JP2018170307A - 金属汚染防止方法及び成膜装置 - Google Patents
金属汚染防止方法及び成膜装置 Download PDFInfo
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Abstract
Description
前記処理室内を、ドライクリーニング時の温度から所定の成膜温度に変更する温度変更ステップと、
該温度変更ステップを行った後、前記処理室内に水素及び酸素を供給し、前記処理室内で前記水素及び酸素を活性化する活性化ステップと、
該活性化ステップを行った後、前記処理室内に基板が存在しない状態で前記成膜処理を行い、前記処理室内をコーティングするステップと、を有する。
まず、本発明の実施形態に係る成膜装置について説明する。本発明の実施形態に係る金属汚染防止方法は、種々の成膜装置に適用され得るが、以下、本発明の実施形態に係る金属汚染防止方法が好適に適用され得る一実施形態に係る成膜装置について説明する。
次に、かかる成膜装置をドライクリーニングした後であって、次の成膜処理を開始する前に行われる本発明の実施形態に係る金属汚染防止方法について説明する。本実施形態に係る金属汚染方法は、成膜温度がドライクリーニング温度よりも高い場合に好適に適用され得る。よって、以下の実施形態では、成膜温度がドライクリーニング温度よりも高い例を挙げて説明する。また、説明の容易のため、ドライクリーニングの温度が620〜680℃、成膜温度が760℃以上である場合を例に挙げて説明する。
次に、本発明の実施形態に係る金属汚染防止方法を実施した実施例について説明する。実施例における条件は、成膜時の原料ガスが3DMASであり、成膜温度は760℃に設定した。真空容器1内の圧力は、6.7Torrに設定した。回転テーブル2の回転速度は120rpmに設定した。H2/O2パージ工程における水素ガス及び酸素ガスの流量は、H2/O2=4000/6000sccmに設定した。また、金属汚染防止の効果を確認するため、H2/O2パージ工程を120分実施した。コーティング工程においては、真空容器1内の温度、圧力、回転テーブル2の回転速度は同じ条件を維持し、原料ガスは3DMASを300sccmの流量で供給するとともに、H2/O2を4000/6000sccmで供給した。コーティング工程においては、300nmのシリコン酸化膜を成膜した。
Claims (14)
- 成膜処理に用いる処理室のドライクリーニング後、かつ成膜開始前に行う金属汚染防止方法であって、
前記処理室内を、ドライクリーニング時の温度から所定の成膜温度に変更する温度変更ステップと、
該温度変更ステップを行った後、前記処理室内に水素及び酸素を供給し、前記処理室内で前記水素及び酸素を活性化する活性化ステップと、
該活性化ステップを行った後、前記処理室内に基板が存在しない状態で前記成膜処理を行い、前記処理室内をコーティングするステップと、を有する金属汚染防止方法。 - 成膜処理に用いる処理室のドライクリーニング後、かつ成膜開始前に行う金属汚染防止方法であって、
前記処理室内を、ドライクリーニング時の温度から所定の成膜温度に変更しながら、前記処理室内で水素及び酸素を活性化する活性化ステップと、
該活性化ステップを行った後、前記処理室内に基板が存在しない状態で前記成膜処理を行い、前記処理室内をコーティングするステップと、を有する金属汚染防止方法。 - 成膜処理に用いる処理室のドライクリーニング後、かつ成膜開始前に行う金属汚染防止方法であって、
前記処理室内を、ドライクリーニング時の温度から成膜温度よりも高い所定温度に変更しながら、前記処理室内で水素及び酸素を活性化する活性化ステップと、
前記処理室内を前記所定温度から前記成膜温度に変更する温度変更ステップと、
該温度変更ステップを行った後、前記処理室内に基板が存在しない状態で前記成膜処理を行い、前記処理室内をコーティングするステップと、を有する金属汚染防止方法。 - 前記成膜温度は、前記ドライクリーニング時の温度よりも高い温度である請求項1乃至3のいずれか一項に記載の金属汚染防止方法。
- 前記成膜温度は、前記水素及び酸素が活性化する温度に設定されている請求項1乃至4のいずれか一項に記載の金属汚染防止方法。
- 前記成膜温度は、700℃以上の温度に設定されている請求項1乃至5のいずれか一項に記載の金属汚染防止方法。
- 前記ドライクリーニング時の温度は、600〜690℃の温度に設定されている請求項1乃至6のいずれか一項に記載の金属汚染防止方法。
- 前記所定温度は、765℃以上の温度に設定されている請求項3に記載の金属汚染防止方法。
- 前記水素及び酸素は、プラズマにより活性化される請求項1乃至8のいずれか一項に記載の金属汚染防止方法。
- 前記成膜処理は、酸化膜を基板上に成膜する処理である請求項1乃至9のいずれか一項に記載の金属汚染防止方法。
- 前記酸化膜は、シリコン酸化膜である請求項10に記載の金属汚染防止方法。
- 処理室と、
該処理室内に設けられたヒータと、
前記処理室内に原料ガスを供給可能な原料ガス供給手段と、
前記処理室内に水素ガスを供給可能な水素ガス供給手段と、
該水素ガス供給手段に隣接して設けられ、前記処理室内に酸素ガスを供給可能な酸素ガス供給手段と、
制御手段と、を有し、
該制御手段は、
前記処理室内のドライクリーニングが行われた後、前記ヒータを制御し、前記処理室内を、ドライクリーニング時の温度から所定の成膜温度に変更する温度変更ステップと、
該温度変更ステップを行った後、前記水素ガス供給手段及び前記酸素ガス供給手段を制御し、前記処理室内に水素及び酸素を供給し、前記処理室内で前記水素及び酸素を活性化する活性化ステップと、
該活性化ステップを行った後、前記原料ガス供給手段及び前記酸素ガス供給手段を制御し、前記処理室内に基板が存在しない状態で前記原料ガス及び前記酸素ガスを供給し、前記処理室内に酸化膜の成膜を行うコーティングステップと、を行う成膜装置。 - 処理室と、
該処理室内に設けられたヒータと、
前記処理室内に原料ガスを供給可能な原料ガス供給手段と、
前記処理室内に水素ガスを供給可能な水素ガス供給手段と、
該水素ガス供給手段に隣接して設けられ、前記処理室内に酸素ガスを供給可能な酸素ガス供給手段と、
制御手段と、を有し、
該制御手段は、
前記処理室内のドライクリーニングが行われた後、前記ヒータ、前記水素ガス供給手段及び前記酸素ガス供給手段を制御し、前記処理室内を、ドライクリーニング時の温度から所定の成膜温度に変更しながら、前記処理室内に水素及び酸素を供給し、前記処理室内で前記水素及び酸素を活性化する活性化ステップと、
該活性化ステップを行った後、前記原料ガス供給手段及び前記酸素ガス供給手段を制御し、前記処理室内に基板が存在しない状態で前記原料ガス及び前記酸素ガスを供給し、前記処理室内に酸化膜の成膜を行うコーティングステップと、を行う成膜装置。 - 処理室と、
該処理室内に設けられたヒータと、
前記処理室内に原料ガスを供給可能な原料ガス供給手段と、
前記処理室内に水素ガスを供給可能な水素ガス供給手段と、
該水素ガス供給手段に隣接して設けられ、前記処理室内に酸素ガスを供給可能な酸素ガス供給手段と、
制御手段と、を有し、
該制御手段は、
前記処理室内のドライクリーニングが行われた後、前記ヒータ、前記水素ガス供給手段及び前記酸素ガス供給手段を制御し、前記処理室内を、ドライクリーニング時の温度から成膜温度よりも高い所定温度に変更しながら、前記処理室内に水素及び酸素を供給し、前記処理室内で前記水素及び酸素を活性化する活性化ステップと、
前記ヒータを制御し、前記処理室内を前記所定温度から前記成膜温度に変更する温度変更ステップと、
該温度変更ステップを行った後、前記原料ガス供給手段及び前記酸素ガス供給手段を制御し、前記処理室内に基板が存在しない状態で前記原料ガス及び前記酸素ガスを供給し、前記処理室内に酸化膜の成膜を行うコーティングステップと、を行う成膜装置。
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