JP2017219860A5 - - Google Patents

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JP2017219860A5
JP2017219860A5 JP2017163780A JP2017163780A JP2017219860A5 JP 2017219860 A5 JP2017219860 A5 JP 2017219860A5 JP 2017163780 A JP2017163780 A JP 2017163780A JP 2017163780 A JP2017163780 A JP 2017163780A JP 2017219860 A5 JP2017219860 A5 JP 2017219860A5
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optical device
membrane
piezoelectric
ring
region
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JP2017219860A (ja
JP6560311B2 (ja
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JP2017163780A 2009-09-15 2017-08-28 圧電作動変形可能メンブレンを有する光学デバイス Active JP6560311B2 (ja)

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FR0956327 2009-09-15
FR0956327A FR2950153B1 (fr) 2009-09-15 2009-09-15 Dispositif optique a membrane deformable a actionnement piezoelectrique

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JP2017219860A JP2017219860A (ja) 2017-12-14
JP2017219860A5 true JP2017219860A5 (enExample) 2018-03-08
JP6560311B2 JP6560311B2 (ja) 2019-08-14

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JP2012528385A Active JP5907871B2 (ja) 2009-09-15 2010-09-14 圧電作動変形可能メンブレンを有する光学デバイス
JP2015224647A Active JP6254563B2 (ja) 2009-09-15 2015-11-17 圧電作動変形可能メンブレンを有する光学デバイス
JP2017163780A Active JP6560311B2 (ja) 2009-09-15 2017-08-28 圧電作動変形可能メンブレンを有する光学デバイス

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JP2012528385A Active JP5907871B2 (ja) 2009-09-15 2010-09-14 圧電作動変形可能メンブレンを有する光学デバイス
JP2015224647A Active JP6254563B2 (ja) 2009-09-15 2015-11-17 圧電作動変形可能メンブレンを有する光学デバイス

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US (1) US8879160B2 (enExample)
EP (2) EP3246734A1 (enExample)
JP (3) JP5907871B2 (enExample)
FR (1) FR2950153B1 (enExample)
WO (1) WO2011032925A1 (enExample)

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