JP2018026138A5 - - Google Patents

Download PDF

Info

Publication number
JP2018026138A5
JP2018026138A5 JP2017156619A JP2017156619A JP2018026138A5 JP 2018026138 A5 JP2018026138 A5 JP 2018026138A5 JP 2017156619 A JP2017156619 A JP 2017156619A JP 2017156619 A JP2017156619 A JP 2017156619A JP 2018026138 A5 JP2018026138 A5 JP 2018026138A5
Authority
JP
Japan
Prior art keywords
process fluid
meniscus
elongated bladder
chamber
bladder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2017156619A
Other languages
English (en)
Japanese (ja)
Other versions
JP7013168B2 (ja
JP2018026138A (ja
Filing date
Publication date
Application filed filed Critical
Publication of JP2018026138A publication Critical patent/JP2018026138A/ja
Publication of JP2018026138A5 publication Critical patent/JP2018026138A5/ja
Application granted granted Critical
Publication of JP7013168B2 publication Critical patent/JP7013168B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2017156619A 2016-08-11 2017-08-14 メニスカス制御を備えた高精度分配システム Active JP7013168B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201662373733P 2016-08-11 2016-08-11
US62/373,733 2016-08-11

Publications (3)

Publication Number Publication Date
JP2018026138A JP2018026138A (ja) 2018-02-15
JP2018026138A5 true JP2018026138A5 (https=) 2020-09-10
JP7013168B2 JP7013168B2 (ja) 2022-01-31

Family

ID=61160360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017156619A Active JP7013168B2 (ja) 2016-08-11 2017-08-14 メニスカス制御を備えた高精度分配システム

Country Status (5)

Country Link
US (1) US10354872B2 (https=)
JP (1) JP7013168B2 (https=)
KR (2) KR102545444B1 (https=)
CN (1) CN107728431A (https=)
TW (1) TWI760355B (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11072858B2 (en) * 2018-09-05 2021-07-27 Nova Engineering Films, Inc. Pulsing mixture of precursor and supercritical fluid to treat substrate surface
JP6698809B1 (ja) * 2018-12-19 2020-05-27 株式会社キャタラー 排ガス浄化装置の製造方法
WO2020214389A2 (en) * 2019-04-15 2020-10-22 Robert Bosch Gmbh Pressure management device for battery pack
US11754923B2 (en) * 2021-03-26 2023-09-12 Taiwan Semiconductor Manufacturing Co., Ltd. Resist dispensing system and method of use
KR102650050B1 (ko) 2021-08-24 2024-03-20 세메스 주식회사 메니스커스 측정 장치 및 방법, 기판 처리 장치

Family Cites Families (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2467150A (en) 1943-11-12 1949-04-12 Carl H Nordell Valve
US2517820A (en) 1948-08-10 1950-08-08 American Cyanamid Co Fluid-pressure controller
BE491946A (https=) 1949-01-04 1900-01-01
US4195810A (en) 1978-03-31 1980-04-01 Lavin Aaron M Pinch valve
US4442954A (en) 1982-07-30 1984-04-17 National Instrument Company, Inc. Self-pressurizing pinch valve
JPS62121669A (ja) * 1985-11-19 1987-06-02 Toshiba Corp 塗布装置
FR2651552B1 (fr) 1989-09-01 1991-12-06 Cit Alcatel Vanne et dispositifs utilisant ladite vanne.
US20020055786A1 (en) * 1994-08-16 2002-05-09 Anthony Atala Reconstruction of urological structures with polymeric matrices
KR100754342B1 (ko) 1999-10-18 2007-09-03 인터그레이티드 디자인즈 엘.피. 유체 분배 방법 및 장치
JP2002231668A (ja) 2001-01-31 2002-08-16 Mitsubishi Materials Silicon Corp スラリー移送装置
US6568416B2 (en) 2001-02-28 2003-05-27 Brian L. Andersen Fluid flow control system, fluid delivery and control system for a fluid delivery line, and method for controlling pressure oscillations within fluid of a fluid delivery line
EP1432639A1 (en) 2001-10-01 2004-06-30 Fsi International, Inc. Fluid dispensing apparatus
US7114641B2 (en) * 2003-09-19 2006-10-03 Intel Corporation Drip resistant dispensing nozzle
WO2005071112A2 (en) * 2004-01-26 2005-08-04 Isis Innovation Ltd Molecular analysis
JP4511868B2 (ja) * 2004-04-26 2010-07-28 株式会社コガネイ 可撓性タンクとこれを用いた薬液供給装置
US7335003B2 (en) 2004-07-09 2008-02-26 Saint-Gobain Performance Plastics Corporation Precision dispense pump
US20060029720A1 (en) * 2004-08-03 2006-02-09 Anastasia Panos Methods and apparatus for injection coating a medical device
KR100643494B1 (ko) 2004-10-13 2006-11-10 삼성전자주식회사 반도체 제조용 포토레지스트의 디스펜싱장치
KR20060065188A (ko) 2004-12-10 2006-06-14 삼성전자주식회사 반도체 코팅설비의 포토레지스트 분사장치
US20060174656A1 (en) 2005-02-08 2006-08-10 Owens-Brockway Glass Container Inc. Glassware forming machine with bladder-operated cooling wind valve
EP3006102A1 (en) * 2005-04-25 2016-04-13 Advanced Technology Materials, Inc. Liner-based liquid storage and dispensing systems with empty detection capability
JP2006336574A (ja) 2005-06-03 2006-12-14 Anest Iwata Corp 不活性ガス昇圧送給方法および装置
JP2006324677A (ja) 2006-05-29 2006-11-30 Tokyo Electron Ltd 液処理装置の自動設定装置
US7935948B2 (en) * 2006-08-11 2011-05-03 Sokudo Co., Ltd. Method and apparatus for monitoring and control of suck back level in a photoresist dispense system
US20080169230A1 (en) 2007-01-12 2008-07-17 Toshiba America Electronic Components, Inc. Pumping and Dispensing System for Coating Semiconductor Wafers
JP4824792B2 (ja) * 2009-07-02 2011-11-30 東京エレクトロン株式会社 塗布装置
CN102472614B (zh) * 2009-07-31 2015-04-01 Asml控股股份有限公司 低压和高压接近式传感器
SG10201404592RA (en) * 2009-08-11 2014-09-26 Glaxosmithkline Llc Vapor sheath for liquid dispensing nozzle
US8913063B2 (en) * 2010-08-27 2014-12-16 Disney Enterprises, Inc. Pattern detection of avatars in a virtual environment
JP5416672B2 (ja) * 2010-09-28 2014-02-12 株式会社コガネイ 薬液供給装置
JP5672204B2 (ja) * 2011-09-13 2015-02-18 東京エレクトロン株式会社 液処理装置、液処理方法及び記憶媒体
EP2662137A1 (en) * 2012-05-08 2013-11-13 Roche Diagniostics GmbH Dispensing assembly
DE102013012088B3 (de) * 2013-07-22 2014-06-18 Macauto Industrial Co., Ltd. Laderaumabdeckung für ein Kraftfahrzeug
US9718082B2 (en) * 2014-01-26 2017-08-01 Tokyo Electron Limited Inline dispense capacitor
US9987655B2 (en) * 2015-06-26 2018-06-05 Tokyo Electron Limited Inline dispense capacitor system

Similar Documents

Publication Publication Date Title
JP2018026138A5 (https=)
JP2018040349A5 (https=)
US9555430B2 (en) Paint application system
US20110054505A1 (en) Fluid ejection device and method of controlling fluid ejection device
KR102476462B1 (ko) 인라인 분사 커패시터 시스템
JP2008128178A5 (https=)
RU2018138160A (ru) Генерирующая аэрозоль система с насосом
WO2017219018A3 (en) Method and apparatus for wetting internal fluid path surfaces of a fluid port to increase ultrasonic signal transmission
CA2638300A1 (en) Dispensing system and method for dispensing fluid in an appliance
KR20150023028A (ko) 액체 재료 토출 장치의 세정 장치 및 세정 방법
CN106999966B (zh) 具有改善的压力控制的液体分配系统
JP2018026137A5 (https=)
FI3838312T3 (fi) Laitteisto laskimonsisäisen kaasun poistamiseksi
WO2013052734A3 (en) Direct dispense device and method
FR3059050B1 (fr) Dispositif et procede de regulation de debit de gaz
NL2021363B1 (nl) Blussysteem en werkwijze voor het blussen van branden
KR20190038242A (ko) 기판의 도포 방법 및 기판의 도포 장치
KR101763121B1 (ko) 개선된 약액 가압 장치, 및 이를 구비한 약액 공급 장치
JP2018521703A5 (https=)
JP6581187B2 (ja) 排出デバイス
EP2731727B1 (en) Water pulsating device for irrigation systems
EP2572761A3 (en) An improved dispensing valve for a fire extinguisher
JP4889911B2 (ja) 圧力制御、化学および排気機能を含む改善された消火ノズル
US2088082A (en) Liquid sprayer
JP6209452B2 (ja) 均質化装置