JP2017530554A - レーザー活性媒質及びその製造方法 - Google Patents
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Abstract
Description
Claims (14)
- 固体レーザーシステム(100、200、300、400、500、600、700)用のレーザー活性媒質(2、12、12’、12”)であって、
光利得材料(1、1’、1”)と、
特に200nmから4000nmの波長範囲にわたって好ましくは1cm-1未満の吸収係数を有する透明なヒートシンク(5、15)であって、特に149W/m*K以上の高い熱伝導率を有するヒートシンク(5、15)と
を含み、
前記光利得材料(1、1’、1”)及び前記ヒートシンク(5、15)は1nm未満の二乗平均平方根(RMS)表面粗さを示し、
前記光利得材料(1、1’、1”)は直接接合によって前記透明なヒートシンク(5、15)に取り付けられる、レーザー活性媒質(2、12、12’、12”)。 - 前記レーザー活性媒質(2、12、12’、12”)は、高反射率の薄膜積層体(1S、1S’)を更に含み、前記光利得材料(1,1’、1”)は、前記高反射率の薄膜積層体(1S、1S’)と結合される、請求項1に記載のレーザー活性媒質(2、12、12’、12”)。
- 前記光利得材料(1、1’、1”)は半導体構造体(1A、1A’)又はドープレーザー結晶(1A”)を含む、請求項1又は2に記載のレーザー活性媒質(2、12、12’、12”)。
- 前記半導体構造体は、交互の高屈折率材料及び低屈折率材料から成る高反射率の積層体(1S、1S’)と半導体ベースの光利得材料(1,1’、1”)とを1つの連続構造物内で結合したモノリシックである、請求項3に記載のレーザー活性媒質(2、12、12’、12”)。
- 前記半導体ベースの光利得材料(1、1’、1”)は半導体量子構造を含む、請求項3又は4に記載のレーザー活性媒質(2、12、12’、12”)。
- 前記活性素子は、高反射率ミラーを生じる交互の高屈折率材料及び低屈折率材料から成る多層積層体と結合されたドープレーザー結晶(1A”)を含む複合構造を含む、請求項3に記載のレーザー活性媒質(2、12、12’、12”)。
- 前記ドープレーザー結晶(1A”)は、Nd、Yb、Er、Tm又はそれらの組み合わせをドープしたYAG、ネオジムドープバナジウム酸塩、ネオジムドープタングステン酸塩、イッテルビウムドープタングステン酸塩、チタンドープサファイア、クロムドープAl2O3、クロムドープカルコゲニドのうちの少なくとも1つを含む、請求項3及び6のいずれか1項に記載のレーザー活性媒質(2、12、12’、12”)。
- 前記光利得材料(1、1’、1”)の前記透明なヒートシンク(5、15)への直接接合は、ファンデルワールス力及び/又は好ましくは共有結合を含む、請求項1から7のいずれか1項に記載のレーザー活性媒質(2、12、12’、12”)。
- 前記ヒートシンク(5、15)は、透明であり且つ高い熱伝導性の材料、例えば、200nmから4000nmの波長範囲での可視及びIR動作のためのダイヤモンド、SiC、及びAlN、又は1200〜4000nmの波長範囲での近赤外線及び中赤外線用途のための単結晶シリコンを含む、請求項1から8のいずれか1項に記載のレーザー活性媒質(2、12、12’、12”)。
- 半導体ベースの光利得材料(1、1’、1”)と、ヒートシンク(5、15)であって、特に149W/m*K以上の高い熱伝導率を有し且つ特に200nmから4000nmの波長範囲にわたって好ましくは1cm-1未満の吸収係数を有する光学的に透明なヒートシンク(5、15)とを含むレーザー活性媒質(2、12、12’、12”)を製造する方法であって、
1nm未満の二乗平均平方根(RMS)表面粗さを有する半導体ベースの光利得材料(1、1’、1”)を第1基板上に提供するステップであって、特に前記第1基板はGaAs、InP、GaN、AlN、Si又はGeを含むスップと、
1nm未満のRMS粗さを有する研磨された表面を有するヒートシンク(5、15)を提供するステップと、
前記光利得材料(1、1’、1”)を前記第1基板から取り外すステップと、
直接接合によって前記光利得材料(1、1’、1”)を前記ヒートシンク(5、15)に取り付けるステップと
を含む方法。 - ドープレーザー結晶をベースとし、光利得材料(1、1’、1”)としての前記ドープレーザー結晶(1A”)と、ヒートシンク(5、15)であって、特に148W/m*K以上の高い熱伝導率を示し且つ特に200nmから4000nmの波長範囲にわたって好ましくは1cm-1未満の吸収係数を有する光学的に透明なヒートシンク(5、15)とを含むレーザー活性媒質(2、12、12’、12”)を製造する方法であって、
前記ドープレーザー結晶に1nmRMS未満の表面粗さを提供するステップと、
前記透明なヒートシンク(5、15)に1nmRMS未満の表面粗さを提供するステップと、
直接接合によって前記レーザー結晶ベースの光利得材料(1、1’、1”)を前記ヒートシンク(5、15)に取り付けるステップと
を含む方法。 - 前記レーザー活性媒質(2、12、12’、12”)は高反射率の薄膜積層体(1S、1S’)を更に備え、前記光利得材料(1、1’、1”)は前記高反射率の薄膜積層体(1S、1S’)と結合され、前記光利得材料(1、1’、1”)は半導体構造体(1A、1A’)又はドープレーザー結晶(1A”)を含む、請求項10に記載の方法。
- 前記光利得材料(1、1’、1”)はファンデルワールス力及び/又は好ましくは共有結合によって前記ヒートシンク(5、15)に直接取り付けられる、請求項10から12のいずれか1項に記載の方法。
- レーザーフィードバックのための少なくとも2つのミラー(11、11U、11L)と、請求項1から9の少なくとも1項に記載のレーザー活性媒質(2、12、12’、12”)と、前記レーザー活性媒質(2、12、12’、12”)に入射するポンプビームを供給するポンプ光源とを含む、固体レーザーシステム。
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DE102015216655A1 (de) * | 2015-09-01 | 2017-03-02 | Trumpf Laser Gmbh | Plattenförmiger laseraktiver Festkörper mit einem kristallinen hochreflektierenden Spiegel und Verfahren zu seiner Herstellung |
EP3309913A1 (en) * | 2016-10-17 | 2018-04-18 | Universität Stuttgart | Radiation field amplifier system |
EP3309914A1 (en) | 2016-10-17 | 2018-04-18 | Universität Stuttgart | Radiation field amplifier system |
CN112753145A (zh) * | 2018-09-19 | 2021-05-04 | 新墨西哥大学雨林创新 | 高功率光泵浦半导体盘形激光器的宽带有源反射镜架构 |
WO2022002777A1 (en) | 2020-07-01 | 2022-01-06 | Twenty-One Semiconductors Gmbh | Back-pumped semiconductor membrane laser |
EP4203205A1 (en) | 2021-12-22 | 2023-06-28 | Fyzikální ústav AV CR, v. v. i. | A laser amplification module for a solid-state laser system and a method for manufacturing thereof |
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DE10038006A1 (de) | 2000-08-04 | 2002-02-21 | Haas Laser Gmbh & Co Kg | Laserverstärkeranordnung |
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US6910820B2 (en) * | 2003-07-25 | 2005-06-28 | 3M Innovative Properties Company | Apparatus and method for handling linerless label tape |
US20050074040A1 (en) * | 2003-10-03 | 2005-04-07 | Spence David E. | Diamond cooled laser gain assembly |
US7485544B2 (en) * | 2006-08-02 | 2009-02-03 | Micron Technology, Inc. | Strained semiconductor, devices and systems and methods of formation |
US7924895B2 (en) * | 2007-05-23 | 2011-04-12 | Bae Systems Information And Electronic Systems Integration Inc. | Monolithic diode-pumped laser cavity |
CN102684072A (zh) | 2012-05-30 | 2012-09-19 | 北京工业大学 | 混合集成激光器及其制备方法 |
DE102013211977B3 (de) * | 2013-06-25 | 2014-10-09 | Trumpf Laser Gmbh + Co. Kg | Festkörperlaseranordnung |
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JPH0799360A (ja) * | 1993-05-18 | 1995-04-11 | Matsushita Electric Ind Co Ltd | レーザ装置 |
US5796766A (en) * | 1994-08-23 | 1998-08-18 | Laser Power Corporation | Optically transparent heat sink for longitudinally cooling an element in a laser |
JPH114030A (ja) * | 1997-06-12 | 1999-01-06 | Nec Corp | 励起型固体レーザ装置 |
US20050190810A1 (en) * | 2004-02-27 | 2005-09-01 | Stuart Butterworth | Contact-bonded optically pumped semiconductor laser structure |
JP2005327997A (ja) * | 2004-05-17 | 2005-11-24 | Akio Ikesue | 複合レーザー素子及びその素子を用いたレーザー発振器 |
WO2006020925A2 (en) * | 2004-08-12 | 2006-02-23 | Spectra Physics, Inc. | High thermal-conductivity materials for a cooled laser gain assembly |
JP2013517631A (ja) * | 2010-01-18 | 2013-05-16 | エレメント シックス リミテッド | Cvd単結晶ダイヤモンド材料 |
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WO2016037870A1 (en) | 2016-03-17 |
US10559936B2 (en) | 2020-02-11 |
EP2996211A1 (en) | 2016-03-16 |
CN107112715B (zh) | 2019-08-16 |
CN107112715A (zh) | 2017-08-29 |
US20170256904A1 (en) | 2017-09-07 |
EP2996211B1 (en) | 2021-02-17 |
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