JP2017220910A5 - - Google Patents

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Publication number
JP2017220910A5
JP2017220910A5 JP2016116558A JP2016116558A JP2017220910A5 JP 2017220910 A5 JP2017220910 A5 JP 2017220910A5 JP 2016116558 A JP2016116558 A JP 2016116558A JP 2016116558 A JP2016116558 A JP 2016116558A JP 2017220910 A5 JP2017220910 A5 JP 2017220910A5
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Japan
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resonator
output terminal
terminal tout
harmonic
closest
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JP2016116558A
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Japanese (ja)
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JP2017220910A (ja
JP6590760B2 (ja
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Priority to JP2016116558A priority Critical patent/JP6590760B2/ja
Priority claimed from JP2016116558A external-priority patent/JP6590760B2/ja
Priority to US15/497,606 priority patent/US10291206B2/en
Priority to CN201710379794.0A priority patent/CN107493088B/zh
Publication of JP2017220910A publication Critical patent/JP2017220910A/ja
Publication of JP2017220910A5 publication Critical patent/JP2017220910A5/ja
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JP2016116558A 2016-06-10 2016-06-10 弾性波デバイス Active JP6590760B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2016116558A JP6590760B2 (ja) 2016-06-10 2016-06-10 弾性波デバイス
US15/497,606 US10291206B2 (en) 2016-06-10 2017-04-26 Acoustic wave device
CN201710379794.0A CN107493088B (zh) 2016-06-10 2017-05-25 声波器件

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016116558A JP6590760B2 (ja) 2016-06-10 2016-06-10 弾性波デバイス

Publications (3)

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JP2017220910A JP2017220910A (ja) 2017-12-14
JP2017220910A5 true JP2017220910A5 (https=) 2018-03-22
JP6590760B2 JP6590760B2 (ja) 2019-10-16

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JP2016116558A Active JP6590760B2 (ja) 2016-06-10 2016-06-10 弾性波デバイス

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US (1) US10291206B2 (https=)
JP (1) JP6590760B2 (https=)
CN (1) CN107493088B (https=)

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US11206009B2 (en) 2019-08-28 2021-12-21 Resonant Inc. Transversely-excited film bulk acoustic resonator with interdigital transducer with varied mark and pitch
US10911023B2 (en) 2018-06-15 2021-02-02 Resonant Inc. Transversely-excited film bulk acoustic resonator with etch-stop layer
US12237826B2 (en) 2018-06-15 2025-02-25 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch
US10491192B1 (en) * 2018-06-15 2019-11-26 Resonant Inc. Transversely-excited film bulk acoustic resonator
US10601392B2 (en) 2018-06-15 2020-03-24 Resonant Inc. Solidly-mounted transversely-excited film bulk acoustic resonator
US11146232B2 (en) 2018-06-15 2021-10-12 Resonant Inc. Transversely-excited film bulk acoustic resonator with reduced spurious modes
US11323096B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Transversely-excited film bulk acoustic resonator with periodic etched holes
US10637438B2 (en) 2018-06-15 2020-04-28 Resonant Inc. Transversely-excited film bulk acoustic resonators for high power applications
US11996827B2 (en) 2018-06-15 2024-05-28 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with periodic etched holes
US11936358B2 (en) 2020-11-11 2024-03-19 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with low thermal impedance
US11177787B2 (en) * 2018-03-02 2021-11-16 Skyworks Solutions, Inc. Lamb wave resonator and other type of acoustic wave resonator included in one or more filters
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US10992284B2 (en) 2018-06-15 2021-04-27 Resonant Inc. Filter using transversely-excited film bulk acoustic resonators with multiple frequency setting layers
US12155374B2 (en) 2021-04-02 2024-11-26 Murata Manufacturing Co., Ltd. Tiled transversely-excited film bulk acoustic resonator high power filters
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US12375056B2 (en) 2018-06-15 2025-07-29 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators
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US11146238B2 (en) 2018-06-15 2021-10-12 Resonant Inc. Film bulk acoustic resonator fabrication method
US11349452B2 (en) 2018-06-15 2022-05-31 Resonant Inc. Transversely-excited film bulk acoustic filters with symmetric layout
US12009798B2 (en) 2018-06-15 2024-06-11 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with electrodes having irregular hexagon cross-sectional shapes
US12113512B2 (en) 2021-03-29 2024-10-08 Murata Manufacturing Co., Ltd. Layout of XBARs with multiple sub-resonators in parallel
US10985728B2 (en) 2018-06-15 2021-04-20 Resonant Inc. Transversely-excited film bulk acoustic resonator and filter with a uniform-thickness dielectric overlayer
US12149227B2 (en) 2018-06-15 2024-11-19 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
US12119808B2 (en) 2018-06-15 2024-10-15 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
US12021496B2 (en) 2020-08-31 2024-06-25 Murata Manufacturing Co., Ltd. Resonators with different membrane thicknesses on the same die
US12095446B2 (en) 2018-06-15 2024-09-17 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch
US12119805B2 (en) 2018-06-15 2024-10-15 Murata Manufacturing Co., Ltd. Substrate processing and membrane release of transversely-excited film bulk acoustic resonator using a sacrificial tub
US11888463B2 (en) 2018-06-15 2024-01-30 Murata Manufacturing Co., Ltd. Multi-port filter using transversely-excited film bulk acoustic resonators
US12191838B2 (en) 2018-06-15 2025-01-07 Murata Manufacturing Co., Ltd. Solidly-mounted transversely-excited film bulk acoustic device and method
US12155371B2 (en) 2021-03-29 2024-11-26 Murata Manufacturing Co., Ltd. Layout of xbars with multiple sub-resonators in series
US12095441B2 (en) 2018-06-15 2024-09-17 Murata Manufacturing Co., Ltd. Transversely excited film bulk acoustic resonator with recessed interdigital transducer fingers
US11901878B2 (en) 2018-06-15 2024-02-13 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with two-layer electrodes with a wider top layer
US12244295B2 (en) 2018-06-15 2025-03-04 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with two-layer electrodes having a narrower top layer
US12218650B2 (en) 2018-06-15 2025-02-04 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator
US10826462B2 (en) 2018-06-15 2020-11-03 Resonant Inc. Transversely-excited film bulk acoustic resonators with molybdenum conductors
US12081187B2 (en) 2018-06-15 2024-09-03 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator
US11909381B2 (en) 2018-06-15 2024-02-20 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with two-layer electrodes having a narrower top layer
US12170516B2 (en) 2018-06-15 2024-12-17 Murata Manufacturing Co., Ltd. Filters using transversly-excited film bulk acoustic resonators with frequency-setting dielectric layers
US11916539B2 (en) 2020-02-28 2024-02-27 Murata Manufacturing Co., Ltd. Split-ladder band N77 filter using transversely-excited film bulk acoustic resonators
US10998882B2 (en) 2018-06-15 2021-05-04 Resonant Inc. XBAR resonators with non-rectangular diaphragms
US12191837B2 (en) 2018-06-15 2025-01-07 Murata Manufacturing Co., Ltd. Solidly-mounted transversely-excited film bulk acoustic device
US11038487B2 (en) * 2018-07-18 2021-06-15 Skyworks Solutions, Inc. FBAR filter with integrated cancelation circuit
WO2020092414A2 (en) 2018-10-31 2020-05-07 Resonant Inc. Solidly-mounted transversely-excited film bulk acoustic resonator
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CN110071702B (zh) * 2019-02-19 2023-04-07 天津大学 一种带通滤波器及双工器
CN118353412A (zh) 2019-04-05 2024-07-16 株式会社村田制作所 横向激励薄膜体声波谐振器封装和方法
US11811391B2 (en) 2020-05-04 2023-11-07 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with etched conductor patterns
US10992282B1 (en) 2020-06-18 2021-04-27 Resonant Inc. Transversely-excited film bulk acoustic resonators with electrodes having a second layer of variable width
US11742828B2 (en) 2020-06-30 2023-08-29 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with symmetric diaphragm
JP7417487B2 (ja) * 2020-07-15 2024-01-18 京セラ株式会社 弾性波デバイス及び通信装置
US11405019B2 (en) 2020-10-05 2022-08-02 Resonant Inc. Transversely-excited film bulk acoustic resonator matrix filters
US11405017B2 (en) 2020-10-05 2022-08-02 Resonant Inc. Acoustic matrix filters and radios using acoustic matrix filters
CN114513181A (zh) * 2020-11-16 2022-05-17 杭州左蓝微电子技术有限公司 声表面波器件
US12166468B2 (en) 2021-01-15 2024-12-10 Murata Manufacturing Co., Ltd. Decoupled transversely-excited film bulk acoustic resonators for high power filters
US11239816B1 (en) 2021-01-15 2022-02-01 Resonant Inc. Decoupled transversely-excited film bulk acoustic resonators
CN113992185A (zh) * 2021-09-18 2022-01-28 中国电子科技集团公司第五十五研究所 一种超宽带薄膜体声波滤波器电路
US12424999B2 (en) 2021-12-28 2025-09-23 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with gap dielectric stripes in busbar-electrode gaps
US12413196B2 (en) 2022-02-16 2025-09-09 Murata Manufacturing Co., Ltd. Tuning acoustic resonators with back-side coating
US12549151B2 (en) 2022-04-12 2026-02-10 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with thick dielectric layer for improved coupling
US12489415B2 (en) 2022-10-19 2025-12-02 Murata Manufacturing Co., Ltd. Acoustic resonator lid for thermal transport
CN115664375B (zh) * 2022-11-08 2024-11-22 湖南大学 Fbar谐振器组合结构、fbar滤波器提升带宽结构及其制造方法
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