CN105899995B - 具有大稳定运动范围的多状态干涉调制器 - Google Patents

具有大稳定运动范围的多状态干涉调制器 Download PDF

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Publication number
CN105899995B
CN105899995B CN201480072861.9A CN201480072861A CN105899995B CN 105899995 B CN105899995 B CN 105899995B CN 201480072861 A CN201480072861 A CN 201480072861A CN 105899995 B CN105899995 B CN 105899995B
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CN
China
Prior art keywords
movable reflector
restoring force
deformable element
movable
modifier
Prior art date
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CN201480072861.9A
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English (en)
Chinese (zh)
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CN105899995A (zh
Inventor
笹川照夫
理查德·叶
寇斯坦丁·狄米绰夫·乔尔杰夫
赫瑞什科士·维加伊库马尔·班差瓦加
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Qualcomm MEMS Technologies Inc
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Qualcomm MEMS Technologies Inc
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/12—Optical coatings produced by application to, or surface treatment of, optical elements by surface treatment, e.g. by irradiation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/007—Optical devices or arrangements for the control of light using movable or deformable optical elements the movable or deformable optical element controlling the colour, i.e. a spectral characteristic, of the light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Astronomy & Astrophysics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
CN201480072861.9A 2014-01-17 2014-12-16 具有大稳定运动范围的多状态干涉调制器 Active CN105899995B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201461928953P 2014-01-17 2014-01-17
US61/928,953 2014-01-17
US14/265,193 2014-04-29
US14/265,193 US9372338B2 (en) 2014-01-17 2014-04-29 Multi-state interferometric modulator with large stable range of motion
PCT/US2014/070630 WO2015108649A1 (en) 2014-01-17 2014-12-16 Multi-state interferometric modulator with large stable range of motion

Publications (2)

Publication Number Publication Date
CN105899995A CN105899995A (zh) 2016-08-24
CN105899995B true CN105899995B (zh) 2017-10-31

Family

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Family Applications (1)

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CN201480072861.9A Active CN105899995B (zh) 2014-01-17 2014-12-16 具有大稳定运动范围的多状态干涉调制器

Country Status (6)

Country Link
US (1) US9372338B2 (enExample)
JP (1) JP2017504835A (enExample)
KR (1) KR20160110462A (enExample)
CN (1) CN105899995B (enExample)
TW (1) TWI644125B (enExample)
WO (1) WO2015108649A1 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102193091B1 (ko) * 2014-05-22 2020-12-21 엘지디스플레이 주식회사 낮은 반사율을 갖는 블랙 매트릭스를 구비한 평판 표시장치 및 그 제조 방법
TWI581004B (zh) * 2015-11-18 2017-05-01 財團法人工業技術研究院 可調式光學裝置
CN108916688B (zh) * 2017-04-24 2020-08-18 京东方科技集团股份有限公司 光源和照明装置
TWI822686B (zh) 2017-07-06 2023-11-21 日商濱松赫德尼古斯股份有限公司 光學裝置
JP6514804B1 (ja) 2017-07-06 2019-05-15 浜松ホトニクス株式会社 光学デバイス
WO2019009393A1 (ja) 2017-07-06 2019-01-10 浜松ホトニクス株式会社 光学デバイス及びその製造方法
US11187872B2 (en) 2017-07-06 2021-11-30 Hamamatsu Photonics K.K. Optical device
EP3650911B1 (en) * 2017-07-06 2023-08-30 Hamamatsu Photonics K.K. Optical device
JP7112876B2 (ja) 2017-07-06 2022-08-04 浜松ホトニクス株式会社 光学デバイス
WO2019009392A1 (ja) 2017-07-06 2019-01-10 浜松ホトニクス株式会社 光学デバイス
CN107561683B (zh) 2017-09-15 2023-05-16 京东方科技集团股份有限公司 像素结构、显示基板及其控制方法、显示装置
CN115657296A (zh) 2017-11-15 2023-01-31 浜松光子学株式会社 光学器件的制造方法
DE102018217054A1 (de) * 2018-10-05 2020-04-09 Robert Bosch Gmbh Spiegeleinrichtung für eine Interferometereinrichtung, Interferometereinrichtung, Verfahren zur Herstellung einer Spiegeleinrichtung für eine Interferometereinrichtung, und Verfahren zur Herstellung einer Interferometereinrichtung
DE102019212597A1 (de) * 2019-08-22 2021-02-25 Robert Bosch Gmbh Mikromechanische Interferometereinrichtung und Verfahren zum Herstellen einer mikromechanischen Interferometereinrichtung
IT201900024475A1 (it) * 2019-12-18 2021-06-18 St Microelectronics Srl Dispositivo micromeccanico con gruppo elastico a costante elastica variabile
FI130707B1 (en) 2020-03-31 2024-01-31 Teknologian Tutkimuskeskus Vtt Oy Fabry-Perot interferometer that has support elements
DE102022211284A1 (de) * 2022-10-25 2024-04-25 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanische Struktur und mikromechanischer Lautsprecher
DE102023207523A1 (de) * 2023-08-04 2025-02-06 Robert Bosch Gesellschaft mit beschränkter Haftung MEMS-Bauteil mit einer Membranfeder und Verfahren zur Herstellung einer Membranfeder

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6329738B1 (en) * 1999-03-30 2001-12-11 Massachusetts Institute Of Technology Precision electrostatic actuation and positioning

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5142414A (en) * 1991-04-22 1992-08-25 Koehler Dale R Electrically actuatable temporal tristimulus-color device
US6680792B2 (en) * 1994-05-05 2004-01-20 Iridigm Display Corporation Interferometric modulation of radiation
US6710908B2 (en) 1994-05-05 2004-03-23 Iridigm Display Corporation Controlling micro-electro-mechanical cavities
EP0783124B1 (en) 1995-12-15 2002-04-17 Texas Instruments Incorporated Improvements in or relating to spatial light modulators
US7532377B2 (en) 1998-04-08 2009-05-12 Idc, Llc Movable micro-electromechanical device
KR100738064B1 (ko) 2001-02-27 2007-07-12 삼성전자주식회사 비선형적 복원력의 스프링을 가지는 ｍｅｍｓ 소자
US6836029B2 (en) 2001-11-28 2004-12-28 International Business Machines Corporation Micro-electromechanical switch having a conductive compressible electrode
US7265477B2 (en) 2004-01-05 2007-09-04 Chang-Feng Wan Stepping actuator and method of manufacture therefore
KR101354520B1 (ko) * 2004-07-29 2014-01-21 퀄컴 엠이엠에스 테크놀로지스, 인크. 간섭 변조기의 미소기전 동작을 위한 시스템 및 방법
US8008736B2 (en) * 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7612932B2 (en) 2004-09-27 2009-11-03 Idc, Llc Microelectromechanical device with optical function separated from mechanical and electrical function
US7486854B2 (en) 2006-01-24 2009-02-03 Uni-Pixel Displays, Inc. Optical microstructures for light extraction and control
US7724417B2 (en) * 2006-12-19 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US8274200B2 (en) 2007-11-19 2012-09-25 Xcom Wireless, Inc. Microfabricated cantilever slider with asymmetric spring constant
US8314984B2 (en) 2008-02-14 2012-11-20 Miradia Inc. Method and system for optical MEMS with flexible landing structures
US8164821B2 (en) 2008-02-22 2012-04-24 Qualcomm Mems Technologies, Inc. Microelectromechanical device with thermal expansion balancing layer or stiffening layer
US7859740B2 (en) 2008-07-11 2010-12-28 Qualcomm Mems Technologies, Inc. Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control
US8270062B2 (en) 2009-09-17 2012-09-18 Qualcomm Mems Technologies, Inc. Display device with at least one movable stop element
JP5348032B2 (ja) * 2010-03-16 2013-11-20 セイコーエプソン株式会社 光フィルター並びにそれを用いた分析機器及び光機器
JP5177209B2 (ja) * 2010-11-24 2013-04-03 株式会社デンソー ファブリペロー干渉計
US20130335808A1 (en) 2012-06-14 2013-12-19 Qualcomm Mems Technologies, Inc. Analog imod having high fill factor
US9096419B2 (en) 2012-10-01 2015-08-04 Qualcomm Mems Technologies, Inc. Electromechanical systems device with protrusions to provide additional stable states

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6329738B1 (en) * 1999-03-30 2001-12-11 Massachusetts Institute Of Technology Precision electrostatic actuation and positioning

Also Published As

Publication number Publication date
CN105899995A (zh) 2016-08-24
KR20160110462A (ko) 2016-09-21
US20150205092A1 (en) 2015-07-23
TWI644125B (zh) 2018-12-11
TW201533471A (zh) 2015-09-01
JP2017504835A (ja) 2017-02-09
WO2015108649A1 (en) 2015-07-23
US9372338B2 (en) 2016-06-21

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