JP2018011089A - Semiconductor device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a semiconductor device which can suppress the occurrence of field inversion, and which can materialize stable element isolation.SOLUTION: A semiconductor device comprises: an epitaxial substrate 45 including a low-voltage element region 2 having a low-voltage element; element isolation wells 7 formed in a surface layer portion of the epitaxial substrate 45 so as to partition the low-voltage element region 2; a field insulation film 10 formed over the epitaxial substrate 45 so as to cover the element isolation wells 7; first to fourth interlayer insulation films 21, 25, 27, 36 formed over the epitaxial substrate 45; a high-voltage wiring line 30 formed on the fourth interlayer insulation film 36 so as to cross the low-voltage element region 2 in plan view; and a conductor film 11 formed on the field insulation film 10 so as to cross a region opposed to the high-voltage wiring line 30 in the field insulation film 10, of which the width is equal to or smaller than that of the element isolation well 7.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a semiconductor device.

  Patent Document 1 discloses a semiconductor device including a p-type well region for separating an element formation region and a DMOS transistor formed in the element formation region. A semiconductor device includes a p-type silicon substrate, an n-type source region and a drain region which are selectively formed on the surface of the silicon substrate and separated from each other by a field oxide film, and a gate oxide film on the silicon substrate. And a gate electrode formed on the substrate. A field oxide film is formed on the p-type well region.

JP 2012-156205 A

In a semiconductor device having an element isolation structure as in Patent Document 1, a DMOS transistor may be mixed with other elements. In such a semiconductor device, not only a wiring electrically connected to the DMOS transistor but also a plurality of wirings electrically connected to other elements are formed. Various voltages according to each element are applied to the plurality of wirings.
Here, when the wiring passes near the field insulating film or crosses the field insulating film, an anion in the semiconductor substrate is caused by an electric field from the wiring to a region immediately below the field insulating film (that is, an element formation region). Is attracted to the surface of the p-type well region separating the two, and field inversion occurs in the p-type well region. Therefore, the field-inverted region serves as a leak path, and a leak current is generated, resulting in element isolation failure. The occurrence of such a leakage current due to the electric field from the wiring becomes more prominent as the voltage applied to the wiring increases.

In order to avoid this problem, it is possible to create a design rule for forming a wiring at a certain distance from the field insulating film according to the voltage applied to the wiring, and to design the device accordingly. However, this method cannot effectively utilize the area of the semiconductor chip but also hinders the high shrinkage of the semiconductor chip.
Accordingly, an object of one embodiment of the present invention is to provide a semiconductor device that can suppress the occurrence of field inversion and realize stable element isolation.

  In one embodiment of the present invention, a semiconductor layer including an element region having a semiconductor element, an element isolation well formed in a surface layer portion of the semiconductor layer so as to partition the element region, and covering the element isolation well A field insulating film formed on the semiconductor layer, an interlayer insulating film formed on the semiconductor layer, and a wiring formed on the interlayer insulating film so as to cross the element region in plan view And a conductor film formed on the field insulating film so as to cross a region facing the wiring in the field insulating film and having a width equal to or smaller than the width of the element isolation well. .

  According to this configuration, the influence of the electric field from the wiring can be reduced by the conductor film. Specifically, since the conductor film fixed at a constant potential is disposed closer to the wiring than the element isolation well, the electric field from the wiring can be effectively terminated by the conductor film. Thereby, it is possible to suppress the occurrence of field inversion due to the ions in the element isolation well being attracted to the region immediately below the field insulating film by the electric field from the wiring. As a result, it is possible to suppress the occurrence of a leak current due to the formation of a leak path that crosses the element isolation well, so that a semiconductor device that can realize stable element isolation can be provided. One embodiment of the present invention includes a low voltage element region having a low voltage element operating at a low reference voltage, and a high voltage element region having a high voltage element operating at a high reference voltage higher than the low reference voltage. A semiconductor layer; an element isolation well formed in a surface layer portion of the semiconductor layer so as to electrically isolate the low voltage element region and the high voltage element region; and the semiconductor layer so as to cover the element isolation well A field insulating film formed thereon, an interlayer insulating film formed on the semiconductor layer, a wiring formed on the interlayer insulating film and electrically connected to the high-voltage element region; There is provided a semiconductor device including a conductor film formed between an interlayer insulating film and the field insulating film and facing the element isolation well with the field insulating film interposed therebetween.

  According to this configuration, the influence of the electric field from the wiring can be reduced by the conductor film. Specifically, since the conductor film fixed at a constant potential is disposed closer to the wiring than the element isolation well, the electric field from the wiring can be effectively terminated by the conductor film. Thereby, it is possible to suppress the occurrence of field inversion due to the ions in the element isolation well being attracted to the region immediately below the field insulating film by the electric field from the wiring. As a result, it is possible to suppress the occurrence of a leak current due to the formation of a leak path that crosses the element isolation well, so that a semiconductor device that can realize stable element isolation can be provided.

FIG. 1 is a schematic plan view of a semiconductor device according to the first embodiment of the present invention. 2 is a cross-sectional view taken along the section line II-II in FIG. 3A is an enlarged plan view showing an example of the layout of the conductor film of FIG. 3B is an enlarged plan view showing an example of the layout of the conductor film of FIG. FIG. 3C is an enlarged plan view showing an example of the layout of the conductor film of FIG. 4A is a cross-sectional view for explaining an example of a manufacturing process of the semiconductor device of FIG. FIG. 4B is a diagram showing a manufacturing process subsequent to FIG. 4A. FIG. 4C is a diagram showing the next manufacturing step after FIG. 4B. FIG. 4D is a diagram showing the next manufacturing step after FIG. 4C. FIG. 4E is a diagram showing the next manufacturing step after FIG. 4D. FIG. 4F is a view showing the next manufacturing step after FIG. 4E. FIG. 4G is a diagram showing the next manufacturing step after FIG. 4F. FIG. 4H is a view showing the next manufacturing step after FIG. 4G. FIG. 5 is a schematic cross-sectional view of a semiconductor device according to the second embodiment of the present invention. FIG. 6 is a schematic plan view of a semiconductor device according to the third embodiment of the present invention. FIG. 7 is a schematic plan view of a semiconductor device according to the fourth embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a schematic plan view of a semiconductor device 1 according to the first embodiment of the present invention. FIG. 2 is a cross-sectional view taken along the section line II-II in FIG.
The semiconductor device 1 includes an epitaxial substrate 45 as an example of a semiconductor layer, and an element isolation well 7 that partitions a low-voltage element region 2 as an example of an electrically floating element formation region in a surface layer portion of the epitaxial substrate 45. including.

More specifically, the epitaxial substrate 45 includes a p-type silicon substrate 4 and an n ⁻ -type epitaxial layer 5 formed on the silicon substrate 4, and a strip-shaped p-type element isolation that draws a closed curve in a plan view. Well 7 is formed so as to reach silicon substrate 4 from the surface of n ⁻ type epitaxial layer 5. The layer thickness of the n ⁻ type epitaxial layer 5 is, for example, 5.0 μm to 10 μm.

In this embodiment, the element isolation well 7 is formed in a quadrangular ring shape in a plan view as shown in FIG. 1, but may be another closed curve structure such as an annular shape or a triangular ring shape. The element isolation well 7 has a two-layer structure of a p ⁺ type well region 8 disposed on the upper side and a p ⁻ type low isolation (L / I) region 9 disposed on the lower side. The boundary between the regions 8 and 9 is set in the middle of the n ⁻ type epitaxial layer 5 in the thickness direction. For example, the boundary between the regions 8 and 9 is set at a depth position of 1.0 μm to 2.0 μm from the surface of the epitaxial layer 5.

As a result, the low-voltage element region 2 composed of a part of the n ⁻ type epitaxial layer 5 surrounded by the element isolation well 7 on the silicon substrate 4 is defined in the epitaxial substrate 45.
An n ⁺ type buried layer (B / L) 6 is selectively formed in the low voltage element region 2. The buried layer 6 is formed in the epitaxial substrate 45 so as to straddle the boundary between the silicon substrate 4 and the n ⁻ -type epitaxial layer 5. The film thickness of the buried layer 6 is, for example, 2.0 μm to 3.0 μm.

  In addition, in the epitaxial substrate 45, a high voltage element region 3 as an example of an element formation region that is electrically floating as in the low voltage element region 2 is defined in the outer peripheral region of the low voltage element region 2. The high voltage element region 3 may be formed adjacent to the low voltage element region 2 with the element isolation well 7 interposed therebetween, or in a region away from the low voltage element region 2 as shown in FIG. An element isolation structure (for example, a well similar to the element isolation well 7) may be formed.

The low voltage element region 2 is a region that operates with a low reference voltage as a reference, and a voltage of, for example, about 5V to 100V is applied. The high voltage element region 3 is applied with a high voltage of about 400V to 600V, for example.
On the surface of the element isolation well 7, a strip-shaped field insulating film 10 that draws a closed curve is formed. Similar to the element isolation well 7, the field insulating film 10 is formed in a square ring shape in plan view so as to surround the low voltage element region 2. The field insulating film 10 is wider than the element isolation well 7 and is formed so as to completely cover the element isolation well 7. The field insulating film 10 is, for example, a LOCOS film formed by selectively oxidizing the surface of the n ⁻ type epitaxial layer 5.

  A conductor film 11 is formed on the field insulating film 10 so as to face the element isolation well 7 with the field insulating film 10 interposed therebetween. The conductor film 11 is formed in a strip shape that draws a closed curve, as with the element isolation well 7. That is, the conductor film 11 is formed in a quadrangular ring shape in plan view so as to surround the periphery of the low voltage element region 2. The conductor film 11 includes, for example, a conductive material such as polysilicon or aluminum, and the film thickness is, for example, 0.4 μm to 1.0 μm. The conductor film 11 is fixed at a constant potential via, for example, a wiring formed on an interlayer insulating film such as a first interlayer insulating film 21 and a second interlayer insulating film 25 described later. In this embodiment, the conductor film 11 is fixed to the ground potential. In this case, the conductor film 11 can be fixed to the ground potential by connecting to the source wiring 29 described later.

A DMOS (Double-Diffused MOSFET) 35 is formed in the low voltage element region 2.
The DMOS 35 includes an n ⁻ type well region 13 and a p ⁻ type well region 15 formed on the surface of the n ⁻ type epitaxial layer 5 so as to be spaced from each other. The n ⁻ type well region 13 is formed in an annular shape in plan view along the field insulating film 10 so as to surround the p ⁻ type well region 15.

the n ^- the surface of the mold well region 13, n ^- n ⁺ -type drain region 14 are formed to have an impurity concentration higher than type well region 13. Further, p ^- the surface of the type well region 15, p ^- n ⁺ -type source region 17 so as to surround the p ⁺ -type impurity regions 16 having an impurity concentration higher than type well region 15 is formed.
The outer peripheral edge of the n ⁺ -type source region 17 is arranged at a position spaced a certain distance inward from the outer peripheral edge of the p ⁻ -type well region 15. The n ⁺ type source region 17 is formed, for example, with the same concentration and the same depth as the n ⁺ type drain region 14. The p ⁺ -type impurity region 16 is formed with the same depth as the n ⁺ -type source region 17.

An annular field insulating film 12 is formed on the surface of the n ⁻ type epitaxial layer 5 at a portion between the n ⁻ type well region 13 and the p ⁻ type well region 15. The field insulating film 12 is a LOCOS film formed in a square shape in plan view in the same process as the field insulating film 10 described above.
The outer peripheral edge of the field insulating film 12 is disposed on the peripheral edge of the n ⁺ -type drain region 14, and the inner peripheral edge of the field insulating film 12 is a position spaced apart from the outer peripheral edge of the p ⁻ -type well region 15 by a certain distance. Is arranged. The n ⁺ -type drain region 14 is formed in a region sandwiched between the outer peripheral edge of the field insulating film 12 and the field insulating film 10.

Further, n ^- the surface of the type epitaxial layer 5, n ^- -type epitaxial layer 5 and the p ^- type well region 15 a gate insulating film 18 so as to straddle between the is formed. A gate electrode 19 is formed via the gate insulating film 18. The gate electrode 19 is formed so as to selectively cover a part of the gate insulating film 18 and a part of the field insulating film 12.
The gate electrode 19 is formed with, for example, the same material and the same film thickness as the above-described conductor film 11. The gate insulating film 18 is, for example, a silicon oxide film formed by oxidizing the surface of the n ⁻ type epitaxial layer 5.

A region where the gate electrode 19 faces the p ⁻ type well region 15 through the gate insulating film 18 is a channel region 20 of the DMOS 35. The formation of the channel in the channel region 20 is controlled by the gate electrode 19.
Then, first to fourth interlayer insulating films 21, 25, 27, and 36 are formed so as to cover the entire low voltage element region 2. The first to fourth interlayer insulating films 21, 25, 27, and 36 are formed of an insulating film such as an oxide film or a nitride film, for example. In this embodiment, the first to fourth interlayer insulating films 21, 25, 27, and 36 are formed, but the fifth, sixth, or more interlayer insulating layers are further formed on the fourth interlayer insulating film 36. The structure in which the film | membrane was formed may be sufficient.

Low voltage contacts 23 and 24 are formed in the first interlayer insulating film 21. The low voltage contacts 23, 24 include a drain contact 23 formed through the first interlayer insulating film 21 and a source contact 24. Hereinafter, the drain contact 23 and the source contact 24 may be collectively referred to as low voltage contacts 23 and 24. The drain contact 23 is electrically connected to the n ⁺ type drain region 14, and the source contact 24 is electrically connected to the p ⁺ type impurity region 16 and the n ⁺ type source region 17. The low voltage contact may include a gate contact (not shown) that is electrically connected to the gate electrode 19.

On the first interlayer insulating film 21, a second interlayer insulating film 25 and a third interlayer insulating film 27 are formed in this order so as to cover the low-voltage contacts 23 and 24. On the third interlayer insulating film 27, low voltage wirings 28 and 29 as an example of wirings electrically connected to the low voltage contacts 23 and 24 are selectively formed.
The low voltage wirings 28 and 29 include a drain wiring 28 and a source wiring 29 as shown in FIG. Hereinafter, the drain wiring 28 and the source wiring 29 may be collectively referred to as low voltage wirings 28 and 29. The drain wiring 28 is electrically connected to the n ⁺ -type drain region 14 via the drain contact 23, and the source wiring 29 is electrically connected to the n ⁺ -type source region 17 via the source contact 24. Yes. The low voltage wiring may include a gate wiring (not shown) that is electrically connected to the gate electrode 19 through a gate contact.

In this embodiment, the drain wiring 28 and the source wiring 29 are routed from the outer peripheral region across the element isolation well 7 in the width direction onto the drain contact 23 and the source contact 24, and are respectively connected to the contacts 23 and 24. It is connected.
Source line 29 is preferably fixed at a constant potential, for example, a ground potential. The source wiring 29 may be connected to the conductor film 11, for example. In addition, a voltage of, for example, about 5V to 100V is applied to the drain wiring 28, and a voltage of, for example, about 0V to 30V is applied to the gate wiring (not shown). Thus, the low voltage wiring is a low voltage wiring to which a relatively low voltage is applied. A fourth interlayer insulating film 36 is formed on the third interlayer insulating film 27 so as to cover the low voltage wirings 28 and 29 formed on the third interlayer insulating film 27.

  On the fourth interlayer insulating film 36, a high voltage wiring 30 as an example of wiring is formed. The high voltage wiring 30 is a high voltage wiring to which a relatively higher voltage (for example, 400 V to 600 V) is applied than the low voltage wirings 28 and 29. In this embodiment, the high-voltage wiring 30 is formed in a straight line that crosses the element isolation well 7 in the width direction so as to divide the low-voltage element region 2 into two parts. Connected to the drain contact of the high-voltage element region 3 not to be connected).

Next, the layout of the conductor film 11 will be described more specifically with reference to FIGS. 3A to 3C. 3A to 3C are enlarged plan views showing an example of the layout of the conductor film 11 of FIG.
Referring to the layout of FIG. 3A, the conductor film 11 is interposed between the field insulating film 10 and the intersection 31 where the element isolation well 7 and the high voltage wiring 30 intersect. The width _{W 1} of the field insulating film 10 is, for example, 5.0Myuemu～10myuemu. The width _{W 2} of the conductive film 11 is formed narrower than the width _{W 1} of the field insulating film 10, for example, a 2.0Myuemu～3.0Myuemu.

With respect to the direction in which the element isolation well 7 intersects the high voltage wiring 30 at the intersection 31 (the direction in which the element isolation well 7 extends), the length of the conductor film 11 is greater than the length L ₁ of the intersection 31. Yes.
With respect to the direction in which the high voltage wiring 30 intersects the element isolation well 7 at the intersection 31 (the direction in which the high voltage wiring 30 extends), the length of the conductor film 11 (that is, the width W ₂ of the conductor film 11) Shorter than the length L _{2 of} W (ie, W ₂ <L ₂ ). In other words, the conductor film 11 has an area S ₁ (W ₂ × L _{1 in} this embodiment) of the intersection 34 where the conductor film 11 and the high voltage wiring 30 intersect with each other. It is formed so as to be smaller than the area S ₂ (L ₁ × L _{2 in} this embodiment) of the intersecting portion 31 that intersects 30 (ie, S ₁ <S ₂ ).

Next, referring to the layout of FIG. 3B, the width W ₂ of the conductor film 11 intersects the region inside the field insulating film 10 in the extending direction of the high voltage wiring 30, unlike the case of FIG. 3A described above. The portion 31 is formed to have a length L ₂ or more (that is, W ₂ ≧ L ₂ ). At this time, the width W ₂ of the conductor film 11 may be formed to be substantially equal to the width W ₁ of the field insulating film 10.

Further, the conductor film 11 has an area S ₁ (W ₂ × L _{1 in} this embodiment) of the intersection 34 where the conductor film 11 and the high voltage wiring 30 intersect with each other. Is preferably formed so as to be equal to or greater than the area S ₂ (L ₁ × L _{2 in} this embodiment) of the intersecting portion 31 (that is, S ₁ ≧ S ₂ ). With such a configuration, the conductor film 11 can reliably and completely cover the region where the element isolation well 7 is formed via the field insulating film 10.

Next, referring to the layout of FIG. 3C, the conductor film 11 is not formed in a belt-like shape that draws a closed curve, but is formed only in a region where the high-voltage wiring 30 and the element isolation well 7 intersect and its peripheral portion. 3A and 3B described above.
In this case, the conductor film 11 is formed so that the length L ₃ of the conductor film 11 is not less than the length L ₁ of the intersection 31 (L ₃ ≧ L ₁ ) in the extending direction of the element isolation well 7. It is preferable. 3C shows a configuration in which the width W ₂ of the conductor film 11 is formed to be equal to or less than the length L ₂ of the intersecting portion 31 (that is, W ₂ ≦ L ₂ ) in the extending direction of the high-voltage wiring 30. However, as in the case of FIG. 3B, it is preferable that the crossing portion 31 is formed to have a length L ₂ or more (that is, W ₂ ≧ L ₂ ).

That is, the area S ₃ (W ₂ × L _{3 in} this embodiment) of the region where the conductor film 11 is formed is the area S of the intersection 34 between the conductor film 11 and the high voltage wiring 30 as shown in FIG. 3C. ₁ (in this embodiment, W ₂ × L ₁ ) is preferably larger. With such a configuration, not only the element isolation well 7 directly under the high voltage wiring 30 but also the element isolation well 7 located in a region away from the high voltage wiring 30 can be reliably covered. The area S ₃ (W ₂ × L _{3 in} this embodiment) of the region where the conductor film 11 is formed is the same as the area S ₁ (W ₁ × L _{1 in} this embodiment) of the intersection 34 (ie, W ₁ × L _{1 in} this embodiment). S ₁ = S ₃ ) or the area S ₂ (L ₁ × L _{2 in} this embodiment) of the intersection 31 (ie, S ₂ = S ₃ ).

3A to 3C show an example of the layout of the high voltage wiring 30 and the conductor film 11, but these layouts are not limited to the high voltage wiring 30, for example, the low voltage wiring 28, 29 is also applicable.
Thus, in the semiconductor device 1, the high voltage wiring 30 and the low voltage wirings 28 and 29 intersect with the element isolation well 7. Therefore, the distance between the element isolation well 7 and each of the wirings 28, 29, 30 is shorter than when the wirings 28, 29, 30 and the element isolation well 7 do not intersect. Further, since a higher voltage is applied to the high voltage wiring 30 than to the low voltage wirings 28 and 29, an electric field relatively higher than that of the low voltage wirings 28 and 29 is generated. Therefore, under such a structure, field inversion is relatively likely to occur in a region immediately below the field insulating film 10, that is, in the element isolation well 7.

  However, according to the semiconductor device 1, the influence of the electric field from the low voltage wirings 28 and 29 and the high voltage wiring 30 can be reduced by the conductor film 11. Specifically, since the conductor film 11 fixed to the ground potential is disposed at a position closer to the low voltage wirings 28 and 29 and the high voltage wiring 30 than the element isolation well 7, the high voltage wiring 30 and the low voltage wiring The electric fields from both 28 and 29 can be effectively terminated by the conductor film 11.

  As a result, it is possible to suppress the occurrence of field inversion due to the ions in the element isolation well 7 being attracted to the region immediately below the field insulating film 10 by the electric field from both the low voltage wirings 28 and 29 and the high voltage wiring 30. Can do. As a result, it is possible to suppress the generation of a leak current due to the formation of a leak path that crosses the element isolation well 7, and thus a semiconductor device that can realize more stable element isolation can be provided.

  In addition, when the conductor film 11 is formed in a belt-like shape that draws a closed curve (configuration of FIG. 3A and FIG. 3B), the conductor film 11 is necessarily disposed immediately above the element isolation well 7 in the region on the field insulating film 10. Has been. Therefore, even if the element isolation well 7 intersects with the low voltage wirings 28, 29 and the high voltage wiring 30, the electric field caused by the low voltage wirings 28, 29 and the high voltage wiring 30 can be satisfactorily terminated by the conductor film 11. .

As a result, the occurrence of field inversion in the element isolation well 7 can be suppressed regardless of the wiring rules of the low-voltage wirings 28 and 29 and the high-voltage wiring 30, so that the degree of freedom in design rules can be further increased. As a result, the area of the semiconductor chip can be used effectively, and the semiconductor chip can be highly shrunk.
Next, a manufacturing process of the semiconductor device 1 will be described with reference to FIGS. 4A to 4H.

4A to 4H are cross-sectional views for explaining an example of the manufacturing process of the semiconductor device 1. 4A to 4H correspond to FIG. 2, respectively.
To manufacture the semiconductor device 1, a p ⁻ type silicon substrate 4 is prepared as shown in FIG. 4A. Next, n-type impurities and p-type impurities are selectively implanted into the surface of the silicon substrate 4. Then, for example, silicon of the silicon substrate 4 is epitaxially grown at a temperature of 1100 ° C. or higher while adding n-type impurities. Thereby, as shown in FIG. 4B, an epitaxial substrate 45 including the silicon substrate 4 and the n ⁻ type epitaxial layer 5 is formed.

During epitaxial growth of the silicon substrate 4, n-type impurities and p-type impurities implanted into the silicon substrate 4 diffuse in the growth direction of the n ⁻ -type epitaxial layer 5. As a result, the buried layer 6 and the p ⁻ type low isolation region 9 that straddle the boundary between the silicon substrate 4 and the n ⁻ type epitaxial layer 5 are formed. Examples of the p-type impurity include B (boron) and Al (aluminum). Examples of the n-type impurity include P (phosphorus) and As (arsenic). it can.

Next, as shown in FIG. 4C, an ion implantation mask (not shown) having an opening selectively in a region where the p ⁺ type well region 8 is to be formed is formed on the n ⁻ type epitaxial layer 5. Then, a p-type impurity is implanted into the n ⁻ -type epitaxial layer 5 through the ion implantation mask. As a result, the element isolation well 7 having a two-layer structure of the p ⁺ type well region 8 and the p ⁻ type low isolation region 9 is formed. After the element isolation well 7 is formed, the ion implantation mask is removed.

Next, a hard mask 32 having an opening selectively in a region where the field insulating films 10 and 12 are to be formed is formed on the n ⁻ type epitaxial layer 5. Then, a thermal oxidation process is performed on the surface of the n ⁻ type epitaxial layer 5 through the hard mask 32 to form field insulating films 10 and 12 made of a LOCOS film. Thereafter, the hard mask 32 is removed.
Next, as shown in FIG. 4D, the surface of the n ⁻ type epitaxial layer 5 is subjected to a thermal oxidation process to form a gate insulating film 18. At this time, the gate insulating film 18 is formed so as to be continuous with the field insulating films 10 and 12. Next, polysilicon for the conductor film 11 and the gate electrode 19 is deposited on the n ⁻ type epitaxial layer 5 to form a polysilicon layer 33.

  Next, as shown in FIG. 4E, a resist mask (not shown) having an opening selectively in a region where the conductor film 11 and the gate electrode 19 are to be formed is formed on the polysilicon layer 33. Then, unnecessary portions of the polysilicon layer 33 are removed by etching through the resist mask. Thereby, the conductor film 11 and the gate electrode 19 are formed simultaneously. At this time, the layout of each conductor film 11 shown in FIGS. 3A to 3C can be obtained only by changing the layout of the resist mask. Thereafter, the resist mask is removed.

Next, in order to remove an unnecessary portion of the gate insulating film 18, a hard mask (not shown) having an opening selectively is formed on the n ⁻ type epitaxial layer 5. Then, an unnecessary portion of the gate insulating film 18 is etched through the hard mask. Thereby, a predetermined gate insulating film 18 is formed. After forming the gate insulating film 18, the hard mask is removed.

Next, as shown in FIG. 4F, an n ⁻ type well region 13 and a p ⁻ type well region 15 are formed. In order to form the n ⁻ type well region 13, first, an ion implantation mask (not shown) having an opening selectively in a region where the n ⁻ type well region 13 is to be formed is formed. Then, n-type impurities are implanted into the n ⁻ -type epitaxial layer 5 through the ion implantation mask. Thereby, an n ⁻ type well region 13 is formed. After the n ⁻ type well region 13 is formed, the ion implantation mask is removed. In the same procedure, an ion implantation mask (not shown) having an opening selectively in a region where the p ⁻ type well region 15 is to be formed is formed. Then, a p-type impurity is implanted into the n ⁻ -type epitaxial layer 5 through the ion implantation mask. Thereby, the p ⁻ type well region 15 is formed. After the p ⁻ type well region 15 is formed, the ion implantation mask is removed.

Next, a p ⁺ type impurity region 16 is formed in the inner region of the p ⁻ type well region 15. In order to form the p ⁺ -type impurity region 16, first, an ion implantation mask (not shown) having an opening selectively in a region where the p ⁺ -type impurity region 16 is to be formed is formed. Then, a p-type impurity is implanted into the p ⁻ -type well region 15 through the ion implantation mask. As a result, ap ⁺ type impurity region 16 is formed in the inner region of the p ⁻ type well region 15. After the p ⁺ -type impurity region 16 is formed, the ion implantation mask is removed.

Next, n ⁺ -type drain region 14 and n ⁺ -type source region 17 are selectively formed in the inner regions of n ⁻ -type well region 13 and p ⁻ -type well region 15, respectively. In order to form the n ⁺ -type drain region 14 and the n ⁺ -type source region 17, first, an ion implantation mask having an opening selectively in a region where the n ⁺ -type drain region 14 and the n ⁺ -type source region 17 are to be formed ( (Not shown) is formed. Then, n-type impurities are implanted into the n ⁻ -type well region 13 and the p ⁻ -type well region 15 through the ion implantation mask. Thereby, the n ⁺ type drain region 14 and the n ⁺ type source region 17 are formed. After the n ⁺ type drain region 14 and the n ⁺ type source region 17 are formed, the ion implantation mask is removed.

Next, as shown in FIG. 4G, an insulating material is deposited so as to cover the conductor film 11 and the gate electrode 19 to form a first interlayer insulating film 21. Next, a low voltage contact including a drain contact 23 and a source contact 24 is formed so as to penetrate the first interlayer insulating film 21, and the n ⁺ type drain region 14 and the n ⁺ type source region 17 are electrically connected to each other. Connected. Next, a second interlayer insulating film 25 and a third interlayer insulating film 27 are formed on the first interlayer insulating film 21 in this order so as to cover the drain contact 23 and the source contact 24.

  Next, as shown in FIG. 4H, a low voltage wiring (see FIG. 1) including a drain wiring 28 and a source wiring 29 electrically connected to the drain contact 23 and the source contact 24 is formed in the third interlayer insulating film 27. Selectively formed on top. In order to form the low voltage wirings 28 and 29, a resist mask having a predetermined opening is formed in a region where the low voltage wirings 28 and 29 are to be formed. Then, the low voltage wirings 28 and 29 can be formed by depositing an electrode material through the resist mask.

Next, a fourth interlayer insulating film 36 is formed on the third interlayer insulating film 27 so as to cover the low voltage wirings 28 and 29. Next, a high voltage wiring 30 electrically connected to the high voltage element region 3 is formed on the fourth interlayer insulating film 36. The semiconductor device 1 according to the first embodiment is manufactured through the above steps.
As described above, according to the method for manufacturing the semiconductor device 1, the conductor film 11 can be formed in the same process as the process of forming the gate electrode 19 of the DMOS 35. That is, the gate electrode 19 and the conductor film 11 of the DMOS 35 can be formed simply by changing the layout of the resist mask in the manufacturing process of the semiconductor device 1 (see FIG. 4E). Therefore, since it is not necessary to add a new manufacturing process, an increase in the number of processes can be prevented.

Further, during the manufacturing process of FIG. 4E, with respect to the extending direction of element isolation well 7, (see Fig. 3A~ diagram 3C) by forming the length of the conductive film 11 to the length L ₁ or more intersections 31, element Even if the low voltage wirings 28 and 29 and the high voltage wiring 30 are misaligned (alignment misalignment) along the direction in which the isolation well 7 extends, the conductor film 11 and the low voltage wirings 28 and 29 and the high voltage wiring 30 are securely connected. Can be crossed. As a result, it is possible to manufacture the semiconductor device 1 that can effectively suppress the occurrence of field inversion in the element isolation well 7 immediately below the field insulating film 10 at the intersection 31.

Next, a semiconductor device 41 according to the second embodiment of the present invention will be described with reference to FIG. FIG. 5 is a schematic cross-sectional view of a semiconductor device 41 according to the second embodiment of the present invention.
The semiconductor device 41 according to the second embodiment is different from the semiconductor device 1 according to the first embodiment described above in that a conductor film 42 is formed on the first interlayer insulating film 21. That is, the conductor film for suppressing field inversion does not have to be formed so as to be in contact with the surface of the field insulating film 10, and may be formed on the interlayer insulating film on the field insulating film 10. Other configurations are the same as those of the semiconductor device 1 according to the first embodiment described above. In FIG. 5, parts corresponding to those shown in FIG. 2 are given the same reference numerals, and description thereof is omitted.

  In this embodiment, the conductor film 42 is formed on the first interlayer insulating film 21 in the same layer as the drain contact 23 and the source contact 24. At this time, the conductor film 42 faces the element isolation well 7 through the first interlayer insulating film 21 and the field insulating film 10. As the layout of the conductor film 42, a layout similar to each layout described in FIGS. 3A to 3C of the first embodiment described above can be applied.

  For example, the conductor film 42 is formed of the same material and the same film thickness as the drain contact 23 and the source contact 24. Examples of the material of the conductor film 42 include aluminum, copper, tungsten, and the like, and the film thickness is, for example, 0.4 μm to 2.0 μm. For example, the conductor film 42 is fixed to the same potential as the source wiring 29 (for example, the ground potential). In this case, the conductor film 42 may be formed so as to be continuous with the source wiring 29.

As described above, the semiconductor device 41 according to the second embodiment can achieve the same effects as those of the semiconductor device 1 according to the first embodiment described above.
In the semiconductor device 41, the conductor film 42 can be formed in the same process as the process of forming the low voltage contacts 23 and 24. That is, the low-voltage contacts 23 and 24 and the conductor film 42 can be formed simply by changing the layout of the resist mask in the manufacturing process of the semiconductor device 41 (see the process of FIG. 4H). Therefore, since it is not necessary to add a new manufacturing process, an increase in the number of processes can be prevented.

Next, a semiconductor device 51 according to a third embodiment of the present invention will be described with reference to FIG.
FIG. 6 is a schematic plan view of a semiconductor device 51 according to the third embodiment of the present invention. The semiconductor device 51 according to the third embodiment is different from the semiconductor device 1 according to the first embodiment described above in that a high voltage wiring 52 is formed instead of the high voltage wiring 30. Other configurations are the same as those of the semiconductor device 1 described above. In FIG. 6, parts corresponding to those shown in FIG. 1 are given the same reference numerals, and descriptions thereof are omitted.

The high voltage wiring 52 is formed along the element isolation well 7 at a position away from the low voltage element region 2 by a certain distance.
Thus, even if the element isolation well 7 and the high voltage wiring 52 do not cross each other, the influence of the electric field from the high voltage wiring 52 can be reduced by the conductor film 11. In this embodiment, as in the first embodiment described above, the conductor film 11 is formed in a square ring shape in plan view. However, the conductor film 11 extends along at least the region where the high voltage wiring 52 is formed. What is necessary is just to be formed.

  More specifically, as shown in FIG. 6, when the high voltage wiring 52 is formed at a certain distance from the low voltage element region 2, the element isolation well 7 adjacent to the high voltage wiring 52 has an electric field. Susceptible to. Therefore, the conductor film 11 may be formed so as to cover at least the element isolation well 7 adjacent to the high voltage wiring 52. Thereby, occurrence of field inversion in the element isolation well 7 can be effectively suppressed.

Next, a semiconductor device 61 according to a fourth embodiment of the present invention will be described with reference to FIG.
FIG. 7 is a schematic plan view of a semiconductor device 61 according to the fourth embodiment of the present invention. The semiconductor device 61 according to the fourth embodiment is different from the semiconductor device 1 according to the first embodiment described above in that a high voltage wiring 62 is formed instead of the high voltage wiring 30. Other configurations are the same as those of the semiconductor device 1 described above. 7, parts corresponding to those shown in FIG. 1 described above are denoted by the same reference numerals, and description thereof is omitted.

The high voltage wiring 62 is formed so as to completely cover a part of the field insulating film 10 along the region where the field insulating film 10 is formed. That is, the high voltage wiring 62 is formed so as to cover the field insulating film 10 following the region where the field insulating film 10 is formed (the region where the element isolation well 7 is formed).
Also with such a configuration, the influence of the electric field from the high voltage wiring 62 can be reduced by the conductor film 11. In this embodiment, as in the first embodiment, the conductor film 11 is formed in a square ring shape in plan view, but at least the high voltage wiring 62 and the element isolation well 7 are opposed to each other in the conductor film 11. It suffices if it is formed in the region to be used. Therefore, the conductor film 11 may be formed on the field insulating film 10 immediately below the region where the high voltage wiring 62 is formed so as to face the high voltage wiring 62.

As a result, even if the high voltage wiring 62 is formed so as to completely cover a part of the field insulating film 10 along the region where the field insulating film 10 is formed, the field in the element isolation well 7 can be obtained. The occurrence of inversion can be reliably suppressed.
As mentioned above, although embodiment of this invention was described, this invention can also be implemented with another form.
For example, in the first embodiment described above, a configuration in which the conductor film 11 is formed on the center portion of the field insulating film 10 is shown. However, the conductor film 11 has a range in which field inversion in the element isolation well 7 can be suppressed. As long as it is formed so as to cover part or all of the region where the element isolation well 7 is formed, it may be formed at a position shifted in the extending direction of the high-voltage wiring 30.

  In the first to fourth embodiments described above, the configuration in which the DMOS 35 is formed in the low-voltage element region 2 as an example of the semiconductor element has been described. However, the present invention is not limited to this. Therefore, in addition to the DMOS 35, a configuration in which a non-volatile memory having a CMOS (Complementary MOS), a BJT (Bipolar Junction Transistor), an IGBT (Insulated Gate Bipolar Transistor), a JFET (Junction Field Effect Transistor), a control gate, and a floating gate is formed. It may be.

  Various circuit elements such as capacitors and resistors may be formed in the low voltage element region 2. Further, depending on the combination of these semiconductor elements and circuit elements, LSI (Large Scale Integration), SSI (Small Scale Integration), MSI (Medium Scale Integration), VLSI (Very Large Scale Integration), ULSI (Ultra-Very Large Scale). An integrated circuit such as Integration) may be configured.

In the first to fourth embodiments described above, the p-type silicon substrate 4 is formed. However, an n-type silicon substrate 4 in which the conductivity type is inverted may be formed. In this case, the conductivity type of other impurity regions is inverted.
In addition, various design changes can be made within the scope of matters described in the claims.

Examples of features extracted from this specification and drawings are shown below.
[Item 1] A low voltage element region in which a low voltage element that operates based on a low reference voltage is formed, and a high voltage in which a high voltage element that operates based on a high reference voltage higher than the low reference voltage is formed. A semiconductor substrate having a first conductivity type semiconductor layer including an element region in a surface layer portion thereof and the low voltage element region are partitioned, and the low voltage element region is electrically separated from the high voltage element region. As described above, the second conductivity type element isolation well formed in the surface layer portion of the semiconductor substrate, the field insulating film covering the surface of the element isolation well, the interlayer insulating film formed on the semiconductor substrate, and a plan view A high-voltage wiring formed on the interlayer insulating film so as to cross the low-voltage element region and electrically connected to the high-voltage element in the high-voltage element region; and High Wherein formed on the field insulating film so as to cross the-pressure line and the opposing area, and includes a conductive film, wherein fixed to the low reference voltage, the semiconductor device.

  According to this configuration, the influence of the electric field from the high voltage wiring can be reduced by the conductor film fixed to the low reference voltage. Specifically, the conductor film fixed at the low reference voltage is disposed at a position closer to the high voltage wiring than the element isolation well, so that the electric field from the high voltage wiring is effectively terminated by the conductor film. Can do. Thereby, it is possible to suppress the occurrence of field inversion due to the ions in the element isolation well being attracted to the region immediately below the field insulating film by the electric field from the high voltage wiring. As a result, it is possible to suppress the occurrence of a leak current due to the formation of a leak path that crosses the element isolation well, so that a semiconductor device that can realize more stable element isolation can be provided.

Therefore, since the high voltage wiring can be brought close to or crossed with the field insulating film, the design rule of the high voltage wiring becomes loose, and the degree of design freedom can be increased. As a result, the area of the semiconductor chip can be used effectively, and the semiconductor chip can be highly shrunk.
In the case of a high-voltage wiring connected to a high-voltage element region, the electric field generated by the high-voltage wiring is relatively larger than that of a wiring connected to a low-voltage element region. Is likely to occur. Therefore, according to this configuration, the high voltage wiring that passes near the field insulating film on the element isolation well or intersects the field insulating film is connected to the high voltage element region, so that the field inversion is relatively low. Even under conditions that tend to occur, the electric field generated by the high-voltage wiring can be effectively terminated by the conductor film.

  When the high voltage wiring intersects with the element isolation well, the distance between the high voltage wiring and the element isolation well becomes shorter than when the high voltage wiring does not intersect with the element isolation well. It becomes easy to receive, and it is easy to produce field inversion. Therefore, according to this configuration, even when the high voltage wiring intersects the element isolation well and the field inversion is relatively likely to occur, the electric field due to the high voltage wiring is effectively terminated by the conductor film. Can do. Furthermore, the semiconductor chip area can be utilized more effectively by crossing the high voltage wiring with the element isolation well.

  [Item 2] The semiconductor device further includes a low voltage wiring formed in the interlayer insulating film so as to cross the field insulating film in a plan view and electrically connected to the low voltage element in the low voltage element region. 2. The semiconductor device according to claim 1, wherein the conductor film is formed on the field insulating film so as to cross a region of the field insulating film facing the low voltage wiring.

  [Item 3] The element isolation well includes an intersection that intersects the high-voltage wiring in a plan view, and the length of the conductor film with respect to a direction in which the element isolation well intersects the high-voltage wiring at the intersection. Item 3. The semiconductor device according to Item 1 or 2, wherein is longer than a length of the intersection. According to this configuration, the conductor film and the high-voltage wiring can be reliably crossed even when the high-voltage wiring is misaligned (alignment misalignment) along the direction in which the element isolation well extends when the high-voltage wiring is formed. Can do. Therefore, it is possible to effectively suppress the occurrence of field inversion in the element isolation well immediately below the field insulating film at the intersection.

[Item 4] The element isolation well includes an intersection that intersects the high-voltage wiring in a plan view, and the length of the conductor film with respect to a direction in which the high-voltage wiring intersects the element isolation well at the intersection. The semiconductor device according to any one of Items 1 to 3, wherein is shorter than a length of the intersection.
[Item 5] The element isolation well includes an intersection that intersects with the high voltage wiring in a plan view, and the length of the conductor film with respect to a direction in which the high voltage wiring intersects the element isolation well at the intersection. The semiconductor device according to any one of Items 1 to 3, wherein is equal to or greater than a length of the intersection. According to this configuration, the element isolation well can be completely covered with the conductor film via the field insulating film in the extending direction of the high voltage wiring. As a result, the occurrence of field inversion in the element isolation well immediately below the field insulating film can be effectively suppressed.

  [Item 6] The element isolation well is formed in a strip shape along the periphery of the low voltage element region, the field insulating film is formed in a strip shape along the periphery of the low voltage element region, and the conductor Item 6. The semiconductor device according to any one of Items 1 to 5, wherein the film is formed in a band shape along the periphery of the low-voltage element region. According to this configuration, the conductor film is necessarily disposed immediately above the element isolation well in the region on the field insulating film. Therefore, the electric field caused by the high voltage wiring can be satisfactorily terminated by the conductor film regardless of the positional relationship of the high voltage wiring with respect to the element isolation well. As a result, the occurrence of field inversion in the element isolation well can be suppressed regardless of the wiring rule of the high voltage wiring, and the degree of freedom in the design rule can be further increased.

[Item 7] The element isolation well is formed in an annular shape surrounding the low-voltage element region, the field insulating film is formed in an annular shape surrounding the low-voltage element region, and the conductor film is Item 7. The semiconductor device according to any one of Items 1 to 6, which is formed in an annular shape surrounding the low-voltage element region.
[Item 8] In any one of Items 1 to 7, a MOS transistor is formed as the low voltage element in the low voltage element region, and the conductor film has the same potential as the source of the MOS transistor. The semiconductor device according to claim 1.

  [Item 9] The semiconductor device according to item 8, wherein the conductor film is formed of the same material as the gate in the same layer as the gate of the MOS transistor. According to this configuration, the conductor film can be formed in the same step as the step of forming the gate of the MOS transistor. In other words, the gate of the MOS transistor and the conductor film can be formed simultaneously only by changing the layout of the resist mask in the manufacturing process of the semiconductor device. Therefore, since it is not necessary to add a new manufacturing process, an increase in the number of processes can be prevented.

[Item 10] The semiconductor device according to item 9, wherein the gate and the conductor film are made of polysilicon.
[Item 11] The semiconductor device according to any one of Items 1 to 10, wherein the interlayer insulating film includes a wiring layer, and the conductor film is formed of a wiring film disposed in the wiring layer.

1 semiconductor device 2 low-voltage device region 3 the high voltage device region 4 silicon substrate 5 n ^- -type epitaxial layer 7 isolation well 10 field insulating film 11 conductive film 12 field insulating film 21 first interlayer insulation film 25 second interlayer insulation film 27 Third interlayer insulating film 30 High voltage wiring 31 Intersection 35 DMOS
36 Fourth interlayer insulating film 41 Semiconductor device 42 Conductor film 45 Epitaxial substrate 51 Semiconductor device 52 High voltage wiring 61 Semiconductor device 62 High voltage wiring

Claims (17)

A semiconductor layer including an element region having a semiconductor element;
An element isolation well formed in a surface layer portion of the semiconductor layer so as to partition the element region;
A field insulating film formed on the semiconductor layer so as to cover the element isolation well;
An interlayer insulating film formed on the semiconductor layer;
Wiring formed on the interlayer insulating film so as to cross the element region in plan view;
A semiconductor device, comprising: a conductor film formed on the field insulating film so as to cross a region facing the wiring in the field insulating film and having a width equal to or smaller than a width of the element isolation well. The element region includes a low voltage element region in which a low voltage element that operates based on a low reference voltage is formed, and a high voltage element that operates on a basis of a high reference voltage that is higher than the low reference voltage. Including the voltage element region,
2. The device isolation well according to claim 1, wherein the device isolation well partitions the low voltage device region and the high voltage device region so as to electrically isolate the low voltage device region and the high voltage device region from each other. Semiconductor device.   The semiconductor device according to claim 2, wherein the conductor film is fixed to the low reference voltage. The wiring includes a low voltage wiring electrically connected to the low voltage element,
The semiconductor device according to claim 2, wherein the conductor film crosses a region facing the low-voltage wiring in the field insulating film. The wiring includes a high voltage wiring electrically connected to the high voltage element,
The semiconductor device according to claim 2, wherein the conductor film crosses a region facing the high-voltage wiring in the field insulating film. In the low voltage element region, a MOS transistor as the low voltage element is formed,
The semiconductor device according to claim 2, wherein the conductor film has the same potential as the source of the MOS transistor.   The semiconductor device according to claim 6, wherein the conductor film is formed of a material similar to that of the gate of the MOS transistor.   The semiconductor device according to claim 7, wherein the gate is made of polysilicon. The wiring includes an intersection that intersects the element isolation well in plan view,
The semiconductor device according to claim 1, wherein a length of the conductor film is equal to or less than a length of the intersecting portion with respect to a direction in which the wiring intersects the element isolation well at the intersecting portion. The wiring includes an intersection that intersects the element isolation well in plan view,
The semiconductor device according to claim 1, wherein a length of the conductor film is equal to or longer than a length of the intersecting portion with respect to a direction in which the element isolation well intersects the wiring at the intersecting portion. The element isolation well is formed in a strip shape along the periphery of the element region;
The field insulating film is formed in a strip shape along the periphery of the element region,
The semiconductor device according to claim 1, wherein the conductor film is formed in a strip shape along a periphery of the element region. The element isolation well is formed in an annular shape surrounding the element region;
The field insulating film is formed in an annular shape surrounding the element region;
The semiconductor device according to claim 1, wherein the conductor film is formed in an annular shape surrounding the element region. The interlayer insulating film includes a wiring layer;
The semiconductor device according to claim 1, wherein the conductor film is formed of a wiring film disposed in the wiring layer. A semiconductor layer including a low voltage element region having a low voltage element operating at a low reference voltage, and a high voltage element region having a high voltage element operating at a high reference voltage higher than the low reference voltage;
An element isolation well formed in a surface layer portion of the semiconductor layer so as to electrically isolate the low voltage element region and the high voltage element region;
A field insulating film formed on the semiconductor layer so as to cover the element isolation well;
An interlayer insulating film formed on the semiconductor layer;
A wiring formed on the interlayer insulating film and electrically connected to the high voltage element region;
And a conductor film formed between the interlayer insulating film and the field insulating film and facing the element isolation well with the field insulating film interposed therebetween. The low voltage element includes a MOS transistor having a gate electrode;
The semiconductor device according to claim 14, wherein the conductor film is formed of a material similar to that of the gate electrode of the MOS transistor. A second field insulating film formed on the semiconductor layer in the low-voltage element region;
The conductor film is formed on the field insulating film in a region outside the low voltage element region,
The semiconductor device according to claim 15, wherein the gate electrode is formed on the second field insulating film in the low-voltage element region. The semiconductor device according to claim 14, wherein the conductor film is in contact with the field insulating film.

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