JP2018008307A5 - - Google Patents

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Publication number
JP2018008307A5
JP2018008307A5 JP2016140651A JP2016140651A JP2018008307A5 JP 2018008307 A5 JP2018008307 A5 JP 2018008307A5 JP 2016140651 A JP2016140651 A JP 2016140651A JP 2016140651 A JP2016140651 A JP 2016140651A JP 2018008307 A5 JP2018008307 A5 JP 2018008307A5
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JP
Japan
Prior art keywords
processing
detection
mark
processed
processing apparatus
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Application number
JP2016140651A
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English (en)
Japanese (ja)
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JP2018008307A (ja
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Priority to JP2016140651A priority Critical patent/JP2018008307A/ja
Priority claimed from JP2016140651A external-priority patent/JP2018008307A/ja
Publication of JP2018008307A publication Critical patent/JP2018008307A/ja
Publication of JP2018008307A5 publication Critical patent/JP2018008307A5/ja
Pending legal-status Critical Current

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JP2016140651A 2016-07-15 2016-07-15 光加工装置及び光加工物の生産方法 Pending JP2018008307A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016140651A JP2018008307A (ja) 2016-07-15 2016-07-15 光加工装置及び光加工物の生産方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016140651A JP2018008307A (ja) 2016-07-15 2016-07-15 光加工装置及び光加工物の生産方法

Publications (2)

Publication Number Publication Date
JP2018008307A JP2018008307A (ja) 2018-01-18
JP2018008307A5 true JP2018008307A5 (enExample) 2019-03-28

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ID=60994775

Family Applications (1)

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JP2016140651A Pending JP2018008307A (ja) 2016-07-15 2016-07-15 光加工装置及び光加工物の生産方法

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JP (1) JP2018008307A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019150480A1 (ja) 2018-01-31 2019-08-08 株式会社ニコン 加工システム、及び、加工方法
CN109604839B (zh) * 2018-12-28 2020-11-03 湖北山色新材料科技有限公司 一种具有调节功能的软瓷切割装置
CN110560925B (zh) * 2019-08-27 2022-01-21 江苏华风电子有限公司 一种通过光照自动定位并割膜装置及工艺
WO2021161422A1 (ja) * 2020-02-12 2021-08-19 株式会社ニコン 加工システム及び載置装置
JP7523932B2 (ja) 2020-03-30 2024-07-29 株式会社ディスコ レーザー加工装置
WO2021220456A1 (ja) * 2020-04-30 2021-11-04 株式会社ニコン 加工システム

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3863389B2 (ja) * 2001-05-31 2006-12-27 三菱電機株式会社 レーザ加工方法および装置
JP2004216436A (ja) * 2003-01-16 2004-08-05 Canon Sales Co Inc レーザ加工方法、レーザ加工位置の補正方法及びレーザ加工装置
JP2005088045A (ja) * 2003-09-17 2005-04-07 Sumitomo Heavy Ind Ltd レーザ穴あけ方法及び装置
JP6048124B2 (ja) * 2012-12-21 2016-12-21 三菱マテリアル株式会社 レーザ加工装置

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