JP2018129523A5 - - Google Patents
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- Publication number
- JP2018129523A5 JP2018129523A5 JP2018052282A JP2018052282A JP2018129523A5 JP 2018129523 A5 JP2018129523 A5 JP 2018129523A5 JP 2018052282 A JP2018052282 A JP 2018052282A JP 2018052282 A JP2018052282 A JP 2018052282A JP 2018129523 A5 JP2018129523 A5 JP 2018129523A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- metal layer
- wiring terminal
- manufacturing
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 34
- 229910052751 metal Inorganic materials 0.000 claims 30
- 239000002184 metal Substances 0.000 claims 30
- 238000004519 manufacturing process Methods 0.000 claims 17
- 238000000034 method Methods 0.000 claims 9
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical group [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 4
- 229910052719 titanium Inorganic materials 0.000 claims 4
- 239000010936 titanium Substances 0.000 claims 4
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 2
- 239000000956 alloy Substances 0.000 claims 2
- 229910045601 alloy Inorganic materials 0.000 claims 2
- 229910001882 dioxygen Inorganic materials 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 2
- 150000002739 metals Chemical class 0.000 claims 2
- 230000003647 oxidation Effects 0.000 claims 2
- 238000007254 oxidation reaction Methods 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- 229910052726 zirconium Inorganic materials 0.000 claims 2
- 230000004913 activation Effects 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018052282A JP6718479B2 (ja) | 2018-03-20 | 2018-03-20 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018052282A JP6718479B2 (ja) | 2018-03-20 | 2018-03-20 | 半導体装置の製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016058870A Division JP6315014B2 (ja) | 2016-03-23 | 2016-03-23 | 半導体装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018129523A JP2018129523A (ja) | 2018-08-16 |
| JP2018129523A5 true JP2018129523A5 (https=) | 2019-05-09 |
| JP6718479B2 JP6718479B2 (ja) | 2020-07-08 |
Family
ID=63173201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018052282A Active JP6718479B2 (ja) | 2018-03-20 | 2018-03-20 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6718479B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7616040B2 (ja) * | 2021-12-20 | 2025-01-17 | 豊田合成株式会社 | Ｌｅｄディスプレイとその製造方法 |
-
2018
- 2018-03-20 JP JP2018052282A patent/JP6718479B2/ja active Active
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