JP2017510748A5 - - Google Patents
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- Publication number
- JP2017510748A5 JP2017510748A5 JP2016559888A JP2016559888A JP2017510748A5 JP 2017510748 A5 JP2017510748 A5 JP 2017510748A5 JP 2016559888 A JP2016559888 A JP 2016559888A JP 2016559888 A JP2016559888 A JP 2016559888A JP 2017510748 A5 JP2017510748 A5 JP 2017510748A5
- Authority
- JP
- Japan
- Prior art keywords
- getter
- cartridge
- casing
- linear center
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ITMI20140595 | 2014-04-03 | ||
| ITMI2014A000595 | 2014-04-03 | ||
| PCT/IB2015/052174 WO2015150974A1 (en) | 2014-04-03 | 2015-03-25 | Getter pump |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017510748A JP2017510748A (ja) | 2017-04-13 |
| JP2017510748A5 true JP2017510748A5 (cg-RX-API-DMAC7.html) | 2018-03-08 |
| JP6317471B2 JP6317471B2 (ja) | 2018-04-25 |
Family
ID=50819846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016559888A Active JP6317471B2 (ja) | 2014-04-03 | 2015-03-25 | ゲッターポンプ |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US9541078B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP2989327B1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP6317471B2 (cg-RX-API-DMAC7.html) |
| KR (1) | KR101887292B1 (cg-RX-API-DMAC7.html) |
| CN (1) | CN106133314B (cg-RX-API-DMAC7.html) |
| ES (1) | ES2604969T3 (cg-RX-API-DMAC7.html) |
| RU (1) | RU2673834C2 (cg-RX-API-DMAC7.html) |
| TW (1) | TWI660125B (cg-RX-API-DMAC7.html) |
| WO (1) | WO2015150974A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102154893B1 (ko) * | 2014-06-26 | 2020-09-11 | 사에스 게터스 에스.페.아. | 게터 펌핑 시스템 |
| RU2661493C1 (ru) * | 2017-07-24 | 2018-07-17 | ООО "Инновационные Вакуумные Решения" | Способ управления скоростью распыления материала в геттерном насосе и устройство геттерного насоса |
| RU187265U1 (ru) * | 2018-10-25 | 2019-02-27 | Закрытое акционерное общество "Время - Ч" | Комбинированный магниторазрядный геттерный насос для откачки вакуумных объемов рубидиевого стандарта частоты |
| CN114928934B (zh) * | 2022-06-20 | 2024-06-18 | 中国科学院近代物理研究所 | 加速器真空室非蒸散型吸气剂片固定装置及其使用方法 |
| EP4392673B1 (en) | 2022-08-01 | 2024-11-27 | Saes Getters S.p.A. | Snap-on getter pump assembly and its use |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2034633C3 (de) * | 1969-07-24 | 1979-10-25 | S.A.E.S. Getters S.P.A., Mailand (Italien) | Kartusche für eine Getterpumpe |
| US4137012A (en) * | 1976-11-03 | 1979-01-30 | S.A.E.S. Getters S.P.A. | Modular getter pumps |
| IT1255439B (it) * | 1992-07-17 | 1995-10-31 | Getters Spa | Pompa getter non evaporabile |
| US6109880A (en) * | 1994-10-31 | 2000-08-29 | Saes Pure Gas, Inc. | Getter pump module and system including focus shields |
| IT1274478B (it) | 1995-05-11 | 1997-07-17 | Getters Spa | Insieme di riscaldamento per pompe getter e purificatori di gas |
| IT237018Y1 (it) * | 1995-07-10 | 2000-08-31 | Getters Spa | Pompa getter perfezionata in particolare per uno strumento dianalisi chimiche portatile |
| IT1292175B1 (it) | 1997-06-17 | 1999-01-25 | Getters Spa | Pompa getter particolarmente adatta per l'uso a monte,in prossimita' e coassialmente ad una pompa turbomolecolare |
| IT1295340B1 (it) * | 1997-10-15 | 1999-05-12 | Getters Spa | Pompa getter ad elevata velocita' di assorbimento di gas |
| IT1297013B1 (it) * | 1997-12-23 | 1999-08-03 | Getters Spa | Sistema getter per la purificazione dell'atmosfera di lavoro nei processi di deposizione fisica da vapore |
| US7045958B2 (en) * | 2003-04-14 | 2006-05-16 | Hewlett-Packard Development Company, L.P. | Vacuum device having a getter |
| ITMI20080282A1 (it) * | 2008-02-22 | 2009-08-23 | Getters Spa | Apparato per litografia con radiazione nell'uv estremo con un elemento assorbitore di idrocarburi comprendente un materiale getter |
| CN101978463B (zh) * | 2008-03-28 | 2013-02-13 | 工程吸气公司 | 包括吸气剂泵和离子泵的组合式抽气系统 |
| ITMI20090402A1 (it) | 2009-03-17 | 2010-09-18 | Getters Spa | Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica |
| ITMI20121732A1 (it) * | 2012-10-15 | 2014-04-16 | Getters Spa | Pompa getter |
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2015
- 2015-03-20 TW TW104108930A patent/TWI660125B/zh active
- 2015-03-25 CN CN201580017115.4A patent/CN106133314B/zh active Active
- 2015-03-25 KR KR1020167027026A patent/KR101887292B1/ko active Active
- 2015-03-25 US US14/786,138 patent/US9541078B2/en active Active
- 2015-03-25 EP EP15715853.6A patent/EP2989327B1/en active Active
- 2015-03-25 RU RU2016143194A patent/RU2673834C2/ru active
- 2015-03-25 JP JP2016559888A patent/JP6317471B2/ja active Active
- 2015-03-25 ES ES15715853.6T patent/ES2604969T3/es active Active
- 2015-03-25 WO PCT/IB2015/052174 patent/WO2015150974A1/en not_active Ceased