JP2018085468A - 半導体レーザ、光源ユニット及びレーザ光照射装置 - Google Patents
半導体レーザ、光源ユニット及びレーザ光照射装置 Download PDFInfo
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Abstract
Description
実施の形態1にかかる半導体レーザ100について説明する。半導体レーザ100は、窒化物半導体をベースとした405nm帯青紫色レーザとして構成される。図1は、実施の形態1にかかる半導体レーザ100の構成を模式的に示す上面図である。図2は、図1のII−II面における半導体レーザ100の断面図である。図3は、図1のIII−III面における半導体レーザ100の断面図である。
S=(Ww−Wn)×(Lt+2×Lw)+Wn×L (1)
ここで、導波路110の面積を、狭幅導波路101の幅Wnと導波路110の長さLとの積Wn×Lで除した比率(図4にハッチングで示した部分の面積の割合に相当)を、式(2)に示すようにksと定義する。
ks=S/(Wn・L) (2)
1<ks≦1.5 (3)
kw=Ww/Wn≧2 (4)
Lt=(kw−1)・Wn/(2・tanθ) (5)
Lt>24×(kw−1)×Wn (6)
よって、上述したように、比率kwの範囲と狭幅導波路101の幅Wnの範囲とを考慮すると、テーパ導波路103A及び103Bの長さLtは、40μm以上200μm以下(40μm≦Lt≦200μm)が望ましい。これにより、基本モードの結合損失を低減することが可能となる。
Pkink= Aexp[B{ks/(1+ks)}] (7)
(Lt+2Lw)/L≦0.5/(kw−1) (8)
実施の形態2にかかる半導体レーザ200について説明する。図11は、実施の形態2にかかる半導体レーザ200の構成を模式的に示す上面図である。図11に示すように、半導体レーザ200は、半導体レーザ100のp電極310を、p電極410に置換した構成を有する。
実施の形態3にかかる光源ユニット500について説明する。光源ユニット500は、上述した実施の形態1にかかる半導体レーザ100光源とする光源ユニットとして構成される。図12は、実施の形態3にかかる光源ユニット500の構成を模式的に示す図である。
実施の形態4にかかるレーザ光照射装置について説明する。ここでは、実施の形態3にかかる光源ユニット500が搭載された測定装置600について説明する。図13は、実施の形態4にかかる測定装置600の構成を模式的に示す図である。
実施の形態5にかかるレーザ光照射装置について説明する。ここでは、実施の形態3にかかる光源ユニット500が搭載された描画装置700について説明する。図14は、実施の形態5にかかる描画装置700の構成を模式的に示す図である。
101 狭幅導波路
102A、102B 広幅導波路
103A、103B テーパ導波路
110 導波路
111A、111B 共振器端面
301 n型GaN基板
302 n型クラッド層
303 n型ガイド層
304 MQW活性層
305 キャップ層
306 p型ガイド層
307 p型クラッド層
308 p型コンタクト層
309 絶縁膜
310 p電極
311 カバー電極
312 n電極
320 半導体積層基板
410 p電極
420A、420B 電流非注入領域
500 光源ユニット
501 CANパッケージ
502 サブマウント
503 電極
504 ボンディングワイヤ
505 制御回路
506 レーザ駆動回路
507 レンズ
508 ビームスプリッタ
509 光学系
510 光検出器
600 測定装置
601、702 集光レンズ
602 ラインレンズ
603 撮像部
604 画像処理装置
605、703 制御装置
610 測定対象物
620、720 可動ステージ
700 描画装置
701 ミラー
710 対象物
Claims (12)
- 共振器の長手方向に延在する第1の幅を有する第1の導波路と、
前記共振器の第1の端面から前記共振器の長手方向に延在する、前記第1の幅よりも広い第2の幅を有する第2の導波路と、
前記共振器の第2の端面から前記共振器の長手方向に延在する、前記第2の幅を有する第3の導波路と、
前記第1の導波路と前記第2の導波路とを接続するように幅が連続的に変化する第1のテーパ導波路と、
前記第1の導波路と前記第3の導波路とを接続するように幅が連続的に変化する第2のテーパ導波路と、を備え、
前記第1の幅をWn、前記共振器の長さである前記第1〜第3の導波路及び前記第1、第2のテーパ導波路の前記共振器の長手方向の長さの和をL、前記第1〜第3の導波路及び前記第1、第2のテーパ導波路が形成される半導体基板に対して垂直な方向から見ときの前記第1〜第3の導波路及び前記第1、第2のテーパ導波路の面積の合計をSとしたときに、以下の式(1)及び(2)を満たす、
ks=S/(Wn・L) (1)
1<ks≦1.5 (2)
半導体レーザ。 - 前記第2の幅をWwとしたとき、以下の式(3)を満たす、
kw=Ww/Wn≧2.0 (3)
請求項1に記載の半導体レーザ。 - 前記第1及び第2のテーパ導波路の前記共振器の長手方向の長さをLt、前記第2及び第3の導波路の前記共振器の長手方向の長さをLwとしたとき、以下の式(4)を満たす、
(Lt+2Lw)/L≦0.5/(kw−1) (4)
請求項2に記載の半導体レーザ。 - 前記第1〜第3の導波路及び前記第1、第2のテーパ導波路の前記共振器の長手方向の長さの和Lは、2000μm以上であり、
前記第2の幅Wwは、6μm以上であり、
kwは、6以上である、
請求項3に記載の半導体レーザ。 - 前記第1〜第3の導波路及び前記第1、第2のテーパ導波路の前記共振器の長手方向の長さの和Lは、600以上かつ1600μm以下であり、
前記第2の幅Wwは、2μm以上かつ6μm以下であり、
kwは、2以上かつ5以下である、
請求項3に記載の半導体レーザ。 - 前記第1及び第2のテーパ導波路の前記共振器の長手方向の長さLtは、40μm以上かつ200μm以下である、
請求項3に記載の半導体レーザ。 - 前記第2及び第3の導波路の前記共振器の長手方向の長さLwは、5μm以上かつ150μm以下である、
請求項3に記載の半導体レーザ。 - 前記第2の導波路には、前記第1の端面から所定の範囲で電流が注入されない第1の電流非注入領域が設けられ、
前記第3の導波路には、前記第2の端面から所定の範囲で電流が注入されない第2の電流非注入領域が設けられる、
請求項1に記載の半導体レーザ。 - 前記第1〜第3の導波路及び前記第1、第2のテーパ導波路の上に形成された、前記第1〜第3の導波路及び前記第1、第2のテーパ導波路に電流を注入する電極を備え、
前記電極の前記共振器の長手方向の前記第1の端面側の一端は前記第1の端面から前記所定の距離だけ離隔し、
前記電極の前記共振器の長手方向の前記第2の端面側の他端は前記第2の端面から前記所定の距離だけ離隔している、
請求項8に記載の半導体レーザ。 - 前記第1及び第2の電流非注入領域の幅は、前記第2及び第3の導波路の前記共振器の長手方向の長さよりも大きい、
請求項8に記載の半導体レーザ。 - 請求項1に記載の半導体レーザが搭載された、
光源ユニット。 - 請求項11に記載の光源ユニットが搭載され、
前記光源ユニットから出射されたレーザ光を対象物に照射する、
レーザ光照射装置。
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CN201711010427.XA CN108110616B (zh) | 2016-11-25 | 2017-10-26 | 半导体激光器、光源单元和激光照射装置 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020194806A1 (ja) * | 2019-03-22 | 2020-10-01 | パナソニック株式会社 | 半導体発光装置 |
JP2021019040A (ja) * | 2019-07-18 | 2021-02-15 | パナソニック株式会社 | 窒化物半導体レーザ素子 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6551672B2 (ja) * | 2015-08-17 | 2019-07-31 | セイコーエプソン株式会社 | 発光装置およびプロジェクター |
WO2020249219A1 (en) * | 2019-06-13 | 2020-12-17 | Huawei Technologies Co., Ltd. | Optical device with passive window |
CN113794104B (zh) * | 2021-09-29 | 2023-01-03 | 中国科学院半导体研究所 | 光子晶体激光器 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60163486A (ja) * | 1984-02-03 | 1985-08-26 | Nec Corp | 半導体レ−ザ |
JPH01105589A (ja) * | 1987-10-17 | 1989-04-24 | Semiconductor Res Found | 半導体ラマンレーザ |
JPH08340147A (ja) * | 1995-06-13 | 1996-12-24 | Hitachi Ltd | 半導体レーザ装置 |
JP2001057458A (ja) * | 1999-08-17 | 2001-02-27 | Mitsubishi Chemicals Corp | 半導体発光装置 |
US20030112842A1 (en) * | 2001-12-14 | 2003-06-19 | Adc Telecommunications, Inc | Semiconductor laser with a tapered ridge |
JP2007305635A (ja) * | 2006-05-09 | 2007-11-22 | Sharp Corp | 窒化物半導体発光素子 |
JP2009295761A (ja) * | 2008-06-05 | 2009-12-17 | Panasonic Corp | 半導体レーザ素子 |
KR20130063818A (ko) * | 2011-12-07 | 2013-06-17 | 한국전기연구원 | 테이퍼드형 레이저 다이오드 소자 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5261857B2 (ja) | 2001-09-21 | 2013-08-14 | 日本電気株式会社 | 端面発光型半導体レーザおよび半導体レーザ・モジュール |
US6798815B2 (en) | 2002-04-24 | 2004-09-28 | Bookham Technology Plc | High power semiconductor laser diode and method for making such a diode |
JP2009033009A (ja) * | 2007-07-30 | 2009-02-12 | Panasonic Corp | 半導体レーザ装置及びその製造方法 |
JP2009295680A (ja) * | 2008-06-03 | 2009-12-17 | Panasonic Corp | 半導体レーザ装置 |
JP4657337B2 (ja) * | 2008-09-29 | 2011-03-23 | シャープ株式会社 | 半導体レーザ装置 |
US20150146757A1 (en) * | 2010-02-19 | 2015-05-28 | Furukawa Electric Co., Ltd. | Semiconductor laser module |
US9214786B2 (en) * | 2013-04-09 | 2015-12-15 | Nlight Photonics Corporation | Diode laser packages with flared laser oscillator waveguides |
-
2016
- 2016-11-25 JP JP2016228526A patent/JP2018085468A/ja not_active Withdrawn
-
2017
- 2017-10-26 CN CN201711010427.XA patent/CN108110616B/zh not_active Expired - Fee Related
- 2017-11-01 US US15/800,778 patent/US10243326B2/en not_active Expired - Fee Related
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60163486A (ja) * | 1984-02-03 | 1985-08-26 | Nec Corp | 半導体レ−ザ |
JPH01105589A (ja) * | 1987-10-17 | 1989-04-24 | Semiconductor Res Found | 半導体ラマンレーザ |
JPH08340147A (ja) * | 1995-06-13 | 1996-12-24 | Hitachi Ltd | 半導体レーザ装置 |
JP2001057458A (ja) * | 1999-08-17 | 2001-02-27 | Mitsubishi Chemicals Corp | 半導体発光装置 |
US20030112842A1 (en) * | 2001-12-14 | 2003-06-19 | Adc Telecommunications, Inc | Semiconductor laser with a tapered ridge |
JP2007305635A (ja) * | 2006-05-09 | 2007-11-22 | Sharp Corp | 窒化物半導体発光素子 |
JP2009295761A (ja) * | 2008-06-05 | 2009-12-17 | Panasonic Corp | 半導体レーザ素子 |
KR20130063818A (ko) * | 2011-12-07 | 2013-06-17 | 한국전기연구원 | 테이퍼드형 레이저 다이오드 소자 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020194806A1 (ja) * | 2019-03-22 | 2020-10-01 | パナソニック株式会社 | 半導体発光装置 |
JP2021019040A (ja) * | 2019-07-18 | 2021-02-15 | パナソニック株式会社 | 窒化物半導体レーザ素子 |
JP7340974B2 (ja) | 2019-07-18 | 2023-09-08 | パナソニックホールディングス株式会社 | 窒化物半導体レーザ素子 |
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US10243326B2 (en) | 2019-03-26 |
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