JP2017504835A - 大きい安定的動き範囲を有する多状態干渉変調器 - Google Patents

大きい安定的動き範囲を有する多状態干渉変調器 Download PDF

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Publication number
JP2017504835A
JP2017504835A JP2016545903A JP2016545903A JP2017504835A JP 2017504835 A JP2017504835 A JP 2017504835A JP 2016545903 A JP2016545903 A JP 2016545903A JP 2016545903 A JP2016545903 A JP 2016545903A JP 2017504835 A JP2017504835 A JP 2017504835A
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Japan
Prior art keywords
restoring force
movable reflector
deformable element
movable
layer
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Japanese (ja)
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JP2017504835A5 (enExample
Inventor
照夫 笹川
照夫 笹川
リチャード・イェ
コスタディン・ディミトロフ・ドヨルディエフ
ヒリシケシュ・ヴィジャイクマール・パンチャワグ
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クォルコム・メムズ・テクノロジーズ・インコーポレーテッド
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Publication of JP2017504835A publication Critical patent/JP2017504835A/ja
Publication of JP2017504835A5 publication Critical patent/JP2017504835A5/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/12—Optical coatings produced by application to, or surface treatment of, optical elements by surface treatment, e.g. by irradiation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/007—Optical devices or arrangements for the control of light using movable or deformable optical elements the movable or deformable optical element controlling the colour, i.e. a spectral characteristic, of the light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Astronomy & Astrophysics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
JP2016545903A 2014-01-17 2014-12-16 大きい安定的動き範囲を有する多状態干渉変調器 Pending JP2017504835A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201461928953P 2014-01-17 2014-01-17
US61/928,953 2014-01-17
US14/265,193 2014-04-29
US14/265,193 US9372338B2 (en) 2014-01-17 2014-04-29 Multi-state interferometric modulator with large stable range of motion
PCT/US2014/070630 WO2015108649A1 (en) 2014-01-17 2014-12-16 Multi-state interferometric modulator with large stable range of motion

Publications (2)

Publication Number Publication Date
JP2017504835A true JP2017504835A (ja) 2017-02-09
JP2017504835A5 JP2017504835A5 (enExample) 2018-01-18

Family

ID=52282975

Family Applications (1)

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JP2016545903A Pending JP2017504835A (ja) 2014-01-17 2014-12-16 大きい安定的動き範囲を有する多状態干渉変調器

Country Status (6)

Country Link
US (1) US9372338B2 (enExample)
JP (1) JP2017504835A (enExample)
KR (1) KR20160110462A (enExample)
CN (1) CN105899995B (enExample)
TW (1) TWI644125B (enExample)
WO (1) WO2015108649A1 (enExample)

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KR102193091B1 (ko) * 2014-05-22 2020-12-21 엘지디스플레이 주식회사 낮은 반사율을 갖는 블랙 매트릭스를 구비한 평판 표시장치 및 그 제조 방법
TWI581004B (zh) * 2015-11-18 2017-05-01 財團法人工業技術研究院 可調式光學裝置
CN108916688B (zh) * 2017-04-24 2020-08-18 京东方科技集团股份有限公司 光源和照明装置
TWI822686B (zh) 2017-07-06 2023-11-21 日商濱松赫德尼古斯股份有限公司 光學裝置
JP6514804B1 (ja) 2017-07-06 2019-05-15 浜松ホトニクス株式会社 光学デバイス
WO2019009393A1 (ja) 2017-07-06 2019-01-10 浜松ホトニクス株式会社 光学デバイス及びその製造方法
US11187872B2 (en) 2017-07-06 2021-11-30 Hamamatsu Photonics K.K. Optical device
EP3650911B1 (en) * 2017-07-06 2023-08-30 Hamamatsu Photonics K.K. Optical device
JP7112876B2 (ja) 2017-07-06 2022-08-04 浜松ホトニクス株式会社 光学デバイス
WO2019009392A1 (ja) 2017-07-06 2019-01-10 浜松ホトニクス株式会社 光学デバイス
CN107561683B (zh) 2017-09-15 2023-05-16 京东方科技集团股份有限公司 像素结构、显示基板及其控制方法、显示装置
CN115657296A (zh) 2017-11-15 2023-01-31 浜松光子学株式会社 光学器件的制造方法
DE102018217054A1 (de) * 2018-10-05 2020-04-09 Robert Bosch Gmbh Spiegeleinrichtung für eine Interferometereinrichtung, Interferometereinrichtung, Verfahren zur Herstellung einer Spiegeleinrichtung für eine Interferometereinrichtung, und Verfahren zur Herstellung einer Interferometereinrichtung
DE102019212597A1 (de) * 2019-08-22 2021-02-25 Robert Bosch Gmbh Mikromechanische Interferometereinrichtung und Verfahren zum Herstellen einer mikromechanischen Interferometereinrichtung
IT201900024475A1 (it) * 2019-12-18 2021-06-18 St Microelectronics Srl Dispositivo micromeccanico con gruppo elastico a costante elastica variabile
FI130707B1 (en) 2020-03-31 2024-01-31 Teknologian Tutkimuskeskus Vtt Oy Fabry-Perot interferometer that has support elements
DE102022211284A1 (de) * 2022-10-25 2024-04-25 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanische Struktur und mikromechanischer Lautsprecher
DE102023207523A1 (de) * 2023-08-04 2025-02-06 Robert Bosch Gesellschaft mit beschränkter Haftung MEMS-Bauteil mit einer Membranfeder und Verfahren zur Herstellung einer Membranfeder

Citations (3)

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US5142414A (en) * 1991-04-22 1992-08-25 Koehler Dale R Electrically actuatable temporal tristimulus-color device
JP2011191661A (ja) * 2010-03-16 2011-09-29 Seiko Epson Corp 光フィルター並びにそれを用いた分析機器及び光機器
JP2012112777A (ja) * 2010-11-24 2012-06-14 Denso Corp ファブリペロー干渉計

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US6710908B2 (en) 1994-05-05 2004-03-23 Iridigm Display Corporation Controlling micro-electro-mechanical cavities
EP0783124B1 (en) 1995-12-15 2002-04-17 Texas Instruments Incorporated Improvements in or relating to spatial light modulators
US7532377B2 (en) 1998-04-08 2009-05-12 Idc, Llc Movable micro-electromechanical device
US6329738B1 (en) 1999-03-30 2001-12-11 Massachusetts Institute Of Technology Precision electrostatic actuation and positioning
KR100738064B1 (ko) 2001-02-27 2007-07-12 삼성전자주식회사 비선형적 복원력의 스프링을 가지는 ｍｅｍｓ 소자
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Publication number Priority date Publication date Assignee Title
US5142414A (en) * 1991-04-22 1992-08-25 Koehler Dale R Electrically actuatable temporal tristimulus-color device
JP2011191661A (ja) * 2010-03-16 2011-09-29 Seiko Epson Corp 光フィルター並びにそれを用いた分析機器及び光機器
JP2012112777A (ja) * 2010-11-24 2012-06-14 Denso Corp ファブリペロー干渉計

Also Published As

Publication number Publication date
CN105899995A (zh) 2016-08-24
KR20160110462A (ko) 2016-09-21
US20150205092A1 (en) 2015-07-23
TWI644125B (zh) 2018-12-11
CN105899995B (zh) 2017-10-31
TW201533471A (zh) 2015-09-01
WO2015108649A1 (en) 2015-07-23
US9372338B2 (en) 2016-06-21

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