JP2018129447A - 振動デバイス - Google Patents
振動デバイス Download PDFInfo
- Publication number
- JP2018129447A JP2018129447A JP2017022546A JP2017022546A JP2018129447A JP 2018129447 A JP2018129447 A JP 2018129447A JP 2017022546 A JP2017022546 A JP 2017022546A JP 2017022546 A JP2017022546 A JP 2017022546A JP 2018129447 A JP2018129447 A JP 2018129447A
- Authority
- JP
- Japan
- Prior art keywords
- main surface
- piezoelectric element
- vibration
- resin
- vibration member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011347 resin Substances 0.000 claims abstract description 73
- 229920005989 resin Polymers 0.000 claims abstract description 73
- 229910052751 metal Inorganic materials 0.000 claims abstract description 13
- 239000002184 metal Substances 0.000 claims abstract description 13
- 239000012790 adhesive layer Substances 0.000 description 26
- 239000004020 conductor Substances 0.000 description 11
- 238000006073 displacement reaction Methods 0.000 description 11
- 239000010410 layer Substances 0.000 description 7
- 229910052709 silver Inorganic materials 0.000 description 4
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 239000011231 conductive filler Substances 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- 229920001651 Cyanoacrylate Polymers 0.000 description 2
- MWCLLHOVUTZFKS-UHFFFAOYSA-N Methyl cyanoacrylate Chemical compound COC(=O)C(=C)C#N MWCLLHOVUTZFKS-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910001374 Invar Inorganic materials 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 150000003949 imides Chemical class 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000052 poly(p-xylylene) Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- -1 polyparaxylylene Polymers 0.000 description 1
- 230000015541 sensory perception of touch Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Images
Landscapes
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Abstract
Description
Claims (2)
- 圧電素子と、
前記圧電素子に接合している第一主面と前記第一主面に対向する第二主面とを有する絶縁性の樹脂部材と、
前記樹脂部材の前記第二主面に接合している第三主面と前記第三主面に対向する第四主面とを有すると共に、金属からなる振動部材と、を備え、
前記振動部材の前記第三主面の全体は、前記樹脂部材によって覆われている、振動デバイス。 - 前記樹脂部材の前記第一主面上には、前記圧電素子と電気的に接続されている一対の電極が設けられている、請求項1に記載の振動デバイス。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017022546A JP6961949B2 (ja) | 2017-02-09 | 2017-02-09 | 振動デバイス |
US15/890,669 US10897005B2 (en) | 2017-02-09 | 2018-02-07 | Vibrating device |
CN201810122039.9A CN108417706B (zh) | 2017-02-09 | 2018-02-07 | 振动器件 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017022546A JP6961949B2 (ja) | 2017-02-09 | 2017-02-09 | 振動デバイス |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018129447A true JP2018129447A (ja) | 2018-08-16 |
JP6961949B2 JP6961949B2 (ja) | 2021-11-05 |
Family
ID=63173203
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017022546A Active JP6961949B2 (ja) | 2017-02-09 | 2017-02-09 | 振動デバイス |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6961949B2 (ja) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003134852A (ja) * | 2001-10-23 | 2003-05-09 | Sanki:Kk | 搬送装置の圧電駆動素子 |
JP2008246888A (ja) * | 2007-03-30 | 2008-10-16 | Brother Ind Ltd | 圧電アクチュエータ、及び、この圧電アクチュエータを備えた液体移送装置 |
JP2009083196A (ja) * | 2007-09-28 | 2009-04-23 | Brother Ind Ltd | 液体移送装置及び圧電アクチュエータ |
JP2016137723A (ja) * | 2016-03-09 | 2016-08-04 | ブラザー工業株式会社 | 圧電アクチュエータ |
-
2017
- 2017-02-09 JP JP2017022546A patent/JP6961949B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003134852A (ja) * | 2001-10-23 | 2003-05-09 | Sanki:Kk | 搬送装置の圧電駆動素子 |
JP2008246888A (ja) * | 2007-03-30 | 2008-10-16 | Brother Ind Ltd | 圧電アクチュエータ、及び、この圧電アクチュエータを備えた液体移送装置 |
JP2009083196A (ja) * | 2007-09-28 | 2009-04-23 | Brother Ind Ltd | 液体移送装置及び圧電アクチュエータ |
JP2016137723A (ja) * | 2016-03-09 | 2016-08-04 | ブラザー工業株式会社 | 圧電アクチュエータ |
Also Published As
Publication number | Publication date |
---|---|
JP6961949B2 (ja) | 2021-11-05 |
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