WO2012089054A1 - 光开关以及mems显示器 - Google Patents

光开关以及mems显示器 Download PDF

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Publication number
WO2012089054A1
WO2012089054A1 PCT/CN2011/084357 CN2011084357W WO2012089054A1 WO 2012089054 A1 WO2012089054 A1 WO 2012089054A1 CN 2011084357 W CN2011084357 W CN 2011084357W WO 2012089054 A1 WO2012089054 A1 WO 2012089054A1
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WO
WIPO (PCT)
Prior art keywords
optical switch
substrate
movable mirror
transparent substrate
polarized light
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PCT/CN2011/084357
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English (en)
French (fr)
Inventor
毛剑宏
唐德明
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上海丽恒光微电子科技有限公司
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Publication of WO2012089054A1 publication Critical patent/WO2012089054A1/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Definitions

  • the present invention relates to the field of micromechanical electromechanical systems (MEMS), and more particularly to an optical switch based on MEMS technology and a MEMS display using the optical switch to realize image display.
  • MEMS micromechanical electromechanical systems
  • LCD TVs and other flat panel displays have become common electronic consumer products in social life. How to further reduce the size of the flat panel display and reduce the thickness of the panel is one of the development directions of the flat panel display. Since the light source of the liquid crystal display device must be disposed on the back surface of the panel or embedded in the panel, good brightness and uniformity of gradation can be obtained. Therefore, the arrangement of the above light source brings great difficulty to the thickness of the thinned panel.
  • the use of mechanically structured optical path switches to make flat panel displays is an alternative to liquid crystal displays.
  • the mechanical light path switch can quickly route the light source's beam to display in the desired pixel area, resulting in a good viewing angle and a wide range of color, grayscale display image content.
  • the light source can be disposed at any position of the panel independently of the pixel array area, thereby facilitating reduction of the panel thickness of the display.
  • the contents of a MEMS display can be found in U.S. Patent No. US2006006448.
  • the problem to be solved by the present invention is to provide an optical switch and a MEMS display using the same, which has the characteristics that the control mechanism is simple and easy to manufacture.
  • the optical switch comprises: a base; an elastic cantilever having a fixed end fixed to the base and a free end suspended; a movable mirror, the movable mirror being located at a free end of the elastic cantilever;
  • the elastic cantilever bends under the action of a driving electric field, causing the movable mirror to shift, reflecting the incident beam to the exit direction.
  • the method further includes a fixed mirror fixed to the base, the reflective surface of the fixed mirror is opposite to the reflective surface of the movable mirror when the elastic cantilever is bent; the incident light beam is incident from the back surface of the substrate, and is projected on Fix the reflective surface of the mirror.
  • the substrate is a transparent substrate.
  • the reflecting surface of the fixed mirror is parallel to the reflecting surface of the movable mirror.
  • the elastic cantilever is a sheet metal.
  • the optical switch further includes an inducing electrode disposed under the free end of the elastic cantilever, and the inducing electrode is configured to form the driving electric field.
  • the inducing electrode is disposed within the substrate and spaced from the surface of the substrate.
  • the optical switch further includes a support structure disposed on the base, the elastic cantilever is fixed to the base by the support structure, and is further electrically connected to the base through the support structure.
  • the reflective surface of the movable mirror has a polarization beam splitter.
  • the present invention further provides a MEMS display, comprising: a transparent substrate, an optical switch array disposed on a surface of the transparent substrate, and a backlight located on a back surface of the transparent substrate; the light beam generated by the backlight passes through the transparent substrate And optical switch array transmission imaging.
  • the backlight is an RGB three primary color or a CMY three primary color light source.
  • the backlight is a 3D polarized light source.
  • the optical switch is divided into a P-polarized light switch and an S-polarized light switch; a reflective surface of the movable mirror of the P-polarized light switch has a P-polarization beam splitter, and a reflective surface of the movable mirror of the S-polarized light switch has a S a polarization beam splitter; the P-polarized light switch and the S-polarized light switch are alternately arranged in the optical switch array.
  • the optical switch of the invention has the advantages of simple structure, convenient control and easy manufacture; the MEMS display adopts an optical switch as a pixel unit to form an optical switch array, and the light beam generated by the backlight is transmitted through the transparent substrate and the optical switch array, and is responsive. Fast imaging features.
  • FIG. 1 is a cross-sectional view showing a first embodiment of the optical switch of the present invention
  • FIGS. 2 to 4 are schematic views showing the working state of the optical switch of the present invention.
  • FIG. 5 is a cross-sectional view of a first embodiment of the MEMS display of the present invention
  • FIG. 6 is a cross-sectional view of a second embodiment of the MEMS display of the present invention
  • FIG. 7 is a cross-sectional view of a third embodiment of the MEMS display of the present invention.
  • An optical switch provided by the present invention includes: a base; an elastic cantilever having a fixed end fixed to the base and a free end suspended; a movable mirror, the movable mirror being located at a free end of the elastic cantilever
  • the elastic cantilever bends under the action of a driving electric field, so that the movable mirror is displaced to reflect the incident beam to the exit direction.
  • the substrate is a transparent substrate, and the incident light beam is incident from the back surface of the substrate and is irradiated onto the elastic cantilever of the optical switch through the substrate.
  • a fixed mirror may be provided on the substrate to reflect the incident beam first. Further, when the elastic cantilever is bent, the incident light beam that has been reflected once can be directly irradiated onto the reflecting surface of the movable mirror. It is then reflected by the movable mirror to the exit direction. After the above two reflections, the outgoing direction of the light beam may coincide with the incident direction.
  • the optical switch of the present invention will be further described below in conjunction with a specific embodiment.
  • the basic structure of the optical switch includes: a transparent substrate 10; an elastic cantilever 20 disposed on the transparent substrate 10, the elastic cantilever 20 has a fixed end 21 fixed to the transparent substrate 10 and a suspended free end 22; a movable mirror 30 is disposed on the free end 22 of the elastic cantilever 20; and a fixed mirror 40 is disposed on the transparent substrate 20.
  • the transparent substrate 10 may be a glass substrate. When the incident light beam is incident from the back surface of the transparent substrate 10, it may be directly transmitted through the transparent substrate 10 to be irradiated on the optical switch.
  • a support structure 11 may also be formed on the transparent substrate 10.
  • the support structure 11 protrudes from the surface of the transparent substrate 10 for connection with the fixed end 21 of the elastic cantilever 20.
  • contact can be made in the support structure 11
  • the holes are such that the elastic cantilever 20 is electrically connected to the transparent substrate 10 through the support structure 11; in particular, electrically connected to a control circuit for controlling the optical switch in the transparent substrate 10.
  • an inducing electrode 12 for generating a driving electric field is further disposed on the transparent substrate 10, under the elastic cantilever 20, an inducing electrode 12 for generating a driving electric field is further disposed.
  • the inducing electrode 12 may be disposed in the transparent substrate 10 and spaced apart from the surface of the transparent substrate 10.
  • the elastic cantilever 20 may be a sheet metal, and may be made of copper, aluminum, gold or the like.
  • the elastic cantilever 20 may be parallel to the surface of the transparent substrate 10 when it is not bent.
  • a driving electric field is formed between the elastic cantilever 20 and the induction electrode 12, that is, the elastic cantilever 20 can be bent by the action of the driving electric field.
  • the inducing electrode 12 and the elastic cantilever 20 are connected to electrodes of different potentials, and the inducing electrode 12 and the elastic cantilever 20 have a potential difference, and the driving electric field is formed therebetween.
  • the elastic cantilever 20 is bent by an electric field force, and its free end 22 is offset toward the transparent substrate 10, causing the movable mirror 30 located thereon to be displaced. Moreover, the greater the potential difference, the stronger the electric field force exerted by the elastic cantilever 20 and the greater the degree of bending.
  • the fixed mirror 40 should be capable of reflecting the light beam incident on the back side of the transparent substrate 10 to the displaced movable mirror 30, thereby causing the incident beam to be re-reflected and emitted from the optical switch.
  • the reflecting surface of the fixed mirror 40 should be parallel to the reflecting surface of the movable mirror 30 at this time.
  • FIG. 2 and FIG. 3 also provide a schematic diagram of the operation of the optical switch of this embodiment.
  • the elastic cantilever 20 when the elastic cantilever 20 is not bent in the optical switch, the elastic cantilever 20 is parallel to the surface of the transparent substrate 10. At this time, the light beam incident from the back surface of the transparent substrate 10 is transmitted through the transparent substrate 10, or directly irradiated to the elastic cantilever 20, or irradiated to other positions of the optical switch, such as the support structure 11, through the secondary reflection mirror 40, None of them can be emitted from the optical switch. At this time, the elastic cantilever 20 of the sheet metal functions to shield the light in the direction of light transmission.
  • the optical switch can be considered as off.
  • the induction electrode 12 is connected to the negative electrode, and the elastic cantilever 20 is connected to the positive electrode to form a potential difference therebetween; the potential difference causes the negative electrode to be injected into the induction electrode 12, and the elasticity
  • the cantilever 20 injects a positive charge between the above heterogeneous charges
  • the electric field force is generated to act on the elastic cantilever 20, causing the elastic cantilever 20 to bend and its free end 22 to be offset toward the transparent substrate 10. Assuming that the electric field force is sufficiently strong, the free end 22 portion of the resilient cantilever 20 will abut against the surface of the transparent substrate 10. Since the induction electrode 12 has a distance from the surface of the transparent substrate 10, the induction electrode 12 does not directly contact the elastic cantilever 20, the electric field force between the two will be maintained, and the elastic cantilever 20 is also maintained in the bending. status.
  • the movable reflector 30 located on the free end 22 of the elastic cantilever 20 has been displaced with respect to the initial state. It is assumed that there is a light beam incident from the back surface of the transparent substrate 10 at this time, and a part of the light beam is reflected by the fixed mirror 30 and irradiated onto the movable mirror 30, in addition to the portion that is directly blocked by the elastic cantilever 20. The portion of the beam that is incident on the moving mirror 30 will be reflected again and exit from the exit direction. Since the fixed mirror 40 is parallel to the reflecting surface of the movable mirror 30 at this time, after two reflections, the outgoing direction of the light beam remains in line with the incident direction.
  • the optical switch can be considered as conducting.
  • each optical switch can be regarded as one pixel.
  • an image display can be formed.
  • the present invention further provides a MEMS display, the basic structure comprising: a transparent substrate, an optical switch array disposed on a surface of the transparent substrate, and a backlight located on a back surface of the transparent substrate; The light beam is transmissively imaged through the transparent substrate and the optical switch array.
  • the transparent substrate is usually a glass substrate.
  • the working mechanism of the above MEMS display is also different according to the type of the light source.
  • the MEMS display of the present invention will be further described below in conjunction with specific embodiments.
  • the optical switch array adopts the optical switch shown in FIG. 1
  • the backlight adopts three primary color light sources, for example, three primary colors of RGB (red, green, and blue) or CMY three primary colors (green, Magenta, yellow, three colors) light source.
  • 5 is a schematic cross-sectional view of the MEMS display of the first embodiment, including a glass substrate 100, a backlight 200 disposed on the back surface of the glass substrate 100, and an optical switch array 300 disposed on the surface of the glass substrate 100.
  • the optical switch array only shows two optical switches.
  • each of the optical switches in the optical switch array 300 represents one pixel unit.
  • the amount of light transmitted by each pixel unit can be precisely controlled by adjusting the curvature of the elastic cantilever in the light switch.
  • the three primary colors generated by the backlight 200 are time-division input, and the RGB three primary colors are taken as an example, and specifically include: the interval time is T, and the red light L1, the blue light L2, and the green light L3 are periodically input.
  • the above interval time T should be less than the visual persistence time of the human eye.
  • Each of the pixel units is separately controlled such that the pixel unit transmits primary light of a corresponding kind and light intensity for a certain period of time.
  • the MEMS display When the MEMS display is viewed by a human eye, an image superimposed by a plurality of pixels can be formed due to persistence of vision. The light of the primary colors of different kinds and light intensity are superimposed to visually form different colors, so that the MEMS display of the embodiment displays a colored figure.
  • Figure 6 is a cross-sectional view showing a MEMS display according to a second embodiment of the present invention.
  • the structure of the optical switch array 300 and the glass substrate 100 is exactly the same as that of the first embodiment.
  • the backlight 200 can be a 3D polarized light source, including P-polarized light and S-polarized light.
  • each of the optical switches in the optical switch array 300 of the MEMS display also represents a pixel unit.
  • the amount of light transmitted by each pixel unit is also precisely controlled by adjusting the curvature of the elastic cantilever in the optical switch.
  • the 3D polarized light generated by the backlight 200 also adopts a time-sharing input, and specifically includes: an interval time T', periodically inputting the ⁇ polarized light Lp and the S-polarized light Ls.
  • the above interval time T' is also smaller than the visual persistence time of the human eye.
  • Each of the pixel units is separately controlled such that the pixel unit transmits polarized light of a corresponding kind and intensity during a certain period of time.
  • the P-polarized light Lp and the S-polarized light Ls can form a 3D image, so that the MEMS display of the present embodiment displays a three-dimensional solid figure.
  • the above embodiment utilizes the persistence of vision of the human eye, and the backlights all adopt a time-sharing input mechanism.
  • the 3D effect produced by the visual persistence superposition of P-polarized light and S-polarized light is not ideal, and it is difficult to control the timing of the light source.
  • the present invention also provides a MEMS display of the third embodiment.
  • the optical switch of the optical switch array 300 is further provided with a polarization beam splitter.
  • the polarizing beam splitter can be used to split the superimposed 3D polarized light, for example, the P polarizing beam splitter transmits only P polarized light, and the S polarizing beam splitter transmits only S polarized light.
  • the polarization beam splitter may be disposed on a reflective surface of the movable mirror of the optical switch.
  • the optical switch is divided into a P-polarized optical switch 301 and an S-polarized optical switch 302.
  • the two optical switches are alternately arranged in the optical switch array 300, and adjacent P-polarized light
  • the switch 301 and the S-polarized light switch 302 constitute one pixel group.
  • the backlight 200 simultaneously generates P-polarized light and S-polarized light. After the incident light beam including the two kinds of polarized light is transmitted through the glass substrate 100 to the optical switch array 300, the P-polarized light switch 301 and the S-polarized light switch 302 of each pixel group split the incident light beam, and adjust the emitted polarized light. The light is strong.
  • each pixel unit further includes a corresponding thin film transistor for controlling a corresponding off switch.
  • the inductive electrode of each optical switch can be connected to a fixed electrode, such as ground;
  • the arm is connected to the power source through the thin film transistor; by controlling the conduction or the closing of the thin film transistor, a charge is injected into the elastic cantilever to form a driving electric field between the elastic cantilever and the inducing electrode, thereby controlling the optical switch Open and close state.
  • each pixel unit arranged in the array emits light beams of different light intensities and colors, and the visual effects can be superimposed to form an image to be displayed.

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Description

光开关以及 MEMS显示器
技术领域
本发明涉及微机械机电系统 （MEMS ) 领域， 特别涉及一种基于 MEMS技术的光开关以及使用所述光开关实现图像显示的 MEMS显示 器。 背景技术
液晶电视以及其他平板显示器， 已经成为社会生活中常见的电子 消费产品。 如何进一歩的减小平板显示器的尺寸， 减薄其面板厚度， 是平板显示器的发展方向之一。 由于液晶显示装置的光源必须设置于 面板的背面或嵌入于面板中， 才能获得较好的亮度以及灰度的均匀性， 因此上述光源的设置对减薄面板的厚度带来了较大的困难。
采用机械结构的光路切换开关制作平板显示器是液晶显示器的可 供选择的替代方案。机械的光路切换开关能够快速地路由光源的光束， 使其在所需的像素区域显示， 从而获得良好的视角和大范围的色彩、 灰度显示图像内容。 所述光源可以独立于像素阵列区， 而设置于面板 的任意位置， 因而有利于缩小显示器的面板厚度。 更多关于利用机械 结构的光路切换开关， 制作 MEMS 显示器的内容可以参见专利号为 US2006006448的美国专利。
虽然采用 MEMS技术的光开关在投影显示应用中已获得成功， 然 而在平板显示装置中缺乏实质性的突破。 制作灵敏可靠的光开关， 并 将其应用至 MEMS显示器中， 成为 MEMS显示器的主要研究方向。 发明内容
本发明解决的问题是提供一种光开关以及应用所述光开关的 MEMS显示器， 具有控制机构简单， 易于生产制造的特点。
本发明提供的光开关， 包括： 基底； 弹性悬臂， 所述弹性悬臂具 有固定于基底的固定端以及悬浮的自由端； 活动反射镜， 所述活动反 射镜位于所述弹性悬臂的自由端上； 所述弹性悬臂在驱动电场的作用 下弯曲， 使得活动反射镜移位， 将入射光束反射至出射方向。 可选的， 还包括固定于基底的固定反射镜， 所述固定反射镜的反 射面与弹性悬臂弯曲时活动反射镜的反射面相对； 所述入射光束从所 述基底的背面入射， 并投射于固定反射镜的反射面上。
可选的， 所述基底为透明基底。 所述固定反射镜的反射面与活动 反射镜的反射面平行。
可选的， 所述弹性悬臂为片状金属。
可选的， 所述光开关还包括设置于基底位于弹性悬臂自由端下方 的诱导电极， 所述诱导电极用于形成所述驱动电场。 所述诱导电极设 置于所述基底内， 且与基底表面具有间距。
可选的， 所述光开关还包括设置于基底的支撑结构， 所述弹性悬 臂通过所述支撑结构固定于基底， 还通过所述支撑结构与基底电连接。
可选的， 所述活动反射镜的反射面具有偏振分光镜。
基于上述关开关，本发明还提供了 MEMS显示器，包括透明基板， 设置于透明基板表面的光开关阵列， 以及位于所述透明基板背面的背 光源； 所述背光源产生的光束经由所述透明基板以及光开关阵列透射 成像。
可选的， 所述背光源为 RGB三原色或 CMY三原色光源。
可选的，所述背光源为 3D偏振光源。所述光开关分为 P偏振光开 关以及 S偏振光开关;所述 P偏振光开关的活动反射镜的反射面具有 P 偏振分光镜， 所述 S偏振光开关的活动反射镜的反射面具有 S偏振分 光镜； 所述 P偏振光开关以及 S偏振光开关在光开关阵列中间隔交替 排列。
本发明所述光开关结构简单， 控制方便， 易于生产制造； 所述 MEMS显示器采用光开关作为像素单元构成光开关阵列， 背光源产生 的光束经由透明基板以及光开关阵列透射成像， 具有响应灵敏， 成像 快速的特点。 附图说明
通过附图中所示的本发明的优选实施例的更具体说明， 本发明的 上述及其他目的、 特征和优势将更加清晰。 附图中与现有技术相同的 部件使用了相同的附图标记。 附图并未按比例绘制， 重点在于示出本 发明的主旨。 在附图中为清楚起见， 放大了层和区域的尺寸。
图 1是本发明所述光开关第一实施例的剖面示意图；
图 2至图 4是本发明所述光开关的工作状态示意图；
图 5是本发明所述 MEMS显示器第一实施例的剖面示意图； 图 6是本发明所述 MEMS显示器第二实施例的剖面示意图； 图 7是本发明所述 MEMS显示器第三实施例的剖面示意图。 具体实施方式
本发明提供的一种光开关， 包括： 基底； 弹性悬臂， 所述弹性悬 臂具有固定于基底的固定端以及悬浮的自由端； 活动反射镜， 所述活 动反射镜位于所述弹性悬臂的自由端上； 所述弹性悬臂在驱动电场的 作用下弯曲， 使得活动反射镜移位， 将入射光束反射至出射方向。
进一歩的， 所述基底为透明基底， 所述入射光束从所述基底的背 面入射， 透过基底照射于光开关的弹性悬臂上。
通常为了使得所述光束具有良好的入射角度， 还可以在基底上设 置固定的反射镜， 将所述入射光束先进行一次反射。 并且使得， 所述 弹性悬臂弯曲时， 上述经过一次反射的入射光束能够直接照射于活动 反射镜的反射面上。 从而再经由活动反射镜反射至出射方向。 经过上 述两次反射后， 所述光束的出射方向可以与入射方向一致。 以下结合 具体的实施例， 对本发明所述光开关进一歩介绍。
图 1是本发明光开关具体实施例的剖面示意图， 如图 1所示， 所 述光开关的基本结构包括：透明基底 10; 设置于所述透明基底 10上的 弹性悬臂 20， 所述弹性悬臂 20具有固定于透明基底 10上的固定端 21 以及悬浮的自由端 22; 活动反射镜 30， 设置于弹性悬臂 20的自由端 22上； 固定反射镜 40， 设置于所述透明基底 20。
其中， 透明基底 10可以为玻璃基底， 当入射光束从透明基底 10 的背面入射时， 可以直接透过所述透明基底 10， 而照射于光开关上。
为了使得弹性悬臂 20的自由端 22为悬浮状态， 也即使得所述自 由端 22与透明基底 10之间具有高度差， 还可以在透明基底 10上形成 支撑结构 11。 上述支撑结构 11突出于透明基底 10表面， 用于与弹性 悬臂 20的固定端 21连接。 此外还可以在所述支撑结构 11内制作接触 孔，使得弹性悬臂 20通过支撑结构 11与透明基底 10电连接；具体的， 与透明基底 10内用于控制光开关的控制电路电连接。
在所述透明基底 10上， 位于弹性悬臂 20的下方还设置有诱导电 极 12， 所述诱导电极 12用于产生驱动电场。 通常为了避免弹性悬臂 20弯曲后与诱导电极 12发生直接接触， 所述诱导电极 12可以设置于 透明基底 10内， 并与透明基底 10的表面具有一定间距。
所述弹性悬臂 20可以为片状金属， 可以采用铜、 铝、 金等材质。 所述弹性悬臂 20在未弯曲时可以与透明基底 10表面平行。 当向所述 弹性悬臂 20以及诱导电极 12通电时， 在所述弹性悬臂 20与诱导电极 12之间形成驱动电场，即可以使得弹性悬臂 20受到驱动电场的作用而 弯曲。 具体的， 在本实施例中， 向所述诱导电极 12 以及弹性悬臂 20 与不同电位的电极连接， 所述诱导电极 12与弹性悬臂 20具有电势差， 两者之间便形成所述驱动电场， 所述弹性悬臂 20受到电场力作用而弯 曲， 其自由端 22朝向透明基底 10偏移， 使得位于其上的活动反射镜 30产生移位。且所述电势差越大， 弹性悬臂 20所受的电场力作用也越 强， 弯曲程度也越大。
当活动反射镜 30移位后， 所述固定反射镜 40应当能够将透明基 底 10背面入射的光束反射至移位后的活动反射镜 30，从而使得入射光 束产生二次反射， 从光开关出射。 为了使得出射方向与入射方向一致， 此时固定反射镜 40的反射面应当与活动反射镜 30的反射面平行。
为进一歩说明上述光开关的工作原理， 图 2以及图 3还提供了本 实施例光开关的工作示意图。
如图 2所示， 当光开关中弹性悬臂 20未发生弯曲时， 所述弹性悬 臂 20与透明基底 10表面平行。此时从透明基底 10背面入射的光束在 透射透明基底 10后， 或直接照射于所述弹性悬臂 20， 或经过固定反射 镜 40—次反射而照射于光开关的其他位置例如支撑结构 11上， 均无 法从光开关中出射。此时片状金属的弹性悬臂 20在透光方向上起到遮 光的作用。 光开关可以视为关闭状态。
如图 3所示，将所述诱导电极 12与负电极连接， 而将弹性悬臂 20 与正电极连接， 从而在两者之间形成电势差； 所述电势差使得诱导电 极 12上注入负电荷， 而弹性悬臂 20注入正电荷， 上述异种电荷之间 产生电场力， 作用于弹性悬臂 20上， 导致弹性悬臂 20发生弯曲， 并 且其自由端 22向透明基底 10偏移。 假设所述电场力足够强， 弹性悬 臂 20的自由端 22部分将紧贴于透明基底 10的表面。由于诱导电极 12 与所述透明基底 10的表面具有间距， 因此所述诱导电极 12并不会与 弹性悬臂 20发生直接的接触， 两者之间的电场力将保持， 弹性悬臂 20 也维持在弯曲状态。
在上述弯曲状态下， 位于弹性悬臂 20的自由端 22上的活动反射 器 30相对于初始状态已发生了位移。 假设此时存在从透明基底 10的 背面入射的光束， 除了直接照射于弹性悬臂 20而被遮挡的部分外， 还 有一部分光束经由固定反射镜 30反射而照射于活动反射镜 30上。 该 部分照射于活动反射镜 30上的光束将再次反射， 并从出射方向出射。 且由于此时固定反射镜 40与活动反射镜 30的反射面平行， 因此经过 两次反射后， 光束的出射方向依然与入射方向保持一致。 光开关可以 视为导通状态。
进一歩的如图 4所示， 假设弹性悬臂 20与诱导电极 12之间的电 场力作用不够强， 所述弹性悬臂 20的弯曲度有限， 其自由端 22未能 紧贴于透明基底 10的表面， 所述活动反射镜 30的位移不足。
此时从透明基底 10背面入射的光束， 依然有一部分能够经由固定 反射镜 30反射至活动反射镜 30上， 而从出射方向出射。 但与图 3中 活动反射镜 30具有最大位移量的情况相比， 上述能够出射的光束的光 量明显减弱。 综上所述， 仅需通过控制弹性悬臂 20 以及诱导电极 12 中导入的电荷量， 也即控制弹性悬臂 20与诱导电极 12之间的电势差， 便能够控制所述光开关的透光度， 起到对出射光强进行调节的作用。
将上述光开关在透明基底上形成阵列排布后， 每个光开关可以视 为一个像素点， 通过控制各像素点的透光度， 便能形成图像的显示。
因此基于上述光开关， 本发明还提供了一种 MEMS显示器， 基本 结构包括： 透明基板， 设置于透明基板表面的光开关阵列， 以及位于 所述透明基板背面的背光源； 所述背光源产生的光束经由所述透明基 板以及光开关阵列透射成像。 其中所述透明基板通常采用玻璃基板。
根据光源类型的不同，上述 MEMS显示器的工作机制也不尽相同， 下面结合具体的实施例， 对本发明所述 MEMS显示器作进一歩介绍。 第一实施例
本发明第一实施例的 MEMS显示器， 所述光开关阵列采用图 1所 示光开关， 所述背光源采用三原色光源， 例如 RGB三原色 （红、 绿、 蓝三色）光源或 CMY三原色（青、 品红、 黄三色）光源。 图 5为所述 第一实施例的 MEMS显示器的剖面示意图， 包括玻璃基板 100， 设置 于玻璃基板 100背面的背光源 200以及设置于玻璃基板 100表面的光 开关阵列 300。 所述光开关阵列仅示意出两个光开关。
如图 6所示， 本实施例的 MEMS显示器， 光开关阵列 300中每一 个光开关代表一个像素单元。 各像素单元的透光量可以通过调节光开 关中弹性悬臂的弯曲度进行精确控制。
所述背光源 200所产生的三原色光采用分时输入， 以 RGB三原色 光为例， 具体包括： 间隔时间为 T, 周期性输入红光 Ll、 蓝光 L2以及 绿光 L3。 上述间隔时间 T应当小于人眼的视觉暂留时间。
对各像素单元进行分别控制， 使得所述像素单元在特定时间段内 透过相应种类以及光强的原色光。 当人眼观察所述 MEMS显示器时， 由于视觉暂留， 可以形成多个像素显示相叠加的图像。 而不同种类以 及光强的原色光相叠加， 在视觉上便能形成不同色彩， 从而使得本实 施例的 MEMS显示器显示出彩色的图形。
第二实施例
图 6为本发明第二实施例的 MEMS显示器的剖面示意图。 本实施 例中， 光开关阵列 300以及玻璃基板 100的结构与第一实施例完全相 同，所述背光源 200可以采用 3D偏振光源，包括 P偏振光以及 S偏振 光。
如图 6所示， 所述 MEMS显示器的光开关阵列 300中每一个光开 关也代表一个像素单元。 各像素单元的透光量同样通过调节光开关中 弹性悬臂的弯曲度进行精确控制。
所述背光源 200所产生的 3D偏振光同样采用分时输入，具体包括: 间隔时间 T'， 周期性输入 Ρ偏振光 Lp以及 S偏振光 Ls。 上述间隔时 间 T'也小于人眼的视觉暂留时间。
对各像素单元进行分别控制， 使得所述像素单元在特定时间段内 透过相应种类以及光强的偏振光。 当人眼观察所述 MEMS显示器时， 由于视觉暂留所带来的叠加效果， 上述 P偏振光 Lp与 S偏振光 Ls能 够形成 3D图像， 从而使得本实施例的 MEMS显示器显示出三维立体 图形。
第三实施例
以上实施例利用了人眼的视觉暂留， 背光源均采用分时输入机制。 对于普通的 RGB三原色或 CMY三原色光源效果尚可； 但对于 3D偏 振光源，P偏振光与 S偏振光的视觉暂留叠加产生的 3D效果并不理想， 在光源的时序控制上较为困难。 为解决上述问题， 本发明还提供了第 三实施例的 MEMS显示器。
如图 7所示， 在本实施例中， 所述光开关阵列 300的光开关上还 设置有偏振分光镜。所述偏振分光镜可以用于对叠加的 3D偏振光进行 分光， 例如 P偏振分光镜仅透射 P偏振光， 而 S偏振分光镜仅透射 S 偏振光。 具体的， 上述偏振分光镜可以设置于光开关的活动反射镜的 反射面上。
进一歩的， 本实施例的光开关阵列 300中， 光开关分为 P偏振光 开关 301 以及 S偏振光开关 302， 上述两种光开关在光开关阵列 300 中交替设置， 相邻的 P偏振光开关 301以及 S偏振光开关 302构成一 个像素组。
所述背光源 200同时产生 P偏振光以及 S偏振光。 当包含上述两 种偏振光的入射光束透过玻璃基板 100照射于光开关阵列 300后， 各 像素组的 P偏振光开关 301以及 S偏振光开关 302对上述入射光束分 光， 并调节出射的偏振光的光强。
当人眼观察上述 MEMS显示器时， 可以同时接受两种偏振光， 在 视觉上形成叠加效果。 各像素组所产生的不同强度的偏振光相组合， 便能够形成 3D图形， 从而使得本实施例的 MEMS显示器显示出更为 逼真的三维立体图形。
以上三实施例中， 背光源仅起到产生入射光束的作用， 而决定 MEMS显示器显示图像的， 是通过对各像素单元的光开关进行控制， 调节出射光束的光强。 因此， 所述玻璃基板内还形成有控制电路。 具 体的， 各像素单元还包括相应的薄膜晶体管用于控制相应的关开关。 可以将各光开关的诱导电极连接于固定电极， 例如接地； 而将弹性悬 臂通过所述薄膜晶体管与电源连接； 通过控制所述薄膜晶体管的导通 或关闭， 向所述弹性悬臂注入电荷， 从而在弹性悬臂与诱导电极之间 形成驱动电场， 进而控制所述光开关的开闭状态。 在所述像素阵列区 中， 阵列排布的各像素单元出射不同光强、 颜色的光束， 在视觉效果 上便能够叠加形成所需显示的图像。
本发明虽然已以较佳实施例公开如上， 但其并不是用来限定本发 明， 任何本领域技术人员在不脱离本发明的精神和范围内， 都可以利 用上述揭示的方法和技术内容对本发明技术方案做出可能的变动和修 改， 因此， 凡是未脱离本发明技术方案的内容， 依据本发明的技术实 质对以上实施例所作的任何简单修改、 等同变化及修饰， 均属于本发 明技术方案的保护范围。

Claims

权利要求书：
1、 一种光开关， 其特征在于， 包括： 基底； 弹性悬臂， 所述弹性 悬臂具有固定于基底的固定端以及悬浮的自由端； 活动反射镜， 所述 活动反射镜位于所述弹性悬臂的自由端上； 所述弹性悬臂在驱动电场 的作用下弯曲， 使得活动反射镜移位， 将入射光束反射至出射方向。
2、 如权利要求 1所述的光开关， 其特征在于， 还包括固定于基底 的固定反射镜， 所述固定反射镜的反射面与弹性悬臂弯曲时活动反射 镜的反射面相对； 所述入射光束从所述基底的背面入射， 并投射于固 定反射镜的反射面上。
3、 如权利要求 2所述的光开关， 其特征在于， 所述基底为透明基 底。
4、 如权利要求 2所述的光开关， 其特征在于， 所述固定反射镜的 反射面与活动反射镜的反射面平行。
5、 如权利要求 1所述的光开关， 其特征在于， 所述弹性悬臂为片 状金属。
6、 如权利要求 1所述的光开关， 其特征在于， 还包括设置于基底 位于弹性悬臂自由端下方的诱导电 ¾， 所述诱导电极用于形成所述驱 动电场。
7、 如权利要求 5所述的光开关， 其特征在于， 所述诱导电极设置 于所述基底内， 且与基底表面具有间距。
8、 如权利要求 1所述的光开关， 其特征在于， 还包括设置于基底 的支撑结构， 所述弹性悬臂通过所述支撑结构固定于基底， 还通过所 述支撑结构与基底电连接。
9、 如权利要求 1所述的光开关， 其特征在于， 所述活动反射镜的 反射面具有偏振分光镜。
10、 一种应用了权利要求 1所述光开关的 MEMS显示器， 包括透 明基板， 设置于透明基板表面的光开关阵列， 以及位于所述透明基板 背面的背光源； 所述背光源产生的光束经由所述透明基板以及光开关 阵列透射成像。
11、 如权利要求 10所述的 MEMS显示器， 其特征在于， 所述背 光源为 RGB三原色或 CMY三原色光源。
12、 如权利要求 10所述的 MEMS显示器， 其特征在于， 所述背 光源为 3D偏振光源。
13、 如权利要求 12所述的 MEMS显示器， 其特征在于， 所述光 开关分为 P偏振光开关以及 S偏振光开关； 所述 P偏振光开关的活动 反射镜的反射面具有 P偏振分光镜， 所述 S偏振光开关的活动反射镜 的反射面具有 S偏振分光镜； 所述 P偏振光开关以及 S偏振光开关在 光开关阵列中间隔交替排列。
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US20100202040A1 (en) * 2009-02-06 2010-08-12 U.S. Government As Represented By The Secretary Of The Army Dynamic imaging and/or identification apparatus and method thereof
CN101561556A (zh) * 2009-05-26 2009-10-21 西安电子科技大学 一种全柔性mems光开关

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