JP2018128285A - Support structure and inspection apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a support structure and an inspection apparatus capable of inhibiting a substrate from being lifted in a tilted state as compared with a case where the substrate is positioned by inserting a lifting pin into a through hole of the substrate and lifted.SOLUTION: A lifting section lifts a substrate conveyed by a conveying section from below and separates the substrate from the conveying section. Further, a pushing section having a shaft body to be inserted into a hole of the substrate in a state being separated from the conveying section, sandwiches the substrate separated from the conveying section by the lifting section with the lifting section.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a support structure and an inspection apparatus.

  In the substrate inspection apparatus described in Patent Document 1, the lower inspection jig is raised, and press-up is performed so that the substrate to be inspected is sandwiched and fixed between the upper and lower inspection jig protective plates. Yes. Further, in this substrate inspection apparatus, when the inspection of the substrate to be inspected is completed, the lower inspection jig is lowered to perform press-down.

JP 2002-131359 A

  The substrate may be inspected by applying a probe pin to the substrate while the substrate is lifted from a belt conveyor (conveying unit) that conveys the substrate. In this case, a lifting pin is inserted into a through hole formed in the substrate placed on the belt conveyor from below to position the substrate and lift the substrate from the belt conveyor.

  When the substrate is lifted in this way, the lifting pin may not be inserted into the through-hole due to the position variation of the substrate conveyed by the belt conveyor, and the substrate may be lifted in an inclined state.

  An object of the present invention is to position a substrate by inserting a lifting pin into a through-hole of the substrate, and to prevent the substrate from being lifted in an inclined state as compared with a case where the substrate is lifted.

  According to a first aspect of the present invention, there is provided a support structure on which a substrate in which holes are formed is placed, a transport unit that transports the substrate, the substrate transported by the transport unit is lifted from below, and the substrate is moved to the support structure. A lifting part that is separated from the transport part and the substrate that is separated from the transport part by the lifting part are sandwiched between the lifting part and inserted into the hole of the substrate that is separated from the transport part. And a pressing portion having a shaft body.

  An inspection apparatus according to a second aspect of the present invention includes the support structure according to the first aspect and a current-carrying member that is in contact with an inspection terminal for performing an electrical inspection formed on the upper surface of the substrate. And an inspection member attached to the pressing portion.

  An inspection apparatus according to a third aspect of the present invention is characterized in that, in the inspection apparatus according to the second aspect, the inspection member and the main body are interchangeably attached.

  According to a fourth aspect of the present invention, there is provided an inspection apparatus having the supporting structure according to the first aspect and a current-carrying member that is energized in contact with an inspection terminal for performing an electric inspection formed on the lower surface of the substrate. And an inspection member attached to the lifting portion.

  An inspection apparatus according to a fifth aspect of the present invention is the inspection apparatus according to the fourth aspect, wherein the inspection member is attached to the main body portion in a replaceable manner.

  The inspection apparatus according to claim 6 of the present invention is the inspection apparatus according to claim 4 or 5, wherein the inspection member abuts on the substrate conveyed by the conveyance unit and stops the substrate. Is attached.

  According to the support structure of the first aspect of the present invention, the substrate is tilted as compared with the case where the substrate is positioned by inserting the lifting pins into the through holes of the substrate and the substrate is lifted from the transport unit. It can be suppressed from being lifted.

  According to the inspection apparatus of the second aspect of the present invention, it is possible to inspect the substrate having the inspection terminal formed on the upper surface in a state where the substrate is lifted from the transport unit.

  According to the inspection apparatus of the third aspect of the present invention, it is possible to inspect a plurality of types of substrates having different positions of the inspection terminals on the upper surface.

  According to the inspection apparatus of the fourth aspect of the present invention, it is possible to inspect the substrate having the inspection terminal formed on the lower surface in a state where the substrate is lifted from the transport unit.

  According to the inspection apparatus of the fifth aspect of the present invention, it is possible to inspect a plurality of types of substrates having different positions of the inspection terminals on the lower surface.

  According to the inspection apparatus of the sixth aspect of the present invention, the position where the substrate is stopped can be changed for each substrate.

It is the side view which showed the support structure which concerns on embodiment of this invention, and the test | inspection apparatus. It is the perspective view which showed the inspection apparatus which concerns on embodiment of this invention. It is process drawing which showed the test | inspection process which test | inspects a board | substrate with the support structure which concerns on embodiment of this invention, and an inspection apparatus. It is process drawing which showed the test | inspection process which test | inspects a board | substrate with the support structure which concerns on embodiment of this invention, and an inspection apparatus. It is process drawing which showed the test | inspection process which test | inspects a board | substrate with the support structure which concerns on embodiment of this invention, and an inspection apparatus. It is process drawing which showed the test | inspection process which test | inspects a board | substrate with the support structure which concerns on embodiment of this invention, and an inspection apparatus. It is process drawing which showed the test | inspection process which test | inspects a board | substrate with the support structure which concerns on embodiment of this invention, and an inspection apparatus. It is process drawing which showed the test | inspection process which test | inspects a board | substrate with the support structure which concerns on embodiment of this invention, and an inspection apparatus. It is process drawing which showed the test | inspection process which test | inspects a board | substrate with the support structure which concerns on embodiment of this invention, and an inspection apparatus. It is process drawing which showed the test | inspection process which test | inspects a board | substrate with the support structure which concerns on embodiment of this invention, and an inspection apparatus. It is process drawing which showed the test | inspection process which test | inspects a board | substrate with the support structure which concerns on embodiment of this invention, and an inspection apparatus. It is process drawing which showed the test | inspection process which test | inspects a board | substrate with the support structure which concerns on embodiment of this invention, and an inspection apparatus. It is process drawing which showed the test | inspection process which test | inspects a board | substrate with the support structure which concerns on embodiment of this invention, and an inspection apparatus. It is process drawing which showed the test | inspection process which test | inspects a board | substrate with the support structure which concerns on embodiment of this invention, and an inspection apparatus. It is process drawing which showed the test | inspection process which test | inspects a board | substrate with the support structure which concerns on embodiment of this invention, and an inspection apparatus. It is process drawing which showed the test | inspection process which test | inspects a board | substrate with the support structure which concerns on embodiment of this invention, and an inspection apparatus. (A) (B) It is the front view which showed the conveyance part of the inspection apparatus which concerns on embodiment of this invention. It is the block diagram which showed the control system of the control part of the test | inspection apparatus which concerns on embodiment of this invention. It is the perspective view which showed the board | substrate test | inspected by the test | inspection apparatus which concerns on embodiment of this invention. (A) (B) (C) It is the front view which showed the support structure which concerns on the comparison form with respect to embodiment of this invention, and the test | inspection apparatus.

  An example of a support structure and an inspection apparatus according to an embodiment of the present invention will be described with reference to FIGS. In the drawing, an arrow H indicates the vertical direction of the apparatus (vertical direction), an arrow W indicates the apparatus width direction (horizontal direction), and an arrow D indicates the depth direction of the apparatus (horizontal direction).

(overall structure)
As shown in FIGS. 1 and 2, the inspection apparatus 10 includes an inspection unit 13 that inspects a printed wiring board 200 (hereinafter “substrate 200”), and a transport unit 12 that transports the substrate 200 to the inspection unit 13. ing. In addition, the inspection apparatus 10 includes a restriction unit 80 that restricts conveyance of the substrate being conveyed toward the inspection unit 13 by the conveyance unit 12, and a control unit 18 (see FIG. 18) that controls each unit.

  The inspection unit 13 includes a lower unit 14 disposed below the substrate 200 to be inspected, and an upper unit 16 disposed above the substrate 200 to be inspected.

  First, the substrate 200 to be inspected by the inspection apparatus 10 will be described, and then the inspection apparatus 10 will be described. The substrate 200 will be described using directions in a state where the substrate 200 is inspected by the inspection apparatus 10.

[Substrate 200]
As shown in FIG. 19, the substrate 200 includes a substrate body 202 and electronic components (not shown) mounted on the substrate body 202. Further, the substrate main body 202 has a rectangular shape extending in the apparatus width direction when viewed from above with the plate thickness direction as the vertical direction. In addition, circular through-holes 202 </ b> A as viewed from above are respectively formed in one portion of the substrate body 202 in the apparatus width direction and in the other direction. A plurality of inspection terminals (not shown) for inspection are formed on the upper surface and the lower surface of the substrate body 202. The through hole 202A is an example of a hole.

[Conveyor 12]
As shown in FIG. 2, the transport unit 12 is a belt conveyor, and transmits to a drive roll 22 having an axial direction as the apparatus depth direction, a driven roll 24 having the axial direction as the apparatus depth direction, and the drive roll 22. And a motor 26 for generating a rotational force. Further, the transport unit 12 includes a pair of endless belts 28 wound around the drive roll 22 and the driven roll 24, a plurality of guide rolls 30 that guide the circulating endless belt 28, and transport of the substrate 200 to be transported. And a pair of restriction frames 32 for regulating the position.

-Driving roll 22, driven roll 24, endless belt 28-
The drive roll 22 extends in the apparatus depth direction. Further, the driven roll 24 whose axial direction is the apparatus depth direction extends in the apparatus depth direction, and is separated from the drive roll 22 on one side (right side in the drawing) of the apparatus width direction with respect to the drive roll 22. Are arranged.

  A pair of endless belts 28 is provided. One endless belt 28 is wound around a portion of the drive roll 22 and the driven roll 24 in the apparatus depth direction, and the other endless belt 28 is the front of the drive roll 22 and the driven roll 24 in the apparatus depth direction. It is wrapped around the side part. One endless belt 28 and the other endless belt 28 are separated from each other in the apparatus depth direction.

-Guide roll 30-
A plurality of guide rolls 30 are arranged in the apparatus width direction so as to guide the endless belt 28 that circulates with the axial direction as the apparatus depth direction.

  Specifically, a plurality of guide rolls 30 for guiding one endless belt 28 are provided, and the plurality of guide rolls 30 are spaced between the drive roll 22 and the driven roll 24 in the apparatus width direction. Are arranged. Similarly, a plurality of guide rolls 30 for guiding the other endless belt 28 are provided, and the plurality of guide rolls 30 are arranged between the driving roll 22 and the driven roll 24 and spaced in the apparatus width direction. Has been.

  And the guide roll 30 which guides one endless belt 28, and the guide roll 30 which guides the other endless belt 28 are spaced apart in the apparatus depth direction.

-Restriction frame 32-
A pair of restriction frames 32 are provided and extend in the apparatus width direction as shown in FIG. As shown in FIG. 17A, one restriction frame 32 is attached to a shaft portion 30A of a plurality of guide rolls 30 that guide one endless belt 28, and the other restriction frame 32 is the other endless belt. 28 is attached to a shaft portion 30A of a guide roll 30 that guides 28.

  Each regulation frame 32 has a facing surface 32A that faces the end surface of the substrate 200 to be transported, and an inclined surface 32B that extends from the upper end of the facing surface 32A in a direction inclined with respect to the vertical direction. . Specifically, the inclined surfaces 32B of the pair of restriction frames 32 are inclined such that the upper side is wider than the lower side when viewed from the apparatus width direction.

  In this configuration, when the control unit 18 operates the motor 26, the drive roll 22 rotates and the endless belt 28 circulates in the direction of arrow A while being guided by the guide roll 30 (see FIG. 2). .

  Then, as shown in FIG. 17A, the substrate 200 has a portion on the back side in the apparatus depth direction of the substrate 200 placed on one endless belt 28, and a portion on the near side in the apparatus depth direction of the substrate 200. Is placed on the other endless belt 28. In this state, as shown in FIG. 2, the transport unit 12 causes the endless belt 28 to place the substrate 200 placed on a portion on one side in the apparatus width direction (right side in the figure) on the other side in the apparatus width direction. It is designed to be transported to.

  Further, the regulation frame 32 regulates the conveyance position of the substrate 200 being conveyed in the apparatus depth direction.

[Lower unit 14]
The lower unit 14 is disposed between the pair of endless belts 28 and below the substrate 200 transported by the transport unit 12 in the apparatus depth direction. As shown in FIG. 1, the lower unit 14 is attached to the upper surface 210 </ b> A side of the floor plate 210 (an example of a skeleton member) of the apparatus, and can be exchanged for the main body 40 and the main body 40. And an exchange unit 50.

[Main Body 40]
The main body portion 40 includes an air cylinder 42 attached to the upper surface 210A side of the floor plate 210, and a base 44 attached to the tip of a rod 42B protruding upward from the main body portion 42A of the air cylinder 42. .

  The air cylinder 42 is arranged such that the rod 42B expands and contracts (pushes and pulls) in the vertical direction, and the main body portion 42A is attached to the upper surface 210A side of the floor plate 210.

  The base 44 includes a base plate 46 attached to the tip (upper end) of the rod 42 </ b> B and a pair of holding members 48 attached to the base plate 46.

  The base plate 46 is formed in a rectangular shape when viewed from above, with the thickness direction being the vertical direction. Further, the pair of holding members 48 are attached to both ends in the apparatus width direction on the upper surface 46A of the base plate 46, and extend in the apparatus depth direction. The pair of holding members 48 are respectively formed with recesses 48A that open on the other holding member 48 side. The recess 48A extends in the apparatus depth direction, and both end portions of the base plate 52, which will be described later, in the apparatus width direction are inserted into the recess 48A.

[Exchange unit 50]
The replacement unit 50 is attached to the base plate 52, a plurality of support posts 56 extending upward from the base plate 52, a support plate 58 supported by the base plate 52 via the support posts 56, and the upper surface 58A side of the support plate 58. A plurality of lifting blocks 60. Further, the replacement unit 50 includes an air cylinder 54 attached to the upper surface 52A side of the base plate 52 and a pin board 62 attached to the tip of a rod 54B protruding upward from the main body 54A of the air cylinder 54. I have.

  Further, the replacement unit 50 includes a stop portion 66 attached to the upper surface 62A side of the pin board 62 and a plurality of probe pins attached to the upper surface 62A side of the pin board 62 and in contact with the inspection terminals of the board 200. 68. An inspection member 64 for inspecting the substrate 200 includes the pin board 62 and a plurality of probe pins 68. The probe pin 68 is an example of an energization member.

−Base plate 52−
The base plate 52 is disposed above the base plate 46 with the thickness direction being the vertical direction. Further, the base plate 52 has a rectangular shape when viewed from above, and both end portions of the base plate 52 in the apparatus width direction are inserted into the recesses 48A of the holding member 48 so as to be insertable / removable. The base plate 52 is positioned by a positioning member (not shown) while being inserted into the recess 48 </ b> A of the holding member 48.

-Prop 56, support plate 58, lifting block 60-
Four struts 56 are provided and are arranged at the four corners of the upper surface 52A of the base plate 52. Each column 56 has a base end attached to the upper surface 52 </ b> A side of the base plate 52 and extends upward from the base plate 52.

  The support plate 58 is disposed above the base plate 52 with the plate thickness direction being the vertical direction. Furthermore, the support plate 58 has a rectangular shape when viewed from above, and the ends of the support columns 56 are attached to the four corners of the lower surface 58B of the support plate 58. Thus, the support plate 58 is supported by the base plate 52 via the support column 56.

  Further, the support plate 58 is formed with a through hole 58C through which a shaft 170 described later passes, a through hole 58D into which the stop portion 66 is inserted, and a through hole 58E into which the probe pin 68 is inserted. The through hole 58C, the through hole 58D, and the through hole 58E have a circular cross section.

  A pair of through holes 58 </ b> C are formed on one side (right side in the figure) and the other side (left side in the figure) of the support plate 58 in the apparatus width direction. Further, one through hole 58D is formed, and is formed between the pair of through holes 58C and next to the through hole 58C on the other side in the apparatus width direction when viewed from the apparatus depth direction. Furthermore, a plurality of through holes 58E are formed between the through hole 58C on one side in the apparatus width direction and the through hole 58D as viewed from the apparatus depth direction.

  The lifting block 60 has a rectangular parallelepiped shape, and a plurality of lifting blocks 60 are attached to the upper surface 58 </ b> A of the support plate 58. Specifically, the plurality of lifting blocks 60 are arranged with an interval in the apparatus width direction between the through hole 58C on one side in the apparatus width direction and the through hole 58D when viewed from the apparatus depth direction. . Furthermore, at least one lifting block 60 is separated from the other lifting blocks 60 in the apparatus depth direction.

-Air cylinder 54, pin board 62, stop 66, probe pin 68-
The air cylinder 54 is disposed such that the rod 54B expands and contracts (pushes and pulls) in the vertical direction, and is attached to the upper surface 52A side of the base plate 52.

  The pin board 62 has a plate thickness direction set in the vertical direction, is smaller than the support plate 58, and is disposed below the support plate 58. The pin board 62 has a rectangular shape when viewed from above, and is attached to the tip of the rod 54B of the air cylinder 54 as described above. Further, the pin board 62 is formed with a through hole 62C into which a distal end of a shaft 170 described later is inserted. Further, the pin board 62 is movable within a predetermined range in the apparatus depth direction and in the apparatus width direction in a state of being attached to the tip of the rod 54B.

  The stop portion 66 extends in the vertical direction, and is attached to the upper surface 62A side of the pin board 62 in a state where a part thereof is inserted into a through hole 58D formed in the support plate 58. Inside the stop portion 66, a rod 66A (see FIG. 4) extending in the vertical direction is provided. And the stop part 66 operates the drive member which is not shown in figure, and transfers to the protrusion state (refer FIG. 4) which protrudes the rod 66A upward, and the accommodation state (refer FIG. 3) which accommodates the rod 66A inside. It is supposed to be.

  The probe pin 68 extends in the vertical direction, and is attached to the upper surface 62A side of the pin board 62 in a state where at least a part thereof is inserted into a through hole 58E formed in the support plate 58.

  In the above configuration, when the inspection apparatus 10 is not in operation (hereinafter referred to as “non-operation state of the inspection apparatus”), as shown in FIGS. 1 and 3, the rod 42B of the air cylinder 42 is in a retracted state. The base 44 is disposed at the standby position. Further, the lifting block 60 attached to the support plate 58 in the state where the base 44 is disposed at the standby position is positioned below the upper surface 28A on the endless belt 28 on which the substrate 200 is placed.

  Further, the rod 54 </ b> B of the air cylinder 54 is in a retracted state, and the pin board 62 is disposed at a separated position away from the support plate 58. Further, the tip of the probe pin 68 is positioned below the upper surface 58A of the support plate 58 in a state where the pin board 62 is disposed at the separated position, and does not protrude from the upper surface 58A of the support plate 58. ing.

  Furthermore, the stop portion 66 is in a storage state in which the rod 66A is stored therein, and the tip (upper end) of the stop portion 66 is located below the upper surface 58A of the support plate 58, and It does not protrude from the upper surface 58A.

  In this state, when the stowed stop 66 is shifted to the protruding state, as shown in FIG. 4, the rod 66A protrudes upward, and the tip of the rod 66A is above the upper surface 28A of the endless belt 28. It is supposed to be located in.

  Furthermore, when the air cylinder 42 is operated in this state and the rod 42B in the retracted state is shifted to the extruded state, the base 44 and the replacement unit 50 are moved upward as shown in FIG. The lifting block 60 attached to the support plate 58 is positioned above the upper surface 28A of the endless belt 28. That is, when the substrate 200 transported by the transport unit 12 is positioned above the lifting block 60, the substrate 200 is lifted by the lifting block 60 and the substrate 200 is separated from the endless belt 28. Yes.

  In this state, when the air cylinder 54 is operated and the rod 54B in the retracted state is shifted to the pushed-out state, as shown in FIG. It moves to the approach position which approaches 58. The tip of the probe pin 68 attached to the pin board 62 protrudes from the upper surface 58A of the support plate 58 and is arranged at the same position as the upper surface of the lifting block 60 in the vertical direction. In other words, the tip of the probe pin 68 is in contact with the inspection terminal on the lower surface of the substrate 200 while the substrate 200 is supported by the lifting block 60.

  As described above, the lifting portion 34 that includes the support plate 58 and the lifting block 60 and lifts the substrate 200 transported by the transporting portion 12 from below and separates it from the endless belt 28 is configured.

  On the other hand, as shown in FIG. 1, the replacement unit 50 is configured to inspect other types of substrates by inserting and removing both end portions of the base plate 52 in the apparatus width direction into the recesses 48 </ b> A of the holding member 48. The main body 40 can be exchanged.

  Then, with both end portions of the base plate 52 in the device width direction being inserted into the recesses 48A of the holding member 48, the replacement unit 50 moves within a predetermined range in the device depth direction and the device width direction. It is possible.

[Upper unit 16]
The upper unit 16 is disposed between the pair of endless belts 28 in the apparatus depth direction, above the substrate 200 transported by the transport unit 12 and so as to face the lower unit 14 in the vertical direction. . As shown in FIG. 1, the upper unit 16 is attached to a top plate 220 (an example of a skeleton member), and includes a main body 140 and an exchange unit 150 that can be exchanged for the main body 140. ing.

[Main body 140]
The main body 140 includes an air cylinder 142 attached to the upper surface 220A side of the top plate 220 of the apparatus, and a base 144 attached to the tip of a rod 142B protruding from below the main body 142A of the air cylinder 142. I have.

  The air cylinder 142 is arranged such that the rod 142B expands and contracts (pushes and pulls) in the vertical direction, and the main body 142A is attached to the top surface 220A side of the top plate 220. Further, the rod 142B extends downward through a through hole (not shown) formed in the top plate 220, and the tip (lower end) of the rod 142B protrudes downward from the lower surface 220B of the top plate 220.

  The base 144 also includes a base plate 146 attached to the tip (lower end) of the rod 142B and a pair of holding members 148 attached to the base plate 146.

  The base plate 146 has a vertical direction in the plate thickness direction, and has a rectangular shape when viewed from above. Further, the pair of holding members 148 are attached to both ends in the apparatus width direction on the lower surface 146A of the base plate 146, and extend in the apparatus depth direction. The pair of holding members 148 are respectively formed with recesses 148A that open on the other holding member 148 side. The recess 148A extends in the apparatus depth direction, and both end portions of a base plate 152 to be described later are inserted into the recess 148A.

[Exchange unit 150]
The replacement unit 150 is attached to the base plate 152, a plurality of support columns 156 extending downward from the base plate 152, a pressing plate 158 supported by the base plate 152 via the support columns 156, and the lower surface 158B side of the pressing plate 158. A plurality of pressing blocks 160 are provided. Furthermore, the replacement unit 150 includes an air cylinder 154 attached to the push plate 158 and shafts 170 and 172 attached to the lower surface 158B side of the push plate 158.

  The replacement unit 150 is attached to the pin board 162 attached to the tip (lower end) of the rod 154B protruding downward from the main body 154A of the air cylinder 154, and the lower surface 162A of the pin board 162, and A plurality of probe pins 168 that come into contact with the inspection terminals of the substrate 200 are provided. The probe pin 168 is an example of an energization member. Thus, the inspection member 164 for inspecting the substrate 200 includes the pin board 162 and the plurality of probe pins 168.

-Base plate 152-
The base plate 152 is arranged in the vertical direction in the thickness direction, and is disposed below the base plate 146. Furthermore, the base plate 152 has a rectangular shape when viewed from above, and both end portions of the base plate 152 in the apparatus width direction are inserted into the recesses 148A of the holding member 148 so as to be insertable / removable. The base plate 152 is positioned by a positioning member (not shown) while being inserted into the concave portion 148A of the holding member 148.

-Prop 156, pressing plate 158, pressing block 160-
Four support columns 156 are provided and arranged at the four corners of the lower surface 152A of the base plate 152. Each column 156 has a base end attached to the lower surface 152A side of the base plate 152 and extends downward.

  The push plate 158 has a plate thickness direction in the vertical direction, and is disposed below the base plate 152. Further, the push plate 158 has a rectangular shape when viewed from above, and the tips (lower ends) of the support columns 156 are attached to the four corners of the upper surface 158A of the push plate 158. In this way, the push plate 158 is supported on the base plate 152 via the support column 156.

  The pressing block 160 has a rectangular parallelepiped shape extending downward, and a plurality of pressing blocks 160 are attached to the lower surface 158B of the pressing plate 158. Specifically, the plurality of pressing blocks 160 are disposed so as to face the lifting block 60 attached to the support plate 58 in the vertical direction. The pin board 162 is formed with a through hole (not shown) through which the pressing block 160 passes.

-Shaft body 170, Shaft body 172-
A pair of shaft bodies 170 are provided, and are arranged opposite to the through-holes 58 </ b> C formed in the support plate 58 in the vertical direction when the inspection apparatus is not in operation. The shaft body 170 has a base end (upper end) attached to the lower surface 158B side of the pressing plate 158, and has a cylindrical shape extending downward. Furthermore, the tip (lower end) of the shaft body 170 is tapered, and the maximum diameter of the shaft body 170 is shorter than the diameter of the through hole 58C by a predetermined length.

  A pair of shaft bodies 172 are provided, and are disposed so as to sandwich the plurality of pressing blocks 160 and sandwich the pair of shaft bodies 170 when viewed from the depth direction of the apparatus. The shaft body 172 has a base end (upper end) attached to the lower surface 158 </ b> B side of the push plate 158, has a cylindrical shape extending downward, and is shorter than the shaft body 170. Furthermore, the pitch of the pair of shaft bodies 172 is the same as the pitch in the apparatus width direction of the pair of through holes 202A (see FIG. 19) of the substrate 200. Further, the tip (lower end) of the shaft body 172 is tapered, and the diameter of the shaft body 172 is shorter than the diameter of the through hole 202A of the substrate 200 by a predetermined length. The pin board 162 is formed with a through hole (not shown) through which the shaft body 172 passes.

-Air cylinder 154, pin board 162, probe pin 168-
The air cylinder 154 is arranged such that the rod 154B expands and contracts (pushes and pulls) in the vertical direction, and the main body 154A is attached to the upper surface 158A side of the pressing plate 158. Further, the rod 154B extends downward through a through hole (not shown) formed in the push plate 158, and the tip (lower end) of the rod 154B protrudes downward from the lower surface 158B of the push plate 158.

  The pin board 162 has a plate thickness direction in the vertical direction, and is disposed below the push plate 158 and on the opposite side of the pin board 62 with the support plate 58 interposed therebetween. The pin board 162 has a rectangular shape when viewed from above, is smaller than the push plate 158, and is attached to the tip of the rod 154B of the air cylinder 154.

  The probe pin 168 extends in the vertical direction and is attached to the lower surface 162 </ b> B side of the pin board 162.

  In the above configuration, the rod 142B of the air cylinder 142 is in the retracted state and the base 144 is disposed at the standby position as shown in FIG. 3 in a non-operating state of the inspection apparatus. Further, with the base 144 placed in the standby position, the tips of the shafts 170 and 172 attached to the pressing plate 158 and the lower end of the pressing block 160 are positioned above the upper surface 28A of the endless belt 28. doing.

  Furthermore, the rod 154 </ b> B of the air cylinder 154 is in a retracted state, and the pin board 162 is disposed at an approach position that approaches the push plate 158. Further, the tip of the probe pin 168 is positioned above the upper surface 28A of the endless belt 28 in a state where the pin board 162 is disposed at the approach position.

  Further, when the air cylinder 42 of the lower unit 14 is in the extruded state and the air cylinder 142 is operated to move the retracted rod 142B to the pushed out state, as shown in FIG. The through holes 58C of the support plate 58 are respectively penetrated. Further, the tip end of the shaft body 170 is inserted into the through hole 62 </ b> C of the pin board 62.

  Furthermore, when the substrate 200 is lifted by the lifting block 60, the pressing block 160 comes into contact with the upper surface of the substrate 200, and the pressing block 160 and the lifting block 60 sandwich the substrate 200.

  Further, the tip end of the shaft body 172 is inserted into a through hole 202 </ b> A formed in the substrate 200.

  Further, when the air cylinder 154 is operated in this state and the rod 154B in the retracted state is shifted to the pushed-out state, as shown in FIG. It moves to a separated position that is separated from 158. The tip of the probe pin 168 attached to the pin board 162 is in contact with the inspection terminal on the upper surface of the substrate 200.

  As described above, the substrate 200 including the pressing plate 158, the pressing block 160, the air cylinder 154, and the shaft body 172 and separated from the endless belt 28 by the lifting portion 34 is pushed from above to be connected to the lifting block 60. A push portion 134 sandwiched between the two is configured.

  Further, the support structure 20 that supports the substrate 200 is configured including the transport unit 12, the lifting unit 34, and the pressing unit 134.

[Restriction unit 80]
As shown in FIG. 3, the restriction unit 80 is located upstream of the inspection unit 13 and on the upper surface of the endless belt 28 in the transport direction (hereinafter referred to as “substrate transport direction”) in which the substrate 200 is transported by the transport unit 12. It is arranged above 28A.

  Inside the limiting portion 80, a rod 80A (see FIG. 9) extending in the vertical direction is provided. Then, the restricting unit 80 operates a driving member (not shown) to shift between a protruding state in which the rod 80A protrudes downward (see FIG. 9) and a storage state in which the rod 80A is stored inside (see FIG. 3). It is supposed to be.

  In this configuration, the restricting portion 80 in the protruding state restricts the transport of the substrate 200 when the rod 80A hits the substrate 200 transported by the transporting portion 12, as shown in FIG. On the other hand, as shown in FIG. 3, the limit unit 80 in the housed state allows the substrate 200 to be transported by the transport unit 12 to be transported.

(Function)
Next, the operation of the inspection apparatus 10 will be described by a process of inspecting the substrate 200 using the inspection apparatus 10.

  First, in the lower unit 14 in a non-operating state of the inspection apparatus, as shown in FIG. 3, the rod 42B of the air cylinder 42 is in a retracted state, and the base 44 is disposed at the standby position. . Further, the upper surface of the lifting block 60 attached to the support plate 58 in the state where the base 44 is disposed at the standby position is positioned below the upper surface 28A on the endless belt 28 on which the substrate 200 is placed. Furthermore, the stop part 66 is in the stored state.

  Further, in the upper unit 16, the rod 142B of the air cylinder 142 is in a retracted state, and the base 144 is disposed at the standby position. Further, in a state where the base 144 is disposed at the standby position, the distal ends of the shaft bodies 170 and 172 attached to the pressing plate 158 and the lower surface of the pressing block 160 are positioned above the upper surface 28A of the endless belt 28. ing.

  Further, the restricting unit 80 is in a stored state. Further, in the transport unit 12, the motor 26 is not operating, and the endless belt 28 is stopped (see FIG. 2).

  When the inspection apparatus 10 is operated in this state, the control unit 18 (see FIG. 18) controls the motor 26 of the transport unit 12 and operates the motor 26 (see FIG. 2). Furthermore, the control part 18 controls the stop part 66, and shifts the stop part 66 of the accommodation state to a protrusion state (refer FIG. 4).

  As shown in FIG. 2, the substrate 200 to be inspected is placed on the endless belt 28 on the upstream side of the inspection unit 13 with respect to the substrate transport direction. As shown in FIG. 17A, the substrate 200 placed on the endless belt 28 is transported downstream in the substrate transport direction while the position in the apparatus depth direction is regulated by the regulation frame 32.

  Then, as shown in FIGS. 4 and 5, the protruding stop portion 66 stops the conveyance of the substrate 200 by applying a rod 66 </ b> A to the substrate 200 being conveyed. Further, when a sensor (not shown) detects that the substrate 200 has stopped, the control unit 18 receives this information, and the control unit 18 controls the motor 26 of the transport unit 12 to deactivate the motor 26. Moreover, the control part 18 controls the stop part 66, and makes the stop part 66 of a protrusion state transfer to an accommodation state, as FIG. 6 shows.

  When the stop unit 66 shifts to the retracted state, the control unit 18 controls the air cylinder 42 to shift the retracted rod 42B to the extruded state, as shown in FIG. As a result, the lifting block 60 attached to the support plate 58 comes into contact with the lower surface of the substrate 200 to support and lift the substrate 200 from below, thereby separating the substrate 200 from the endless belt 28 (see FIG. 17B). .

  When the substrate 200 is separated from the endless belt 28, the control unit 18 controls the limiting unit 80 and shifts the stored limiting unit 80 to the protruding state. Furthermore, the control part 18 controls the motor 26 of the conveyance part 12, and operates the motor 26 (refer FIG. 2).

  Then, the substrate 200 to be inspected next is placed on the endless belt 28 on the upstream side of the inspection unit 13 in the substrate transport direction (see FIG. 2). The substrate 200 placed on the endless belt 28 is transported downstream in the substrate transport direction. Further, as shown in FIG. 8, the protruding restriction unit 80 restricts the conveyance of the substrate 200 by applying a rod 80 </ b> A to the substrate 200 being conveyed.

  Further, the control unit 18 controls the air cylinder 142 to shift the retracted rod 142B to the extruded state. Thus, as shown in FIG. 8, the shaft body 170 passes through the through hole 58 </ b> C of the support plate 58, and the tip of the shaft body 170 is inserted into the through hole 62 </ b> C of the pin board 62. Furthermore, the tip of the shaft body 172 is inserted into a through hole 202A (see FIG. 19) formed in the substrate 200. Further, the pressing block 160 comes into contact with the upper surface of the substrate 200 in a state where the tip of the shaft body 172 is inserted into the through hole 202A, and the substrate 200 is sandwiched between the pressing block 160 and the lifting block 60.

  In this way, the support plate 58 and the pin board 62 are positioned on the pressing plate 158 by the shaft body 170, and the substrate 200 is positioned on the pressing plate 158 by the shaft body 172. Further, the substrate 200 is sandwiched and supported by the pressing block 160 and the lifting block 60.

  In this state, the control unit 18 controls the air cylinder 154 to shift the retracted rod 154B to the extruded state as shown in FIG. Thereby, the tip of the probe pin 168 attached to the pin board 162 comes into contact with the inspection terminal on the upper surface of the substrate 200.

  When the tip of the probe pin 168 comes into contact with the inspection terminal on the upper surface of the substrate 200, the control unit 18 controls the air cylinder 54 to shift the retracted rod 54B to the extruded state, as shown in FIG. . Thereby, the tip of the probe pin 68 attached to the pin board 62 comes into contact with the inspection terminal on the lower surface of the substrate 200.

  In this state, an electrical inspection of the substrate 200 is performed via the probe pins 68 and the probe pins 168 by an inspection unit (not shown).

  When the electrical inspection of the substrate 200 is completed, the control unit 18 controls the air cylinder 54 to shift the extruded rod 54B to the retracted state as shown in FIG. As a result, the tip of the probe pin 68 attached to the pin board 62 is separated from the inspection terminal on the lower surface of the substrate 200.

  When the tip of the probe pin 68 is separated from the inspection terminal on the lower surface of the substrate 200, the control unit 18 controls the air cylinder 154 to shift the extruded rod 154B to the retracted state as shown in FIG. . Thereby, the tip of the probe pin 168 attached to the pin board 162 is separated from the inspection terminal on the upper surface of the substrate 200.

  When the tip of the probe pin 168 is separated from the inspection terminal on the upper surface of the substrate 200, the control unit 18 controls the air cylinder 142 to shift the extruded rod 142B to the retracted state as shown in FIG. . Accordingly, the shaft body 170 is removed from the through hole 58 </ b> C of the support plate 58 and the through hole 62 of the pin board 62 by moving the base 144 to the standby position. Further, the shaft body 172 is removed from the through hole 202A (see FIG. 19) formed in the substrate 200. Further, the pressing block 160 is separated from the upper surface of the substrate 200.

  When the base 144 moves to the standby position, the control unit 18 controls the air cylinder 42 to shift the extruded rod 42B to the retracted state as shown in FIG. As a result, the base 44 moves to the standby position, so that the lifting block 60 moves downward, and the inspected substrate 200 is placed on the circulating endless belt 28. Further, the lifting block 60 is separated from the lower surface of the substrate 200. Then, the transport unit 12 transports the substrate body 202 that has been inspected to the downstream side in the substrate transport direction.

  When the inspected substrate body 202 is transported to the downstream side in the substrate transport direction, the control unit 18 controls the stop unit 66 so that the stowed stop unit 66 protrudes as shown in FIG. Transition. Furthermore, the control unit 18 controls the limiting unit 80 to shift the protruding limiting unit 80 to the housed state. As a result, the substrate 200 to be inspected next is transported downstream in the substrate transport direction. Further, as illustrated in FIG. 16, the protruding stop portion 66 stops the conveyance of the substrate 200 by applying a rod 66 </ b> A to the substrate 200 that has been conveyed.

  Then, the transported substrate 200 is inspected by repeating the above-described steps.

  Here, the operation of the inspection apparatus 10 will be described while comparing with the inspection apparatus 500 according to the comparative embodiment. First, with respect to the configuration of the inspection apparatus 500 according to the comparative embodiment, portions different from the inspection apparatus 10 will be mainly described.

  The support plate 58 of the inspection apparatus 500 is not provided with the lifting block 60 that contacts the lower surface of the substrate, and the support plate 58 is provided with a plurality of lifting pins 560 as shown in FIG. It has been.

  The lifting pin 560 is formed with a step portion 560A, and the upper portion of the step portion 560A has a smaller diameter than the lower portion of the step portion 560A. Furthermore, the tip of the support pin 560 is tapered.

  Further, the substrate 500 to be inspected is formed with a through hole 502A into which the small diameter portion 560B is inserted in the lifting pin 560. The diameter of the small diameter portion 560B of the lifting pin 560 is shorter than the diameter of the through hole 502A by a predetermined length. Further, the diameter of the large diameter portion 560C in the lifting pin 560 is longer than the diameter of the through hole 502A.

  With this configuration, when the substrate 500 is lifted away from the endless belt 28, as shown in FIG. 20B, the support plate 58 moves upward, and the small-diameter portion 560B of the lifting pin 560 moves through the through hole 502A. Inserted into. Then, by supporting the substrate 200 with the step portion 560 </ b> A of the lifting pin 560, the substrate 200 is lifted and separated from the endless belt 28. In this way, the substrate 200 is positioned by the lifting pins 560 and separated from the endless belt 28.

  However, in this configuration, for example, when the position of the substrate 500 to be transported varies, as shown in FIG. 20C, the edge of the through hole 502A is caught at the tip of the lifting pin 560, and the substrate 500 is May be lifted diagonally.

  On the other hand, in the inspection apparatus 10, as shown in FIGS. 17A and 17B, the lifting block 60 comes into contact with the lower surface of the substrate body 202, thereby lifting the substrate 200. Then, the tip end of the shaft body 172 is inserted into the through hole 202A of the substrate 200 in a state where the substrate 200 is lifted (see FIG. 8).

(Summary)
As described above, in the inspection apparatus 10, the substrate 200 is lifted by the lifting block 60 coming into contact with the lower surface of the substrate body 202. For this reason, as compared with the case where the substrate 500 is lifted by inserting the lifting pins 560 into the through holes 502A, the substrate 200 is suppressed from being lifted in a tilted state. In other words, in the support structure 20 that supports the substrate 200, the substrate 200 is positioned as compared with the case where the substrate 500 is positioned and the substrate 500 is lifted by inserting the lifting pins 560 into the through holes 502 </ b> A of the substrate 500. Lifting in a tilted state is suppressed.

  Further, in a state where the substrate 200 is separated from the endless belt 28, the tip of the shaft body 172 is inserted into a through hole 202A (see FIG. 19) formed in the substrate body 202, and further, a lifting block 60 and a pressing block 160. And the substrate 200 is sandwiched. Therefore, in the support structure 20, the substrate 200 is supported and positioned regardless of the vertical variation of the upper surface 28 </ b> A of the endless belt 28.

  In the inspection apparatus 10, the replacement unit 50 is attached to the main body 40 so as to be replaceable. In other words, the inspection member 64 and the support plate 58 are attached to the main body portion 40 in a replaceable manner. For this reason, in the inspection apparatus 10, a plurality of substrates having different positions of the inspection terminals on the lower surface of the substrate 200 are inspected.

  The replacement unit 150 is attached to the main body 140 so as to be replaceable. In other words, the inspection member 164 and the pressing plate 158 are attached to the main body 140 in a replaceable manner. Therefore, in the inspection apparatus 10, a plurality of substrates having different positions of the inspection terminals on the upper surface of the substrate 200 are inspected.

  In addition, the inspection apparatus 10 includes an inspection member 164 that includes a probe pin 168 that contacts an inspection terminal on the upper surface of the substrate 200, and an inspection member 64 that includes a probe pin 68 that contacts the inspection terminal on the lower surface of the substrate 200. ing. For this reason, even if the inspection terminals are formed on both surfaces of the substrate 200, the substrate 200 is inspected.

  A stop portion 66 for stopping the substrate 200 being transported is attached to the pin board 62 of the inspection member 64. As described above, the inspection member 64 is attached to the main body 40 in a replaceable manner. For this reason, the position where the substrate 200 is stopped is determined for each type of the substrate 200.

  Although the present invention has been described in detail with respect to specific embodiments, the present invention is not limited to such embodiments, and various other embodiments can be taken within the scope of the present invention. This will be apparent to those skilled in the art. For example, in the above-described embodiment, the case where the inspection terminals are formed on both surfaces of the substrate 200 has been described. However, when the inspection terminals are formed only on the upper surface of the substrate, the inspection terminals contact the lower surface of the substrate 200. The probe pin 168 and the like are not necessary.

  Although not specifically described in the above embodiment, the timing at which the shaft body 172 is inserted into the through hole 202A of the substrate 200 is such that the substrate 200 is inserted into the endless belt 28 when the shaft body 172 is inserted into the through hole 202A. The substrate 200 may move up and down, or may be stopped.

DESCRIPTION OF SYMBOLS 10 Inspection apparatus 12 Conveyance part 20 Support structure 34 Lifting part 40 Main body part 64 Inspection member 66 Stop part 68 Probe pin (an example of electricity supply member)
134 Pushing part 140 Body part 164 Inspection member 168 Probe pin (an example of a current-carrying member)
172 Shaft body 200 Substrate 202A Through hole (an example of hole)

Claims (6)

A substrate on which a hole is formed, and a conveyance unit that conveys the substrate;
Lifting the substrate transported by the transport unit from below, and lifting the substrate away from the transport unit;
A pressing unit having a shaft inserted into the hole of the substrate in a state of being sandwiched between the lifting unit and the substrate spaced apart from the transport unit by the lifting unit;
A support structure comprising: A support structure according to claim 1;
An inspection member attached to the pressing part, having an energization member that contacts and energizes an inspection terminal for electrical inspection formed on the upper surface of the substrate;
An inspection apparatus comprising:   The inspection apparatus according to claim 2, wherein the inspection member and the main body are interchangeably attached. A support structure according to claim 1;
An energizing member that contacts and energizes an inspecting terminal for electrical inspection formed on the lower surface of the substrate, and an inspecting member attached to the lifting portion;
An inspection apparatus comprising:   The inspection device according to claim 4, wherein the inspection member is replaceably attached to the main body.   The inspection apparatus according to claim 4, wherein a stop unit that stops the substrate when the substrate is conveyed by the conveyance unit is attached to the inspection member.