JP2018096884A - 流体特性測定システム - Google Patents
流体特性測定システム Download PDFInfo
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- JP2018096884A JP2018096884A JP2016242743A JP2016242743A JP2018096884A JP 2018096884 A JP2018096884 A JP 2018096884A JP 2016242743 A JP2016242743 A JP 2016242743A JP 2016242743 A JP2016242743 A JP 2016242743A JP 2018096884 A JP2018096884 A JP 2018096884A
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- pressure
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N7/00—Analysing materials by measuring the pressure or volume of a gas or vapour
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/56—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/10—Devices for withdrawing samples in the liquid or fluent state
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Fluid Mechanics (AREA)
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Hydrology & Water Resources (AREA)
- Automation & Control Theory (AREA)
- Engineering & Computer Science (AREA)
- Measuring Volume Flow (AREA)
- Flow Control (AREA)
- Control Of Fluid Pressure (AREA)
Abstract
【解決手段】一定容量を有する容器1と、該容器1に一定流量で流体を導入可能に接続された流量制御器2と、前記容器1内の圧力が異なる2つの状況下において、前記流量制御器2によって互いに等しい流量で該容器1に流体を導入した際の、該容器1内の圧力の各時間変化に基づいて当該流体の圧力に応じた圧縮係数を算出する情報処理装置5とを具備するようにした。
【選択図】図2
Description
気体の状態方程式は下記式(数1)に示すとおりである。
1・・・容器
2・・・流量制御器
5・・・情報処理装置
Claims (5)
- 一定容量を有する容器と、
該容器に一定流量で流体を導入又は導出可能に接続された流量制御器と、
前記容器内の圧力が異なる2つの状況下において、前記流量制御器によって互いに等しい流量で該容器に流体を導入又は導出した際の、該容器内圧力の各時間変化に基づいて当該流体の圧力に応じた圧縮係数を算出する情報処理装置とを備えていることを特徴とする流体特性測定システム。 - 前記情報処理装置は、
前記圧縮係数が圧力によって変わらない一定値と仮定した場合の、前記各状況下での流量を、前記圧力時間変化及び容器容量からそれぞれ仮算出し、
前記仮算出した流量である仮流量に基づいて、前記圧縮係数を算出するものである請求項1記載の流体特性測定システム。 - 前記情報処理装置は、
前記各状況での圧力及び仮流量から、それら圧力及び仮流量の関係を求め、
該関係から前記容器内の圧力が0での前記仮流量を算出して、該圧力が0での仮流量を真の流量とし、
該真の流量と、前記容器内の圧力が所定値のときの圧力時間変化とに基づいて前記圧縮係数を算出するものである請求項2記載の流体特性測定システム。 - 一定容量を有する容器と、該容器に一定流量で流体を導入又は導出可能に接続された流量制御器と、情報処理装置とを備えた流体特性測定システムに搭載されるプログラムであり、
前記容器内の圧力が異なる2つの状況下において、前記流量制御器により互いに等しい流量で該容器に流体を導入又は導出した際の該容器内圧力の時間変化に基づいて、当該流体の圧力に応じた圧縮係数を算出する機能を前記情報処理装置に発揮させることを特徴とするプログラム。 - 一定容量の容器に流体を導入又は導出したときの圧力に基づいて、該流体の特性である圧縮係数を測定する方法であり、
前記容器内の圧力が異なる2つの状況下において、互いに等しい流量で該容器に流体を導入又は導出した際の該容器内圧力の時間変化に基づいて、当該流体の圧力に応じた圧縮係数を算出する流体特性測定方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016242743A JP6775403B2 (ja) | 2016-12-14 | 2016-12-14 | 流体特性測定システム |
TW106143729A TWI760399B (zh) | 2016-12-14 | 2017-12-13 | 流體特性測量系統、程式存儲介質和流體特性測量方法 |
US15/840,798 US11162883B2 (en) | 2016-12-14 | 2017-12-13 | Fluid characteristics measurement system, program storage medium storing program for fluid characteristics measurement system, and fluid characteristics measurement method |
KR1020170171136A KR102501874B1 (ko) | 2016-12-14 | 2017-12-13 | 유체 특성 측정 시스템, 유체 특성 측정 시스템용 컴퓨터 프로그램이 기억된 컴퓨터로 판독 가능한 기억 매체, 및 유체 특성 측정 방법 |
CN201711341107.2A CN108227765B (zh) | 2016-12-14 | 2017-12-14 | 流体特性测量系统、程序存储介质和流体特性测量方法 |
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JP2016242743A JP6775403B2 (ja) | 2016-12-14 | 2016-12-14 | 流体特性測定システム |
Publications (2)
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JP2018096884A true JP2018096884A (ja) | 2018-06-21 |
JP6775403B2 JP6775403B2 (ja) | 2020-10-28 |
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JP2016242743A Active JP6775403B2 (ja) | 2016-12-14 | 2016-12-14 | 流体特性測定システム |
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US (1) | US11162883B2 (ja) |
JP (1) | JP6775403B2 (ja) |
KR (1) | KR102501874B1 (ja) |
CN (1) | CN108227765B (ja) |
TW (1) | TWI760399B (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2006337346A (ja) * | 2005-06-06 | 2006-12-14 | Ckd Corp | 流量制御機器絶対流量検定システム |
JP2012032983A (ja) * | 2010-07-30 | 2012-02-16 | Fujikin Inc | ガス供給装置用流量制御器の校正方法及び流量計測方法 |
JP2016080634A (ja) * | 2014-10-21 | 2016-05-16 | 国立研究開発法人産業技術総合研究所 | 吸着特性測定装置 |
Family Cites Families (12)
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US4584868A (en) * | 1985-05-16 | 1986-04-29 | American Meter Company | Apparatus for determining the supercompressibility factor of a flowing gas |
US4718443A (en) * | 1987-02-06 | 1988-01-12 | Conoco Inc. | Mass flowmeter apparatus |
US5218840A (en) * | 1991-10-08 | 1993-06-15 | Atlantic Richfield Company | Determining compressibility factors for multiphase fluid flow measurement system |
CN100454200C (zh) * | 2003-06-09 | 2009-01-21 | 喜开理株式会社 | 相对压力控制系统和相对流量控制系统 |
KR100593346B1 (ko) * | 2004-04-26 | 2006-06-26 | 이신국 | 가스유량 제어장치 및 제어방법 |
KR20070070265A (ko) * | 2004-06-29 | 2007-07-04 | 삼성전자주식회사 | 유체의 유량을 실시간으로 검출하는 질량 유량계 |
US7412986B2 (en) * | 2004-07-09 | 2008-08-19 | Celerity, Inc. | Method and system for flow measurement and validation of a mass flow controller |
US7150201B2 (en) * | 2004-12-15 | 2006-12-19 | Celerity, Inc. | System and method for measuring flow |
US7174263B2 (en) | 2005-03-25 | 2007-02-06 | Mks Instruments, Inc. | External volume insensitive flow verification |
EP2247819B1 (en) * | 2008-01-18 | 2022-11-02 | Pivotal Systems Corporation | Method and apparatus for in situ testing of gas flow controllers |
JP5703032B2 (ja) | 2011-01-06 | 2015-04-15 | 株式会社フジキン | ガス供給装置用流量制御器の流量測定方法 |
CN103411724B (zh) * | 2013-08-06 | 2016-11-23 | 三峡大学 | 一种定容快速充放气气腔压力的测量方法 |
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2016
- 2016-12-14 JP JP2016242743A patent/JP6775403B2/ja active Active
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- 2017-12-13 KR KR1020170171136A patent/KR102501874B1/ko active IP Right Grant
- 2017-12-13 TW TW106143729A patent/TWI760399B/zh active
- 2017-12-13 US US15/840,798 patent/US11162883B2/en active Active
- 2017-12-14 CN CN201711341107.2A patent/CN108227765B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2006337346A (ja) * | 2005-06-06 | 2006-12-14 | Ckd Corp | 流量制御機器絶対流量検定システム |
JP2012032983A (ja) * | 2010-07-30 | 2012-02-16 | Fujikin Inc | ガス供給装置用流量制御器の校正方法及び流量計測方法 |
JP2016080634A (ja) * | 2014-10-21 | 2016-05-16 | 国立研究開発法人産業技術総合研究所 | 吸着特性測定装置 |
Also Published As
Publication number | Publication date |
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CN108227765B (zh) | 2022-09-06 |
US20180164200A1 (en) | 2018-06-14 |
TW201821770A (zh) | 2018-06-16 |
JP6775403B2 (ja) | 2020-10-28 |
CN108227765A (zh) | 2018-06-29 |
US11162883B2 (en) | 2021-11-02 |
KR102501874B1 (ko) | 2023-02-22 |
KR20180068877A (ko) | 2018-06-22 |
TWI760399B (zh) | 2022-04-11 |
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