JP2017220910A5 - - Google Patents

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Publication number
JP2017220910A5
JP2017220910A5 JP2016116558A JP2016116558A JP2017220910A5 JP 2017220910 A5 JP2017220910 A5 JP 2017220910A5 JP 2016116558 A JP2016116558 A JP 2016116558A JP 2016116558 A JP2016116558 A JP 2016116558A JP 2017220910 A5 JP2017220910 A5 JP 2017220910A5
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JP
Japan
Prior art keywords
resonator
output terminal
terminal tout
harmonic
closest
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JP2016116558A
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English (en)
Japanese (ja)
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JP6590760B2 (ja
JP2017220910A (ja
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Priority to JP2016116558A priority Critical patent/JP6590760B2/ja
Priority claimed from JP2016116558A external-priority patent/JP6590760B2/ja
Priority to US15/497,606 priority patent/US10291206B2/en
Priority to CN201710379794.0A priority patent/CN107493088B/zh
Publication of JP2017220910A publication Critical patent/JP2017220910A/ja
Publication of JP2017220910A5 publication Critical patent/JP2017220910A5/ja
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Publication of JP6590760B2 publication Critical patent/JP6590760B2/ja
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JP2016116558A 2016-06-10 2016-06-10 弾性波デバイス Active JP6590760B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2016116558A JP6590760B2 (ja) 2016-06-10 2016-06-10 弾性波デバイス
US15/497,606 US10291206B2 (en) 2016-06-10 2017-04-26 Acoustic wave device
CN201710379794.0A CN107493088B (zh) 2016-06-10 2017-05-25 声波器件

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016116558A JP6590760B2 (ja) 2016-06-10 2016-06-10 弾性波デバイス

Publications (3)

Publication Number Publication Date
JP2017220910A JP2017220910A (ja) 2017-12-14
JP2017220910A5 true JP2017220910A5 (OSRAM) 2018-03-22
JP6590760B2 JP6590760B2 (ja) 2019-10-16

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JP2016116558A Active JP6590760B2 (ja) 2016-06-10 2016-06-10 弾性波デバイス

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US (1) US10291206B2 (OSRAM)
JP (1) JP6590760B2 (OSRAM)
CN (1) CN107493088B (OSRAM)

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US11323096B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Transversely-excited film bulk acoustic resonator with periodic etched holes
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US11996822B2 (en) 2018-06-15 2024-05-28 Murata Manufacturing Co., Ltd. Wide bandwidth time division duplex transceiver
US11349452B2 (en) 2018-06-15 2022-05-31 Resonant Inc. Transversely-excited film bulk acoustic filters with symmetric layout
US12149227B2 (en) 2018-06-15 2024-11-19 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
US11901878B2 (en) 2018-06-15 2024-02-13 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with two-layer electrodes with a wider top layer
US12119805B2 (en) 2018-06-15 2024-10-15 Murata Manufacturing Co., Ltd. Substrate processing and membrane release of transversely-excited film bulk acoustic resonator using a sacrificial tub
US10992284B2 (en) 2018-06-15 2021-04-27 Resonant Inc. Filter using transversely-excited film bulk acoustic resonators with multiple frequency setting layers
US12081187B2 (en) 2018-06-15 2024-09-03 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator
US12155374B2 (en) 2021-04-02 2024-11-26 Murata Manufacturing Co., Ltd. Tiled transversely-excited film bulk acoustic resonator high power filters
US11146238B2 (en) 2018-06-15 2021-10-12 Resonant Inc. Film bulk acoustic resonator fabrication method
US11374549B2 (en) 2018-06-15 2022-06-28 Resonant Inc. Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers
US12040781B2 (en) 2018-06-15 2024-07-16 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
US12191837B2 (en) 2018-06-15 2025-01-07 Murata Manufacturing Co., Ltd. Solidly-mounted transversely-excited film bulk acoustic device
US12244295B2 (en) 2018-06-15 2025-03-04 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with two-layer electrodes having a narrower top layer
US12095441B2 (en) 2018-06-15 2024-09-17 Murata Manufacturing Co., Ltd. Transversely excited film bulk acoustic resonator with recessed interdigital transducer fingers
US11870423B2 (en) 2018-06-15 2024-01-09 Murata Manufacturing Co., Ltd. Wide bandwidth temperature-compensated transversely-excited film bulk acoustic resonator
US12095446B2 (en) 2018-06-15 2024-09-17 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch
US10985728B2 (en) 2018-06-15 2021-04-20 Resonant Inc. Transversely-excited film bulk acoustic resonator and filter with a uniform-thickness dielectric overlayer
US12170516B2 (en) 2018-06-15 2024-12-17 Murata Manufacturing Co., Ltd. Filters using transversly-excited film bulk acoustic resonators with frequency-setting dielectric layers
US12021496B2 (en) 2020-08-31 2024-06-25 Murata Manufacturing Co., Ltd. Resonators with different membrane thicknesses on the same die
US12119808B2 (en) 2018-06-15 2024-10-15 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
US11876498B2 (en) 2018-06-15 2024-01-16 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method
US11916539B2 (en) 2020-02-28 2024-02-27 Murata Manufacturing Co., Ltd. Split-ladder band N77 filter using transversely-excited film bulk acoustic resonators
US11967945B2 (en) 2018-06-15 2024-04-23 Murata Manufacturing Co., Ltd. Transversly-excited film bulk acoustic resonators and filters
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US11742828B2 (en) 2020-06-30 2023-08-29 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with symmetric diaphragm
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US11405017B2 (en) 2020-10-05 2022-08-02 Resonant Inc. Acoustic matrix filters and radios using acoustic matrix filters
US11405019B2 (en) 2020-10-05 2022-08-02 Resonant Inc. Transversely-excited film bulk acoustic resonator matrix filters
CN114513181A (zh) * 2020-11-16 2022-05-17 杭州左蓝微电子技术有限公司 声表面波器件
US11239816B1 (en) 2021-01-15 2022-02-01 Resonant Inc. Decoupled transversely-excited film bulk acoustic resonators
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CN113992185A (zh) * 2021-09-18 2022-01-28 中国电子科技集团公司第五十五研究所 一种超宽带薄膜体声波滤波器电路
US12424999B2 (en) 2021-12-28 2025-09-23 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with gap dielectric stripes in busbar-electrode gaps
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