portion 22 and the peripheral side surface of the third upper opening 15 define the first recess 33.

  The first concave portion 33 is formed so as to dent the upper surface of the anisotropic conductive portion 2 downward. The first recess 33 has a tapered shape in which the opening cross-sectional area increases from the bottom surface (the upper surface of the central portion 21) toward the upper side.

  The lower surface of the conductor portion 4 is located above the lower surface of the first base layer 5, and the lower surface of the conductor portion 4 and the peripheral side surface of the through hole 16 define the second recess 34. Specifically, the lower surface of the central portion 21 and the peripheral side surface of the first opening 11 define the second recess 34.

  The second concave portion 34 is formed so as to dent the lower surface of the anisotropic conductive portion 2 toward the upper side. The second recess 34 has a tapered shape in which the opening cross-sectional area increases from the bottom surface (the lower surface of the central portion 21) toward the lower side.

  The depth (vertical length) D1 of the first recess 33 and the depth D2 of the second recess 34 are each 3 μm or more, preferably 5 μm or more, for example, 40 μm or less, preferably 25 μm or less.

  As a material of the conductor part 4, metal materials, such as copper, silver, gold | metal | money, nickel, or an alloy containing them, are mentioned, for example, Preferably, copper is mentioned.

  The anisotropic conductive sheet 1 includes, for example, a base insulating layer forming step for forming a base insulating layer, a conductor portion forming step for forming the conductor portion 4, a cover layer forming step for forming the cover layer 7, and a first opening. It can be obtained by sequentially performing the opening forming process for forming the portion 11.

  In the base insulating layer forming step, for example, a photosensitive varnish is applied to the substrate, dried, and then exposed and developed with a pattern having a recess corresponding to the second opening 12. Thereafter, if necessary, heat curing is performed to remove the substrate. Thereby, a base insulating layer including the first base layer 5 not having the first opening 11 and the second base layer 6 having the second opening 12 (concave portion) is obtained.

  In the conductor portion forming step, the conductor portion 4 is formed in the concave portion of the base insulating layer and the periphery thereof by, for example, a known patterning method for forming a wiring such as an additive method or a subtractive method.

  In the cover layer forming step, for example, a photosensitive varnish is applied to the upper surfaces of the second base layer 6 and the conductor portion 4, dried, and then exposed and developed with a pattern having the third opening 13. Thereafter, if necessary, the cover layer 7 is formed after heat curing.

  In the opening forming step, for example, the first opening 11 is formed on the lower surface (first base layer 6) of the base insulating layer by known etching or the like.

  In the sectional side view, the anisotropic conductive portion 2 is symmetric with respect to the axis (the phantom line shown in FIG. 2) passing through the center point in the radial direction of the central portion 21 of the conductor portion 4 in the vertical direction. In other words, the anisotropic conductive portion 2 is bilaterally symmetric in the side sectional view.

  The distance L8 (pitch between conductor parts) between the radial center point of one conductor part 4 (center part 21) and the radial center point of another adjacent conductor part 4 is, for example, 30 μm or more, preferably 40 μm. For example, it is 200 μm or less, preferably 80 μm or less, and more preferably 60 μm or less. If the pitch L8 between the conductors is within the above range, the distance between the conductors 4 is sufficiently narrow, so that it is possible to inspect the device 41 to be further miniaturized.

  The thickness T8 of the anisotropic conductive sheet 1, that is, the vertical length from the upper end to the lower end of the anisotropic conductive portion 2, is, for example, 100 μm or less, preferably 50 μm or less, more preferably 40 μm or less. For example, it is 10 μm or more. If the anisotropic conductive sheet 1 has a thickness equal to or less than the above upper limit, it is easy to flex in the vertical direction, and therefore the shape and warpage of the device under test 41 can be easily followed. Therefore, inspection at a lower pressure is possible.

  The anisotropic conductive sheet 1 is used to electrically connect the device under inspection 41 and the inspection device 42 to each other.

  Specifically, as shown in FIG. 3, an inspected apparatus 41 having a plurality of terminals 43 and an inspection apparatus 42 having a plurality of inspection probes 44 are prepared. Examples of the device under test 41 include a semiconductor element and a printed circuit board. Examples of the inspection device 42 include known or commercially available inspection devices such as a probe tester and a printed circuit board inspection device.

  Next, the terminal 43 of the device under test 41 is brought into contact with the upper surface of the conductor portion 4, that is, the upper surface of the central portion 21, while the inspection probe 44 of the inspection device 42 is brought into contact with the lower surface of the conductor portion 4, ie, the central portion 21. Make contact with the bottom surface.

  Thereafter, a function test such as a continuity test can be performed on the device under test 41 by the operation of the test device 42.

  Note that the anisotropic conductive sheet 1 does not include the inspected apparatus 41 and the inspection apparatus 42, and the anisotropic conductive sheet 1 itself is a device that can be used industrially by distributing components alone. Moreover, this anisotropic conductive sheet can be used also as one part of the anisotropic conductive sheet 50 with a plating layer mentioned later and the anisotropic conductive sheet 60 with an elastic part.

  And this anisotropically conductive sheet 1 is provided with the anisotropic conductive part 2 which has the insulating layer 3 which has the through-hole 16 penetrated to an up-down direction, and the conductor part 4 arrange | positioned in the through-hole 16, and is a conductor. The upper surface of the portion 4 and the peripheral side surface of the through hole 16 define the first recess 33.

  Therefore, when the plating layers 51 and 52 (described later) and the conductive elastic portion 61 (described later) are arranged on the upper surface of the anisotropic conductive portion 2, the plating layer 51 and the conductive elastic portion 61 are accommodated in the first recess 33. can do. Therefore, the plating layer 51 or the like is hardly attached to the upper surface of the cover layer 7. As a result, it is possible to suppress conduction between the conductor portions 4 of the adjacent anisotropic conductive portions 2.

  Further, even when the tip of the terminal 43 of the device under test 41 is slightly displaced from the target contact point (the conductor portion in the first recess 33), the tip of the terminal 43 of the device under test 41 is not changed. 1 can be guided and taken into the recess 33. Therefore, the terminal 43 of the device under test 41 can easily and reliably come into contact with the conductor portion 4 and the conduction reliability is improved.

  Moreover, since this anisotropic conductive sheet 1 can form the conductor part 4 (the center part 21, the inclined part 22, the collar part 23) by the patterning method which forms a well-known fine wiring etc., it is the pitch between conductor parts. L8 can be narrowed. Therefore, it is possible to inspect a finer device under test 41.

  The insulating layer 3 has a fitted portion 32 (an outer peripheral portion of the third lower opening 14) that is recessed in the surface direction in the through-hole 16, and the conductor portion 4 is fitted to the fitted portion 32. It has a fitting part 31 (a collar part 23).

  Therefore, the conductor portion 4 is fixed to the insulating layer 3 by the fitting of the flange portion 23 and the third lower opening portion 14. Therefore, even when the conductor portion 4 is pressed from above or below by the terminal 43, the inspection device 42, and the inspection probe 44 of the device under test 41 during the inspection of the device under inspection 41, the conductor portion 4 is not inserted into the through hole. It can suppress falling off from 16. As a result, durability is excellent.

  Moreover, the conductor part 4 is provided with the center part 21 and the inclination part 22 extended in the diagonal direction (especially the direction which goes up as it goes to radial direction outer side).

  Therefore, the center part 21 can be arrange | positioned under the through-hole 16, and the 1st recessed part 33 can be formed in the anisotropic conductive part 2 more reliably.

  The conductor portion 4 further includes a flange portion 23 that extends radially outward from the outer peripheral edge of the inclined portion 22.

  Therefore, the flange portion 23 can be fitted to the fitted portion 32 of the insulating layer 3. Thereby, each of the upper surface, the lower surface, and the outer peripheral side surface of the flange portion 23 is fixed to the insulating layer 3 (the first base layer 5 and the second base layer 6). Therefore, the conductor portion 4 can be applied to any one of pressurization from the upper side by the terminal 43 of the device under test 41, pressurization from the lower side by the test probe 44 of the test device 42, and stress in the surface direction by these. Is firmly fixed and misalignment hardly occurs. As a result, it is possible to more reliably suppress the conductor part 4 from falling off. Therefore, the durability is further improved.

  Moreover, the 1st recessed part 33 has a taper shape from which an opening cross-sectional area becomes large as it goes upwards.

  Therefore, when inspecting the device under test 41, the terminal 43 of the device under test 41 can be easily electrically connected to the upper surface of the central portion 21 from above. In particular, even if the tip of the terminal 43 of the device under test 41 is slightly displaced from the target contact point (the conductor portion in the first recess 33), the tip of the terminal 43 of the device under test 41 is not changed. 1 can be guided and taken into the recess 33 more smoothly. Therefore, the conduction reliability is further improved.

  The lower surface of the conductor portion 4 is located above the lower surface of the first base layer 5, and the lower surface of the conductor portion 4 and the peripheral side surface of the through hole 16 define the second recess 34.

  Therefore, when the second plating layer 52 and the conductive elastic part 61 are arranged on the lower surface of the conductor part 4, the second plating layer 52 and the conductive elastic part 61 can be accommodated in the second recess 34. Therefore, the second plating layer 52 and the like are hardly attached to the lower surface of the first base layer 5, and as a result, it is possible to suppress conduction between the conductor portions 4 of the adjacent anisotropic conductive portions 2.

  Moreover, the 2nd recessed part 34 has a taper shape from which an opening cross-sectional area becomes large as it goes below.

  Therefore, when inspecting the device under inspection 41, the inspection probe 44 of the inspection device 42 can be easily electrically connected to the lower surface of the central portion 21 from the lower side. In particular, even when the tip of the inspection probe 44 of the inspection device 42 is slightly displaced from the target contact point (the conductor portion in the second recess 34), the tip of the inspection probe 44 of the inspection device 42 is moved to the first position. 2 It is possible to guide and take in the recess 34 more smoothly. Therefore, the conduction reliability is further improved.

2. Anisotropic conductive sheet with plating layer The anisotropic conductive sheet 1 may further include a plating layer. Specifically, an anisotropic conductive sheet 50 with a plating layer shown in FIG. 4 includes a first plating layer 51 disposed on the upper surface (one surface in the thickness direction) of the conductor portion 4 and the lower surface (thickness direction) of the conductor portion 4. A second plating layer 52 is further provided on the other surface.

  The first plating layer 51 is disposed on the upper surface of the conductor portion 4 so as to cover the entire upper surface of the conductor portion 4 and part of the side surface (inclined surface) of the cover layer 7.

  The first plating layer 51 includes a first inner plating layer 53 and a first outer plating layer 54.

  The first inner plating layer 53 is disposed on the upper surface of the conductor portion 4 so as to cover the entire upper surface of the conductor portion 4 and a part of the side surface of the cover layer 7.

  The first outer plating layer 54 is disposed on the upper surface of the first inner plating layer 53 so as to cover the entire upper surface of the first inner plating layer 53.

  Examples of the material of the first plating layer 51 include metal materials such as gold, silver, copper, and nickel.

  The first inner plating layer 53 is preferably a nickel plating layer, and the first outer plating layer is preferably a gold plating layer. Thereby, since electrical conductivity is further excellent, inspection sensitivity can be improved and pitch L8 between conductor parts can be narrowed.

  The second plating layer 52 is disposed on the lower surface of the conductor portion 4 so as to cover the entire lower surface of the conductor portion 4 and part of the side surface (inclined surface) of the first base layer 5.

  The second plating layer 52 includes a second inner plating layer 55 and a second outer plating layer 56.

  The second inner plating layer 55 is disposed on the lower surface of the conductor portion 4 so as to cover the entire lower surface of the conductor portion 4 and a part of the side surface of the first base layer 5.

  The second outer plating layer 56 is disposed on the lower surface of the second inner plating layer 55 so as to cover the entire lower surface of the second inner plating layer 55.

  Examples of the material of the second plating layer 52 include metal materials such as gold, silver, copper, and nickel.

  The second inner plating layer 55 is preferably a nickel plating layer, and the second outer plating layer is preferably a gold plating layer. Thereby, since electrical conductivity is further excellent, inspection sensitivity can be improved and pitch L8 between conductor parts can be narrowed.

  The thickness (53, 54, 55, 56) of each plating layer is, for example, 0.01 μm or more, preferably 0.05 μm or more, and, for example, 50 μm or less, preferably 12 μm or less, more preferably. Is 8 μm or less.

  Examples of the method of providing the plating layers 51 and 52 include known plating methods such as an electrolytic plating method and an electroless plating method.

  The upper surface of the first plating layer 51 and the peripheral side surface of the through hole 16 define the third recess 57, and the lower surface of the second plating layer 52 and the peripheral side surface of the through hole 16 define the fourth recess 58. Specifically, the upper surface of the first outer plating layer 54 and the peripheral side surface of the third upper opening 15 define the third recess 57, and the lower surface of the second outer plating layer 56 and the peripheral side surface of the first opening 11. However, the fourth recess 58 is partitioned.

  The diameter L9 of the bottom surface of the third recess 57 and the diameter L10 of the bottom surface of the fourth recess 58 are, for example, 3 μm or more, preferably 5 μm or more, and for example, 80 μm or less, preferably 40 μm or less. .

  The depth D3 of the third recess 57 and the depth D4 of the fourth recess 58 are, for example, 5 μm or more, preferably 8 μm or more, and for example, 60 μm or less, preferably 40 μm or less.

  The anisotropic conductive sheet 59 with a plating layer includes plating layers 51 and 52. Therefore, the oxidation of the conductor part 4 can be suppressed and the durability is further improved.

3. Anisotropic Conductive Sheet with Elastic Part The anisotropic conductive sheet 1 can further include a conductive elastic part 61. Specifically, the anisotropic conductive sheet 60 with an elastic portion shown in FIG. 5 further includes a conductive elastic portion 61 arranged above the conductor portion 4 in the anisotropic conductive portion 2.

  The anisotropic conductive portion 2 includes a conductor portion 4, plating layers (first plating layer 51 and second plating layer 52), and a conductive elastic portion 61.

  The conductive elastic portion 61 is disposed in the third recess 57 in the anisotropic conductive portion 2. That is, the conductive elastic portion 61 is filled in the third recess 57. The shape of the conductive elastic portion 61 is the same as the shape of the third recess 57, has a substantially circular shape in plan view, and has a tapered shape in which the cross-sectional area increases toward the upper side in a side cross-sectional view. ing.

  The upper surface of the conductive elastic portion 61 is formed so as to be flush with the upper surface of the cover layer 7.

  The conductive elastic part 61 is formed from a conductive resin composition containing conductive particles 62 and a resin.

  Examples of the material of the conductive particles 62 include metals such as iron, cobalt, nickel, gold, silver, copper, palladium, rhodium, and alloys thereof.

  The conductive particles 62 may be metal particles that are the above metals. In addition, the conductive particles may be, for example, core-shell type particles including non-conductive particles (polymer particles, glass beads, etc.) as a core material and a shell portion that is the above metal on the surface of the core material.

  The average particle diameter of the conductive particles 62 is, for example, 1 μm or more and 10 μm or less.

  Examples of the resin include an elastic material such as rubber, a resin forming the insulating layer 3, and the like, and preferably rubber.

  Examples of rubber include natural rubber, polybutadiene rubber, polyisoprene rubber, chloroprene rubber, styrene-butadiene copolymer rubber, acrylonitrile-butadiene copolymer rubber, styrene-butadiene-diene block copolymer rubber, and styrene-isoprene block. Conjugated diene rubbers such as copolymers and hydrogenated products thereof, such as urethane rubber, polyester rubber, epichlorohydrin rubber, silicone rubber, ethylene-propylene copolymer rubber, ethylene-propylene-diene copolymer rubber, etc. Can be mentioned.

  The hardness of the conductive elastic portion 61 is, for example, 30 Hs or more, preferably 40 Hs or more, and for example, 70 Hs or less, preferably 60 Hs or less. By setting the hardness of the conductive elastic portion 61 within the above range, the conductive elastic portion 61 can be deformed more flexibly corresponding to the plurality of terminals 43. The hardness can be measured, for example, by the method described in JIS K 6253.

  For example, the anisotropic conductive sheet 60 with an elastic portion is formed by applying a composition containing the conductive particles 62 and a resin to the entire upper surface of the anisotropic conductive sheet 1 and then applying the composition of the anisotropic conductive sheet 1 with a squeegee. It can be manufactured by rubbing the upper surface and moving the composition to the third recess 57. Specifically, the production method described in JP-A-2015-26584 can be referred to.

  The anisotropic conductive sheet 60 with an elastic part includes a conductive elastic part 61 in the third recess 57. Therefore, even if the height of the plurality of terminals 43 of the device under test 41 varies, when the device under test 41 is pressed against the anisotropic conductive sheet 60 with an elastic portion, these terminals are used. The conductive elastic portion 61 can be compressed downward according to the individual heights of 43. In particular, the conductive elastic portion 61 is compressed according to its thickness, and can compress a thickness of several μm, for example. As a result, even when the heights of the plurality of terminals 43 are not uniform, the inspection can be reliably performed.

  The conductive elastic portion 61 absorbs pressure from the device under test 41 and avoids direct contact between the conductor portion 4 and the terminal 43. Therefore, the durability is further improved.

  In the embodiment shown in FIG. 5, the conductive elastic portion 61 is formed so that the upper surface thereof is flush with the upper surface of the cover layer 7. That is, the conductive elastic portion 61 is filled so that the volume ratio is 100% with respect to the volume of the third recess 57. However, for example, although not shown, the conductive elastic portion 61 may be formed such that its upper surface is above or below the upper surface of the cover layer 7. In such a case, the volume ratio of the conductive elastic portion 61 is, for example, 20% or more, preferably 50% or more, and, for example, 200% or less, preferably with respect to the volume of the third recess 57. 150% or less.

  If the volume ratio of the conductive elastic portion 61 is within the above range, even if the heights of the plurality of terminals 43 of the device under test 41 are not uniform, the inspection can be reliably performed. Moreover, since the electroconductive elastic part 61 can relieve | moderate the pressure and impact to the anisotropic conductive part 2 reliably, durability is further excellent.

4). Modified Example With reference to FIGS. 6 to 9, a modified example of the anisotropic conductive sheet 1 of the first embodiment will be described. In addition, in a modification, the same code | symbol is attached | subjected to the member similar to embodiment shown above in FIG. 2, etc., and the description is abbreviate | omitted.

  (1) In the embodiment shown in FIG. 2, the cover layer 7 covers only a part of the upper surface of the flange 23. For example, as shown in FIG. The entire upper surface may be covered.

  In the embodiment shown in FIG. 6, the inclined surface of the cover layer 7 is formed to be flush with the upper surface of the inclined surface 17 of the conductor portion 4 in the direction in which the inclined surface 17 of the conductor portion 4 extends.

  Also in the anisotropic conductive sheet 1 shown in FIG. 6, the same effect as the embodiment shown in FIG. 2 can be obtained.

  (2) In the embodiment shown in FIG. 2, the first opening 11 has a tapered shape in which the opening cross-sectional area increases toward the lower side. For example, as shown in FIG. The portion 11 may have a tapered shape in which the opening cross-sectional area decreases toward the lower side. Although not illustrated, the first opening 11 is a cylinder having a uniform opening cross-sectional area in the vertical direction. You may have a shape.

  Furthermore, in the embodiment shown in FIG. 7, the third opening 13 has a cylindrical shape having a uniform opening cross-sectional area in the vertical direction.

  Also in the anisotropic conductive sheet 1 shown in FIG. 7, the same effect as the embodiment shown in FIG. 2 can be obtained. The embodiment shown in FIG. 2 is preferable because of the ease of connection at the inspection probe 44 of the inspection device 42 and the terminal 43 of the device under inspection 41.

  (3) In the embodiment shown in FIG. 2, the anisotropic conductive portion 2 includes the first base layer 5. For example, as shown in FIGS. 8 and 9, the anisotropic conductive portion 2 includes the first base layer 5. The base layer 5 may not be provided.

  In the embodiment shown in FIGS. 8 and 9, the insulating layer 3 includes only the second base layer 6 and the cover layer 7, and the lower surface of the second base layer 6 is exposed. Further, the insulating layer 3 does not include the first opening 11, and the second opening 12 and the third opening 13 form the through hole 16. The anisotropic conductive part 2 does not have the second recess 34.

  In the embodiment shown in FIG. 8, the lower surface of the central portion 21 is formed to be flush with the lower surface of the second base layer 6.

  In the embodiment shown in FIG. 9, the lower surface of the central portion 21 is located below the lower surface of the second base layer 6. That is, the central portion 21 protrudes below the lower surface of the insulating layer 3. Further, a part of the lower surface of the inclined portion 22 is exposed from the second base layer 6.

  Also in the anisotropic conductive sheet 1 shown in FIG. 8 and FIG. 9, the same effect as the embodiment shown in FIG. 2 can be obtained. Preferably, when disposing the second plating layer 52 and the like, the embodiment shown in FIG. 2 can be cited from the viewpoint of suppressing conduction between the conductor portions 4 of the adjacent anisotropic conductive portions 2.

  (4) The anisotropic conductive sheet 1 shown in FIGS. 6 to 9 is also referred to the anisotropic conductive sheet 50 with a plating layer shown in FIG. 4 and the anisotropic conductive sheet 60 with an elastic portion shown in FIG. As described above, the plating layers 51 and 52 and the conductive elastic portion 61 can be provided.

  (5) In FIGS. 2 to 9, when the first base layer 5, the second base layer 6, and the cover layer 7 are formed of the same kind of material (for example, polyimide resin), the first base layer 5 and the first base layer 5 The boundary between the second base layer 6 and the boundary between the second base layer 6 and the cover layer 7 (broken line in the insulating layer 3 in each drawing) does not exist, and the first base layer 5, the second base layer 6 and The cover layer 7 is integrally formed. This also applies to the embodiments shown in FIGS.

Second Embodiment
1. Anisotropic Conductive Sheet With reference to FIG. 10, an embodiment of the anisotropic conductive sheet of the second embodiment of the present invention will be described. In the second embodiment, members similar to those in the first embodiment described above are denoted by the same reference numerals, and description thereof is omitted.

  In the anisotropic conductive sheet 1 of the first embodiment, the conductor portion 4 includes the central portion 21, the inclined portion 22, and the flange portion 23, but in the anisotropic conductive sheet 1 of the second embodiment, FIG. As shown in FIG. 4, the conductor portion 4 includes only the central portion 21 and the inclined portion 22 and may not include the flange portion 23.

  In the anisotropic conductive sheet 1 of the second embodiment, the insulating layer 3 includes only the second base layer 6 and the cover layer 7, and does not include the first base layer 5.

  The second base layer 6 is located at the lowermost part of the insulating layer 3 and has a second opening 12. The second opening 12 has a circular shape in a bottom view, and has a tapered shape in which the opening cross-sectional area increases as it goes upward in a side sectional view. The second opening 12 communicates with the third inner opening 19 and the third outer opening 20 on the upper side. The opening at the upper end of the second opening 12 coincides with the opening at the lower end of the third outer opening 20 (described later).

  The cover layer 7 is located on the uppermost part of the insulating layer 3 and is disposed on the upper side of the second base layer 6. Specifically, the cover layer 7 is disposed on the upper surface of the second base layer 6 so that the lower surface of the cover layer 7 is continuous with the upper surface of the second base layer 6. The upper surface of the cover layer 7 is exposed.

  The cover layer 7 has a third opening 13. The third opening 13 includes a third inner opening 19 that defines the inner side of the third opening 13 and a third outer opening 20 that defines the outer side of the third inner opening 19.

  The third inner opening 19 penetrates the cover layer 7 in the vertical direction. The third inner opening 19 has a substantially circular shape in plan view, and has a tapered shape in which the opening cross-sectional area increases toward the upper side in a side sectional view. The third inner opening 19 communicates with the inner side of the second opening 12 on the lower side.

  The third outer opening 20 has a substantially annular shape in plan view and a substantially triangular shape in side sectional view. The third outer opening 20 communicates with the outer side of the second opening 12 on the lower side.

  The first opening portion 11 and the third opening portion 13 communicate with each other in the vertical direction, and constitute a through hole 16 that penetrates the insulating layer 3 in the vertical direction.

  The conductor portion 4 includes only the central portion 21 and the inclined portion 22 and does not include the flange portion 23.

  The lower surface of the central portion 21 is located below the lower surface of the second base layer 6. That is, the central portion 21 protrudes below the lower surface of the second base layer 6. For this reason, the entire surface of the central portion 21 and a part (lower portion) of the lower surface of the inclined portion 22 are exposed from the second base layer 6.

  The upper surface and outer peripheral side surface of the inclined portion 22 are covered with the cover layer 7, and the lower surface of the inclined portion 22 is covered with the second base layer 6. Specifically, the entire upper surface of the inclined portion 22 and the entire outer peripheral side surface of the inclined portion 22 are in contact with the cover layer 7, and a part of the lower surface (upper portion) of the inclined portion 22 is the second base layer 6. In contact with the inclined surface 17. For this reason, the inclined portion 22 is defined by the second base layer 6 and the cover layer 7, and is fitted to the third outer opening 20 and the second opening 12 that are recessed in the surface direction (particularly the oblique direction). That is, the inclined part 22 constitutes the fitting part 31, and the outer peripheral part of the third outer opening 20 and the second opening part 12 constitutes the fitted part 32 that fits the fitting part 31. ing.

  Also in the anisotropic conductive sheet 1 of 2nd Embodiment, there can exist an effect similar to the anisotropic conductive sheet 1 of 1st Embodiment.

  In particular, in the second embodiment, the inclined portion 22 extending in the oblique direction constitutes the fitting portion 31, and is fitted into the fitted portion 32 (the third outer opening 20 and the second opening 12) that is recessed in the oblique direction. Has been. Therefore, the conductor part 4 is fixed to the insulating layer 3 more reliably. Therefore, the conductor 4 is not affected by any of the pressure from the upper side by the terminal 43 of the device under test 41, the pressure from the lower side by the terminal of the inspection device 42, and the stress in the surface direction by both terminals. It is firmly fixed and misalignment is unlikely to occur. As a result, it is possible to suppress the conductor portion 4 from dropping from the through hole 16. Therefore, durability is excellent.

  Further, since the flange portion 23 is not provided, the length in the surface direction of the conductor portion 4 can be shortened. As a result, the pitch L8 between the conductor portions can be further miniaturized.

  Further, since the first base layer 5 is not provided, the anisotropic conductive sheet 1 can be thinned. Moreover, since it is excellent in flexibility and can easily follow the shape and warpage of the device under test 41, inspection at a lower pressure is possible, and as a result, durability is further improved.

2. Anisotropic conductive sheet with plating layer and anisotropic conductive sheet with elastic part As shown in FIGS. 11 and 12, the anisotropic conductive sheet 1 of the second embodiment includes plating layers 51 and 52 and conductive properties. At least one of the elastic portions 61 can be further provided. The plating layers 51 and 52 and the conductive elastic portion 61 are the same as the plating layers 51 and 52 and the conductive elastic portion 61 shown in the first embodiment.

  The anisotropic conductive sheet 50 with plating layer and the anisotropic conductive sheet 60 with elastic portion of the second embodiment are also different from the anisotropic conductive sheet 50 with plating layer and the elastic portion with elastic portion of the first embodiment. The same effect as that of the directionally conductive sheet 60 can be obtained.

3. Modification A modification of the anisotropic conductive sheet 1 of the second embodiment will be described. In addition, in a modification, the same code | symbol is attached | subjected to the member similar to embodiment shown above in FIG. 2, etc., and the description is abbreviate | omitted.

  (1) In the embodiment shown in FIG. 10, the cover layer 7 covers the entire upper surface of the inclined portion 22. For example, although not shown, the cover layer 7 is a part of the upper surface of the inclined portion 22 ( Only the upper part may be covered. Also in this anisotropic conductive sheet 1, the same operational effects as the embodiment shown in FIG. 10 can be obtained.

  (2) In the embodiment shown in FIG. 10, the insulating layer 3 does not include the first base layer 5. For example, although not shown, the insulating layer 3 is disposed on the lower surface of the second base layer 6. One base layer 5 may be provided.

  The first base layer 5 has a first opening 11. Thereby, the center part 21 and the 1st opening part 11 demarcate the 2nd recessed part 34. FIG. As shown in FIGS. 2 and 7, the first opening 11 may have a tapered shape in which the opening cross-sectional area increases or decreases toward the upper side, and the opening cross-sectional area is uniform in the vertical direction. It may have a cylindrical shape.

  Also in this anisotropic conductive sheet 1, the same operational effects as the embodiment shown in FIG. 2 can be obtained. From the viewpoint of thinning and low-pressure inspection, the embodiment shown in FIG. 10 is preferable.

<Third Embodiment>
1. Anisotropic Conductive Sheet With reference to FIG. 13, an embodiment of the anisotropic conductive sheet of the third embodiment of the present invention will be described. Note that in the third embodiment, members similar to those in the first and second embodiments described above are given the same reference numerals, and descriptions thereof are omitted.

  In the anisotropic conductive sheet 1 of the first embodiment, the conductor portion 4 includes the central portion 21, the inclined portion 22, and the flange portion 23, but in the anisotropic conductive sheet 1 of the third embodiment, FIG. As shown in FIG. 3, the conductor portion 4 includes only the central portion 21 and the flange portion 23 and does not need to include the inclined portion 22.

  In the third embodiment, the insulating layer 3 includes only the second base layer 6 and the cover layer 7, and does not include the first base layer 5.

  The second base layer 6 is located at the lowermost part of the insulating layer 3. Specifically, the second base layer 6 is disposed on the lower surface of the cover layer 7 so that the upper surface of the second base layer 6 is continuous with the lower surface of the cover layer 7. The lower surface of the second base layer 6 is exposed.

  The second base layer 6 has a second opening 12. The second opening 12 has a substantially circular shape in a bottom view, and has a tapered shape in which the opening cross-sectional area increases as it goes upward in a side sectional view. The second opening 12 communicates with the third lower opening 14 on the upper side. The opening at the upper end of the second opening 12 coincides with the opening at the lower end of the third lower opening 14.

  The cover layer 7 is located on the uppermost part of the insulating layer 3 and is disposed on the upper side of the second base layer 6. Specifically, the cover layer 7 is disposed on the upper surface of the second base layer 6 so that the lower surface thereof is continuous with the upper surface of the second base layer 6. The upper surface of the cover layer 7 is exposed.

  The cover layer 7 has a third opening 13. The third opening 13 includes a third lower opening 14 that defines the lower side of the third opening 13 and a third upper opening 15 that defines the upper side of the third opening 13.

  The third lower opening 14 has a substantially circular shape in a plan view, and has a tapered shape in which the opening cross-sectional area decreases as it goes upward in a side cross-sectional view. The third lower opening 14 communicates with the second opening 12 on the lower side, and communicates with the third upper opening 15 on the upper side. The opening at the lower end of the third lower opening 14 coincides with the opening at the upper end of the second opening 12.

  The third upper opening 15 has a substantially circular shape in plan view, and has a tapered shape in which the opening cross-sectional area increases toward the upper side in a side sectional view. The third upper opening 15 communicates with the third lower opening 14 on the lower side. The opening at the lower end of the third upper opening 15 is narrower than the opening at the upper end of the third lower opening 14, and when projected in the vertical direction, the third upper opening 15 becomes the third lower opening 14. include.

  The first opening portion 11, the second opening portion 12, and the third opening portion 13 communicate with each other in the vertical direction, and form a through hole 16 that penetrates the insulating layer 3 in the vertical direction.

  The conductor portion 4 includes a central portion 21 and a flange portion 23.

  The central portion 21 is disposed inside the second opening 12 and the third lower opening 14. A part of the upper surface (center portion) of the center portion 21 is exposed from the cover layer 7. The entire lower surface of the central portion 21 is exposed from the second base layer 6 and is formed to be flush with the lower surface of the second base layer 6.

  The flange 23 is formed so as to extend in the surface direction from the outer peripheral edge of the central portion 21. The flange portion 23 has a substantially annular shape in a plan view, and has a substantially triangular shape in which an opening cross-sectional area becomes smaller toward the outside in a side sectional view.

  The upper surface (inclined surface) of the flange portion 23 is covered with the cover layer 7, and the lower surface (inclined surface) of the flange portion 23 is covered with the second base layer 6. Specifically, the entire upper surface of the flange portion 23 is in contact with the cover layer 7, and the entire lower surface of the flange portion 23 is in contact with the inclined surface 17 of the second base layer 6. For this reason, the flange 23 is defined by the second base layer 6 and the cover layer 7 and is fitted to the outer peripheral portions of the second opening 12 and the third lower opening 14 that are recessed in the surface direction. That is, the flange portion 23 constitutes the fitting portion 31, and the outer peripheral portions of the second opening portion 12 and the third lower opening portion 14 constitute the fitted portion 32 that fits the fitting portion 31. Yes.

  In the anisotropic conductive portion 2, the upper surface of the central portion 21 and the peripheral side surface of the third upper opening 15 define the first recess 33.

  Also in the anisotropic conductive sheet 1 of 3rd Embodiment, there can exist an effect similar to the anisotropic conductive sheet 1 of 1st Embodiment.

  In particular, in the third embodiment, since the conductor portion 4 is disposed in the second opening 12 and the third lower opening 14, the thickness can be increased. Therefore, the durability is further improved. Further, the anisotropic conductive sheet 1 is difficult to bend in the vertical direction with respect to the pressure from the terminal 43 of the device under test 41, and the anisotropic conductive portion 2 can be evenly contacted with the plurality of terminals 43.

2. Anisotropic Conductive Sheet with Plating Layer The anisotropic conductive sheet 1 of the third embodiment can further include plating layers 51 and 52 as shown in FIG.

  In the anisotropic conductive sheet 50 with a plating layer of the third embodiment, the first inner plating layer 53 is formed so as to completely fill the first recess 33. Specifically, the first inner plating layer 53 is formed so as to protrude above the upper surface of the cover layer 7.

  Also in the anisotropic conductive sheet 50 with a plating layer of 3rd Embodiment, there can exist an effect similar to the anisotropic conductive sheet 10 with a plating layer of 1st Embodiment.

  Moreover, in the anisotropic conductive sheet 50 with a plating layer of 3rd Embodiment, it forms so that the 1st inner side plating layer 53 and by extension the 1st plating layer 51 may become thick. Therefore, the conductor part 4 can be more reliably protected by the first plating layer 51, and oxidation of the conductor part 4 can be further suppressed.

  In particular, since the anisotropic conductive sheet 1 with a plating layer according to the third embodiment is obtained from the anisotropic conductive sheet 1 having the first recess 33, the thickness of the first inner plating layer 53, and hence the first plating layer. Even if the thickness of 51 is increased, the first inner plating layer 53 does not easily flow out to the entire upper surface of the cover layer 7. Therefore, it is possible to more reliably protect the conductor portion 4 while suppressing conduction between the conductor portions 4 of the adjacent anisotropic conductive portions 2.

<Fourth embodiment>
With reference to FIG. 15, one embodiment of the anisotropic conductive sheet of the fourth embodiment of the present invention will be described. In addition, in 4th Embodiment, the same code | symbol is attached | subjected to the member similar to above-described 1st-3rd embodiment, and the description is abbreviate | omitted.

  In the anisotropic conductive sheet 1 of the first embodiment shown in FIG. 8, the conductor portion 4 is integrally provided with the central portion 21, the inclined portion 22 and the flange portion 23, but the anisotropic conductive member of the fourth embodiment. In the conductive sheet 1, the conductor portion 4 can integrally include a central portion 21, an inclined portion 22, a flange portion 23, and a filling portion 24 as shown in FIG. 15.

  The filling portion 24 is disposed inside the second opening 12 and the third lower opening 14. The filling portion 24 has a substantially truncated cone shape as indicated by a broken line in FIG. The filling portion 24 is integrally continuous with the central portion 21 and the inclined portion 22 such that the lower surface thereof is continuous with the central portion 21 and the inclined portion 22. Further, the upper surface of the filling portion 24 is formed so as to be flush with the upper surface of the flange portion 23. That is, the upper surface of the conductor part 4 is a flat surface.

  In the anisotropic conductive portion 2, the peripheral side surfaces of the filling portion 24 and the inclined portion 22 define the first concave portion 33.

  The anisotropic conductive sheet 10 of 4th Embodiment can also show the effect similar to the anisotropic conductive sheet 10 of 1st Embodiment.

  An anisotropic conductive sheet 50 with a plating layer and an anisotropic conductive sheet 60 with an elastic part using the anisotropic conductive sheet 1 are also the same as in the first to third embodiments. Further, the above-described modifications of the first to third embodiments can be similarly applied to the fourth embodiment.

<Fifth Embodiment>
With reference to FIG. 16, one embodiment of the anisotropic conductive sheet of the fifth embodiment of the present invention will be described. Note that in the fifth embodiment, members similar to those in the first to fourth embodiments described above are given the same reference numerals, and descriptions thereof are omitted.

  In the anisotropic conductive sheet 1 of the first embodiment, the conductor portion 4 is integrally provided with a central portion 21, an inclined portion 22 and a flange portion 23, and the insulating layer 3 includes the second base layer 6 and the cover layer 7. In the anisotropic conductive sheet 1 of the fifth embodiment, as shown in FIG. 16, the conductor portion 4 is integrally provided with only the central portion 21 and the flange portion 23, and the insulating layer 3 is a cover. Only layer 7 can be provided.

  The insulating layer 3 includes only the cover layer 7 and does not include the first base layer 5 and the second base layer 6. The cover layer 7 has a third lower opening 14 and a third upper opening 15.

  In the conductor part 4, the flange part 23 is formed so as to extend radially outward from the peripheral edge of the central part 21. The flange 23 has a substantially annular shape in plan view and a substantially rectangular shape in side sectional view. The upper surface and the lower surface of the flange portion 23 are formed so as to be flush with the upper surface and the lower surface of the central portion 21, respectively.

  The upper surface and the peripheral side surface of the flange 23 are covered with the cover layer 7. Specifically, the entire upper surface and the entire outer peripheral side surface of the flange 23 are in contact with the cover layer 7. For this reason, the collar part 23 is defined by the cover layer 7 and is fitted to the outer peripheral part of the third lower opening 14 that is recessed in the surface direction. That is, the flange portion 23 constitutes the fitting portion 31, and the outer peripheral portion of the third lower opening portion 14 constitutes the fitted portion 32 into which the fitting portion 31 is fitted. Note that the lower surface of the flange 23 (the fitting portion 31) is exposed from the insulating layer 3.

  In the anisotropic conductive portion 2, the upper surface of the central portion 21 and the peripheral side surface of the third upper opening 15 define the first recess 33.

  In the anisotropic conductive sheet 1 of the fifth embodiment, the same effects as the anisotropic conductive sheet 1 of the first embodiment can be achieved.

  Preferably, the 1st-4th embodiment in which the insulating layer 3 is provided with the 2nd base layer 6, and the lower surface of the fitting part 31 is coat | covered with the 2nd base layer 6 is mentioned. In 1st-4th embodiment, with respect to any of the pressurization from the upper side by the terminal 43 of the to-be-inspected apparatus 41, the pressurization from the lower side by the terminal of the test | inspection apparatus 42, and the stress to the surface direction by both terminals. In addition, the displacement of the conductor portion 4 in the through hole 16 can be suppressed. In particular, the displacement of the conductor portion 4 in the through hole 16 can be suppressed even when pressure is applied from above. As a result, it is possible to effectively prevent the conductor portion 4 from dropping from the through hole 16, and the durability is excellent.

  An anisotropic conductive sheet 50 with a plating layer and an anisotropic conductive sheet 60 with an elastic part using the anisotropic conductive sheet 1 are also the same as in the first to third embodiments. Further, the above-described modifications of the first to third embodiments can be similarly applied to the fifth embodiment.

<Sixth Embodiment>
With reference to FIG. 17, one embodiment of the anisotropic conductive sheet of the sixth embodiment of the present invention will be described. In addition, in 6th Embodiment, the same code | symbol is attached | subjected to the member similar to above-described 1st-5th embodiment, and the description is abbreviate | omitted.

  In the anisotropic conductive sheet 1 of the fifth embodiment, the conductor portion 4 is integrally provided with the central portion 21 and the flange portion 23, but in the anisotropic conductive sheet 1 of the sixth embodiment, FIG. As shown, the conductor part 4 can also comprise only the central part 21.

  In the anisotropic conductive sheet 1 of the sixth embodiment, the cover layer 7 has the third opening 13. The third opening 13 has a cylindrical shape with a uniform opening cross-sectional area in the vertical direction.

  In the conductor portion 4, the outer peripheral side surface of the central portion 21 is in contact with the peripheral side surface of the third opening 13 (through hole 16). For this reason, the anisotropic conductive sheet 1 of 6th Embodiment is not provided with the fitting part and the to-be-fitted part.

  In the anisotropic conductive portion 2, the upper surface of the central portion 21 and the peripheral side surface of the third opening 13 define the first recess 33.

  Also in the anisotropic conductive sheet 1 of 6th Embodiment, there can exist the same effect as the anisotropic conductive sheet 1 of 1st-5th embodiment.

  Preferably, the 1st-5th embodiment in which the conductor part 4 has the fitting part 31, and the insulating layer 3 has the to-be-fitted part 32 is mentioned. In 1st-5th embodiment, the position shift to the upper direction of the conductor part 4 in the through-hole 16 can be suppressed also with respect to the pressurization from the lower side by the test | inspection probe 44 of the test | inspection apparatus 42. As a result, it is possible to suppress the conductor portion 4 from dropping from the through hole 16, and the durability is excellent.

  An anisotropic conductive sheet 50 with a plating layer and an anisotropic conductive sheet 60 with an elastic part using the anisotropic conductive sheet 1 are also the same as in the first to third embodiments. Further, the above-described modifications of the first to third embodiments can be similarly applied to the sixth embodiment.

DESCRIPTION OF SYMBOLS 1 Anisotropic conductive sheet 2 Anisotropic conductive part 3 Insulating layer 4 Conductor part 16 Through-hole 22 Inclined part 23 Gutter part 31 Fitting part 32 Fitted part 33 1st recessed part 34 2nd recessed part 41 Inspected apparatus 42 Inspection apparatus 51 1st plating layer 52 2nd plating layer 61 Conductive elastic part 62 Conductive particles

Claims (10)

An anisotropic conductive sheet for electrically connecting a device to be inspected and an inspection device to each other,
An anisotropic conductive portion having an insulating layer having a through hole penetrating in the thickness direction and a conductor portion disposed in the through hole,
An anisotropic conductive sheet characterized in that one side in the thickness direction of the conductor portion and the peripheral side surface of the through hole define a first recess.   The insulating layer has a fitted portion that is recessed in a surface direction perpendicular to the thickness direction in the through hole, and the conductor portion has a fitted portion that fits into the fitted portion. The anisotropic conductive sheet according to claim 1.   The anisotropic conductive sheet according to claim 2, wherein the conductor portion includes an inclined portion extending in an intersecting direction intersecting both the thickness direction and the surface direction.   The anisotropic conductive sheet according to claim 3, wherein the conductor portion further includes an end portion extending in a surface direction from an edge in a surface direction of the inclined portion.   5. The anisotropic conductive sheet according to claim 1, wherein the first concave portion has a tapered shape in which an opening cross-sectional area increases toward one side in a thickness direction. The other surface in the thickness direction of the conductor portion is located on one side in the thickness direction than the other surface in the thickness direction of the insulating layer,
The anisotropic conductive sheet according to any one of claims 1 to 5, wherein the other side surface of the conductor portion in the thickness direction and the peripheral side surface of the through hole define the second recess.   The anisotropic conductive sheet according to claim 6, wherein the second recess has a tapered shape in which an opening cross-sectional area increases toward the other side in the thickness direction.   The anisotropic conductivity according to claim 1, wherein the anisotropic conductive portion further includes a plating layer on one surface in the thickness direction and the other surface in the thickness direction of the conductor portion. Sheet.   The anisotropic conductive material according to claim 1, further comprising a conductive elastic portion that is disposed on one side in the thickness direction of the conductor portion and contains conductive particles and a resin. Sheet. The thickness direction one side of the plating layer and the peripheral side surface of the through hole define a third recess,
The anisotropic conductive sheet according to claim 9, wherein a volume ratio of the conductive elastic portion is 20% or more and 200% or less with respect to a volume of the third recess.

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