JP2017516944A5 - - Google Patents
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- Publication number
- JP2017516944A5 JP2017516944A5 JP2016569640A JP2016569640A JP2017516944A5 JP 2017516944 A5 JP2017516944 A5 JP 2017516944A5 JP 2016569640 A JP2016569640 A JP 2016569640A JP 2016569640 A JP2016569640 A JP 2016569640A JP 2017516944 A5 JP2017516944 A5 JP 2017516944A5
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- supply
- supply chamber
- stage
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims 13
- 238000000034 method Methods 0.000 claims 5
- 238000001514 detection method Methods 0.000 claims 2
- 238000001914 filtration Methods 0.000 claims 2
- 230000001276 controlling effect Effects 0.000 claims 1
- 230000001105 regulatory Effects 0.000 claims 1
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201462004117P | 2014-05-28 | 2014-05-28 | |
US62/004,117 | 2014-05-28 | ||
PCT/US2015/032817 WO2015184057A1 (en) | 2014-05-28 | 2015-05-28 | System and method for operation of a pump with feed and dispense sensors, filtration and dispense confirmation, and reduced pressure priming of filter |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2017516944A JP2017516944A (ja) | 2017-06-22 |
JP2017516944A5 true JP2017516944A5 (de) | 2018-07-05 |
JP6644712B2 JP6644712B2 (ja) | 2020-02-12 |
Family
ID=53433273
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016569640A Active JP6644712B2 (ja) | 2014-05-28 | 2015-05-28 | 供給および分注センサー、濾過および分注確認、ならびに濾過器の減圧プライミングを有するポンプの動作のためのシステムおよび方法 |
JP2016569637A Active JP6543646B2 (ja) | 2014-05-28 | 2015-05-28 | 高精度のシステムおよび用途におけるモーター駆動コンポーネントのためのバックラッシュ防止メカニズム |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016569637A Active JP6543646B2 (ja) | 2014-05-28 | 2015-05-28 | 高精度のシステムおよび用途におけるモーター駆動コンポーネントのためのバックラッシュ防止メカニズム |
Country Status (8)
Country | Link |
---|---|
US (2) | US20170114879A1 (de) |
EP (2) | EP3149329B1 (de) |
JP (2) | JP6644712B2 (de) |
KR (2) | KR102141271B1 (de) |
CN (2) | CN106460811A (de) |
SG (2) | SG11201609910XA (de) |
TW (2) | TWI664350B (de) |
WO (2) | WO2015184056A1 (de) |
Families Citing this family (20)
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US10969805B2 (en) | 2013-02-11 | 2021-04-06 | Graco Minnesota Inc. | Paint sprayer distributed control and output volume monitoring architectures |
US11124406B1 (en) * | 2014-07-13 | 2021-09-21 | Sestra Systems, Inc. | System and method for piston detection in a metering mechanism for use with beverage dispensing system |
FR3049993B1 (fr) * | 2016-04-07 | 2018-04-20 | Dosatron International | Mecanisme de dosage d'une pompe, procedes de verrouillage et de deverrouillage d'un tel mecanisme |
US10519942B2 (en) | 2016-07-28 | 2019-12-31 | Accriva Diagnostics, Inc. | Methods of operating a pump to reduce or eliminate pump backlash errors |
US10570896B1 (en) * | 2017-04-28 | 2020-02-25 | Vp Sales And Company Lp | Packing nut lock |
US10792697B2 (en) * | 2017-05-17 | 2020-10-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Drippage prevention system and method of operating same |
JP6920133B2 (ja) * | 2017-08-23 | 2021-08-18 | 株式会社Screenホールディングス | 処理液供給装置 |
JP6920923B2 (ja) * | 2017-08-25 | 2021-08-18 | 株式会社Screenホールディングス | ポンプ装置および基板処理装置 |
KR101933062B1 (ko) | 2017-09-19 | 2019-03-15 | 서강대학교산학협력단 | 이송대상유체의 압력을 측정하는 펌프, 이를 이용하는 유체운송 시스템과 그 시스템의 동작 방법 |
US10663865B2 (en) * | 2018-06-29 | 2020-05-26 | Taiwan Semiconductor Manufacturing Co., Ltd. | Photoresist recycling apparatus |
EP3856420B1 (de) * | 2018-09-24 | 2023-07-05 | Graco Minnesota Inc. | Kontrolle der ausgabe eines lackzerstäubers sowie strukturen zur überwachung des ausgegebenen volumens |
BR102018072471B1 (pt) * | 2018-10-31 | 2023-01-03 | Drausuisse Brasil Comércio E Locação De Unidades Hidráulicas Inteligentes S.A. | Unidade hidráulica com acionamento combinado por via pneumática e servo motor e seu uso |
KR102115101B1 (ko) * | 2018-11-01 | 2020-05-26 | 강현석 | Iot기반 지능형 원격관리 서비스 시스템 |
WO2020097700A1 (pt) * | 2018-11-14 | 2020-05-22 | Drausuisse Brasil Comercio E Locacao De Unidades Hidraulicas Inteligentes S.A. | Unidade hidráulica com bombas paralelas ligadas a servo motor e seu uso |
CN111219248A (zh) * | 2018-11-27 | 2020-06-02 | 罗伯特·博世有限公司 | 检测系统中过滤器的存在的方法 |
JP7193376B2 (ja) * | 2019-02-22 | 2022-12-20 | Towa株式会社 | 樹脂成型装置及び樹脂成型品の製造方法 |
IT201900007779A1 (it) * | 2019-05-31 | 2020-12-01 | Corob Spa | Metodo di controllo della dispensazione di prodotti fluidi |
US11260669B2 (en) | 2019-10-01 | 2022-03-01 | Hewlett-Packard Development Company, L.P. | Gas purger anomaly condition indication |
TWI768379B (zh) * | 2020-06-19 | 2022-06-21 | 緯創資通股份有限公司 | 壓力緩衝模組及生物培養裝置 |
JP2022161268A (ja) * | 2021-04-08 | 2022-10-21 | 株式会社Screenホールディングス | 処理液流通方法、及び、処理液供給装置 |
Family Cites Families (33)
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US4896552A (en) * | 1988-01-19 | 1990-01-30 | Ballscrews & Actuators Co., Inc. | Ballscrew follower and method of making and operating the same |
US4954032A (en) * | 1989-11-13 | 1990-09-04 | Windfred M. Berg, Inc. | Anti-backlash nut |
US5839321A (en) * | 1997-05-16 | 1998-11-24 | Ball Screw & Actuators Co. | Backlash compensating assembly |
US6142032A (en) * | 1998-01-30 | 2000-11-07 | Creager; Wesley Carl | Adjustable anti-backlash nut assembly |
WO1999063224A1 (en) * | 1998-06-02 | 1999-12-09 | Bayer Corporation | Precision pumping device |
US7029238B1 (en) * | 1998-11-23 | 2006-04-18 | Mykrolis Corporation | Pump controller for precision pumping apparatus |
CN1590761A (zh) * | 1998-11-23 | 2005-03-09 | 米利波尔公司 | 用于精密泵设备的泵调节器 |
US8172546B2 (en) * | 1998-11-23 | 2012-05-08 | Entegris, Inc. | System and method for correcting for pressure variations using a motor |
US6131478A (en) * | 1999-01-07 | 2000-10-17 | Kerk Motion Products, Inc. | Anti-backlash nut assembly |
JP2004143960A (ja) * | 2002-10-22 | 2004-05-20 | Smc Corp | ポンプ装置 |
JP4311620B2 (ja) * | 2003-05-26 | 2009-08-12 | ケーエスエス株式会社 | バックラッシュ除去ナット |
JP4206308B2 (ja) | 2003-08-01 | 2009-01-07 | 株式会社日立ハイテクノロジーズ | 液体クロマトグラフ用ポンプ |
US7328839B2 (en) * | 2004-10-21 | 2008-02-12 | International Business Machines Corporation | User configurable alerts for ATM transactions |
JP5079516B2 (ja) | 2004-11-23 | 2012-11-21 | インテグリス・インコーポレーテッド | 可変定位置ディスペンスシステムのためのシステムおよび方法 |
DE102005017240A1 (de) * | 2005-04-14 | 2006-10-19 | Alldos Eichler Gmbh | Verfahren und Vorrichtung zur Überwachung eines mittels einer Pumpe geförderten Fluidstromes |
KR101262410B1 (ko) | 2005-04-25 | 2013-05-08 | 엔테그리스, 아이엔씨. | 미소 기포를 감소시키도록 유체를 처리하는 방법 및 장치 |
US7850431B2 (en) * | 2005-12-02 | 2010-12-14 | Entegris, Inc. | System and method for control of fluid pressure |
CN102705213A (zh) * | 2005-12-02 | 2012-10-03 | 恩特格里公司 | 使用电机校正压力变化的系统和方法 |
KR101281210B1 (ko) | 2005-12-02 | 2013-07-02 | 엔테그리스, 아이엔씨. | 펌프에서의 밸브 시퀀싱 시스템 및 방법 |
US7878765B2 (en) * | 2005-12-02 | 2011-02-01 | Entegris, Inc. | System and method for monitoring operation of a pump |
CN102705209B (zh) | 2005-12-02 | 2015-09-30 | 恩特格里公司 | 用于泵中压力补偿的系统和方法 |
JP4845969B2 (ja) | 2005-12-02 | 2011-12-28 | エンテグリース,インコーポレイテッド | ポンプ制御装置を結合する入出力システム、方法、および装置 |
US7842010B2 (en) * | 2005-12-05 | 2010-11-30 | Medrad, Inc. | Pneumatically-operated thrombectomy catheter deployment system |
JP2007158663A (ja) * | 2005-12-05 | 2007-06-21 | Ricoh Co Ltd | アナログ画像信号のオフセット調整方法 |
TWI402423B (zh) | 2006-02-28 | 2013-07-21 | Entegris Inc | 用於一幫浦操作之系統及方法 |
US7443483B2 (en) | 2006-08-11 | 2008-10-28 | Entegris, Inc. | Systems and methods for fluid flow control in an immersion lithography system |
US7992456B2 (en) * | 2007-12-10 | 2011-08-09 | Pacific Bearing Company | Anti-backlash nut, lead screw assembly and method |
JP5419008B2 (ja) * | 2009-04-28 | 2014-02-19 | Smc株式会社 | ポンプ装置 |
TWI563351B (en) | 2010-10-20 | 2016-12-21 | Entegris Inc | Method and system for pump priming |
JP6325442B2 (ja) | 2011-08-19 | 2018-05-16 | インテグリス・インコーポレーテッド | 流体中の空気を検出するシステムおよび方法 |
US9303742B2 (en) * | 2011-11-28 | 2016-04-05 | Pacific Bearing Company | Inverted spline rail system |
US20140271264A1 (en) * | 2013-03-15 | 2014-09-18 | Anthony Florindi | Piston pump drive train anti-backlash |
CN203488656U (zh) * | 2013-08-19 | 2014-03-19 | 高明铁企业股份有限公司 | 可减少背隙导螺杆结构 |
-
2015
- 2015-05-28 JP JP2016569640A patent/JP6644712B2/ja active Active
- 2015-05-28 KR KR1020167036399A patent/KR102141271B1/ko active IP Right Grant
- 2015-05-28 TW TW104117224A patent/TWI664350B/zh active
- 2015-05-28 CN CN201580035323.7A patent/CN106460811A/zh active Pending
- 2015-05-28 US US15/314,469 patent/US20170114879A1/en not_active Abandoned
- 2015-05-28 EP EP15732082.1A patent/EP3149329B1/de active Active
- 2015-05-28 KR KR1020167036398A patent/KR102141270B1/ko active IP Right Grant
- 2015-05-28 US US15/314,461 patent/US20170107982A1/en not_active Abandoned
- 2015-05-28 CN CN201580033267.3A patent/CN106662083B/zh active Active
- 2015-05-28 WO PCT/US2015/032816 patent/WO2015184056A1/en active Application Filing
- 2015-05-28 SG SG11201609910XA patent/SG11201609910XA/en unknown
- 2015-05-28 EP EP15729984.3A patent/EP3149328B1/de active Active
- 2015-05-28 TW TW104117225A patent/TWI670417B/zh active
- 2015-05-28 SG SG10201810172QA patent/SG10201810172QA/en unknown
- 2015-05-28 WO PCT/US2015/032817 patent/WO2015184057A1/en active Application Filing
- 2015-05-28 JP JP2016569637A patent/JP6543646B2/ja active Active
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