JP2018158298A - Coating device and coating method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a technique which is related to formation of a coating film which is separated in a moving direction of a coating mechanism and can shorten coating treatment time while keeping high accuracy of coating treatment.SOLUTION: A coating device according to the present invention is configured to: perform movement of a first coating mechanism (14) and a second coating mechanism (16) in parallel in time in at least a part of the movement while separating the first coating mechanism (14) from the second coating mechanism (16) by performing time difference control in which timing at which the second coating mechanism (16) reaches a second end (16y) is delayed from timing at which the first coating mechanism (14) reaches a first end (14y).SELECTED DRAWING: Figure 7

Description

  The present invention relates to a coating apparatus and a coating method for coating a coating material on an upper surface of a substrate.

  Conventionally, a liquid crystal display, an organic EL (Electro-Luminescence) panel, or the like is manufactured by applying a coating material on the upper surface of a substrate such as a glass substrate.

  For example, Patent Document 1 discloses a method in which a coating material is intermittently applied to the upper surface of a substrate using a nozzle. According to this method, it is possible to form a coating film that is separated in the moving direction of the nozzle.

JP2015-192987A

  In order to maintain high coating processing accuracy such as coating film thickness uniformity, maintenance processing such as scraper processing is required to return the nozzle tip to the initial state when the stopped coating operation is resumed. It is desirable to do.

  On the other hand, when applying the coating material intermittently, if the maintenance process is performed every time the coating operation is stopped, the coating process time is longer due to the time required for the coating mechanism including the nozzle to move to the maintenance unit that performs the maintenance process. There was a problem of becoming.

  The present invention has been made to solve the problems as described above, and relates to the formation of a coating film that is separated in the moving direction of the coating mechanism, while maintaining a high coating processing accuracy while applying the coating processing time. It is an object of the present invention to provide a technique that can shorten the time.

  A first aspect of the technology disclosed in the specification of the present application is movable in a first direction which is a stage along which a substrate is disposed, a direction along the upper surface of the substrate disposed on the stage, and A first application mechanism that applies a first application material to a first application region on the upper surface of the substrate; and a second direction that is a direction opposite to the first direction; and A second application mechanism that applies a second application material to a second application region on the upper surface of the substrate; and a first maintenance process that is located on one side of the stage and that is applied to the first application mechanism. A first maintenance unit to be performed, a second maintenance unit that is located on the other side of the stage and that performs a second maintenance process on the second coating mechanism, and the operation of the first coating mechanism; Control the operation of the second application mechanism A control unit, wherein the control unit positions the first application mechanism in the first maintenance unit for the first maintenance process, and then performs the first application in the first application region. The first application mechanism is moved in the first direction, and after the first application mechanism reaches the first end of the first application area, the first application mechanism is moved to the first direction. The controller is retracted from the end, and the controller places the second application mechanism on the second maintenance unit for the second maintenance process, and then moves the second application mechanism in the second application region. The coating mechanism is moved in the second direction, and further, the second coating mechanism is made to reach the second end of the second coating region, and the first end and the second end The distance between the first coating mechanism located at the first end and the first Is less than the distance of contact with the second coating mechanism located at the end of the first coating mechanism, and the control unit sets the timing at which the second coating mechanism reaches the second end to the first coating mechanism. By performing a time difference control that delays the timing of reaching the first end, the first coating mechanism and the second coating mechanism are separated from each other while the first coating mechanism and the second coating mechanism are separated from each other. The movement of the coating mechanism is performed at least partially in parallel in time.

  A second aspect of the technology disclosed in the specification of the present application relates to the first aspect, and the control unit sets a timing at which the second application mechanism is positioned in the second maintenance unit. The time difference control is performed by delaying the application mechanism at a timing earlier than the timing at which the application mechanism is positioned at the first maintenance unit.

  A third aspect of the technology disclosed in the specification of the present application relates to the first aspect or the second aspect, and the controller controls a speed of moving the second application mechanism in the second direction. The time difference control is performed by making the first coating mechanism slower than the moving speed of the first coating mechanism in the first direction.

  A fourth aspect of the technology disclosed in the specification of the present application relates to any one of the first aspect to the third aspect, wherein the first application material and the second application material are , Made of the same material.

  A fifth aspect of the technology disclosed in this specification is related to any one of the first to fourth aspects, and the control unit controls the first application mechanism to the first aspect. Immediately after retreating from the end portion, the time difference control for causing the second coating mechanism to reach the second end portion is performed.

  A sixth aspect of the technology disclosed in the specification of the present application relates to the fifth aspect, and the first application in a plan view when the first application mechanism is located at the first end. The region of the upper surface of the substrate that overlaps the mechanism is a first end region, and the substrate that overlaps the second coating mechanism in plan view when the second coating mechanism is located at the second end portion The upper surface area of the first application mechanism is defined as a second end region, and the control unit is configured to perform the entire operation of the first application mechanism in a plan view after the first application mechanism starts to retract from the first end portion. The time difference control is performed so that at least a part of the second coating mechanism reaches the second end region until it reaches a position that does not overlap with the first end region.

  A seventh aspect of the technology disclosed in this specification relates to any one of the first to sixth aspects, and the first application mechanism is disposed in the first application region. A first nozzle for applying the first application material; and a first holding unit that holds the first nozzle and is movable in the first direction. The mechanism holds the second nozzle for applying the second application material to the second application region, and the second holding that holds the second nozzle and is movable in the second direction. And the distance between the first end and the second end is set such that the distance between the first holding portion and the first end of the first application mechanism located at the first end is Or less than the distance that the second holding part of the second application mechanism located at the end of the second part contacts.

  An eighth aspect of the technology disclosed in the specification of the present application is movable in a first direction that is a direction along an upper surface of a substrate disposed on a stage, and the first application region on the upper surface of the substrate. A first application mechanism that applies the first application material to the first application mechanism, and a second application region on the upper surface of the substrate that is movable in a second direction that is opposite to the first direction. A coating method that coats the first coating material and the second coating material using a coating device that includes a second coating mechanism that coats a second coating material, for the first maintenance process After the first coating mechanism is positioned on one side of the stage, the first coating mechanism is moved in the first direction in the first coating region, and the first coating mechanism is further moved. After reaching the first end of the first application area, After retracting the first application mechanism from the first end and positioning the second application mechanism on the other side of the stage for a second maintenance process, the second application area in the second application region The second application mechanism is moved in the second direction, and the second application mechanism is made to reach the second end of the second application region, and the first end and the second The distance between the first coating mechanism and the second coating mechanism located at the second end is less than or equal to the distance between the first coating mechanism and the second coating mechanism located at the first edge, respectively. By performing the time difference control for delaying the timing at which the second coating mechanism reaches the second end from the timing at which the first coating mechanism reaches the first end, the first coating is performed. The first coating mechanism and the second coating mechanism are spaced apart from each other. Wherein the movement of the second coating mechanism, causing temporally parallel at least in part.

  According to the first and eighth aspects of the technology disclosed in the specification of the present application, each coating mechanism performs coating of a coating material after performing a maintenance process. In addition, at least a part of the two coating mechanisms moving in the mutually opposing directions is separated by time difference control that delays the timing at which one coating mechanism reaches the end of the coating region from the timing of the other coating mechanism. The coating material is applied in parallel with time. As a result, it is possible to form coating films that are close to each other in the moving direction of the coating mechanism and that are spaced apart from each other while controlling the film thickness with high accuracy and shortening the coating processing time.

  In particular, according to the second aspect, the timing for starting the application of the coating material immediately after the maintenance process can be shifted between the two coating mechanisms. Therefore, the application material can be applied in parallel at least in part while adjusting the time until the movement in the application region after the maintenance process is started between the application mechanisms.

  In particular, according to the third aspect, it is possible to shift the degree of progress of the application process of the two application mechanisms after the application of the application material is started. Therefore, it is possible to apply the coating material at least partially in parallel while separating the two coating mechanisms that move in directions facing each other.

  In particular, according to the fourth aspect, when the coating film is formed on a plurality of coating regions formed of the same material, the coating processing time can be shortened.

  In particular, according to the fifth aspect, since one coating mechanism reaches the end of the coating region immediately after the one coating mechanism is retracted from the end of the coating region, the two coating mechanisms are applied in parallel. The time for applying the coating becomes longer. Therefore, the coating processing time for coating the coating material can be effectively shortened.

  In particular, according to the sixth aspect, since one coating mechanism does not completely retract from the end region, but at least a part of the other coating mechanism reaches the other end region, the two coating mechanisms However, it takes a long time to apply the coating material in parallel. Therefore, the coating processing time for coating the coating material can be effectively shortened.

  In particular, according to the seventh aspect, even when the end portions of the two application regions are located at a distance that is less than or equal to the distance at which the end portions contact each other when the application mechanism is located at these end portions, The application material is applied at least partially in parallel while separating the two application mechanisms by time difference control that delays the timing at which the end of the application area reaches the end of the other application mechanism. be able to.

  The objectives, features, aspects, and advantages of the technology disclosed in this specification will become more apparent from the detailed description and the accompanying drawings provided below.

It is a perspective view which illustrates roughly composition of an application device about an embodiment. It is a figure which illustrates the functional structure of the coating device regarding embodiment. It is a top view which illustrates the application area | region of the coating film formed with a coating device. It is the side view which assumed the case where an application | coating mechanism is arrange | positioned at the edge part of the application | coating area | region formed close. It is a top view which illustrates the modification of the application area | region of the coating film formed with a coating device. It is a top view which illustrates the modification of the application area | region of the coating film formed with a coating device. It is a timing chart of the operation | movement which forms a coating film regarding embodiment. It is a flowchart which illustrates operation | movement of the coating device regarding embodiment. It is a side view which illustrates the arrangement | positioning relationship between coating mechanisms when the coating operation by a coating mechanism is complete | finished. It is a side view which illustrates the arrangement | positioning relationship between application mechanisms when an application mechanism retracts | saves from an edge part. It is a timing chart of the operation | movement which forms a coating film with one coating mechanism.

  Embodiments will be described below with reference to the accompanying drawings.

  Note that the drawings are schematically shown, and the configuration is omitted or simplified as appropriate for the convenience of explanation. In addition, the mutual relationships between the sizes and positions of the configurations and the like shown in different drawings are not necessarily accurately described and can be changed as appropriate.

  Moreover, in the description shown below, the same code | symbol is attached | subjected and shown in the same component, and it is the same also about those names and functions. Therefore, detailed descriptions thereof may be omitted to avoid duplication.

  In the description described below, a specific position and direction such as “top”, “bottom”, “left”, “right”, “side”, “bottom”, “front” or “back” Even if the meaning terms are used, these terms are used for convenience to facilitate understanding of the contents of the embodiment, and have no relation to the direction in actual implementation. It is something that does not.

  In addition, in the description described below, even if an ordinal number such as “first” or “second” is used, these terms mean that the contents of the embodiment are understood. It is used for the sake of convenience, and is not limited to the order that can be generated by these ordinal numbers.

<Embodiment>
Hereinafter, the coating apparatus regarding this Embodiment is demonstrated.

<Configuration of coating apparatus>
FIG. 1 is a perspective view schematically illustrating the configuration of a coating apparatus according to the present embodiment. As illustrated in FIG. 1, the coating apparatus includes a stage 12 on which the substrate 10 is disposed, a coating mechanism 14, a coating mechanism 16, a moving mechanism 22, a control unit 24, and a maintenance unit 26 (described later). 2) and a maintenance unit 28 (see FIG. 2 described later).

  The substrate 10 is, for example, a rectangular glass substrate. In addition, the board | substrate 10 is not restricted to a glass substrate, The various board | substrate etc. which are generally used for flat panel displays can be assumed.

  The coating material 40 (see FIG. 2 described later) applied to the upper surface of the substrate 10 is, for example, a polyamic acid solution used for manufacturing an organic EL panel. Specifically, when a polyimide film is formed on the upper surface of the substrate 10, polyamic acid (polyamic acid) which is a precursor of polyimide is an organic solvent such as NMP (N-methyl-2-pyrrolidone: N-Methyl). -2-Pyrrolidone) is used as the coating material 40. The coating film of the coating material (polyamic acid solution) 40 applied to the substrate 10 is then dried, cured, imidized, and becomes a polyimide film. The coating material 40 is not limited to the polyamic acid solution. For example, various coating materials such as a liquid material such as a resist solution, a paste material or a slurry material containing a conductive material, silicon, nanometal ink, and the like. Can be assumed.

  Different coating materials may be applied by the coating mechanism 14 and the coating mechanism 16, or the same coating material may be applied. In the following embodiment, the same coating material 40 is applied by the coating mechanism 14 and the coating mechanism 16.

  The stage 12 is a table on which the substrate 10 is arranged and holds the substrate 10. The stage 12 is, for example, a stone structure having a rectangular parallelepiped shape, and at least the upper surface thereof, that is, the holding surface 12a of the substrate 10 is processed into a flat surface.

  A large number of vacuum suction holes (not shown here) are formed in the holding surface 12a which is a horizontal plane, and the substrate 10 is sucked and held by the holding surface 12a through the holes while the substrate 10 is processed. The Here, the area | region which hold | maintains the board | substrate 10 among the holding surfaces 12a is set to the holding | maintenance area | region 12b.

  The coating mechanism 14 includes a slit nozzle 14a and a bridging structure 14b.

  The slit nozzle 14a is provided extending in the y-axis direction in FIG. A supply mechanism for supplying the coating material 40 is connected to the slit nozzle 14a. The slit nozzle 14 a scans the upper surface of the substrate 10 and discharges the coating material 40 supplied by the supply mechanism to a predetermined region on the upper surface of the substrate 10, that is, a coating region 14 x (see FIG. 3 described later). . In this manner, the slit nozzle 14a applies the coating material 40 to the substrate 10, and a coating film 41a (see FIG. 3 described later) is formed. Here, the application region is a region on the upper surface of the substrate 10 where the coating material 40 is planned to be applied. For example, a region having a predetermined width along the edge from the entire area of the substrate 10 is defined. Excluded area.

  The bridging structure 14b is provided horizontally across the stage 12. The bridging structure 14b includes, for example, a nozzle holding part 140 that uses carbon fiber reinforced resin as an aggregate, a lifting mechanism 142 and a lifting mechanism 144 that support both ends of the nozzle holding part 140, and a movement that is attached to the ends of both lifting mechanisms. A child 146 and a mover 148.

  The nozzle holding part 140 holds the slit nozzle 14a. In addition, a gap sensor 140 a and a gap sensor 140 b are attached to the nozzle holding unit 140.

  Each of the gap sensor 140a and the gap sensor 140b is mounted in the vicinity of the slit nozzle 14a, and measures a difference in height, that is, a gap, with a lower entity, for example, the upper surface of the substrate 10 or the upper surface of the coating film 41a. The measurement result is output to the control unit 24.

  The elevating mechanism 142 and the elevating mechanism 144 include, for example, a servo motor and a ball screw, and generate a driving force that elevates and lowers the bridging structure 14b. By driving the elevating mechanism 142 and the elevating mechanism 144, the bridging structure 14b can be moved up and down in a translational manner. The elevating mechanism 142 and the elevating mechanism 144 are also used to adjust the posture of the slit nozzle 14a in the yz plane.

  The coating mechanism 16 includes a slit nozzle 16a and a bridging structure 16b. The coating mechanism 16 can operate independently of the coating mechanism 14 and can operate in parallel with the coating mechanism 14 in time.

  The slit nozzle 16a is provided to extend in the y-axis direction in FIG. A supply mechanism for supplying the coating material 40 is connected to the slit nozzle 16a. The slit nozzle 16a scans the upper surface of the substrate 10 and discharges the coating material 40 supplied by the supply mechanism to a predetermined region on the upper surface of the substrate 10, that is, a coating region 16x (see FIG. 3 described later). . Here, the application region 16x is a region located away from the application region 14x. In this way, the slit nozzle 16a applies the coating material 40 to the substrate 10, and a coating film 41b (see FIG. 3 described later) is formed. The operation of the supply mechanism will be described later.

  The bridging structure 16b is provided horizontally across the stage 12. The bridging structure 16b includes, for example, a nozzle holding portion 160 that uses carbon fiber reinforced resin as an aggregate, an elevating mechanism 162 and an elevating mechanism 164 that support both ends of the nozzle holding portion 160, and a movement that is attached to the ends of both elevating mechanisms. A child 166 and a mover 168 are provided.

  The elevating mechanism 162 and the elevating mechanism 164 include, for example, a servo motor and a ball screw, and generate a driving force that raises and lowers the bridging structure 16b.

  The nozzle holding unit 160 holds the slit nozzle 16a. In addition, a gap sensor 160 a and a gap sensor 160 b are attached to the nozzle holding unit 160.

  The moving mechanism 22 includes a traveling rail 22a and a traveling rail 22b that extend in the x-axis direction on both sides of the holding region 12b, and a stator 22c that is disposed on the outer side of each traveling rail and along each traveling rail. And a stator 22d, a linear encoder 22e and a linear encoder 22f (not shown here) provided along the stator 22c, respectively, and a linear encoder 22g and a linear encoder 22h provided along the stator 22d, respectively. .

  Here, the traveling rail 22a and the traveling rail 22b are provided to extend in parallel to each other. One end of the bridging structure 14b and one end of the bridging structure 16b are disposed on the traveling rail 22a. On the traveling rail 22b, the other end of the bridge structure 14b and the other end of the bridge structure 16b are disposed.

  The bridge structure 14b and the bridge structure 16b are moved in parallel along the direction in which the two traveling rails extend, that is, the x-axis direction in FIG. That is, the traveling rail 22a and the traveling rail 22b function as a common linear guide for the bridging structure 14b and the bridging structure 16b.

  Note that when the bridging structure 14b and the bridging structure 16b move using the traveling rail 22a and the traveling rail 22b as a common linear guide, the movement direction of the bridging structure 14b and the bridging structure 16b is the same direction along the x-axis direction (both x The positive axis direction or the negative x axis direction) or the opposite directions (the positive x axis direction and the negative x axis direction, or the negative x axis direction and the positive x axis direction).

  The linear encoder 22e detects the position of the mover 166, and the linear encoder 22f detects the position of the mover 146. Similarly, the linear encoder 22g detects the position of the mover 168, and the linear encoder 22h detects the position of the mover 148. Each of the linear encoder 22e, the linear encoder 22f, the linear encoder 22g, and the linear encoder 22h outputs the detected position information to the control unit 24.

  Moreover, the opening 32a and the opening 32b are provided in the both ends of the x-axis direction of the holding | maintenance area | region 12b in the holding surface 12a. The opening 32a and the opening 32b have a longitudinal direction in the y-axis direction and are formed in a range sandwiched between the traveling rail 22a and the traveling rail 22b.

  Although not shown in FIG. 1, a maintenance unit 26 is provided below the opening 32a. Similarly, a maintenance unit 28 is provided below the opening 32b. The maintenance unit 28 below the opening 32b is located on the opposite side of the maintenance unit 26 below the opening 32a with the main body of the stage 12 in between.

  The control unit 24 controls a control target by executing a program stored in an internal or external storage medium, and includes, for example, a CPU or a microprocessor.

  FIG. 2 is a diagram illustrating a functional configuration of the coating apparatus according to the present embodiment.

  As illustrated in FIG. 2, the control unit 24 includes a processor 24 a and a memory 24 b in which a control program is stored. The processor 24 a executes a control program to perform various controls for the coating process. Configured to run. As the memory, for example, a volatile or nonvolatile memory such as an HDD, a RAM, a ROM, or a flash memory is assumed.

  Specifically, the control unit 24 controls driving of the elevating mechanism 142 and the elevating mechanism 144 according to the outputs of the gap sensor 140a and the gap sensor 140b. Similarly, the control unit 24 controls driving of the elevating mechanism 162 and the elevating mechanism 164 according to the outputs of the gap sensor 160a and the gap sensor 160b. The control is performed, for example, after the maintenance process and before the start of the coating operation.

  Further, the control unit 24 controls the movement position of the slit nozzle 14a according to the position information of the moving element 146 by the linear encoder 22f and the position information of the moving element 148 by the linear encoder 22h. Similarly, the control unit 24 controls the movement position of the slit nozzle 16a according to the position information of the moving element 166 by the linear encoder 22e and the position information of the moving element 168 by the linear encoder 22g.

  The control unit 24 operates the supply mechanism 72a when the position of the slit nozzle 14a is a position corresponding to the application region 14x. In addition, the control unit 24 moves the slit nozzle 14a to the opening 32a and causes the maintenance unit 26 to perform a predetermined maintenance process.

  Similarly, the control unit 24 operates the supply mechanism 72b when the position of the slit nozzle 16a is a position corresponding to the application region 16x. Further, the control unit 24 moves the slit nozzle 16a to the opening 32b and causes the maintenance unit 28 to perform a predetermined maintenance process. The maintenance process in the maintenance unit 28 may be different from the maintenance process in the maintenance unit 26.

  Here, the maintenance process is, for example, a process for returning the tip of the slit nozzle to the initial state before starting the coating process. For example, in the initial state, it is preferable that a bead (liquid reservoir) of the coating material 40 is formed uniformly at the front end of the slit nozzle in which the discharge port is formed over the width direction. Or it is preferable that the coating material 40 is not attached over the width direction of a slit nozzle in an initial state. In short, in the initial state, it is preferable that the state of adhesion of the coating material 40 at the tip of the slit nozzle is uniform in the width direction. When this adhesion state is non-uniform, there arises a problem that the film thickness in the width direction of the coating film formed at the start of the coating process becomes non-uniform.

  The maintenance unit 26 includes a cleaning liquid discharge mechanism 83a, a standby pot 85a, a scraper unit 84a, and a pre-coating mechanism 86a.

  Note that a mechanism for realizing the initial state of the slit nozzle as described above may be provided in the maintenance unit, and the configuration of the maintenance unit is not limited to the above. For example, if the initial state can be realized only by the scraper processing, the maintenance unit may be provided with only the scraper unit.

  The cleaning liquid discharge mechanism 83a is a mechanism that discharges the cleaning liquid toward the tip of the slit nozzle 14a. Further, the cleaning liquid discharge mechanism 83a may be capable of ejecting an inert gas (nitrogen) toward the slit nozzle 14a. The cleaning liquid discharge mechanism 83a cleans the tip of the slit nozzle 14a by discharging the cleaning liquid while moving below the slit nozzle 14a along the y-axis direction.

  The standby pot 85a is provided so that the tip of the standby slit nozzle 14a is not dried.

  The pre-coating mechanism 86a is a mechanism for performing preliminary coating immediately before the slit nozzle 14a performs the coating process on the substrate 10. The pre-coating mechanism 86a includes a dispense roll, and the slit nozzle 14a performs pre-coating by discharging the coating material 40 to the dispense roll.

  The scraper portion 84a removes the coating material 40 remaining at the tip of the slit nozzle 14a after the preliminary coating. The scraper portion 84a removes the coating material 40 remaining at the tip of the slit nozzle 14a while moving the tip of the slit nozzle 14a along the y-axis direction.

  The maintenance unit 28 includes a cleaning liquid discharge mechanism 83b, a standby pot 85b, a scraper unit 84b, and a pre-coating mechanism 86b.

  The cleaning liquid discharge mechanism 83b is a mechanism that discharges the cleaning liquid toward the tip of the slit nozzle 16a. The cleaning liquid discharge mechanism 83b cleans the tip of the slit nozzle 16a by discharging the cleaning liquid while moving below the slit nozzle 16a along the y-axis direction.

  The standby pot 85b is provided so that the tip of the standby slit nozzle 16a is not dried.

  The pre-coating mechanism 86b is a mechanism for performing pre-coating immediately before the slit nozzle 16a performs the coating process on the substrate 10.

  The scraper portion 84b removes the coating material 40 remaining at the tip of the slit nozzle 16a after the preliminary coating. The scraper portion 84b removes the coating material 40 remaining at the tip of the slit nozzle 16a while moving the tip of the slit nozzle 16a along the y-axis direction.

<Operation of coating device>
First, the coating region of the coating film formed by the coating apparatus according to the present embodiment will be described.

  FIG. 3 is a plan view illustrating a coating region of a coating film formed by the coating apparatus. As illustrated in FIG. 3, the coating region 14 x where the coating film 41 a is formed and the coating region 16 x where the coating film 41 b is formed are arranged close to each other and apart from each other. In FIG. 3, an end portion of the application region 14x close to the application region 16x is referred to as an end portion 14y, and an end portion of the application region 16x close to the application region 14x is referred to as an end portion 16y. Further, the end portion on the opposite side to the end portion 14y of the application region 14x is defined as an end portion 14z, and the end portion on the opposite side of the end portion 16y of the application region 16x is defined as an end portion 16z. Note that the number of application regions to which the application material 40 is applied is not limited to the case illustrated in FIG. 3.

  FIG. 4 is a side view virtually illustrating a case where the coating mechanism is arranged at the end of the coating region formed in the vicinity. As illustrated in FIG. 4, the distance A between the end portion 14 y and the end portion 16 y in the coating region 14 x and the coating region 16 x that are arranged close to each other is equal to the coating mechanism 14 positioned at the end portion 14 y. It is below the distance which the application | coating mechanism 16 located in the edge part 16y contacts. Specifically, the distance is equal to or less than the distance between the nozzle holding portion 140 of the coating mechanism 14 located at the end portion 14y and the nozzle holding portion 160 of the coating mechanism 16 located at the end portion 16y. In other words, the length B of the nozzle holding portion 140 when the slit nozzle 14a is located at the end portion 14y protrudes from the application region 14x in a plan view, and the nozzle holding portion when the slit nozzle 16a is located at the end portion 16y. The total of the length 160 that protrudes 160 from the application region 16x in plan view is equal to or greater than the distance A. In other words, the position of the end portion 14y and the position of the end portion 16y are in the positional relationship in which the state illustrated in FIG. 4 is farthest away, and the coating region 14x and the coating region 16x are in a direction closer to each other than this position. Is set.

  FIG. 5 is a plan view illustrating a modified example of the coating region of the coating film formed by the coating apparatus. As illustrated in FIG. 5, even if the application region 15x is formed between the application region 14x and the application region 16x, the distance A between the end portion 14y and the end portion 16y is set at each end portion. In the case where the distance is equal to or shorter than the distance between the coating mechanisms positioned, it can be said that the coating region 14x and the coating region 16x are close to each other.

  FIG. 6 is a plan view illustrating a modified example of the coating region of the coating film formed by the coating apparatus. As illustrated in FIG. 6, the application region 14 c and the application region 14 d to which the application material 40 is applied by the slit nozzle 14 a may be formed apart from each other in the y-axis direction. Similarly, the application region 16c to which the application material 40 is applied by the slit nozzle 16a and the application region 16d may be formed apart from each other in the y-axis direction. In addition, when forming the application | coating area | region illustrated by FIG. 6 (block application | coating), each slit nozzle is formed with two slit-shaped ejection openings along with the y-axis direction.

  Next, operation | movement of the coating device regarding this Embodiment is demonstrated. FIG. 7 is a timing chart of the operation for forming the coating film. In FIG. 7, the vertical axis indicates the position of the slit nozzle (thick line), and the horizontal axis indicates time. In FIG. 7, the operation of the application mechanism 14 is shown by a lower timing chart, and the operation of the application mechanism 16 is shown by an upper timing chart. In FIG. 7, in addition to the position of the slit nozzle (thick line), the boundary position (thin line) of the region reached by the nozzle holder is also shown. FIG. 8 is a flowchart illustrating the operation of the coating apparatus.

As illustrated in FIG. 7, first, the control unit 24 controls the operation of the moving mechanism 22 to move the slit nozzle 14 a of the coating mechanism 14 to the opening 32 a. At this time, the control unit 24 controls the elevating mechanism 142 and the elevating mechanism 144 to position the slit nozzle 14a at the moving height. Then, the control unit 24 performs predetermined maintenance processing in the maintenance unit 26, specifically, cleaning processing by the cleaning liquid discharge mechanism 83a, preliminary coating processing in the pre-coating mechanism 86a, and remaining coating material 40 by the scraper unit 84a. A removal process is performed (t ₁ ). This is an operation corresponding to step ST101 illustrated in FIG. The maintenance process is not limited to the above process, for example, as long as a process for adjusting the tip of the slit nozzle 14a to be in an initial state is performed. For example, a maintenance process in which at least the removal process of the coating material 40 by the scraper unit 84a is executed may be performed.

On the other hand, the control unit 24 keeps the coating mechanism 16 on standby while performing the above-described maintenance process on the coating mechanism 14 (t ₀ ). This is an operation corresponding to step ST201 illustrated in FIG.

  Note that the standby time of the coating mechanism 16 is adjusted based on the timing when the coating mechanism 14 that has finished the coating operation retracts from the end 14y, as will be described later. Specifically, the coating mechanism 16 is adjusted so as to reach the end portion 16y at an appropriate timing in consideration of the width of the coating region 16x, the coating speed of the coating mechanism 16, the time for the retracting operation of the coating mechanism 14, and the like. The The maintenance process is desirably performed after the application mechanism 16 is on standby. In order to maintain the initial state of the slit nozzle at the start of the coating operation because there is a concern that the state of the coating mechanism 16 deteriorates (e.g., the bias of the coating material 40 after the removal processing by the scraper portion 84b) over time after the maintenance processing. This is because the maintenance process is preferably performed immediately before the coating operation.

  Next, the control unit 24 controls the operation of the moving mechanism 22 to move the slit nozzle 14a of the coating mechanism 14 to the end 14z of the coating region 14x. This is an operation corresponding to step ST102 illustrated in FIG.

On the other hand, the control unit 24 controls the operation of the moving mechanism 22 to move the slit nozzle 16a of the coating mechanism 16 to the opening 32b. At this time, the control unit 24 controls the lifting mechanism 162 and the lifting mechanism 164 to position the slit nozzle 16a at the moving height. Then, the control unit 24 causes the maintenance unit 28 to perform a predetermined maintenance process (t ₁ ). This is an operation corresponding to step ST202 illustrated in FIG. In this case, the timing at which the coating mechanism 16 is positioned at the maintenance unit 28 is later in time than the timing at which the coating mechanism 14 is positioned at the maintenance unit 26.

Next, the control unit 24 controls the operation of the coating mechanism 14 while moving the slit nozzle 14a of the coating mechanism 14 from the end portion 14z to the end portion 14y of the coating region 14x, so that the coating material 40 is applied from the slit nozzle 14a. Is discharged to the application region 14x (t ₂ ). At this time, the control unit 24 controls the elevating mechanism 142 and the elevating mechanism 144 to position the slit nozzle 14 a at the coating height with respect to the upper surface of the substrate 10. The application height is lower than the moving height. This is an operation corresponding to step ST103 illustrated in FIG.

  On the other hand, the control unit 24 moves the slit nozzle 16a of the coating mechanism 16 to the end 16z of the coating region 16x. This is an operation corresponding to step ST203 illustrated in FIG.

Furthermore, the control unit 24 controls the operation of the coating mechanism 16 while moving the slit nozzle 16a of the coating mechanism 16 from the end portion 16z to the end portion 16y of the coating region 16x, thereby removing the coating material 40 from the slit nozzle 16a. ejecting the coating region 16x _(t 2). At this time, the control unit 24 controls the elevating mechanism 162 and the elevating mechanism 164 to position the slit nozzle 16 a at the coating height with respect to the upper surface of the substrate 10. Here, the moving speed of the coating mechanism 16 from the end 16z to the end 16y is the same as the moving speed of the coating mechanism 14 from the end 14z to the end 14y. Here, the “same speed” is a speed at which the coating mechanism 14 and the coating mechanism 16 that have started the coating process at the same time can come into contact with each other when reaching the end of each coating region. This is an operation corresponding to step ST204 illustrated in FIG.

  Here, the coating operation by the coating mechanism 16 is started with a time delay from the coating operation by the coating mechanism 14. In addition, at least a part of the coating operation by the coating mechanism 16 is performed in parallel with the coating operation by the coating mechanism 14 in time.

  Next, the control unit 24 ends the coating operation of the coating mechanism 14 that has reached the end 14y. Then, the control unit 24 retracts the coating mechanism 14 from the end 14y, and moves the slit nozzle 14a of the coating mechanism 14 to the opening 32a. At this time, the control unit 24 controls the elevating mechanism 142 and the elevating mechanism 144 to position the slit nozzle 14a at the moving height. This is an operation corresponding to step ST104 illustrated in FIG.

  FIG. 9 is a side view illustrating the arrangement relationship between the application mechanisms when the application operation of the application film 41a by the application mechanism 14 is completed. At this time, the coating mechanism 16 applies the coating film 41b to a position before the end 16y. As illustrated in FIG. 9, in the coating operation illustrated in FIG. 7, the distance between the nozzle holding unit 140 and the nozzle holding unit 160 when the slit nozzle 14 a of the coating mechanism 14 is located at the end 14 y is a distance. D is secured. This distance D is a distance that is adjusted according to the waiting time before the coating mechanism 16 is subjected to the maintenance process, and is for adjusting the time until the coating mechanism 14 is retracted from the end portion 14y.

  FIG. 10 is a side view illustrating the arrangement relationship between the application mechanisms when the application mechanism 14 is retracted from the end 14y after the application operation by the application mechanism 14 is completed. As illustrated in FIG. 10, when the coating mechanism 14 is retracted from the end 14 y, the coating mechanism 14 and the coating mechanism 16 are closest to each other. More specifically, the nozzle holding unit 140 and the nozzle holding unit 160 are closest to each other.

  Here, desirable operation timing in relation to the retracting operation of the coating mechanism 14 when the coating mechanism 16 reaches the end portion 16y will be described with reference to FIG.

  As illustrated in FIG. 10, the region of the upper surface of the substrate 10 that overlaps the coating mechanism 14 in plan view when the coating mechanism 14 is positioned at the end 14 y is defined as an end region 14 w. Similarly, the region of the upper surface of the substrate 10 that overlaps the coating mechanism 16 in plan view when the coating mechanism 16 is positioned at the end portion 16y is referred to as an end region 16w.

  After the coating mechanism 14 starts to retract from the end portion 14y, the control unit 24 waits until the coating mechanism 14 reaches a position where the entire coating mechanism 14 does not overlap the end region 14w in plan view. The time difference control is performed with respect to the movement of the coating mechanism so that at least a part thereof reaches the end region 16w. In the case illustrated in FIG. 10, after the coating mechanism 14 starts to retract from the end portion 14 y, the entire nozzle holding portion 140 reaches a position that does not overlap the end region 14 w in plan view. The control unit 24 performs time difference control so that at least a part of the nozzle holding unit 160 reaches the end region 16w. By such time difference control, the coating mechanism 16 reaches the end portion 16y immediately after the coating mechanism 14 is retracted from the end portion 14y.

  Next, the control unit 24 ends the coating operation of the coating mechanism 16 that has reached the end portion 16y after the coating mechanism 14 has been retracted from the end portion 14y. Then, the control unit 24 retracts the coating mechanism 16 from the end portion 16y, and moves the slit nozzle 16a of the coating mechanism 16 to the opening 32b. At this time, the control unit 24 controls the lifting mechanism 162 and the lifting mechanism 164 to position the slit nozzle 16a at the moving height. This is an operation corresponding to step ST205 illustrated in FIG.

  In the above-described coating operation, since a time for the coating mechanism 16 to wait before the maintenance process is provided, the timing at which the coating mechanism 16 reaches the end portion 16y is the timing at which the coating mechanism 14 reaches the end portion 14y. Later than. According to such a coating operation, the time required for the coating operation as a whole can be shortened while separating the coating mechanism 14 and the coating mechanism 16 that move in directions opposite to each other. In addition, in each coating mechanism, maintenance processing before the coating operation can be performed reliably.

In the above-described coating operation, the moving speed of the coating mechanism 14 and the moving speed of the coating mechanism 16 may be different. For example, when the speed at which the coating mechanism 16 moves in the negative x-axis direction during the coating operation is slower than the speed at which the coating mechanism 14 moves in the positive x-axis direction during the coating operation, the coating illustrated in FIG. Even when the waiting time (t ₀ ) of the mechanism 16 is not or shorter, the coating mechanism 14 reaches the end 14y of the coating region 14x at the timing when the coating mechanism 16 reaches the end 16y of the coating region 16x. It can be delayed from the arrival timing.

Here, the above-described coating operation is compared with a coating operation by one coating mechanism. FIG. 11 is a timing chart of the operation of forming a coating film with one coating mechanism. As illustrated in FIG. 11, for example, when forming a coating film in the coating region as illustrated in FIG. 3 using the coating mechanism 14, the control unit 24 forms the coating film in the coating region 14 x. By controlling the operation of the moving mechanism 22, the slit nozzle 14a of the coating mechanism 14 is moved to the opening 32a. Then, after a predetermined maintenance process is performed by the maintenance unit 26 (t ₁ ), the slit nozzle 14a of the coating mechanism 14 is moved to the end 16y of the coating region 16x.

Further, the control unit 24 controls the operation of the coating mechanism 14 while moving the slit nozzle 14a of the coating mechanism 14 from the end portion 16y of the coating region 16x to the end portion 16z, whereby the coating material 40 is transferred from the slit nozzle 14a. ejecting the coating region 16x _(t 2).

  Next, the control unit 24 ends the coating operation of the coating mechanism 14 that has reached the end 16z. Then, the control unit 24 retracts the coating mechanism 14 from the end 16z, and moves the slit nozzle 14a of the coating mechanism 14 to the opening 32a.

  As described above, when the coating film is formed in each of the coating region 14x and the coating region 16x by one coating mechanism 14, the coating mechanism 14 needs to move to the opening 32a for maintenance processing every time the coating operation is completed. There is. Therefore, according to such an operation, the moving distance and moving time of the coating mechanism 14 become long.

On the other hand, according to the application operation illustrated in FIG. 7, the application mechanism 14 and the application mechanism 16 perform the operation in parallel at least in a part of the application operation, so that the time required for the entire application operation is reached. Can be shortened. Specifically, it is possible to reduce the time to t _s by applying operation than illustrated in FIG. 11.

  Furthermore, according to the coating operation illustrated in FIG. 7, after the maintenance process is performed in the maintenance unit corresponding to each coating mechanism, the coating operation by each coating mechanism is performed. Therefore, it is possible to maintain high accuracy of the coating process such as uniformity of the coating film thickness.

<About the effects produced by the embodiment described above>
Next, effects produced by the embodiment described above will be exemplified. In the following description, the effect is described based on the specific configuration exemplified in the above-described embodiment, but is exemplified in the present specification within a range in which the same effect occurs. Other specific configurations may be substituted.

  According to the embodiment described above, the coating apparatus includes the stage 12 on which the substrate 10 is disposed, the first coating mechanism, the second coating mechanism, the first maintenance unit, and the second maintenance unit. A maintenance unit and a control unit 24 are provided. Here, the first application mechanism corresponds to, for example, the application mechanism 14. The second application mechanism corresponds to the application mechanism 16, for example. The first maintenance unit corresponds to the maintenance unit 26, for example. The second maintenance unit corresponds to the maintenance unit 28, for example.

  The coating mechanism 14 is movable in a first direction that is a direction along the upper surface of the substrate 10 disposed on the stage 12. The application mechanism 14 applies a first application material to the first application region on the upper surface of the substrate 10. Here, the first direction corresponds to, for example, the positive x-axis direction in FIG. The first application area corresponds to, for example, the application area 14x. The first coating material corresponds to the coating material 40, for example.

  The application mechanism 16 is movable in a second direction that is opposite to the positive x-axis direction. The application mechanism 16 applies the second application material to the second application region on the upper surface of the substrate 10. Here, the second direction corresponds to, for example, the x-axis negative direction in FIG. The second application area corresponds to, for example, the application area 16x. The second coating material corresponds to the coating material 40, for example.

  The maintenance unit 26 is located on one side of the stage 12 and performs a first maintenance process (maintenance process) on the coating mechanism 14. The maintenance unit 28 is located on the other side of the stage 12 and performs a second maintenance process (maintenance process) on the coating mechanism 16.

  The control unit 24 controls the operation of the application mechanism 14 and the operation of the application mechanism 16. Specifically, the control unit 24 moves the coating mechanism 14 in the positive x-axis direction in the coating region 14x after positioning the coating mechanism 14 on the maintenance unit 26 for maintenance processing. Further, the control unit 24 retracts the coating mechanism 14 from the first end after the coating mechanism 14 reaches the first end of the coating region 14x. Here, the first end corresponds to, for example, the end 14y.

  Further, the control unit 24 moves the coating mechanism 16 in the negative x-axis direction in the coating region 16x after positioning the coating mechanism 16 on the maintenance unit 28 for maintenance processing. Further, the control unit 24 causes the application mechanism 16 to reach the second end of the application region 16x. Here, the second end corresponds to, for example, the end 16y.

  Here, the distance A between the end portion 14y and the end portion 16y is equal to or shorter than the distance between the coating mechanism 14 located at the end portion 14y and the coating mechanism 16 located at the end portion 16y.

  Then, the control unit 24 separates the coating mechanism 14 and the coating mechanism 16 by performing time difference control that delays the timing at which the coating mechanism 16 reaches the end portion 16y from the timing at which the coating mechanism 14 reaches the end portion 14y. At the same time, at least a part of the movement of the coating mechanism 14 and the coating mechanism 16 is performed in parallel in time.

  According to such a configuration, each application mechanism applies the application material after performing the maintenance process. In addition, the application mechanism 14 moves in the direction opposite to each other by the time difference control that delays the timing at which the application mechanism 16 reaches the end 16y of the application region 16x from the timing at which the application mechanism 14 reaches the end 14y of the application region 14x. And the application | coating operation | movement of the coating material 40 is performed in parallel at least in part, separating the application | coating mechanism 16. As shown in FIG. As a result, a coating film that is close and separated in the moving direction of the coating mechanism (the x-axis direction in FIG. 1) is formed while reducing the coating processing time while maintaining high coating processing accuracy such as film thickness. can do. By shortening the coating processing time, for example, the coating film formed earlier deteriorates the quality of the film or increases the film thickness uniformity during the time it takes until the next coating film is formed. It can suppress making it worse. In particular, when a coating material 40 having a high viscosity, such as a polyamic acid solution, is used, a relatively long time is required for the maintenance process and the coating operation. The deterioration becomes remarkable.

  Other configurations exemplified in the present specification other than these configurations can be omitted as appropriate. That is, if at least these configurations are provided, the effects described above can be produced.

  However, when at least one of the other configurations exemplified in the present specification is appropriately added to the configuration described above, that is, the configuration described above is not exemplified as the configuration described above. Even when other configurations described above are added to the configurations described above, the effects described above can be similarly produced.

  Further, according to the embodiment described above, when the coating mechanism 14 and the coating mechanism 16 move in the respective coating areas at the same speed, the control unit 24 causes the coating mechanism 16 to be moved to the maintenance unit 28. The time difference control is performed by delaying the timing at which the coating mechanism 14 is positioned on the maintenance unit 26. According to such a configuration, the timing at which application of the application material 40 immediately after the maintenance process is started can be shifted between the application mechanism 14 and the application mechanism 16. Therefore, the coating material 40 is applied in parallel in at least a part of the time while the application mechanism 14 and the application mechanism 16 have a short time until the application process after the maintenance process is started and are the same. be able to.

  Further, according to the embodiment described above, for example, when the coating mechanism 14 and the coating mechanism 16 simultaneously start the coating process, the control unit 24 moves the coating mechanism 16 in the negative x-axis direction. It is also possible to perform time difference control by making the speed slower than the speed at which the coating mechanism 14 is moved in the positive x-axis direction. According to such a configuration, after the application of the coating material 40 is started, the progress of the application operation by the application mechanism 14 and the progress of the application operation by the application mechanism 16 can be shifted. Therefore, it is possible to apply the coating material 40 in parallel at least in part while separating the two coating mechanisms that move in directions opposite to each other.

  Moreover, according to embodiment described above, a 1st coating material and a 2nd coating material consist of the same material. According to such a configuration, when the coating film is formed on the coating region 14x and the coating region 16x formed of the same material, the coating processing time can be shortened.

  Further, according to the embodiment described above, the control unit 24 performs time difference control for causing the coating mechanism 16 to reach the end 16y immediately after the coating mechanism 14 is retracted from the end 14y. According to such a configuration, the coating mechanism 16 reaches the end 16y of the coating region 16x immediately after the coating mechanism 14 is retracted from the end 14y of the coating region 14x. The time for performing the application of 40 becomes longer. Therefore, the coating processing time for coating the coating material 40 can be effectively shortened.

  Further, according to the embodiment described above, the region of the upper surface of the substrate 10 that overlaps the coating mechanism 14 in plan view when the coating mechanism 14 is positioned at the end 14y is defined as the first end region. When the region of the upper surface of the substrate 10 that overlaps the coating mechanism 16 in a plan view when the coating mechanism 16 is positioned at the end portion 16y is the second end region, the control unit 24 has After the retreat from 14y is started, at least a part of the coating mechanism 16 is moved to the second end region until the entire coating mechanism 14 reaches a position where it does not overlap the first end region in plan view. The time difference control to reach is performed. Here, the first end region corresponds to, for example, the end region 14w. Further, the second end region corresponds to, for example, the end region 16w. According to such a configuration, since at least a part of the coating mechanism 16 reaches the end region 16w while the entire coating mechanism 14 is not fully retracted from the end region 14w, the two coating mechanisms are parallel to each other. The time for applying the coating material 40 becomes longer. Therefore, the coating processing time for coating the coating material 40 can be effectively shortened.

  Moreover, according to embodiment described above, the application | coating mechanism 14 is provided with a 1st nozzle and a 1st holding | maintenance part. The application mechanism 16 includes a second nozzle and a second holding unit. Here, the first nozzle corresponds to, for example, the slit nozzle 14a. The first holding unit corresponds to the nozzle holding unit 140, for example. The second nozzle corresponds to the slit nozzle 16a, for example. The second holding unit corresponds to the nozzle holding unit 160, for example.

  The slit nozzle 14a applies the coating material 40 to the coating region 14x. The nozzle holding unit 140 holds the slit nozzle 14a and is movable in the x-axis positive direction. The slit nozzle 16a applies the coating material 40 to the coating region 16x. The nozzle holding part 160 holds the slit nozzle 16a and is movable in the x-axis negative direction. The distance A between the end portion 14y and the end portion 16y is such that the nozzle holding portion 140 of the coating mechanism 14 located at the end portion 14y contacts the nozzle holding portion 160 of the coating mechanism 16 located at the end portion 16y. Below the distance.

  According to such a configuration, the end portion 14y of the application region 14x and the end portion 16y of the application region 16x are located below the distance where they contact each other when the application mechanism is positioned at these ends. In addition, the two application mechanisms are separated from each other by the time difference control that delays the timing at which the application mechanism 16 reaches the end 16y of the application region 16x from the timing at which the application mechanism 14 reaches the end 14y of the application region 14x. The coating material 40 can be applied in part in parallel in time.

  According to the embodiment described above, in the coating method, after the coating mechanism 14 is positioned on one side of the stage 12 for maintenance processing, the coating mechanism 14 is moved in the positive x-axis direction in the coating region 14x. Let Further, after the coating mechanism 14 reaches the end 14y of the coating region 14x, the coating mechanism 14 is retracted from the end 14y. Then, after the coating mechanism 16 is positioned on the other side of the stage 12 for the maintenance process, the coating mechanism 16 is moved in the x-axis negative direction in the coating region 16x. Further, the application mechanism 16 is made to reach the end 16y of the application region 16x.

  Then, by performing time difference control that delays the timing at which the coating mechanism 16 reaches the end portion 16y from the timing at which the coating mechanism 14 reaches the end portion 14y, the coating mechanism 14 and the coating mechanism 16 are separated from each other, and the coating mechanism 16 is separated. 14 and the application mechanism 16 are moved in parallel at least in part.

  According to such a configuration, each application mechanism applies the application material after performing the maintenance process. In addition, the application mechanism 14 moves in the direction opposite to each other by the time difference control that delays the timing at which the application mechanism 16 reaches the end 16y of the application region 16x from the timing at which the application mechanism 14 reaches the end 14y of the application region 14x. And the application | coating operation | movement of the coating material 40 is performed in parallel at least in part, separating the application | coating mechanism 16. As shown in FIG. As a result, it is possible to form coating films that are close to each other in the moving direction of the coating mechanism and that are spaced apart from each other while maintaining high accuracy of the coating process such as the film thickness while shortening the coating process time.

  Other configurations exemplified in the present specification other than these configurations can be omitted as appropriate. That is, if at least these configurations are provided, the effects described above can be produced.

  However, when at least one of the other configurations exemplified in the present specification is appropriately added to the configuration described above, that is, the configuration described above is not exemplified as the configuration described above. Even when other configurations described above are added to the configurations described above, the effects described above can be similarly produced.

  Moreover, when there is no special restriction | limiting, the order in which each process is performed can be changed.

<Modifications in Embodiments Described above>
In the embodiment described above, the material, material, dimension, shape, relative arrangement relationship, or implementation condition of each component may be described, but these are examples in all aspects. Thus, it is not limited to those described in this specification.

  Accordingly, countless variations and equivalents not illustrated are envisioned within the scope of the technology disclosed in this specification. For example, the case where at least one component is modified, the case where it is added, or the case where it is omitted are included.

DESCRIPTION OF SYMBOLS 10 Substrate 12 Stage 12a Holding surface 12b Holding area 14, 16 Coating mechanism 14a, 16a Slit nozzle 14b, 16b Bridge structure 14w, 16w End area 14c, 14d, 14x, 15x, 16c, 16d, 16x Coating area 14y, 14z, 16y, 16z End 22 Moving mechanism 22a, 22b Travel rail 22c, 22d Stator 22e, 22f, 22g, 22h Linear encoder 24 Controller 24a Processor 24b Memory 26, 28 Maintenance unit 32a, 32b Opening 40 Coating material 41a, 41b Coating Films 72a, 72b Supply mechanism 83a, 83b Cleaning liquid discharge mechanism 84a, 84b Scraper unit 85a, 85b Standby pot 86a, 86b Pre-coating mechanism 140, 160 Nozzle holding unit 140a, 140b, 160a, 1 0b gap sensor 142,144,162,164 lifting mechanism 146,148,166,168 mover A, D distance

Claims (8)

A stage on which the substrate is placed;
A first coating that is movable in a first direction that is along the top surface of the substrate disposed on the stage and that coats a first coating material on a first coating region on the top surface of the substrate. Mechanism,
A second application mechanism that is movable in a second direction that is opposite to the first direction and that applies a second application material to a second application region on the upper surface of the substrate;
A first maintenance unit that is located on one side of the stage and that performs a first maintenance process on the first application mechanism;
A second maintenance unit that is located on the other side of the stage and that performs a second maintenance process on the second coating mechanism;
A controller that controls the operation of the first application mechanism and the operation of the second application mechanism;
The control unit positions the first coating mechanism in the first maintenance unit for the first maintenance process, and then moves the first coating mechanism in the first coating region. Further, after the first coating mechanism reaches the first end of the first coating region, the first coating mechanism is retracted from the first end,
The control unit positions the second coating mechanism in the second maintenance unit for the second maintenance process, and then moves the second coating mechanism to the second coating region in the second coating region. In addition, the second application mechanism reaches the second end of the second application region,
The distance between the first end and the second end is such that the first application mechanism located at the first end and the second application located at the second end. Less than the contact distance with the mechanism,
The control unit performs time difference control for delaying the timing at which the second coating mechanism reaches the second end from the timing at which the first coating mechanism reaches the first end, The first coating mechanism and the second coating mechanism are moved in parallel at least partially in time while separating the first coating mechanism and the second coating mechanism.
Coating device. The control unit controls the time difference control by delaying a timing for positioning the second coating mechanism in the second maintenance unit from a timing for positioning the first coating mechanism in the first maintenance unit. I do,
The coating apparatus according to claim 1. The control unit performs the time difference control by making a speed of moving the second coating mechanism in the second direction slower than a speed of moving the first coating mechanism in the first direction. Do,
The coating apparatus of Claim 1 or Claim 2. The first coating material and the second coating material are made of the same material.
The coating apparatus of any one of Claims 1-3. The control unit performs the time difference control for causing the second coating mechanism to reach the second end immediately after the first coating mechanism is retracted from the first end.
The coating apparatus of any one of Claims 1-4. When the first coating mechanism is located at the first end, a region of the upper surface of the substrate that overlaps the first coating mechanism in a plan view is defined as a first end region.
When the second coating mechanism is located at the second end, a region on the upper surface of the substrate that overlaps the second coating mechanism in a plan view is defined as a second end region.
After the first coating mechanism starts to retract from the first end, the control unit is positioned so that the entire first coating mechanism does not overlap the first end region in plan view. Performing the time difference control to reach at least a part of the second application mechanism to the second end region until it reaches.
The coating device according to claim 5. The first application mechanism includes:
A first nozzle for applying the first application material to the first application region;
A first holding unit that holds the first nozzle and is movable in the first direction;
The second application mechanism includes:
A second nozzle for applying the second application material to the second application region;
A second holding unit that holds the second nozzle and is movable in the second direction;
The distance between the first end portion and the second end portion is set between the first holding portion and the second end portion of the first application mechanism located at the first end portion. The distance is less than or equal to the distance at which the second holding portion of the second application mechanism located is in contact.
The coating apparatus of any one of Claims 1-6. A first application mechanism which is movable in a first direction which is a direction along the upper surface of the substrate disposed on the stage, and which applies a first application material to a first application region on the upper surface of the substrate; A second application mechanism that is movable in a second direction that is opposite to the first direction and that applies a second application material to a second application region on the upper surface of the substrate. An application method for applying the first application material and the second application material using an application device comprising:
After the first coating mechanism is positioned on one side of the stage for the first maintenance process, the first coating mechanism is moved in the first direction in the first coating region, and After the first application mechanism reaches the first end of the first application region, the first application mechanism is retracted from the first end;
After the second coating mechanism is positioned on the other side of the stage for the second maintenance process, the second coating mechanism is moved in the second direction in the second coating region, and , Causing the second application mechanism to reach a second end of the second application region,
The distance between the first end and the second end is such that the first application mechanism located at the first end and the second application located at the second end. Less than the contact distance with the mechanism,
By performing the time difference control for delaying the timing at which the second coating mechanism reaches the second end from the timing at which the first coating mechanism reaches the first end, the first coating is performed. Moving the first coating mechanism and the second coating mechanism in parallel at least partially in time while separating the mechanism and the second coating mechanism;
Application method.

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