JP2017504835A5 - - Google Patents

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Publication number
JP2017504835A5
JP2017504835A5 JP2016545903A JP2016545903A JP2017504835A5 JP 2017504835 A5 JP2017504835 A5 JP 2017504835A5 JP 2016545903 A JP2016545903 A JP 2016545903A JP 2016545903 A JP2016545903 A JP 2016545903A JP 2017504835 A5 JP2017504835 A5 JP 2017504835A5
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JP
Japan
Prior art keywords
restoring force
movable reflector
deformable element
interferometric modulator
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2016545903A
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English (en)
Japanese (ja)
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JP2017504835A (ja
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Publication date
Priority claimed from US14/265,193 external-priority patent/US9372338B2/en
Application filed filed Critical
Publication of JP2017504835A publication Critical patent/JP2017504835A/ja
Publication of JP2017504835A5 publication Critical patent/JP2017504835A5/ja
Pending legal-status Critical Current

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JP2016545903A 2014-01-17 2014-12-16 大きい安定的動き範囲を有する多状態干渉変調器 Pending JP2017504835A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201461928953P 2014-01-17 2014-01-17
US61/928,953 2014-01-17
US14/265,193 2014-04-29
US14/265,193 US9372338B2 (en) 2014-01-17 2014-04-29 Multi-state interferometric modulator with large stable range of motion
PCT/US2014/070630 WO2015108649A1 (en) 2014-01-17 2014-12-16 Multi-state interferometric modulator with large stable range of motion

Publications (2)

Publication Number Publication Date
JP2017504835A JP2017504835A (ja) 2017-02-09
JP2017504835A5 true JP2017504835A5 (enExample) 2018-01-18

Family

ID=52282975

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016545903A Pending JP2017504835A (ja) 2014-01-17 2014-12-16 大きい安定的動き範囲を有する多状態干渉変調器

Country Status (6)

Country Link
US (1) US9372338B2 (enExample)
JP (1) JP2017504835A (enExample)
KR (1) KR20160110462A (enExample)
CN (1) CN105899995B (enExample)
TW (1) TWI644125B (enExample)
WO (1) WO2015108649A1 (enExample)

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KR102193091B1 (ko) * 2014-05-22 2020-12-21 엘지디스플레이 주식회사 낮은 반사율을 갖는 블랙 매트릭스를 구비한 평판 표시장치 및 그 제조 방법
TWI581004B (zh) * 2015-11-18 2017-05-01 財團法人工業技術研究院 可調式光學裝置
CN108916688B (zh) * 2017-04-24 2020-08-18 京东方科技集团股份有限公司 光源和照明装置
TWI822686B (zh) 2017-07-06 2023-11-21 日商濱松赫德尼古斯股份有限公司 光學裝置
JP6514804B1 (ja) 2017-07-06 2019-05-15 浜松ホトニクス株式会社 光学デバイス
WO2019009393A1 (ja) 2017-07-06 2019-01-10 浜松ホトニクス株式会社 光学デバイス及びその製造方法
US11187872B2 (en) 2017-07-06 2021-11-30 Hamamatsu Photonics K.K. Optical device
EP3650911B1 (en) * 2017-07-06 2023-08-30 Hamamatsu Photonics K.K. Optical device
JP7112876B2 (ja) 2017-07-06 2022-08-04 浜松ホトニクス株式会社 光学デバイス
WO2019009392A1 (ja) 2017-07-06 2019-01-10 浜松ホトニクス株式会社 光学デバイス
CN107561683B (zh) 2017-09-15 2023-05-16 京东方科技集团股份有限公司 像素结构、显示基板及其控制方法、显示装置
CN115657296A (zh) 2017-11-15 2023-01-31 浜松光子学株式会社 光学器件的制造方法
DE102018217054A1 (de) * 2018-10-05 2020-04-09 Robert Bosch Gmbh Spiegeleinrichtung für eine Interferometereinrichtung, Interferometereinrichtung, Verfahren zur Herstellung einer Spiegeleinrichtung für eine Interferometereinrichtung, und Verfahren zur Herstellung einer Interferometereinrichtung
DE102019212597A1 (de) * 2019-08-22 2021-02-25 Robert Bosch Gmbh Mikromechanische Interferometereinrichtung und Verfahren zum Herstellen einer mikromechanischen Interferometereinrichtung
IT201900024475A1 (it) * 2019-12-18 2021-06-18 St Microelectronics Srl Dispositivo micromeccanico con gruppo elastico a costante elastica variabile
FI130707B1 (en) 2020-03-31 2024-01-31 Teknologian Tutkimuskeskus Vtt Oy Fabry-Perot interferometer that has support elements
DE102022211284A1 (de) * 2022-10-25 2024-04-25 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanische Struktur und mikromechanischer Lautsprecher
DE102023207523A1 (de) * 2023-08-04 2025-02-06 Robert Bosch Gesellschaft mit beschränkter Haftung MEMS-Bauteil mit einer Membranfeder und Verfahren zur Herstellung einer Membranfeder

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