JP2017509797A5 - - Google Patents

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Publication number
JP2017509797A5
JP2017509797A5 JP2016559546A JP2016559546A JP2017509797A5 JP 2017509797 A5 JP2017509797 A5 JP 2017509797A5 JP 2016559546 A JP2016559546 A JP 2016559546A JP 2016559546 A JP2016559546 A JP 2016559546A JP 2017509797 A5 JP2017509797 A5 JP 2017509797A5
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JP
Japan
Prior art keywords
chamber
processing
processing system
vacuum
vacuum processing
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Application number
JP2016559546A
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English (en)
Japanese (ja)
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JP6375387B2 (ja
JP2017509797A (ja
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Priority claimed from PCT/EP2014/056605 external-priority patent/WO2015149849A1/en
Publication of JP2017509797A publication Critical patent/JP2017509797A/ja
Publication of JP2017509797A5 publication Critical patent/JP2017509797A5/ja
Application granted granted Critical
Publication of JP6375387B2 publication Critical patent/JP6375387B2/ja
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JP2016559546A 2014-04-02 2014-04-02 真空処理システム、及び処理システムを取り付けるための方法 Active JP6375387B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2014/056605 WO2015149849A1 (en) 2014-04-02 2014-04-02 Vacuum processing system and method for mounting a processing system

Publications (3)

Publication Number Publication Date
JP2017509797A JP2017509797A (ja) 2017-04-06
JP2017509797A5 true JP2017509797A5 (https=) 2017-05-25
JP6375387B2 JP6375387B2 (ja) 2018-08-15

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ID=50440648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016559546A Active JP6375387B2 (ja) 2014-04-02 2014-04-02 真空処理システム、及び処理システムを取り付けるための方法

Country Status (7)

Country Link
US (1) US10648072B2 (https=)
EP (1) EP3126541A1 (https=)
JP (1) JP6375387B2 (https=)
KR (1) KR102196407B1 (https=)
CN (1) CN106164330B (https=)
TW (1) TWI727921B (https=)
WO (1) WO2015149849A1 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016128560A2 (en) * 2016-02-12 2016-08-18 Applied Materials, Inc. Vacuum processing system and methods therefor
US10304716B1 (en) * 2017-12-20 2019-05-28 Powertech Technology Inc. Package structure and manufacturing method thereof
KR102458991B1 (ko) * 2018-03-30 2022-10-25 제이에프이 스틸 가부시키가이샤 방향성 전기 강판의 제조 방법 및 연속 성막 장치
US20220186360A1 (en) * 2019-03-05 2022-06-16 Xefco Pty Ltd Improved vapour deposition system, method and moisture control device
JP7554777B2 (ja) * 2020-01-06 2024-09-20 日本スピンドル製造株式会社 塗工装置、仕切部材及び塗工方法
WO2021185444A1 (en) * 2020-03-18 2021-09-23 Applied Materials, Inc. Vacuum processing system for a flexible substrate, method of depositing a layer stack on a flexible substrate, and layer system
EP4162094A4 (en) * 2020-06-04 2024-10-02 Applied Materials, Inc. Vapor deposition apparatus and method for coating a substrate in a vacuum chamber
JP2023538038A (ja) * 2020-08-21 2023-09-06 アプライド マテリアルズ インコーポレイテッド フレキシブル基板を処理するための処理システム並びにフレキシブル基板の特性及びフレキシブル基板上の１つ又は複数のコーティングの特性のうちの少なくとも１つを測定する方法
EP4326919A4 (en) 2021-04-21 2025-08-20 Elevated Mat Germany Gmbh MATERIAL DEPOSITION APPARATUS, METHOD FOR DEPOSITING MATERIAL ON A SUBSTRATE, AND MATERIAL DEPOSITION SYSTEM
CN118974836A (zh) * 2022-03-08 2024-11-15 10X基因组学有限公司 将光学拥挤最小化的原位代码设计方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0466999A1 (en) * 1990-07-18 1992-01-22 Engineering Films-Establishment Process and apparatus for the surfacing of tape substrates of reels
JP3332700B2 (ja) * 1995-12-22 2002-10-07 キヤノン株式会社 堆積膜形成方法及び堆積膜形成装置
EP1534874A4 (en) * 2002-07-17 2008-02-27 Hitco Carbon Composites Inc STEAM PHASE CONTINUOUS CHEMICAL DEPOSITION METHOD AND CORRESPONDING OVEN
JP4591080B2 (ja) * 2004-12-27 2010-12-01 富士電機システムズ株式会社 薄膜形成装置
US7799182B2 (en) 2006-12-01 2010-09-21 Applied Materials, Inc. Electroplating on roll-to-roll flexible solar cell substrates
EP1988186A1 (en) * 2007-04-24 2008-11-05 Galileo Vacuum Systems S.p.A. Multichamber vacuum deposition system
KR20100126717A (ko) * 2008-03-04 2010-12-02 솔렉슨트 코포레이션 태양 전지의 제조 방법
US8117987B2 (en) * 2009-09-18 2012-02-21 Applied Materials, Inc. Hot wire chemical vapor deposition (CVD) inline coating tool
US9303316B1 (en) * 2010-01-15 2016-04-05 Apollo Precision Kunming Yuanhong Limited Continuous web apparatus and method using an air to vacuum seal and accumulator
JP2012136724A (ja) * 2010-12-24 2012-07-19 Kobe Steel Ltd 巻取り式連続成膜装置
JP2013196848A (ja) * 2012-03-16 2013-09-30 Nitto Denko Corp 有機ｅｌ素子の製造方法及び製造装置

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