FR2950153B1 - Dispositif optique a membrane deformable a actionnement piezoelectrique - Google Patents

Dispositif optique a membrane deformable a actionnement piezoelectrique

Info

Publication number
FR2950153B1
FR2950153B1 FR0956327A FR0956327A FR2950153B1 FR 2950153 B1 FR2950153 B1 FR 2950153B1 FR 0956327 A FR0956327 A FR 0956327A FR 0956327 A FR0956327 A FR 0956327A FR 2950153 B1 FR2950153 B1 FR 2950153B1
Authority
FR
France
Prior art keywords
zone
actuation
anchored
membrane
optical device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0956327A
Other languages
English (en)
French (fr)
Other versions
FR2950153A1 (fr
Inventor
Sebastien Bolis
Stephane Moreau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat à l'Énergie Atomique et Aux Énergies Alternatives
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0956327A priority Critical patent/FR2950153B1/fr
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to EP10751963.9A priority patent/EP2478393B1/fr
Priority to US13/395,169 priority patent/US8879160B2/en
Priority to JP2012528385A priority patent/JP5907871B2/ja
Priority to PCT/EP2010/063427 priority patent/WO2011032925A1/fr
Priority to EP17175653.9A priority patent/EP3246734A1/fr
Publication of FR2950153A1 publication Critical patent/FR2950153A1/fr
Application granted granted Critical
Publication of FR2950153B1 publication Critical patent/FR2950153B1/fr
Priority to JP2015224647A priority patent/JP6254563B2/ja
Priority to JP2017163780A priority patent/JP6560311B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/12—Fluid-filled or evacuated lenses
    • G02B3/14—Fluid-filled or evacuated lenses of variable focal length
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Elements Other Than Lenses (AREA)
FR0956327A 2009-09-15 2009-09-15 Dispositif optique a membrane deformable a actionnement piezoelectrique Active FR2950153B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR0956327A FR2950153B1 (fr) 2009-09-15 2009-09-15 Dispositif optique a membrane deformable a actionnement piezoelectrique
US13/395,169 US8879160B2 (en) 2009-09-15 2010-09-14 Optical device with deformable piezoelectric actuation membrane
JP2012528385A JP5907871B2 (ja) 2009-09-15 2010-09-14 圧電作動変形可能メンブレンを有する光学デバイス
PCT/EP2010/063427 WO2011032925A1 (fr) 2009-09-15 2010-09-14 Dispositif optique a membrane deformable a actionnement piezoelectrique
EP10751963.9A EP2478393B1 (fr) 2009-09-15 2010-09-14 Dispositif optique a membrane deformable a actionnement piezoelectrique
EP17175653.9A EP3246734A1 (fr) 2009-09-15 2010-09-14 Dispositif optique a membrane deformable a actionnement piezoelectrique
JP2015224647A JP6254563B2 (ja) 2009-09-15 2015-11-17 圧電作動変形可能メンブレンを有する光学デバイス
JP2017163780A JP6560311B2 (ja) 2009-09-15 2017-08-28 圧電作動変形可能メンブレンを有する光学デバイス

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0956327A FR2950153B1 (fr) 2009-09-15 2009-09-15 Dispositif optique a membrane deformable a actionnement piezoelectrique

Publications (2)

Publication Number Publication Date
FR2950153A1 FR2950153A1 (fr) 2011-03-18
FR2950153B1 true FR2950153B1 (fr) 2011-12-23

Family

ID=42105849

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0956327A Active FR2950153B1 (fr) 2009-09-15 2009-09-15 Dispositif optique a membrane deformable a actionnement piezoelectrique

Country Status (5)

Country Link
US (1) US8879160B2 (enExample)
EP (2) EP2478393B1 (enExample)
JP (3) JP5907871B2 (enExample)
FR (1) FR2950153B1 (enExample)
WO (1) WO2011032925A1 (enExample)

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Also Published As

Publication number Publication date
FR2950153A1 (fr) 2011-03-18
US20120170134A1 (en) 2012-07-05
JP2013504778A (ja) 2013-02-07
JP6254563B2 (ja) 2017-12-27
JP2017219860A (ja) 2017-12-14
JP6560311B2 (ja) 2019-08-14
EP2478393B1 (fr) 2017-06-14
JP5907871B2 (ja) 2016-04-26
EP2478393A1 (fr) 2012-07-25
EP3246734A1 (fr) 2017-11-22
WO2011032925A1 (fr) 2011-03-24
US8879160B2 (en) 2014-11-04
JP2016048389A (ja) 2016-04-07

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