JP2017516297A5 - - Google Patents
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- Publication number
- JP2017516297A5 JP2017516297A5 JP2016560655A JP2016560655A JP2017516297A5 JP 2017516297 A5 JP2017516297 A5 JP 2017516297A5 JP 2016560655 A JP2016560655 A JP 2016560655A JP 2016560655 A JP2016560655 A JP 2016560655A JP 2017516297 A5 JP2017516297 A5 JP 2017516297A5
- Authority
- JP
- Japan
- Prior art keywords
- support
- support system
- base member
- support member
- proximal end
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims 7
- 239000003870 refractory metal Substances 0.000 claims 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 239000011733 molybdenum Substances 0.000 claims 1
- 229910052758 niobium Inorganic materials 0.000 claims 1
- 239000010955 niobium Substances 0.000 claims 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims 1
- 229910052702 rhenium Inorganic materials 0.000 claims 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/247,427 | 2014-04-08 | ||
| US14/247,427 US9719629B2 (en) | 2014-04-08 | 2014-04-08 | Supporting system for a heating element and heating system |
| PCT/EP2015/000144 WO2015154835A1 (en) | 2014-04-08 | 2015-01-27 | Supporting system for a heating element |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017516297A JP2017516297A (ja) | 2017-06-15 |
| JP2017516297A5 true JP2017516297A5 (enExample) | 2018-01-18 |
| JP6423893B2 JP6423893B2 (ja) | 2018-11-14 |
Family
ID=52473857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016560655A Active JP6423893B2 (ja) | 2014-04-08 | 2015-01-27 | 加熱エレメントのための支持システム |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9719629B2 (enExample) |
| EP (1) | EP3130003B1 (enExample) |
| JP (1) | JP6423893B2 (enExample) |
| KR (1) | KR102276520B1 (enExample) |
| CN (1) | CN106165080B (enExample) |
| SG (1) | SG11201607804TA (enExample) |
| TW (1) | TWI623965B (enExample) |
| WO (1) | WO2015154835A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101749116B1 (ko) * | 2015-05-08 | 2017-06-20 | 엘지전자 주식회사 | 조리기기 |
| JP1581406S (enExample) * | 2016-10-14 | 2017-07-18 | ||
| USD921431S1 (en) * | 2019-04-01 | 2021-06-08 | Veeco Instruments, Inc. | Multi-filament heater assembly |
| JP1684469S (ja) * | 2020-09-24 | 2021-05-10 | 基板処理装置用天井ヒータ | |
| CN116356292B (zh) * | 2021-12-27 | 2025-07-08 | 南昌中微半导体设备有限公司 | 一种加热器组件及气相沉积设备 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11354260A (ja) | 1998-06-11 | 1999-12-24 | Shin Etsu Chem Co Ltd | 複層セラミックスヒータ |
| JP4398064B2 (ja) * | 2000-05-12 | 2010-01-13 | 日本発條株式会社 | 加熱装置 |
| US6506252B2 (en) * | 2001-02-07 | 2003-01-14 | Emcore Corporation | Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor deposition |
| WO2006060134A2 (en) * | 2004-11-15 | 2006-06-08 | Cree, Inc. | Restricted radiated heating assembly for high temperature processing |
| US7573004B1 (en) * | 2006-02-21 | 2009-08-11 | Structured Materials Inc. | Filament support arrangement for substrate heating apparatus |
| DE602007005954D1 (de) * | 2007-12-18 | 2010-05-27 | Nestec Sa | Gerät zur Herstellung eines Getränks mit einem verstellbarem Verschlussmechanismus |
| DE102009023472B4 (de) * | 2009-06-02 | 2014-10-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Beschichtungsanlage und Beschichtungsverfahren |
| CN102498558B (zh) * | 2009-08-07 | 2016-03-30 | 应用材料公司 | 将基板放置在处理腔室中的设备和让处理腔室中的基板朝向中心的方法 |
| JP5480723B2 (ja) * | 2010-06-02 | 2014-04-23 | 助川電気工業株式会社 | 熱電子放出用フィラメントサポート |
| JP5897827B2 (ja) * | 2010-06-25 | 2016-03-30 | サンドビック サーマル プロセス，インコーポレイティド | 加熱エレメント・コイルの支持構造 |
| US9594724B2 (en) * | 2012-08-09 | 2017-03-14 | International Business Machines Corporation | Vector register file |
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2014
- 2014-04-08 US US14/247,427 patent/US9719629B2/en active Active
-
2015
- 2015-01-21 TW TW104101883A patent/TWI623965B/zh active
- 2015-01-27 KR KR1020167026884A patent/KR102276520B1/ko active Active
- 2015-01-27 SG SG11201607804TA patent/SG11201607804TA/en unknown
- 2015-01-27 WO PCT/EP2015/000144 patent/WO2015154835A1/en not_active Ceased
- 2015-01-27 EP EP15704707.7A patent/EP3130003B1/en active Active
- 2015-01-27 CN CN201580018462.9A patent/CN106165080B/zh active Active
- 2015-01-27 JP JP2016560655A patent/JP6423893B2/ja active Active