JP2017209633A - Nozzle cleaning device, coating applicator, and nozzle cleaning method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To inhibit wear of a scraper which is slid on a slit nozzle to clean the slit nozzle.SOLUTION: A spreader 61A spreads a rinse liquid Lb on an inclined surface 26 in advance before a scraper 61B is slid on the inclined surface 26 of a lip part 24 of a slit nozzle 2. Thus, when the scraper 61B is slid on the inclined surface 26 of the lip part 24 of the slit nozzle 2, the rinse liquid Lb, which is spread by the spreader 61A in advance, enters into a space between the inclined surface 26 of the lip part 24 of the slit nozzle 2 and the scraper 61B and functions as a lubricant. As a result, wear of the scraper 61B which is slid on the slit nozzle 2 to clean the slit nozzle 2 can be inhibited.SELECTED DRAWING: Figure 8

Description

  The present invention is for precision electronic devices such as glass substrates for liquid crystal display devices, semiconductor substrates, glass substrates for PDPs, glass substrates for photomasks, substrates for color filters, substrates for recording disks, substrates for solar cells, substrates for electronic paper, etc. Coating apparatus for discharging a coating liquid from a nozzle discharge port to a substrate, a rectangular glass substrate, a film liquid crystal flexible substrate, an organic EL substrate (hereinafter simply referred to as “substrate”), and the nozzle discharge port The present invention relates to a nozzle cleaning member that removes deposits adhering to the nozzle and a nozzle cleaning device that cleans the nozzle with the nozzle cleaning member.

  Conventionally, in order to apply a coating solution to a substrate, a nozzle that discharges the coating solution from a discharge port is generally used. In such a nozzle, there are cases where deposits such as a coating liquid that adheres to the side surface of the tip portion where the discharge port is provided and is dried and hardened fall to contaminate the substrate. Therefore, the slit coater of Patent Document 1 removes the coating liquid adhering to the side surface of the nozzle tip by sliding the wiping head, which is a cleaning member, on the nozzle before the start of application by the nozzle (slit nozzle). To do.

Japanese Patent No. 4985007

  By the way, in the configuration in which the cleaning member is slid on the nozzle, a part of the cleaning member that has been scraped off due to wear becomes wear powder, which may cause wear of the cleaning member or contamination of the substrate due to the fall of the wear powder. It was. In Patent Document 1, since the coating liquid is discharged from the discharge port of the nozzle before the cleaning member is slid on the nozzle, the wear of the cleaning member can be suppressed if the coating liquid functions as a lubricant. However, in actuality, since the cleaning member slides on the nozzle without a sufficient amount of the coating liquid entering between the cleaning member and the nozzle, the coating liquid does not function sufficiently as a lubricant, and the cleaning member There was a case where the wear of the steel was also a problem.

  The present invention has been made in view of the above problems, and an object thereof is to provide a technique capable of suppressing wear of a member that is slid by a nozzle for cleaning the nozzle.

  The nozzle cleaning device according to the first aspect of the present invention is arranged on the discharge port and the side surface of the tip portion while being spaced from the side surface of the tip portion of the nozzle that discharges the coating liquid from the discharge port provided at the tip of the tip portion. A first opposing member that is movable in the movement direction along the nozzle discharge port in an opposed state, and in the movement direction in contact with the side surface of the tip of the nozzle on the upstream side in the movement direction of the first opposing member. The movable contact member and the nozzle discharge the coating liquid from the discharge port, and then the first counter member is moved in the moving direction so that the coating liquid attached to the tip is spread to the side surface by the first counter member. In addition, a moving unit that performs a member moving operation for removing the coating liquid spread on the side surface from the side surface by the contact member by moving the contact member in the moving direction.

  A coating apparatus according to a first aspect of the present invention includes a nozzle that discharges a coating liquid from a discharge port provided at the tip of the tip, and the nozzle cleaning apparatus according to the first aspect.

  The nozzle cleaning method according to the first aspect of the present invention includes a step of attaching a coating liquid to a tip portion of a nozzle that discharges a coating liquid from a discharge port provided at a tip of the tip portion, and a side surface of the nozzle tip portion. A step of spreading the coating liquid adhering to the tip portion to the side surface by the first facing member by moving the discharge port of the tip portion and the first facing member facing the side surface in the moving direction along the discharge port while leaving a space therebetween And the contact member that contacts the side surface of the tip of the nozzle on the upstream side in the movement direction of the first opposing member is moved in the movement direction, so that the coating liquid spread on the side surface is removed from the side surface by the contact member. A process.

  In the first aspect of the present invention thus configured (nozzle cleaning device, coating device, nozzle cleaning method), the side surface of the tip of the nozzle that discharges the coating liquid from the discharge port provided at the tip of the tip is cleaned. In order to do this, a member moving operation is performed in which the first opposing member and the contact member are moved in the moving direction along the discharge port of the nozzle. In this member moving operation, the first opposing member moves while facing the discharge port and the side surface of the tip portion while being spaced apart from the side surface of the tip portion of the nozzle, so that the coating liquid adhering to the tip portion is removed. Spread on the side of the tip. Further, the contact member moves while being in contact with the side surface of the tip of the nozzle, thereby removing the coating liquid spread on the side surface. That is, before the contact member slides on the side surface of the tip portion of the nozzle, the first facing member spreads the coating liquid on the side surface in advance. Therefore, when the contact member is slid on the side surface of the nozzle tip, the coating liquid spread in advance by the first facing member enters between the side surface of the nozzle tip and the contact member, and the lubricant. Can function as. As a result, it is possible to suppress wear of a member (contact member) that slides on the nozzle for cleaning the nozzle.

  In the nozzle cleaning device according to the second aspect of the present invention, the nozzle cleaning device according to the second aspect of the present invention is arranged on the discharge port and the side surface of the tip portion while being spaced from the side surface of the tip portion of the nozzle that discharges coating liquid from the discharge port provided at the tip of the tip portion. A first opposing member that is movable in the movement direction along the nozzle discharge port in an opposed state, and in the movement direction in contact with the side surface of the tip of the nozzle on the upstream side in the movement direction of the first opposing member. A movable contact member, a rinsing liquid supply part for supplying a rinsing liquid to the tip of the nozzle, and a first counter member are moved in the moving direction so as to be supplied by the rinsing liquid supply part and attached to the tip. A moving unit that performs a member moving operation of removing the rinsing liquid spread on the side surface from the side surface by the contact member by spreading the rinsing liquid on the side surface by the first facing member and moving the contact member in the moving direction; Is provided.

  A coating apparatus according to a second aspect of the present invention includes a nozzle that discharges the coating liquid from a discharge port provided at the tip of the tip, and the nozzle cleaning apparatus according to the second aspect.

  The nozzle cleaning method according to the second aspect of the present invention includes a step of attaching a rinsing liquid to a tip portion of a nozzle that discharges a coating liquid from a discharge port provided at a tip of the tip portion, and a side surface of the tip portion of the nozzle. The first counter member that is opposed to the discharge port and the side surface of the tip part while moving the gap in the moving direction along the discharge port while spreading the interval, spreads the rinse liquid adhering to the tip part to the side surface by the first counter member. Then, the rinsing liquid spread on the side surface is removed from the side surface by the contact member by moving the contact member that contacts the side surface of the tip of the nozzle on the upstream side in the movement direction of the first opposing member in the movement direction. A process.

  In the second aspect (nozzle cleaning device, coating device, nozzle cleaning method) of the present invention configured as described above, the side surface of the tip portion of the nozzle that discharges the coating liquid from the discharge port provided at the tip of the tip portion is cleaned. In order to do this, a member moving operation is performed in which the first opposing member and the contact member are moved in the moving direction along the discharge port of the nozzle. In this member moving operation, the first opposing member moves while facing the discharge port and the side surface of the tip portion while being spaced from the side surface of the tip portion of the nozzle, so that the rinse liquid attached to the tip portion is removed. Spread on the side of the tip. Further, the contact member moves while being in contact with the side surface of the tip portion of the nozzle, thereby removing the rinsing liquid spread on the side surface. That is, before the contact member is slid on the side surface of the tip portion of the nozzle, the first facing member spreads the rinsing liquid on the side surface in advance. Therefore, when the contact member slides on the side surface of the tip portion of the nozzle, the rinsing liquid spread in advance by the first facing member enters between the side surface of the tip portion of the nozzle and the contact member, and the lubricant Can function as. As a result, it is possible to suppress wear of a member (contact member) that slides on the nozzle for cleaning the nozzle.

  The rinsing liquid supply unit supplies rinsing liquid from the liquid supply hole provided in the first opposing member between the first opposing member and the tip of the nozzle, and the first opposing member extends from the liquid supply hole. You may comprise a nozzle cleaning apparatus so that the supplied rinse liquid may be spread to a side surface during execution of member movement operation. In such a configuration, the rinsing liquid supplied from the liquid supply hole between the first facing member and the tip of the nozzle enters between the side surface of the tip of the nozzle and the contact member and functions as a lubricant. it can. Therefore, it is possible to suppress wear of a member (contact member) that slides on the nozzle for cleaning the nozzle.

  In addition, the first counter member and the contact member in the moving direction are movable in the moving direction while facing the discharge port and the side surface of the tip portion while being spaced from the side surface of the tip portion of the nozzle. The counter unit further includes two opposing members, and the moving unit moves the second opposing member in the movement direction in the member moving operation, so that the rinsing liquid spread on the side surface by the first opposing member is further spread on the side surface by the second opposing member. Thus, you may comprise a nozzle cleaning apparatus. In such a configuration, the rinsing liquid can be spread over a wider range of the side surface of the tip portion before the contact member is slid to the side surface of the tip portion of the nozzle. Therefore, when the contact member slides on the side surface of the tip portion of the nozzle, the rinsing liquid enters a wider area between the contact member and the side surface of the tip portion of the nozzle and effectively functions as a lubricant. be able to. Therefore, it is possible to more reliably suppress wear of a member (contact member) that slides on the nozzle for cleaning the nozzle.

  In addition, a support portion that urges toward the tip portion of the nozzle while integrally supporting the first facing member and the contact member is provided, and the contact member projects against the side surface of the tip portion of the nozzle by the urging force of the support portion. You may comprise a nozzle cleaning apparatus so that the space | interval of a 1st opposing member and the side surface of the front-end | tip part of a nozzle may be prescribed | regulated in the applied state. In such a configuration, the abutting member is abutted against the side surface of the tip portion of the nozzle by the biasing force of the support portion, so that the interval between the first facing member and the side surface of the tip portion of the nozzle is appropriately defined and rinsed on this side surface. The liquid can be spread uniformly, and the abutting member can be brought into close contact with the side surface of the tip of the nozzle, so that the rinse liquid can be reliably removed from this side surface.

  Moreover, you may comprise a nozzle cleaning apparatus so that a contact member is an elastic body and a 1st opposing member is a hard body harder than a contact member. In such a configuration, the rinsing liquid can be uniformly spread on the side surface of the tip portion of the nozzle by the hard first opposing member, and damage to the side surface of the tip portion of the nozzle due to the contact of the contact member can be suppressed.

  According to the present invention, when the contact member is slid on the side surface of the tip portion of the nozzle, the coating liquid or the rinsing liquid spread in advance by the first facing member is applied to the side surface of the tip portion of the nozzle and the contact member. Can function as a lubricant. As a result, it is possible to suppress wear of a member (contact member) that slides on the nozzle for cleaning the nozzle.

It is a perspective view which shows typically the coating device which concerns on this invention. It is a side view which shows typically the coating device shown in FIG. It is a top view which shows roughly arrangement | positioning of each part of the coating device shown in FIG. It is the side view which looked at the slit nozzle from the X direction. It is a perspective view showing a 1st embodiment of a nozzle cleaning device. It is a figure which shows an example of the nozzle cleaning member which a nozzle cleaning apparatus uses. It is a flowchart which shows an example of the cleaning process by a nozzle cleaning apparatus. It is a front view which shows typically the operation | movement performed according to the flowchart of FIG. It is a side view which shows typically the operation | movement performed according to the flowchart of FIG. It is a perspective view which shows typically the operation | movement performed according to the flowchart of FIG. It is a perspective view which shows 2nd Embodiment of a nozzle cleaning apparatus.

  FIG. 1 is a perspective view schematically showing a coating apparatus according to the present invention. FIG. 2 is a side view schematically showing the coating apparatus shown in FIG. Further, FIG. 3 is a top view schematically showing the arrangement of each part of the coating apparatus shown in FIG. 1, 2, 3, and the subsequent drawings, an XYZ orthogonal coordinate system in which the Z direction is the vertical direction and the XY plane is the horizontal plane is appropriately attached and necessary to clarify the directional relationship. Accordingly, the dimensions and number of each part are exaggerated or simplified. Moreover, in FIG. 2 and FIG. 3, some structures, such as a nozzle support body, are abbreviate | omitted.

  The coating device 1 is a coating device called a slit coater that applies a coating solution to the surface 31 of the substrate 3 using the slit nozzle 2. The coating apparatus 1 uses various coating liquids such as a photoresist liquid that becomes an etching resistant coating, a photoresist liquid for color filters, a polyimide precursor, silicon, nanometal ink, or a slurry (paste) containing a conductive material. It is possible to use. In addition, for the substrate 3 to be coated, a glass substrate for a liquid crystal display device, a semiconductor substrate, a glass substrate for a PDP, a glass substrate for a photomask, a substrate for a color filter, a substrate for a recording disk, a substrate for a solar cell, and an electronic paper The present invention can be applied to various substrates such as substrates for precision electronic devices such as substrates, rectangular glass substrates, flexible substrates for film liquid crystals, and organic EL substrates. In the present specification, the “surface 31 of the substrate 3” means a main surface of the main surface of the substrate 3 on which the coating liquid is applied.

  The coating apparatus 1 includes a stage 4 capable of adsorbing and holding the substrate 3 in a horizontal posture, a coating processing unit 5 that applies a coating process to the substrate 3 held on the stage 4 using the slit nozzle 2, and a slit prior to the coating process. A nozzle cleaning device 6 that performs a cleaning process on the nozzle 2 and a control unit 8 that controls these units are provided.

  FIG. 4 is a side view of the slit nozzle as seen from the X direction. The slit nozzle 2 has a discharge port 21 which is a long slit-like opening extending in the X direction. The discharge port 21 is shorter than the entire length of the slit nozzle 2 in the X direction, and the discharge port 21 does not open at both ends of the slit nozzle 2 in the X direction. The slit nozzle 2 has a configuration capable of discharging the coating liquid from the discharge port 21 toward the surface 31 of the substrate 3 held on the stage 4. Specifically, the slit nozzle 2 includes a main body portion 22 fixedly supported by a nozzle support 51 (FIG. 1), and an internal flow path for supplying a coating liquid supplied from a supply mechanism (not shown) to the discharge port 21. 23 and a lip portion 24 projecting downward from the main body portion 22.

  The lip portion 24 is formed on a flat tip surface 25 provided at the tip (lower end) of the protrusion, an inclined surface 26a that is an inclined surface formed on the + Y side of the protrusion, and the −Y side of the protrusion. And an inclined surface 26b which is an inclined surface. In the following description, when the inclined surface 26 a and the inclined surface 26 b are not distinguished, they are simply referred to as the inclined surface 26. As described above, the lip portion 24 has a tapered convex shape in a side view from the X direction which is the longitudinal direction thereof, the discharge port 21 is provided at the convex tip (lower end), and each convex side surface is an inclined surface. 26.

  In the slit nozzle 2 configured as described above, when the coating liquid is supplied from a supply mechanism (not shown), the coating liquid is uniformly widened in the longitudinal direction (X direction) of the slit nozzle 2 through the internal flow path 23 and sent. The liquid is discharged and discharged downward from the discharge port 21 provided on the front end surface 25 of the lip portion 24. As described above, when the coating operation is performed on the substrate 3 while discharging the coating liquid from the discharge port 21 of the slit nozzle 2, the coating liquid may adhere to the peripheral portion (lip portion 24) of the discharge port 21 of the slit nozzle 2. is there. The adhering coating solution is dried to form a residue. If this is left as it is, it may hinder good discharge or cause contamination of the film formed on the substrate 3. Therefore, in the coating apparatus 1, the nozzle cleaning apparatus 6 performs a cleaning process for removing the deposits. Details of this will be described later.

  Returning to FIG. 1 to FIG. The stage 4 is made of a stone material such as granite having a substantially rectangular parallelepiped shape, and a holding surface 41 that holds the substrate 3 by processing it into a substantially horizontal flat surface on the −Y side of its upper surface (+ Z side). Is provided. A large number of vacuum suction ports (not shown) are formed on the holding surface 41 in a dispersed manner. By adsorbing the substrate 3 by these vacuum suction ports, the substrate 3 is held in a substantially horizontal state at a predetermined position during the coating process. In addition, the holding | maintenance aspect of the board | substrate 3 is not limited to this, For example, you may comprise so that the board | substrate 3 may be hold | maintained mechanically.

  Further, a nozzle adjustment area AR1 is provided on the + Y side of the area occupied by the holding surface 41 in the stage 4, and the nozzle cleaning device 6 is arranged in the nozzle adjustment area AR1. The nozzle cleaning device 6 will be described in detail later.

  In the coating apparatus 1, a movement mechanism (described later) that moves the slit nozzle 2 in the Y direction is provided in the coating processing unit 5, and the slit nozzle 2 is reciprocated between the upper side of the holding surface 41 and the upper side of the nozzle adjustment area AR1. Move. Then, during the period in which the slit nozzle 2 is moving above the nozzle adjustment area AR1, that is, in the period in which there is no slit nozzle 2 above the region occupied by the holding surface 41 in the stage 4, the preceding substrate 3 after the coating process is performed. Unloading and loading of the subsequent substrate 3 before the coating process are performed on the stage 4. On the other hand, while the slit nozzle 2 is moving above the holding surface 41, the coating liquid is applied to the surface 31 of the substrate 3 on the holding surface 41.

  The moving mechanism of the coating processing unit 5 includes a nozzle support 51 having a bridge structure that mainly supports the slit nozzle 2 across the stage 4 in the X direction and a pair of guide rails 52 extending in the Y direction. 51 and a slit nozzle moving unit 53 that horizontally moves the slit nozzle 2 supported by the nozzle 51. The nozzle support 51 includes a fixing member 51a that fixes the slit nozzle 2, and two elevating mechanisms 51b that support the fixing member 51a and raise and lower it. The fixing member 51a is formed of a bar-shaped member having a rectangular cross section such as a carbon fiber reinforced resin whose longitudinal direction is the X direction.

  The two elevating mechanisms 51b are connected to both ends of the fixing member 51a in the longitudinal direction, and each include an AC servo motor and a ball screw. By these elevating mechanisms 51b, the fixing member 51a and the slit nozzle 2 fixed thereto are moved up and down in the vertical direction (Z direction), and the interval between the ejection port 21 of the slit nozzle 2 and the substrate 3, that is, the ejection port for the substrate 3 The relative height of 21 is adjusted. The vertical position of the fixing member 51a is not shown, for example, but is provided on the scale portion provided on the side surface of the elevating mechanism 51b and the side surface of the slit nozzle 2 facing the scale portion. It can detect with the linear encoder comprised with the detected sensor.

  As shown in FIG. 1, the nozzle support 51 configured in this way has a bridge structure that spans the left and right ends of the stage 4 along the X direction and straddles the holding surface 41. The slit nozzle moving unit 53 moves the nozzle support 51 as the bridging structure and the slit nozzle 2 fixed and held relative thereto relative to the substrate 3 held on the stage 4 along the Y direction. It functions as a moving means. Specifically, the slit nozzle moving unit 53 includes a guide rail 52 that guides the movement of the slit nozzle 2 in the Y direction, a linear motor 54 that is a driving source, and a discharge port of the slit nozzle 2 on each of the ± X sides. And a linear encoder 55 for detecting the position of.

  As shown in FIG. 2, the two guide rails 52 are arranged at both ends in the X direction of the stage 4 from the nozzle cleaning position (positioning position of the nozzle cleaning device 6) Y1 along the Y direction from the application end position (holding surface 41). -Y side end position) is extended so as to include a section up to Y3. For this reason, the slit nozzle moving unit 53 guides the lower ends of the two lifting mechanisms 51b along the two guide rails 52, so that the slit nozzle 2 is held on the nozzle cleaning position Y1 and the substrate 3 by the stage 3. It moves between the positions facing to. In FIG. 2, the position Y2 is shown in addition to the positions Y1 and Y3. This position Y2 means a coating start position corresponding to the Y direction range of the coating region RT of the substrate 3.

  Each linear motor 54 is an AC coreless linear motor having a stator 54a and a mover 54b. The stator 54a is provided on both side surfaces in the X direction of the stage 4 along the Y direction. On the other hand, the moving element 54b is fixed to the outside of the elevating mechanism 51b. The linear motor 54 functions as a drive source for the slit nozzle moving unit 53 by the magnetic force generated between the stator 54a and the mover 54b.

  Each linear encoder 55 has a scale portion 55a and a detection portion 55b. The scale portion 55 a is provided along the Y direction below the stator 54 a of the linear motor 54 fixed to the stage 4. On the other hand, the detection unit 55b is fixed to the outer side of the moving element 54b of the linear motor 54 fixed to the elevating mechanism 51b, and is arranged to face the scale unit 55a. The linear encoder 55 detects the position of the discharge port 21 of the slit nozzle 2 in the Y direction based on the relative positional relationship between the scale unit 55a and the detection unit 55b.

  With the configuration as described above, the slit nozzle 2 can move in the Y direction, which is relatively horizontal with respect to the holding surface 41, in the upper space of the holding surface 41 where the substrate 3 is held. The coating apparatus 1 forms a coating layer on the surface 31 of the substrate 3 held by the holding surface 41 by relatively moving the slit nozzle 2 while discharging the coating liquid from the discharge port 21 of the slit nozzle 2. In addition, the area | region (frame-shaped area | region) of predetermined width from the edge part of each edge | side of the board | substrate 3 is a non-application area | region which is not the application object of a coating liquid. And the rectangular area | region except this non-application | coating area | region is the application | coating area | region RT which should apply | coat an application liquid among the board | substrates 3 (FIG. 3). For this reason, from the application start position Y2 (the + Y side end of the application region RT) corresponding to the Y-direction range of the application region RT of the substrate 3 in the movement section of the slit nozzle 2, the application end position Y3 (−Y of the application region RT). The coating liquid is discharged from the discharge port 21 in the section of the side end).

  In addition, the slit nozzle 2 is a holding surface of the substrate 3 during a period when the coating process is not performed on the stage 4 such as a delivery period of the substrate 3 between the coating apparatus 1 and the external transport mechanism (carrying-in / out period of the substrate 3). It is saved in the nozzle adjustment area AR1 deviating from 41 to the + Y side (the state shown in FIG. 1), and undergoes a cleaning process by the nozzle cleaning device 6. Next, the configuration and operation of the nozzle cleaning device 6 will be described in detail with reference to FIGS. 2, 3, 5 and 6.

  FIG. 5 is a perspective view showing the first embodiment of the nozzle cleaning device. FIG. 6 is a view showing an example of a nozzle cleaning member used by the nozzle cleaning device. The nozzle cleaning device 6 includes a removal unit 6A that removes deposits adhering to the lip portion 24 by moving with the nozzle cleaning member 61 in the cleaning direction Dc along the lip portion 24 of the slit nozzle 2, and a removal unit 6A. And a drive unit 6B for driving the cleaning device in the cleaning direction Dc. Here, the cleaning direction Dc is a direction parallel to the X direction facing one direction opposite to the arrow in the X direction, and the drive unit 6B can reciprocate the removal unit 6A in the X direction. Examples of the deposits to be removed by the removal unit 6A include various substances that can adhere to the lip portion 24 of the slit nozzle 2. For example, the solute of the coating solution is dried and solidified. For example, when the coating solution is a color filter photoresist, the pigment contained in the coating solution adheres to the lip portion 24 of the slit nozzle 2 as a deposit.

  In addition, the nozzle cleaning device 6 includes a cleaning unit 6C (FIG. 3) that cleans the nozzle cleaning member 61 inside a sealed space formed by sealing the nozzle cleaning member 61. The cleaning unit 6 </ b> C is attached to the nozzle cleaning member 61 by supplying a cleaning liquid in the sealed space to the nozzle cleaning member 61 that wipes and removes the deposits attached to the lip portion 24 of the slit nozzle 2. This is a unit to wash away deposits. As this washing | cleaning unit 6C, what was described in Unexamined-Japanese-Patent No. 2014-176812 can be used, for example.

  Further, the nozzle cleaning device 6 includes a rinse liquid supply unit 6E that supplies a rinse liquid used for cleaning the lip portion 24 of the slit nozzle 2. The rinse liquid supply unit 6E supplies the rinse liquid to the removal unit 6A via a flexible rinse liquid supply pipe (not shown) whose tip is attached to the removal unit 6A.

  The removal unit 6 </ b> A mainly includes a nozzle cleaning member 61 having an inclined surface corresponding to the inclined surface 26 of the slit nozzle 2, and a support portion 62 that supports the nozzle cleaning member 61. FIG. 5 shows the configuration of the slit nozzle 2 and the removal unit 6A when the removal unit 6A is located at a position upstream of the upstream end of the slit nozzle 2 in the cleaning direction Dc in the cleaning direction Dc. ing.

  The removal unit 6A has two types of nozzle cleaning members 61, a spreader 61A and a scraper 61B. Among these nozzle cleaning members 61, the spreader 61A has a function of supplying a rinse liquid to spread the rinse liquid on the lip portion 24 of the slit nozzle 2, and the scraper 61B is a lip portion of the slit nozzle 2 on the upstream side in the cleaning direction Dc of the spreader 61A. The liquid draining function for removing the rinsing liquid from 24 is performed. Thereby, the deposit on the lip portion 24 of the slit nozzle 2 can be removed together with the rinse liquid. That is, when a deposit such as a coating solution dried and solidified adheres to the inclined surface 26 of the lip portion 24, the rinse liquid spread by the spreader 61A dissolves the deposit to some extent, and this dissolved matter (attachment) The rinse liquid containing the kimono) is removed by the scraper 61B. In this way, the nozzle cleaning member 61 performs a cleaning process for removing the deposits from the lip portion 24 of the slit nozzle 2 using the spreader 61A and the scraper 61B. The spreader 61A and the scraper 61B have a common outer shape except for the presence or absence of the liquid supply hole 610 for supplying the rinse liquid. Therefore, in FIG. 6, the outer shape of the spreader 61 </ b> A is shown representatively of two types of nozzle cleaning members 61.

  As shown in FIG. 6, the nozzle cleaning member 61 includes a main body 611 that can be supported by a support portion 62. The main body 611 of the scraper 61B is formed of an elastic body having an elastic modulus of 900 to 4000 MPa (megapascals), for example, and the main body 611 of the spreader 61A is formed of a hard body harder than the main body 611 of the scraper 61B. The central portion of the main body 611 is a supported portion 612 supported by the support portion 62. The main body 611 has an extended portion 613 extending from the supported portion 612, and a V-shaped groove 614 that is a substantially V-shaped groove is formed at the distal end of the extended portion 613. The V-shaped groove 614 has a shape corresponding to the lip portion 24 of the slit nozzle 2, and has an inclined surface 615a having an inclination corresponding to the inclined surface 26a and an inclined surface 615b having an inclination corresponding to the inclined surface 26b. And have. Each inclined surface 615a, 615b of the spreader 61A is formed with a liquid supply hole 610 to which a rinse liquid supply pipe of the rinse liquid supply unit 6E is attached, and the rinse liquid supplied via the rinse liquid supply pipe Is discharged from the liquid supply hole 610. On the other hand, the liquid supply holes 610 are not formed in the inclined surfaces 615a and 615b of the scraper 61B. In the following, when the inclined surfaces 615a and 615b are not distinguished, they are simply referred to as the inclined surfaces 615.

  As shown in FIG. 5, each nozzle cleaning member 61 configured in this way is detachably fixed to the support portion 62 by two fasteners, for example, bolts 64. That is, the support unit 62 includes an elevating unit 621 that can be moved up and down in the Z direction, and two pillar units 622A and 622B that are erected on the upper surface of the elevating unit 621 in the Z direction and are arranged in the X direction. Of the pillars 622A and 622B, the spreader 61A is fastened to the upper end of the downstream pillar 622A in the cleaning direction Dc, and the scraper 61B is fastened to the upper end of the upstream pillar 622B in the cleaning direction Dc. Has been. More specifically, the supported portion 612 of each nozzle cleaning member 61 is finished in a shape that can be engaged with the upper end portions of the corresponding column portions 622A and 622B. Each nozzle cleaning member 61 is inclined at a predetermined inclination angle θ (for example, 50 degrees) with respect to the slit nozzle 2 extending in the X direction, with each V-shaped groove 614 facing the slit nozzle 2 side. In this state, it is fastened to the upper end portions of the column portions 622A and 622B. Note that the upper end of the column portion 622B is higher than the upper end of the column portion 622A, and the scraper 61B is supported at a position higher than the spreader 61A.

  The support part 62 has a base part 623 below the elevating part 621 to which the nozzle cleaning members 61 are fixed as described above. And the raising / lowering part 621 is supported by the base part 623 so that raising / lowering is possible. That is, in the support portion 62, a guide rail 624 erected in the Z direction from the upper surface of the base portion 623, and an urging member 625 (for example, a compression spring) provided between the base portion 623 and the elevating portion 621, Is provided. The urging member 625 urges the elevating part 621 upward against the base part 623 while the guide rail 624 guides the movement of the elevating part 621 in the Z direction. Therefore, each nozzle cleaning member 61 fixed to the elevating part 621 is urged upward by the urging force of the urging member 625.

  Further, the base portion 623 of the support portion 62 is attached to the drive unit 6B. The drive unit 6B has a pair of rollers 651 and 651 disposed on both outer sides of the slit nozzle 2 in the X direction, and an endless belt 652 stretched over the rollers 651 and 651. A base portion 623 of the support portion 62 is attached. The drive unit 6 </ b> B configured in this manner rotates the rollers 651 and 651 to drive the upper surface of the endless belt 652 in the X direction, and moves each nozzle cleaning member 61 in the X direction along with the support portion 62.

  And the nozzle cleaning apparatus 6 comprised as mentioned above makes each nozzle cleaning member 61 cleaning direction Dc, making each nozzle cleaning member 61 approach the lip | rip part 24 of the slit nozzle 2 located in the nozzle cleaning position Y1 from the downward direction. The lip portion 24 of the slit nozzle 2 is cleaned. Next, this cleaning process will be described in detail.

  FIG. 7 is a flowchart illustrating an example of a cleaning process performed by the nozzle cleaning device. FIG. 8 is a front view schematically showing an operation executed according to the flowchart of FIG. FIG. 9 is a side view schematically showing an operation executed according to the flowchart of FIG. FIG. 10 is a perspective view schematically showing an operation executed according to the flowchart of FIG. The flowchart of FIG. 7 is executed by the control unit 8 controlling each unit of the coating apparatus 1.

  In step S101, the removal unit 6A moves to the cleaning start position P1 in response to driving by the drive unit 6B. The cleaning start position P1 is set with respect to the upstream end 20A in the cleaning direction Dc of the lip portion 24 of the slit nozzle 2, and the spreader 61A and the scraper 61B are in a state where the removal unit 6A is located at the cleaning start position P1. Faces the upstream end 20A of the lip portion 24 from below (in the column “S101” in FIG. 8). Since the discharge port 21 is shorter than the total length of the lip portion 24 of the slit nozzle 2 in the X direction, the discharge port is disposed at both ends of the slit nozzle 2 in the X direction, that is, the upstream end portion 20A and the downstream end portion 20B in the cleaning direction Dc. 21 does not open. That is, in step S101, the spreader 61A and the scraper 61B face the upstream end portion 20A upstream of the discharge port 21 in the cleaning direction Dc in the lip portion 24 of the slit nozzle 2.

  Further, in step S101, the slit nozzle 2 is located at the upper position, and the upstream end 20A of the lip portion 24 and the scraper 61B facing the upstream end 20A are separated from each other in the Z direction. Incidentally, since the scraper 61B is supported at a position higher than the spreader 61A, the distance ΔB between the inclined surface 615 of the scraper 61B and the inclined surface 26 of the lip portion 24 is set between the inclined surface 615 of the spreader 61A and the lip portion 24. It is narrower than the distance ΔA1 between the inclined surface 26 (in the column “S101” in FIG. 9).

  When the movement of the removal unit 6A to the cleaning start position P1 is completed in this way, the slit nozzle 2 discharges a predetermined amount of the coating liquid La from the discharge port 21 (step S102). The discharge of the coating liquid La here is intended to fill the entire area of the discharge port 21 with the coating liquid La before the coating process performed following the cleaning process. Therefore, although exaggerated in FIG. 8, the coating liquid La is discharged to the extent that it slightly comes out from the discharge port 21.

  In step S103, the slit nozzle 2 descends to a lower position lower than the upper position. Specifically, when the slit nozzle 2 starts to descend, the distance between the lip portion 24 of the slit nozzle 2 and the scraper 61B decreases, and the inclined surface 26 of the lip portion 24 and the inclined surface 615 of the scraper 61B come into contact with each other. The slit nozzle 2 further descends and pushes the scraper 61B downward against the urging force of the urging member 625. In addition, the spreader 61A moves downward together with the scraper 61B while maintaining a constant distance ΔA2 between the inclined surfaces 26 of the lip portion 24 and the inclined surfaces 615 that have entered between the inclined surfaces 615. Thus, the inclined surface 615 of the scraper 61B is pressed against the inclined surface 26 of the lip portion 24 by the urging force of the urging member 625, and a certain amount of space is provided between the inclined surface 615 of the spreader 61A and the inclined surface 26 of the lip portion 24. The interval ΔA2 is secured (the column “S103” in FIG. 9). Since each of the spreader 61A and the scraper 61B is in a positional relationship in contact with the inclined surface 26 of the lip portion 24, a gap is formed between each of the spreader 61A and the scraper 61B and the front end surface 25 of the lip portion 24. In addition, each of the spreader 61A and the scraper 61B does not contact the front end surface 25 of the lip portion 24. However, if the inclined surface 615 of the scraper 61B comes into contact with the inclined surface 26 of the lip portion 24 by executing step S103, the spreader 61A and the scraper 61B are configured to contact the front end surface 25 of the lip portion 24. It doesn't matter.

  As described above, the spreader 61A and the scraper 61B have a common outer shape, and the scraper 61B is supported at a position higher than the spreader 61A. As a result, the inclined surface 615 of the scraper 61B is pressed against and contacts the inclined surface 26 of the lip portion 24, and the inclined surface 615 of the spreader 61A is opposed to the inclined surface 26 of the lip portion 24 with a certain distance ΔA2. It becomes. Thus, by setting the spreader 61A and the scraper 61B to have a common outer shape (particularly by making the V-shaped groove 614 have the same shape), the interval ΔA2 can be reliably formed. The spacing ΔA2 may be secured by making the V-shaped groove 614 of the spreader 61A larger than the V-shaped groove 614 of the scraper 61B.

  When the lowering of the slit nozzle 2 is thus completed, the rinse liquid Lb is discharged from the liquid supply hole 610 of the spreader 61A, and the supply of the rinse liquid between the lip portion 24 of the slit nozzle 2 and the spreader 61A is started (step). S104). The supply amount of the rinsing liquid Lb per unit time is such that the liquid level of the rinsing liquid Lb is maintained above the front end surface 25 of the lip portion 24 as shown in the column “S104” in FIG. The degree to which the rinsing liquid Lb adheres to the inclined surface 26 is preferable. Various liquids can be used as the rinsing liquid Lb. For example, a solvent for forming a coating liquid may be used. In this case, a solution obtained by dissolving a solute in a rinsing liquid that is a solvent is a coating liquid.

  Subsequently, the drive unit 6B drives the removal unit 6A in the cleaning direction Dc, thereby starting a member moving operation for moving the spreader 61A and the scraper 61B in the cleaning direction Dc (step S105). During the execution of the member moving operation, the supply of the rinsing liquid Lb from the liquid supply hole 610 is continued. Accordingly, the spreader 61 </ b> A moves in the cleaning direction Dc while spreading the rinse liquid Lb supplied from the liquid supply hole 610 on the inclined surface 26 of the lip portion 24. As a result, as shown in the column “S105-S106” in FIG. 8 and FIG. 10, the rinsing liquid Lb is spread on the inclined surface 26 of the lip portion 24 between the spreader 61A and the scraper 61B in the cleaning direction Dc. ing.

  Further, in the member moving operation, the scraper 61B that moves in the cleaning direction Dc while being in contact with the inclined surface 615 removes the rinsing liquid Lb spread by the spreader 61A from the inclined surface 26 of the lip portion 24. At this time, the rinsing liquid Lb spread from the spreader 61A enters a slight gap between the inclined surface 615 of the scraper 61B and the inclined surface 26 of the lip portion 24 by capillary action. Thus, the rinsing liquid Lb fills the space between the inclined surface 615 of the scraper 61B and the inclined surface 26 of the lip portion 24, and alleviates the frictional force generated between them. Further, in parallel with the removal of the rinsing liquid Lb, the scraper 61B scrapes the coating liquid La protruding downward from the discharge port 21 of the slit nozzle 2, and cleans the lower part of the coating liquid La that fills the discharge port 21 in the cleaning direction Dc. Level along.

  When the removal unit 6A reaches the cleaning end position P2 and the spreader 61A and the scraper 61B move to the downstream side in the cleaning direction Dc from the slit nozzle 2, the drive unit 6B stops the removal unit 6A (step S106). . Further, the supply of the rinsing liquid from the liquid supply hole 610 is stopped (step S107), and the flowchart of FIG.

  In the first embodiment configured as described above, in order to clean the inclined surface 26 of the lip portion 24 of the slit nozzle 2, the spreader 61A and the scraper 61B are moved in the cleaning direction Dc along the discharge port 21 of the slit nozzle 2. The member moving operation to be moved is executed. In this member moving operation, the spreader 61A moves in a state of facing the discharge port 21 and the inclined surface 26 of the lip portion 24 with a gap ΔA2 with respect to the inclined surface 26 of the lip portion 24 of the slit nozzle 2. Thereby, the rinse liquid Lb adhering to the lip portion 24 is filled in the interval ΔA2 by capillary action. In other words, the rinse liquid Lb adhering to the lip portion 24 is spread on the side surface of the inclined surface 26 of the lip portion 24 by the spreader 61A. In addition, the scraper 61 </ b> B moves while in contact with the inclined surface 26 of the lip portion 24 of the slit nozzle 2, thereby removing the rinse liquid Lb spread on the inclined surface 26. That is, before the scraper 61B is slid on the inclined surface 26 of the lip portion 24 of the slit nozzle 2, the spreader 61A spreads the rinse liquid Lb on the inclined surface 26 in advance. Therefore, when the scraper 61B is slid on the inclined surface 26 of the lip portion 24 of the slit nozzle 2, the rinse liquid Lb spread in advance by the spreader 61A is in contact with the inclined surface 26 of the lip portion 24 of the slit nozzle 2 and the scraper 61B. Can function as a lubricant. As a result, it is possible to suppress wear of the scraper 61B that is slid by the slit nozzle 2 for cleaning the slit nozzle 2.

  In addition, when deposits such as a coating solution dried and solidified adhere to the inclined surface 26 of the lip portion 24, the rinse liquid spread by the spreader 61A dissolves the deposits to some extent, The rinse liquid containing the kimono) is removed by the scraper 61B. As described above, the deposit on this occasion includes, for example, a dried and solidified solute of the coating solution.

  Further, such suppression of wear of the scraper 61B leads to a decrease in the replacement frequency of the scraper 61B, which is also effective from the viewpoint of environmental conservation.

  Such a configuration can contribute not only to the suppression of wear of the scraper 61B but also to the speeding up of the cleaning process. That is, the rinse liquid enters between the lip portion 24 and the scraper 61B by capillary action. Therefore, if the amount of liquid adhering to the inclined surface 26 of the lip portion 24 is small or sparse, it takes time to fill the space between the inclined surface 26 of the lip portion 24 and the scraper 61B with the liquid. Therefore, it is necessary to suppress the moving speed of the scraper 61B. On the other hand, in the first embodiment, since the rinse liquid Lb is spread in advance on the inclined surface 26 of the lip portion 24 by the spreader 61A, the rinse liquid is provided between the inclined surface 26 of the lip portion 24 and the scraper 61B. Can be satisfied more quickly. Therefore, the scraper 61B can be moved at high speed while suppressing the wear of the scraper 61B, and the cleaning process can be speeded up.

  Further, the spreader 61A has a liquid supply hole 610 for supplying the rinse liquid Lb between the spreader 61A and the lip portion 24 of the slit nozzle 2, and the member moves the rinse liquid Lb supplied from the liquid supply hole 610. During the operation, the lip portion 24 is spread on the inclined surface 26. In such a configuration, the rinsing liquid Lb supplied from the liquid supply hole 610 can enter between the inclined surface 26 of the lip portion 24 of the slit nozzle 2 and the scraper 61B and function as a lubricant. Therefore, it is possible to suppress wear of the scraper 61B that is slid by the slit nozzle 2 for cleaning the slit nozzle 2.

  The support portion 62 urges the spreader 61A and the scraper 61B integrally with the urging member 625 toward the lip portion 24 of the slit nozzle 2 while integrally supporting the spreader 61A and the scraper 61B. The spreader 61A and the inclined surface 26 of the lip portion 24 of the slit nozzle 2 are in a state where the scraper 61B is abutted against the inclined surface 26 of the lip portion 24 of the slit nozzle 2 by the urging force of the urging member 625 of the support portion 62. An interval ΔA2 is defined. In such a configuration, the scraper 61B is abutted against the inclined surface 26 of the lip portion 24 of the slit nozzle 2 by the urging force of the urging member 625 of the support portion 62, whereby the distance ΔA2 between the spreader 61A and the inclined surface 26 of the lip portion 24 is obtained. The rinsing liquid Lb can be uniformly spread on the inclined surface 26 by properly defining the above, and the rinsing liquid Lb can be reliably removed from the inclined surface 26 by bringing the scraper 61B into close contact with the inclined surface 26 of the lip portion 24.

  The scraper 61B is an elastic body, and the spreader 61A is a hard body harder than the scraper 61B. Accordingly, the hard spreader 61A can spread the rinsing liquid Lb uniformly on the inclined surface 26 of the lip portion 24 of the slit nozzle 2, and the inclined surface 26 of the lip portion 24 of the slit nozzle 2 can be damaged by the contact with the scraper 61B. Can be suppressed. Moreover, since the spreader 61A is a hard body, it can be processed and molded with high accuracy. As a result, the distance ΔA2 between the inclined surface 615 of the spreader 61A and the inclined surface 26 of the lip portion 24 can be ensured uniformly along the inclined surfaces 615 and 26. The material of the scraper 61B, which is an elastic body, is, for example, ethylene / propylene / diene rubber (EPDM) or silicon rubber. The material of the spreader 61A which is a hard body is, for example, PEEK (polyether ether ketone) resin or PI (polyimide) resin.

  At the end of the cleaning process, since the spreader 61A and the scraper 61B are removed from the slit nozzle 2 to the downstream side in the cleaning direction Dc, contamination of the substrate 3 due to liquid dripping from the slit nozzle 2 is suppressed. Yes. That is, when the spreader 61A and the scraper 61B are stopped in a state where they are opposed to the downstream end 20B of the slit nozzle 2, for example, and the cleaning process is finished, the downstream end 20B of the slit nozzle 2 has a coating liquid La or rinse. The liquid Lb will stay. Therefore, it is assumed that the liquid is dripped from the downstream end 20B of the slit nozzle 2 to the substrate 3 during the coating process, and the substrate 3 is contaminated. On the other hand, in 1st Embodiment, the stay of the liquid in the downstream end part 20B of the slit nozzle 2 is suppressed, and the contamination of the board | substrate 3 can be suppressed.

  Although not described in detail above, if it is configured such that the discharge of the coating liquid La from the discharge port 21 is started in step S102 and then the descent of the slit nozzle 2 is started in step S103, the following is performed. An effect can also be produced. That is, it takes some time from the start of the operation of the discharge pump that discharges the coating liquid La from the discharge port 21 until it becomes stable. On the other hand, in the order shown in steps S102 and S103, the operation of the discharge pump can be stabilized during the lowering of the slit nozzle 2, and when the lowering of the slit nozzle 2 is completed, the slit nozzle 2 It is possible to uniformly attach the rinsing liquid Lb over the longitudinal direction (X direction) of the distal end surface 25.

  FIG. 11 is a perspective view showing a second embodiment of the nozzle cleaning device. The difference of the second embodiment from the first embodiment is that a spreader 61C is provided in addition to the spreader 61A and the scraper 61B. Therefore, below, it demonstrates centering around a different structure from 1st Embodiment, and abbreviate | omits description suitably for the structure which is common in 1st Embodiment. However, it is needless to say that the same effect can be achieved by providing the configuration common to the first embodiment.

  The removal unit 6A of the nozzle cleaning device 6 shown in FIG. 11 has a spreader 61C arranged between the spreader 61A and the scraper 61B in the cleaning direction Dc. The spreader 61C is a kind of the above-described nozzle cleaning member 61 like the spreader 61A and the scraper 61B, and has the same configuration as the spreader 61A except that the liquid supply hole 610 is not provided. That is, the main body 611 of the spreader 61C is formed of the same hard body as the main body of the spreader 61A. On the other hand, on the upper surface of the elevating part 621, a column part 622C is erected in the Z direction between the column parts 622A and 622B in the X direction. The spreader 61 </ b> C is a column in a state in which the V-shaped groove 614 is directed toward the slit nozzle 2 and is inclined at a predetermined inclination angle θ (for example, 50 degrees) with respect to the slit nozzle 2 extending in the X direction. Fastened to the upper end of the portion 622C. Further, the upper end of the column portion 622C is the same height as the upper end of the column portion 622A, and the spreader 61C is supported at the same height as the spreader 61A.

  In the second embodiment, the slit nozzle 2 can be cleaned according to the flowchart shown in FIG. That is, in step S101, when the removal unit 6A moves to the cleaning start position P1, the spreader 61A, the spreader 61C, and the scraper 61B face the upstream end 20A of the lip portion 24 from below. When a predetermined amount of the coating liquid La is discharged from the discharge port 21 (step S102), the slit nozzle 2 is lowered (step S103). As a result, the inclined surface 615 of the scraper 61B is pressed against the inclined surface 26 of the lip portion 24 by the urging force of the urging member 625, and the inclined surface 615 of each of the spreader 61A and the spreader 61C and the inclined surface 26 of the lip portion 24 are The same interval ΔA2 is secured between them.

  When the lowering of the slit nozzle 2 is thus completed, the rinse liquid Lb is discharged from the liquid supply hole 610 of the spreader 61A, and the supply of the rinse liquid between the lip portion 24 of the slit nozzle 2 and the spreader 61A is started (step). S104). Subsequently, the drive unit 6B drives the removal unit 6A in the cleaning direction Dc, thereby starting a member moving operation for moving the spreader 61A, the spreader 61C, and the scraper 61B in the cleaning direction Dc (step S105). In this member moving operation, the spreader 61A spreads the rinsing liquid Lb on the inclined surface 26 of the lip portion 24 as in the first embodiment, and the spreader 61C further rips the rinsing liquid Lb spread by the spreader 61A. Spread on the inclined surface 26 of the portion 24.

  Further, the scraper 61B removes the rinse liquid Lb spread by the spreader 61A and the spreader 61C from the inclined surface 26 of the lip portion 24. At this time, the rinsing liquid Lb spread from the spreader 61A and the spreader 61C enters a slight gap between the inclined surface 615 of the scraper 61B and the inclined surface 26 of the lip portion 24 by capillary action. Thus, the rinsing liquid Lb fills the space between the inclined surface 615 of the scraper 61B and the inclined surface 26 of the lip portion 24, and alleviates the frictional force generated between them. Further, in parallel with the removal of the rinsing liquid Lb, the scraper 61B scrapes the coating liquid La protruding downward from the discharge port 21 of the slit nozzle 2, and cleans the lower part of the coating liquid La that fills the discharge port 21 in the cleaning direction Dc. Level.

  Then, the removal unit 6A reaches the cleaning end position P2, and the drive unit 6B stops the removal unit 6A at a timing when the spreader 61A, the spreader 61C, and the scraper 61B are located downstream of the slit nozzle 2 in the cleaning direction Dc. (Step S106). Subsequently, the supply of the rinse liquid from the liquid supply hole 610 is stopped (step S107), and the flowchart of FIG. 7 is ended.

  In the second embodiment configured as described above, when the scraper 61B is slid on the inclined surface 26 of the lip portion 24 of the slit nozzle 2, the rinse liquid Lb spread in advance by the spreader 61A and the spreader 61C is slit. It can enter between the inclined surface 26 of the lip portion 24 of the nozzle 2 and the scraper 61B and function as a lubricant. As a result, it is possible to suppress wear of the scraper 61B that is slid by the slit nozzle 2 for cleaning the slit nozzle 2.

  In particular, in the second embodiment, the spreader 61C provided between the spreader 61A and the scraper 61B has a gap ΔA2 with respect to the inclined surface 26 of the lip portion 24 of the slit nozzle 2 and the discharge port 21 of the lip portion 24 and Opposite the inclined surface 26. Then, the spreader 61C moves in the cleaning direction Dc, so that the rinse liquid L spread by the spreader 61A is further expanded. In such a configuration, even if it is difficult for the spreader 61A to spread the rinsing liquid Lb supplied from the liquid supply hole 610 to the upper part of the inclined surface 26 because the moving speed of the spreader 61A is fast, for example, the subsequent spreader 61C It becomes possible to spread the rinse liquid Lb to the upper part of the inclined surface 26. Therefore, before the scraper 61B is slid on the inclined surface 26 of the lip portion 24 of the slit nozzle 2, the rinsing liquid Lb can be spread over a wider range (upper portion) of the inclined surface 26 of the lip portion 24. Accordingly, when the scraper 61B is slid on the inclined surface 26 of the lip portion 24 of the slit nozzle 2, the rinsing liquid Lb enters a wider area between the scraper 61B and the inclined surface 26 of the lip portion 24 of the slit nozzle 2. It can function effectively as a lubricant. Therefore, the wear of the scraper 61B slid on the slit nozzle 2 for cleaning the slit nozzle 2 can be more reliably suppressed.

  As described above, in the above embodiment, the nozzle cleaning device 6 corresponds to an example of the “nozzle cleaning device” of the present invention, the spreader 61A corresponds to an example of the “first counter member” of the present invention, and the scraper 61B The drive unit 6B corresponds to an example of the “moving part” of the present invention, the cleaning direction Dc corresponds to an example of the “moving direction” of the present invention, and the slit nozzle 2 Corresponds to an example of the “nozzle” of the present invention, the lip portion 24 corresponds to an example of the “tip portion” of the present invention, the discharge port 21 corresponds to an example of the “discharge port” of the present invention, and the inclined surface 26. Corresponds to an example of the “side surface” of the present invention, and the coating apparatus 1 corresponds to an example of the “coating apparatus” of the present invention. Further, the rinsing liquid supply unit 6E corresponds to an example of the “rinsing liquid supply unit” of the present invention, the liquid supply hole 610 corresponds to an example of the “liquid supply hole” of the present invention, and the spreader 61C corresponds to the “first” of the present invention. The “supporting member” corresponds to an example of “two opposing members”, and the support part 62 corresponds to an example of “supporting part” of the present invention.

  The present invention is not limited to the above-described embodiment, and various modifications other than those described above can be made without departing from the spirit of the present invention. For example, the specific configuration for supplying the rinsing liquid to the lip portion 24 is not limited to the aspect of discharging the rinsing liquid from the liquid supply hole 610 of the spreader 61A. Therefore, for example, the following modifications can be made to the second embodiment. That is, the spreader 61A in the second embodiment has a function of supplying a rinsing liquid and a function of spreading the rinsing liquid. On the other hand, in this modification, the spreader 61A is replaced with a member (rinsing liquid supply member) having only a function of supplying the rinsing liquid. Specifically, a pipe-like rinse whose tip faces the inclined surfaces 26a, 26b of the lip portion 24 on the downstream side in the cleaning direction Dc of the spreader 61C (in other words, the arrangement position of the spreader 61A in the second embodiment). A liquid supply pipe (rinse liquid supply member) is provided, and the rinse liquid discharged from the rinse liquid supply pipe by the rinse liquid supply unit 6E is supplied to the inclined surfaces 26a and 26b of the lip portion 24. In this modified example, the rinsing liquid is discharged onto the inclined surface 26 of the lip portion 24 while the tip of the rinsing liquid supply pipe moves in the cleaning direction Dc along with the removal unit 6A, and the cleaning liquid Dc is discharged from the tip of the rinsing liquid supply pipe. The rinse liquid Lb is spread on the inclined surface 26 by the upstream spreader 61C (first opposing member).

  Moreover, in the said embodiment, the rinse liquid Lb was used as a liquid spread on the inclined surface 26 of the lip | rip part 24 of the slit nozzle 2. As shown in FIG. However, the liquid that can be used as an object to be spread on the inclined surface 26 is not limited to the rinse liquid Lb. Therefore, the coating liquid La may be spread on the inclined surface 26 of the lip portion 24 as in the following modification.

  In this modified example, in step S102 in the flowchart of FIG. 7, a larger amount of the coating liquid La than the discharge amount in the first embodiment is discharged from the discharge port 21. Specifically, the coating liquid La is projected from the front end surface 25 of the slit nozzle 2 with a projection width wider than the distance between the front end surface 25 of the slit nozzle 2 and the spreader 61A when the slit nozzle 2 is lowered in the next step S103. Projects downward. Then, after the slit nozzle 2 is lowered in step S103, the supply of the rinse liquid in step S104 is omitted, and the driving of the removal unit 6A in step S105 is started (member movement operation). In this modification, since the rinse liquid Lb is not used, the spreader 61A does not have the liquid supply hole 610.

  In the member moving operation in this modified example, the coating liquid La that has entered between the front end surface 25 of the slit nozzle 2 and the spreader 61A as the spreader 61A moves is driven to the side from between the slit and the slit. It enters between the inclined surface 26 of the nozzle 2 and the inclined surface 615 of the spreader 61A. Thus, the spreader 61 </ b> A moves in the cleaning direction Dc while spreading the coating liquid La adhering to the lip portion 24 of the slit nozzle 2 on the inclined surface 26 of the lip portion 24. Further, the scraper 61B removes the coating liquid La spread by the spreader 61A from the inclined surface 26 of the lip portion 24. At this time, the coating liquid La spread from the spreader 61A enters a slight gap between the inclined surface 615 of the scraper 61B and the inclined surface 26 of the lip portion 24 by capillary action. In this way, the coating liquid La fills the space between the inclined surface 615 of the scraper 61B and the inclined surface 26 of the lip portion 24, and alleviates the frictional force generated between them.

  In the above modification, when the scraper 61B is slid on the inclined surface 26 of the lip portion 24 of the slit nozzle 2, the coating liquid La spread in advance by the spreader 61A is inclined surface 26 of the lip portion 24 of the slit nozzle 2. And the scraper 61B can function as a lubricant. As a result, it is possible to suppress wear of the scraper 61B that is slid by the slit nozzle 2 for cleaning the slit nozzle 2.

  Further, the coating liquid La is discharged from the discharge port 21 of the slit nozzle 2 before the start of the member moving operation, and the spreader 61A tilts the lip portion 24 while the member moving operation is being performed by the spreader 61A. Spread on surface 26. In such a configuration, the coating liquid La discharged from the discharge port 21 of the slit nozzle 2 can enter between the inclined surface 26 of the lip portion 24 of the slit nozzle 2 and the scraper 61B and function as a lubricant. Therefore, it is possible to suppress wear of the scraper 61B that is slid by the slit nozzle 2 for cleaning the slit nozzle 2.

  Further, various modifications can be made in addition to such modifications. For example, in the cleaning process of the first and second embodiments, step S102 for discharging the coating liquid La from the discharge port 21 of the slit nozzle 2 is provided. However, this step S102 may be omitted.

  In the first embodiment, the spreader 61A and the scraper 61B are integrally moved in the cleaning direction Dc. However, the spreader 61A and the scraper 61B may be moved individually in the cleaning direction Dc. Similar modifications can be made to the second embodiment.

  Further, it is not essential that the spreader 61A and the scraper 61B have the same outer shape, and it is not essential that the spreader 61A and the spreader 61C have the same outer shape.

  The interval between the spreader 61A, the scraper 61B or the spreader 61C and the lip portion 24 of the slit nozzle 2 can be changed as appropriate. Therefore, in the second embodiment, the interval ΔA2 between the spreader 61A and the lip portion 24 may be narrower or wider than the interval ΔA2 between the spreader 61A and the lip portion 24.

  Further, the material of the spreader 61A, the scraper 61B or the spreader 61C can be changed as appropriate.

  The present invention can be applied to all nozzle cleaning techniques for removing deposits adhering to the nozzle.

1 ... coating device,
6 ... Nozzle cleaning device,
6A ... removal unit,
6B ... Drive unit,
6E: Rinse solution supply unit,
61A ... spreader,
61B ... scraper,
61C ... spreader,
610: Liquid supply hole 610,
62 ... support part,
2 ... Slit nozzle,
21 ... discharge port,
24 ... Lip part,
26 ... inclined surface,
Dc: Cleaning direction

Claims (9)

The discharge of the nozzle in a state of being opposed to the discharge port and the side surface of the tip while being spaced from the side of the tip of the nozzle that discharges the coating liquid from the discharge port provided at the tip of the tip. A first opposing member movable in a moving direction along the outlet;
An abutting member movable in the moving direction in a state of being in contact with the side surface of the tip portion of the nozzle on the upstream side of the moving direction of the first facing member;
After the nozzle discharges the coating liquid from the discharge port, the first counter member is moved in the moving direction so that the coating liquid adhering to the tip is spread on the side surface by the first counter member. A nozzle cleaning device comprising: a moving unit that performs a member moving operation of removing the coating liquid spread on the side surface from the side surface by the contact member by moving the contact member in the moving direction. The discharge of the nozzle in a state of being opposed to the discharge port and the side surface of the tip while being spaced from the side of the tip of the nozzle that discharges the coating liquid from the discharge port provided at the tip of the tip. A first opposing member movable in a moving direction along the outlet;
An abutting member movable in the moving direction in a state of being in contact with the side surface of the tip portion of the nozzle on the upstream side of the moving direction of the first facing member;
A rinsing liquid supply section for supplying a rinsing liquid to the tip of the nozzle;
By moving the first facing member in the moving direction, the rinsing liquid supplied by the rinsing liquid supply unit and attached to the tip is spread to the side surface by the first facing member, and the contact member is A nozzle cleaning device comprising: a moving unit that performs a member moving operation for removing the rinsing liquid spread on the side surface from the side surface by the contact member by moving in the moving direction. The rinse liquid supply unit supplies a rinse liquid between the first counter member and the tip of the nozzle from a liquid supply hole provided in the first counter member,
The nozzle cleaning device according to claim 2, wherein the first facing member spreads the rinsing liquid supplied from the liquid supply hole to the side surface during execution of the member moving operation. In a state of being opposed to the discharge port and the side surface of the tip portion while being spaced from the side surface of the tip portion of the nozzle between the first facing member and the contact member in the moving direction. A second opposing member movable in the moving direction;
The moving unit moves the second facing member in the moving direction in the member moving operation, so that the rinsing liquid spread on the side surface by the first facing member is further moved to the side surface by the second facing member. The nozzle cleaning device according to claim 3, which is widened. A support portion that urges toward the tip portion of the nozzle while integrally supporting the first facing member and the contact member;
In a state where the abutting member is abutted against the side surface of the tip portion of the nozzle by the urging force of the support portion, an interval between the first opposing member and the side surface of the tip portion of the nozzle is defined. The nozzle cleaning apparatus as described in any one of Claims 1 thru | or 4.   The nozzle cleaning device according to claim 1, wherein the contact member is an elastic body, and the first facing member is a hard body harder than the contact member. A nozzle that discharges the coating liquid from a discharge port provided at the tip of the tip, and
A coating device comprising the nozzle cleaning device according to any one of claims 1 to 6. Attaching the coating liquid to the tip of the nozzle that discharges the coating liquid from a discharge port provided at the tip of the tip; and
The tip portion is moved by moving the discharge port of the tip portion and the first opposing member facing the side surface in a moving direction along the discharge port while being spaced from the side surface of the tip portion of the nozzle. Spreading the coating liquid adhering to the side surface by the first facing member;
By moving a contact member in contact with the side surface of the tip portion of the nozzle in the movement direction on the upstream side in the movement direction of the first facing member, the coating liquid spread on the side surface is contacted. And a step of removing from the side surface by a member. Attaching a rinsing liquid to the tip of the nozzle that discharges the coating liquid from a discharge port provided at the tip of the tip; and
The tip portion is moved by moving the discharge port of the tip portion and the first opposing member facing the side surface in a moving direction along the discharge port while being spaced from the side surface of the tip portion of the nozzle. Spreading the rinse liquid adhering to the side surface by the first opposing member;
By moving an abutting member in contact with the side surface of the tip portion of the nozzle in the moving direction on the upstream side in the moving direction of the first opposing member, the rinsing liquid spread on the side surface is in contact with the first counter member. And a step of removing from the side surface by a member.

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