CN113145363A

CN113145363A - Nozzle cleaning device, coating device, nozzle cleaning method, and scraper

Info

Publication number: CN113145363A
Application number: CN202110068004.3A
Authority: CN
Inventors: 高村幸宏
Original assignee: Screen Holdings Co Ltd
Current assignee: Screen Holdings Co Ltd
Priority date: 2020-01-22
Filing date: 2021-01-19
Publication date: 2021-07-23
Also published as: JP2021115490A; KR102540091B1; KR20210095063A; JP7197525B2

Abstract

The invention provides a nozzle cleaning device, a coating device, a nozzle cleaning method and a scraper. In a cleaning member of a nozzle, abrasion caused by sliding is inhibited, and the decrease of the following performance of the cleaning member relative to a discharge port of the nozzle is inhibited. The nozzle cleaning device is provided with: a nozzle cleaning member capable of contacting with an end of the slit nozzle; and a moving mechanism for moving the nozzle cleaning member in a first direction, the nozzle cleaning member including: a first scraper having a body and a thin plate member; a second scraper having a body and a thin plate member; a third scraper having a body and a thin plate member; and a support portion supporting the first scraper, the second scraper and the third scraper.

Description

Nozzle cleaning device, coating device, nozzle cleaning method, and scraper

Technical Field

The technology disclosed in the present specification relates to a nozzle cleaning device, a coating device, a nozzle cleaning method, and a scraper.

Background

Conventionally, a slit nozzle that discharges a coating liquid from a slit-shaped discharge port is generally used to apply the coating liquid to a substrate. In such a slit nozzle, in order to remove the deposit such as the coating liquid remaining at the discharge port, a process of removing the deposit using a cleaning member movable along the discharge port of the slit nozzle is performed (for example, see patent document 1).

Patent document 1: japanese patent laid-open publication No. 2013-165137

As the cleaning member for the ejection port, a member made of rubber capable of following the shape of the ejection port is often used, and abrasion of the member made of rubber due to sliding is significant, and the frequency of replacement of the cleaning member becomes high. On the other hand, if a hard material such as PEEK (polyetheretherketone) is used, wear due to sliding can be suppressed, but the ability to follow the shape of the ejection port is reduced, and the adhered matter may not be sufficiently removed.

Disclosure of Invention

The technology disclosed in the present specification is proposed in view of the above-described problems, and is a technology for suppressing wear due to sliding in a cleaning member of a nozzle and suppressing a decrease in followability with respect to an ejection port of the nozzle.

A first aspect of the technology disclosed in the present specification is a nozzle cleaning device that cleans an end of a slit nozzle provided with a slit-shaped discharge port, the nozzle cleaning device including: a nozzle cleaning member contactable with an end of the slit nozzle; and a moving mechanism that moves the nozzle cleaning member in a first direction, which is a direction in which the discharge port of the slit nozzle extends, while bringing the nozzle cleaning member into contact with an end of the slit nozzle, the nozzle cleaning member including: at least one first scraper, comprising: a first body portion; and a first thin plate member extending from the first body portion and contactable with a first side surface of an end portion of the slit nozzle from a second direction that is a direction intersecting the first direction; at least one second scraper, possess: a second body portion; and a second thin plate member extending from the second body portion and contactable from the second direction to a second side surface opposite to the first side surface of the end portion of the slit nozzle; at least one third scraper, comprising: a third body portion; and a third thin plate member extending from the third body portion and contactable with a lower surface of an end portion of the slit nozzle from the second direction; and a support portion supporting the first scraper, the second scraper, and the third scraper.

A second aspect of the technology disclosed in the present specification relates to the first aspect, and at least one of the thickness of the first thin plate member, the thickness of the second thin plate member, and the thickness of the third thin plate member becomes thicker as it approaches the corresponding first main body portion, second main body portion, or third main body portion.

A third aspect of the technology disclosed in the present specification relates to the first or second aspect, and a portion of a surface of at least one of the first, second, and third thin plate members facing a direction in which the nozzle cleaning member moves, which portion is continuous with the corresponding first, second, or third main body portion, is a curved surface.

A fourth aspect of the technology disclosed in the present specification relates to the second aspect, and at least one of the thickness of the first thin plate member, the thickness of the second thin plate member, and the thickness of the third thin plate member is thicker with a radius of curvature of 1mm or more and 5mm or less as it approaches the corresponding first main body, second main body, or third main body.

A fifth aspect of the technology disclosed in the present specification relates to any one of the first to fourth aspects, wherein at least one of the first thin plate member, the second thin plate member, and the third thin plate member has a rockwell hardness of R110 or more and R130 or less, and a bending strength of 30 or more and 50 or less.

A sixth aspect of the technology disclosed in the present specification relates to any one of the first to fifth aspects, and at least one of the first scraper, the second scraper, and the third scraper is provided in plurality in the first direction.

A seventh aspect of the technology disclosed in the present specification relates to any one of the first to sixth aspects, wherein an angle formed between a surface of at least one of the first thin plate member, the second thin plate member, and the third thin plate member facing a direction in which the nozzle cleaning member moves, and an end of the slit nozzle is an obtuse angle.

An eighth aspect of the technology disclosed in the present specification relates to any one of the first to seventh aspects, and the third thin plate member is located upstream of the first thin plate member and the second thin plate member in a direction in which the nozzle cleaning member moves.

A ninth aspect of the technology disclosed in the present specification includes: a slit nozzle that ejects a coating liquid from a slit-shaped ejection port; and the nozzle cleaning device.

A tenth aspect of the technology disclosed in the present specification is a nozzle cleaning method for cleaning an end portion of a slit nozzle provided with a slit-shaped discharge port, the nozzle cleaning method including: a step of moving a nozzle cleaning member, which is capable of coming into contact with an end of the slit nozzle, in a first direction, which is a direction in which the discharge port of the slit nozzle extends, while bringing the nozzle cleaning member into contact with the end of the slit nozzle, the nozzle cleaning member including: at least one first scraper, comprising: a first body portion; and a first thin plate member extending from the first body portion and contactable with a first side surface of an end portion of the slit nozzle from a second direction that is a direction intersecting the first direction; at least one second scraper, possess: a second body portion; and a second thin plate member extending from the second body portion and contactable from the second direction to a second side surface opposite to the first side surface of the end portion of the slit nozzle; at least one third scraper, comprising: a third body portion; and a third thin plate member extending from the third body portion and contactable with a lower surface of an end portion of the slit nozzle from the second direction; and a support portion supporting the first scraper, the second scraper, and the third scraper.

An eleventh aspect of the technology disclosed in the present specification is a scraper for cleaning an end of a slit nozzle provided with a slit-shaped discharge port, the scraper comprising: a body portion; and a thin plate member extending from the main body and contactable with an end of the slit nozzle from a direction intersecting a direction in which the ejection port extends.

A twelfth aspect of the technology disclosed in the present specification relates to the eleventh aspect, wherein a width of the thin plate member in a direction intersecting a direction in which the ejection port extends is narrowed as it is separated from the main body.

According to the first to tenth aspects of the technology disclosed in the present specification, even when a hard material is used as the cleaning member of the slit nozzle to suppress wear due to sliding, a decrease in the following ability to the end portion of the slit nozzle can be suppressed by the thin plate members extending from the respective main bodies.

According to the eleventh and twelfth aspects of the technology disclosed in the present specification, even in the case where a hard material is used as the cleaning member of the slit nozzle to suppress wear caused by sliding, a decrease in followability to the end portion of the slit nozzle can be suppressed by the thin plate member extending from the main body portion.

Further, objects, features, aspects and advantages related to the technology disclosed in the present specification will become more apparent from the detailed description and the accompanying drawings given below.

Drawings

Fig. 1 is a perspective view schematically showing an application apparatus including a nozzle cleaning apparatus according to an embodiment.

Fig. 2 is a side view schematically showing the coating apparatus of the example shown in fig. 1.

Fig. 3 is a plan view schematically showing the coating apparatus of the example shown in fig. 1.

Fig. 4 is a side view of the slit nozzle as viewed from the X-axis direction.

Fig. 5 is a side view showing an example of the structure of the nozzle cleaning device according to the embodiment.

Fig. 6 is a perspective view showing an example of the structure of a nozzle cleaning member used in the nozzle cleaning device.

Fig. 7 is a flowchart showing an example of the cleaning process performed by the nozzle cleaning device.

Fig. 8 is a diagram showing in detail a case where the inclined surface and the thin plate member are in contact with each other to remove the adhering substance.

Fig. 9 is a view showing a state in which the lip portion is in contact with three thin plate members.

Fig. 10 is a perspective view showing a modification of the structure of the nozzle cleaning member used in the nozzle cleaning device.

Fig. 11 is a flowchart showing an example of the cleaning process performed by the nozzle cleaning device.

Wherein the reference numerals are as follows:

1: coating device

2: slit nozzle

3: substrate

4: object stage

5: coating treatment part

6: nozzle cleaning device

6A: removal unit

6B: drive unit

6C: cleaning unit

8: control unit

20A: upstream end part

20B: downstream end portion

21: discharge port

22: bottom part

23: internal flow path

24: lip part

25: top end face

26. 26a, 26 b: inclined plane

31: upper surface of

41: retaining surface

51: nozzle support

51 a: fixing member

51 b: lifting mechanism

52. 62B: guide rail

53: slit nozzle moving part

54: linear motor

54 a: fixing piece

54 b: moving part

55: linear encoder

55 a: scale part

55 b: detection part

61: nozzle cleaning component

62: supporting table

62A: base part

62C: force application member

100: nozzle adjustment area

101: direction of cleaning

101A: direction of rotation

201: base part

202: supporting part

203A, 203B, 203C: body part

204A, 204B, 204C: thin plate member

205. 205A, 205B, 205C: scraping device

214A: end face

224A, 234A: noodle

300: attachment article

651A, 651B: roller

652: endless transmission belt

700: flushing nozzle

Detailed Description

Hereinafter, embodiments will be described with reference to the drawings. In the following embodiments, detailed features and the like for technical explanation are shown, but these are merely examples, and not all examples are essential features for making the embodiments feasible.

Note that the drawings are for schematic representation, and the configuration is omitted or simplified as appropriate for the drawings for convenience of description. The mutual relationship between the size and the position of the structures and the like shown in the different drawings is not necessarily shown accurately, and may be appropriately changed.

In the following description, the same components are denoted by the same reference numerals, and the same names and functions are assumed. Therefore, detailed descriptions of these elements may be omitted to avoid redundancy.

In the following description, unless otherwise specified, a non-exclusive expression that does not exclude the presence of other structural elements is given when "including", "having" a certain structural element, and the like.

In the description below, even when the numbers such as "first" and "second" are used, these terms are used only for the convenience of understanding the contents of the embodiments, and are not limited to the order in which the numbers are generated.

In the following description, unless otherwise specified, the expression "moving an object in a specific direction" or the like includes a case where the object is moved in parallel in the specific direction and a case where the object is moved in a direction having a component in the specific direction.

In the following description, even when terms indicating specific positions or directions such as "up", "down", "left", "right", "side", "bottom", "front" and "back" are used, these terms are used for easy understanding of the contents of the embodiments and do not have any relation with the positions or directions in actual implementation.

< first embodiment >

The coating apparatus, the nozzle cleaning apparatus, the scraper, and the nozzle cleaning method according to the present embodiment will be described below.

< Structure of coating apparatus >

Fig. 1 is a perspective view schematically showing a coating apparatus including a nozzle cleaning apparatus according to the present embodiment. Fig. 2 is a side view schematically showing the coating apparatus of the example shown in fig. 1. Fig. 3 is a plan view schematically showing the coating apparatus of the example shown in fig. 1. In fig. 2 and 3, a part of the nozzle support and the like is omitted.

The coating apparatus 1 is a coating apparatus called a slit coater that applies a coating liquid to the upper surface 31 of the substrate 3 using a slit nozzle 2.

The coating apparatus 1 can use various coating liquids such as a photo-etching liquid as an etching-resistant coating film, a photo-etching liquid for a color filter, a liquid containing a polyimide precursor (polyamic acid), a slurry (slurry) containing silicon, a nano-metal ink, or a conductive material, as the coating liquid.

As the substrate 3 to be coated, various substrates such as a glass substrate for a liquid crystal Display device, a semiconductor substrate, a glass substrate for a Plasma Display Panel (PDP), a glass substrate for a photomask, a substrate for a color filter, a substrate for a memory disc, a substrate for a solar cell, a substrate for a precision electronic device such as a substrate for electronic paper, a rectangular glass substrate, a flexible substrate for a thin film liquid crystal, and a substrate for organic Electroluminescence (EL) can be used.

The "upper surface 31 of the substrate 3" refers to one of the two main surfaces of the substrate 3 to which the coating liquid is applied.

The coating apparatus 1 includes: a stage 4 capable of holding the substrate 3 in a horizontal posture by suction; a coating processing unit 5 that performs a coating process on the substrate 3 held on the stage 4 using the slit nozzle 2; a nozzle cleaning device 6 (see fig. 2 and 3) that performs cleaning processing on the slit nozzle 2 prior to the coating processing; the control unit 8 controls the operations of these components.

The control unit 8 is configured to control a control target by executing a program stored in an internal or external storage medium (a volatile or nonvolatile memory such as an HDD, a RAM, a ROM, or a flash memory), and is configured by, for example, a Central Processing Unit (CPU), a microprocessor, a microcomputer, or the like.

Fig. 4 is a side view of the slit nozzle 2 as viewed from the X-axis direction. The slit nozzle 2 has an ejection port 21 which is an elongated slit-like opening extending in the X-axis direction. The length of the discharge port 21 is shorter than the entire length of the slit nozzle 2 in the X-axis direction, and the discharge port 21 is not open at both ends of the slit nozzle 2 in the X-axis direction.

The slit nozzle 2 can discharge the coating liquid from the discharge port 21 toward the upper surface 31 of the substrate 3 held on the stage 4. Specifically, the slit nozzle 2 includes: a bottom portion 22 fixedly supported by a nozzle support 51 (see fig. 1); an internal flow path 23 for supplying the coating liquid supplied from a supply mechanism not shown to the discharge port 21; and a lip 24 protruding downward from the bottom 22.

The lip portion 24 has: a flat tip surface 25 provided at a tip (lower end) protruding downward of the bottom 22; an inclined surface 26a formed on the + Y side and connecting the tip end surface 25 and the bottom 22; the inclined surface 26b is an inclined surface formed on the-Y side and connecting the tip surface 25 and the bottom 22. Hereinafter, the inclined surface 26a and the inclined surface 26b may be simply referred to as the inclined surface 26.

As described above, the lip portion 24 has a convex shape with a narrow tip when viewed from the longitudinal direction, i.e., the X-axis direction, the discharge port 21 is provided at the tip (lower end) of the convex shape, and each side surface of the convex shape is an inclined surface 26.

When the coating liquid is supplied to the slit nozzle 2 configured as described above from a supply mechanism (not shown), the coating liquid is uniformly spread in the longitudinal direction (X-axis direction) of the slit nozzle 2 through the internal flow path 23 and is fed, and is discharged downward from the discharge port 21 provided on the distal end surface 25 of the lip 24.

When the coating liquid is discharged from the discharge port 21 of the slit nozzle 2 and the coating operation is performed on the substrate 3 in this manner, the coating liquid may adhere to a peripheral portion (lip portion 24) of the discharge port 21 of the slit nozzle 2. The deposited coating liquid becomes a residue after drying, and if left as it is, it hinders the coating liquid from being discharged well, or causes contamination of the film formed on the substrate 3.

Therefore, in the coating apparatus 1, the nozzle cleaning device 6 performs the cleaning process for removing the attached matter (the attached liquid) on the peripheral portion (the lip portion 24) of the discharge port 21 as described above.

The stage 4 of the example shown in fig. 1, 2, and 3 is made of a stone material such as granite having a substantially rectangular parallelepiped shape. The holding surface 41, which is formed to be a substantially horizontal flat surface and holds the substrate 3, is provided in a region on the-Y side of the upper surface (+ Z-side surface) of the stage 4. A plurality of vacuum suction ports, not shown, are dispersedly formed in the holding surface 41. By sucking the substrate 3 through these vacuum suction ports, the substrate 3 is held in a substantially horizontal state at a predetermined position during the coating process. The holding form of the substrate 3 is not limited to this, and for example, the stage 4 may be configured to mechanically hold the substrate 3.

Further, the nozzle adjustment region 100 is provided in a region on the + Y side of the stage 4 with respect to the region occupied by the holding surface 41. The nozzle cleaning device 6 is disposed in the nozzle adjustment area 100 (see fig. 2 and 3).

In the coating apparatus 1, a movement mechanism described later that moves the slit nozzle 2 in the Y-axis direction is provided in the coating processing section 5, and the slit nozzle 2 can be moved back and forth between above the holding surface 41 and above the nozzle adjustment region 100 by this movement mechanism.

While the slit nozzle 2 is moving above the nozzle adjustment region 100, that is, while the slit nozzle 2 is not located above the region occupied by the holding surface 41 on the stage 4, the substrate 3 subjected to the coating process is carried out on the stage 4, and thereafter, the substrate 3 subjected to the coating process is carried in. On the other hand, while the slit nozzle 2 is moving above the holding surface 41, the coating liquid is applied from the slit nozzle 2 to the upper surface 31 of the substrate 3 on the holding surface 41.

The moving mechanism of the coating processing section 5 mainly includes: a nozzle support 51 of a bridge structure that spans above the stage 4 in the X-axis direction and supports the slit nozzle 2; the slit nozzle moving section 53 horizontally moves the nozzle support body 51 and the pair of guide rails 52 extending in the Y-axis direction of the slit nozzle 2 supported by the nozzle support body.

The nozzle support 51 includes: a fixing member 51a that fixes the slit nozzle 2; and two elevating mechanisms 51b supporting the fixing member 51a and elevating the fixing member 51 a. The fixing member 51a is formed of a rod-like member having a rectangular cross section, such as carbon fiber-reinforced resin, whose longitudinal direction is the X-axis direction.

The two elevating mechanisms 51b are coupled to both ends of the fixing member 51a in the longitudinal direction, and each includes an AC servomotor, a ball screw, and the like. By these elevating mechanisms 51b, the fixing member 51a and the slit nozzle 2 fixed to the fixing member 51a are elevated in the vertical direction (Z-axis direction), and the interval between the ejection port 21 of the slit nozzle 2 and the substrate 3, that is, the relative height of the ejection port 21 with respect to the substrate 3 is adjusted.

The position of the fixing member 51a in the vertical direction can be detected by, for example, a linear encoder (not shown here) including a scale portion provided on a side surface of the elevating mechanism 51b and a detection sensor provided on a side surface of the slit nozzle 2 opposite to the scale portion.

As shown in the example of fig. 1, the nozzle support 51 configured as described above is a bridge structure suspended from both left and right ends of the stage 4 in the X-axis direction and straddling the holding surface 41. The slit nozzle moving unit 53 moves the nozzle support 51 of the bridge structure and the slit nozzle 2 held by the nozzle support 51 relative to the substrate 3 held on the stage 4 in the Y-axis direction.

Specifically, the slit nozzle moving section 53 has a guide rail 52 for guiding the movement of the slit nozzle 2 in the Y direction on the ± X sides; a linear motor 54 as a drive source; and a linear encoder 55 for detecting the position of the discharge port of the slit nozzle 2.

As shown in the example of fig. 1 and 2, the two guide rails 52 extend in the Y-axis direction at both ends of the stage 4 in the X-axis direction, and include a section from the nozzle cleaning position Y1 (i.e., the position where the nozzle cleaning device 6 is disposed) to the coating end position Y3 (i.e., the end position on the-Y side of the holding surface 41). Therefore, the lower end portions of the two elevating mechanisms 51b are guided along the two guide rails 52 by the slit nozzle moving portion 53, whereby the slit nozzle 2 can be moved between the nozzle cleaning position Y1 and a position facing the substrate 3 held on the stage 4.

In addition, in fig. 2, a coating start position Y2 is shown in addition to the nozzle cleaning position Y1 and the coating end position Y3. The coating start position Y2 corresponds to the coating start position Y2 corresponding to the end on the + Y side of the coating region RT of the substrate 3 in the example shown in fig. 3.

Further, each linear motor 54 is an AC ironless linear motor having a stationary member 54a and a movable member 54 b. The fixing members 54a are provided along the Y-axis direction on both side surfaces of the stage 4 in the X-axis direction. On the other hand, the moving member 54b is provided outside the elevating mechanism 51 b. The linear motor 54 functions as a driving source of the slit nozzle moving section 53, and is driven by a magnetic force generated between the stator 54a and the mover 54 b.

The linear encoder 55 includes a scale portion 55a and a detection portion 55 b. The scale portion 55a is provided along the Y-axis direction below a fixing member 54a of the linear motor 54 provided on the stage 4. On the other hand, the detector 55b is provided outside the moving element 54b of the linear motor 54 provided in the elevating mechanism 51b, and is disposed opposite to the scale 55 a.

The linear encoder 55 detects the position of the discharge port 21 of the slit nozzle 2 in the Y-axis direction based on the relative positional relationship between the scale portion 55a and the detection portion 55 b.

According to the above-described configuration, the slit nozzle 2 can be moved substantially horizontally in the Y-axis direction relative to the holding surface 41 in the upper space of the holding surface 41 holding the substrate 3. The coating apparatus 1 can form a coating layer on the upper surface 31 of the substrate 3 held by the holding surface 41 by relatively moving the slit nozzle 2 in this manner while discharging the coating liquid from the discharge port 21 of the slit nozzle 2.

Further, a region (frame-shaped region) of the substrate 3 having a predetermined width from the end of each side is a non-coating region that is not to be coated with the coating liquid. A rectangular region of the substrate 3 other than the non-coating region is a coating region RT (see fig. 3) to be coated with the coating liquid.

Therefore, the coating liquid is discharged from the discharge port 21 in a section from the coating start position Y2 (end on the + Y side of the coating region RT) to the coating end position Y3 (end on the-Y side of the coating region RT) corresponding to the range of the coating region RT of the substrate 3 in the Y axis direction in the section in which the slit nozzle 2 can move.

In addition, during a period in which the coating process is not performed on the stage 4, such as a period in which the substrate 3 is transferred between the coating apparatus 1 and the external conveyance mechanism (that is, a period in which the substrate 3 is carried in and out), the slit nozzle 2 is retracted to a nozzle adjustment region 100 (corresponding to the state of the example shown in fig. 1) which is a region separated from the holding surface 41 holding the substrate 3 to the + Y side, and the slit nozzle 2 is cleaned by the nozzle cleaning apparatus 6.

< Structure of nozzle cleaning device >

Fig. 5 is a side view showing an example of the configuration of the nozzle cleaning device according to the present embodiment. Fig. 6 is a perspective view showing an example of the structure of a nozzle cleaning member used in the nozzle cleaning device.

The nozzle cleaning device 6 includes: a removing unit 6A that removes an attached matter attached to the lip 24; the driving unit 6B moves the removing unit 6A in the cleaning direction 101 (i.e., the direction in which the discharge port 21 of the slit nozzle 2 extends). The removing unit 6A removes the attached matter attached to the lip 24 by moving the nozzle cleaning member 61 in the cleaning direction 101 along the lip 24 of the slit nozzle 2.

Here, the drive unit 6B can reciprocate the removal unit 6A in the X-axis direction (i.e., in the direction of the cleaning direction 101 and in the opposite direction thereto). The adhered matter to be removed by the removing unit 6A may be any of various substances that may adhere to the lip 24 of the slit nozzle 2, for example, a substance in which a solute of the coating liquid dries and solidifies, the coating liquid itself that is discharged in advance, or a rinse liquid that is discharged to the slit nozzle 2 before the cleaning operation is performed by the nozzle cleaning device 6. For example, when the coating liquid is a photoresist for a color filter, a pigment contained in the coating liquid becomes an attached matter to adhere to the lip portion 24 of the slit nozzle 2.

The nozzle cleaning device 6 is also provided with a cleaning unit 6C (see fig. 3) that cleans the nozzle cleaning member 61. The cleaning unit 6C supplies a cleaning liquid to the nozzle cleaning member 61 after removing the attachments scraped off from the lips 24 of the slit nozzle 2, thereby washing off the attachments adhered to the nozzle cleaning member 61.

The removing unit 6A mainly has: a nozzle cleaning member 61 having a shape corresponding to the lip 24 of the slit nozzle 2; the support base 62 supports the nozzle cleaning member 61.

When the rinse liquid is supplied, the nozzle cleaning member 61 slides in contact with the end of the slit nozzle 2, and removes the rinse liquid from the lip 24 of the slit nozzle 2. This can remove the deposits on the lip 24 of the slit nozzle 2 together with the rinse liquid. That is, when the dried and solidified deposits such as the coating liquid adhere to the inclined surface 26 of the lip 24, the rinse liquid dissolves the deposits to some extent, and the rinse liquid containing the dissolved deposits (deposits) is removed by the nozzle cleaning member 61.

As shown in the example of fig. 6, the nozzle cleaning member 61 includes: a base portion 201 which can be supported by the support base 62; a support portion 202 disposed on the upper surface of the base portion 201;

scrapers

205A, 205B and 205C are integrally supported by the support portion 202. Hereinafter, the

scrapers

205A, 205B and 205C may be simply referred to as "scrapers 205" without distinction.

Scraper 205A has: a body portion 203A supported by the support portion 202; the two thin plate members 204A extend continuously from the main body 203A. In fig. 6, a plurality of thin plate members 204A are arranged in the cleaning direction 101, but one thin plate member 204A may be arranged.

The end surface of the thin plate member 204A opposite to the side continuous with the main body 203A is in contact with the inclined surface 26 (e.g., the inclined surface 26a) of the lip 24 substantially in parallel from the direction intersecting the cleaning direction 101. The two main surfaces of the sheet member 204A are surfaces facing substantially in the cleaning direction 101 or in the opposite direction thereto.

Further, the thickness of the thin plate member 204A in the cleaning direction 101 becomes thicker as it approaches the main body 203A. The thickness of the sheet member 204A in the cleaning direction 101 is, for example, 1mm to 2 mm.

An angle formed between a surface of the sheet member 204A that faces substantially in the cleaning direction 101 (i.e., the moving direction of the nozzle cleaning member 61) and the inclined surface 26 (e.g., the inclined surface 26a) of the lip 24 is an obtuse angle (e.g., 120 °). Further, a portion of the surface of the thin plate member 204A facing the cleaning direction 101, which portion is continuous with the main body portion 203A, is a curved surface that is curved at a predetermined curvature radius R (for example, the curvature radius R is 1mm or more and 5mm or less). Since the thin plate member 204A has a curved surface, the flow (drainage) of the scraped liquid becomes smooth. Further, the strength of the thin plate member 204A when the distal end is bent can be maintained. In other words, the strength of the thin plate member 204A can be maintained, and the tip thereof can be bent.

Scraper 205B has: a body portion 203B supported by the support portion 202; the two thin plate members 204B extend continuously from the main body 203B. In fig. 6, a plurality of thin plate members 204B are arranged in the cleaning direction 101, but one thin plate member 204B may be arranged.

An end surface of the thin plate member 204B opposite to the side continuous with the main body 203B is in contact with an inclined surface 26 (for example, an inclined surface 26B) of the lip 24 opposite to the side, in substantially parallel with the direction intersecting the cleaning direction 101. The two main surfaces of the sheet member 204B are surfaces facing substantially the cleaning direction 101 or the direction opposite thereto.

Further, the thickness of the thin plate member 204B in the cleaning direction 101 becomes thicker as it approaches the main body 203B. The thickness of the sheet member 204B in the cleaning direction 101 is, for example, 1mm to 2 mm.

An angle formed between a surface of the sheet member 204B facing the cleaning direction 101 and the inclined surface 26 (for example, the inclined surface 26B) on the opposite side of the lip 24 is an obtuse angle (for example, 120 °). Further, a portion of the surface of the thin plate member 204B facing the cleaning direction 101, which portion is continuous with the main body portion 203B, is a curved surface that is curved at a predetermined radius of curvature R (for example, the radius of curvature R is 1mm or more and 5mm or less). Since the thin plate member 204B has a curved surface, the flow (drainage) of the scraped liquid becomes smooth. Further, the strength of the thin plate member 204B when the distal end is bent can be maintained. In other words, the strength of the thin plate member 204B can be maintained, and the tip thereof can be bent.

Scraper 205C has: a body portion 203C supported by the support portion 202; three thin plate members 204C extend continuously from the main body 203C. In fig. 6, a plurality of thin plate members 204C are arranged in the cleaning direction 101, but one thin plate member 204C may be arranged.

The end surface of the thin plate member 204C opposite to the side continuous with the main body 203C is in contact with the distal end surface 25 of the lip 24 substantially in parallel from the direction intersecting the cleaning direction 101. The two main surfaces of the thin plate member 204C are surfaces facing in the cleaning direction 101 or the opposite direction.

Further, the thickness of the thin plate member 204C in the cleaning direction 101 becomes thicker as it approaches the main body 203C. The thickness of the sheet member 204C in the cleaning direction 101 is, for example, 1mm to 2 mm.

An angle formed between a surface of the sheet member 204C facing the cleaning direction 101 and the inclined surface 26 (for example, the inclined surface 26b) on the opposite side of the lip 24 is an obtuse angle (for example, 120 °). Further, a portion of the surface of the thin plate member 204C facing the cleaning direction 101, which portion is continuous with the main body portion 203C, is a curved surface that is curved at a predetermined curvature radius R (for example, the curvature radius R is 1mm or more and 5mm or less). Since the thin plate member 204C has a curved surface, the flow (drainage) of the scraped liquid becomes smooth. Further, the strength of the thin plate member 204C when the distal end is bent can be maintained. In other words, the strength of the thin plate member 204C can be maintained, and the tip thereof can be bent.

Further, at least one of the plurality of thin plate members 204C is provided further on the upstream side in the cleaning direction 101 (i.e., the rear side of the removing unit 6A advancing in the cleaning direction 101) than the thin plate member 204A and the thin plate member 204B. Further, the width of the sheet member 204C in the direction intersecting the cleaning direction 101 is narrowed as it is separated from the main body 203C.

Each scraper 205 is made of a resin such as PEEK (polyetheretherketone), PPS (polyphenylene sulfide), or PET (polyethylene terephthalate). Alternatively, each scraper 205 has a rockwell hardness of R110 or more and R130 or less, preferably, a rockwell hardness of R120. Alternatively, each scraper 205 has a bending strength of 30 to 50 inclusive, and preferably a bending strength of 41.

The support portion 202 is supported so as to fix the relative positional relationship among the body portion 203A, the body portion 203B, and the body portion 203C, but the body portion 203A, the body portion 203B, and the body portion 203C are each adjustable in position with respect to the support portion 202. In the case where the supporting portion 202 integrally supports the body portion 203A, the body portion 203B, and the body portion 203C, the position adjustment of the plurality of scrapers 205 can be performed simultaneously, and therefore the position adjustment is simplified.

Specifically, the body portion 203A and the body portion 203B are connected to the support portion 202 via screws, bolts, and the like, and are supported so as to be swingable in the Y-axis direction with respect to the support portion 202.

The nozzle cleaning member 61 having the above-described structure is detachably fixed to the support base 62 by bolts or the like.

The support base 62 shown in fig. 5 has a base portion 62A below the base portion 201 of the nozzle cleaning member 61. The base portion 201 of the nozzle cleaning member 61 is supported by the base portion 62A so as to be able to move up and down. That is, the support table 62 is provided with: a guide rail 62B extending from the upper surface of the base 62A in the Z-axis direction; an urging member 62C (e.g., a compression spring) is provided between the base portion 62A and the base portion 201.

The guide rail 62B guides the movement of the base portion 201 in the Z-axis direction, and the biasing member 62C biases the base portion 201 upward with respect to the base portion 62A. Therefore, the nozzle cleaning member 61 including the base portion 201 is pushed upward by the urging force of the urging member 62C.

Further, the base 62A of the support table 62 is attached to the drive unit 6B. The drive unit 6B has: a pair of

rollers

651A and 651B arranged on both outer sides of the slit nozzle 2 in the X-axis direction; an endless belt 652 is suspended from the

rollers

651A and 651B. A base 62A of the support table 62 is attached to the upper surface of the endless belt 652.

The drive unit 6B configured as described above rotates the

rollers

651A and 651B to drive the upper surface of the endless belt 652 in the X-axis direction, and moves the nozzle cleaning member 61 in the X-axis direction (specifically, the cleaning direction 101) along with the support base 62.

In the nozzle cleaning device 6 having the above configuration, the nozzle cleaning member 61 is moved in the cleaning direction 101 while approaching the lip 24 of the slit nozzle 2 located at the nozzle cleaning position Y1 from below, thereby cleaning the lip 24 of the slit nozzle 2.

< actions relating to nozzle cleaning device >

Fig. 7 is a flowchart showing an example of the cleaning process performed by the nozzle cleaning device. The flowchart of fig. 7 is executed by the control section 8 controlling each action section of the coating apparatus 1.

First, the removal unit 6A is moved to the cleaning start position P1 by being driven by the drive unit 6B (step ST101 of fig. 7). The cleaning start position P1 is set corresponding to the upstream end 20A of the lip 24 of the slit nozzle 2 in the cleaning direction 101, and the nozzle cleaning member 61 faces the upstream end 20A of the lip 24 from below (the same position as in fig. 5) in a state where the removal unit 6A is located at the cleaning start position P1.

Further, since the discharge port 21 is shorter than the entire length of the lip 24 of the slit nozzle 2 in the X-axis direction, the discharge port 21 is not provided at each of both ends of the slit nozzle 2 in the X-axis direction, that is, the upstream end portion 20A and the downstream end portion 20B in the cleaning direction 101. That is, in step ST101, the nozzle cleaning member 61 faces the upstream end 20A of the lip 24 of the slit nozzle 2 on the upstream side in the cleaning direction 101 from the discharge port 21.

Further, in step ST101, the slit nozzle 2 is located at the upper position, and the upstream end portion 20A of the lip 24 and the nozzle cleaning member 61 opposed thereto are separated in the Z-axis direction.

When the movement of the removal unit 6A to the cleaning start position P1 is completed, a predetermined amount of the coating liquid is ejected from the ejection port 21 by the slit nozzle 2 (step ST102 in fig. 7). The purpose of discharging the coating liquid here is to fill the entire area of the discharge port 21 with the coating liquid before the coating process is performed after the cleaning process, but the discharge is not essential.

Next, the slit nozzle 2 is lowered to a lower position lower than the upper position (step ST103 in fig. 7). When the slit nozzle 2 starts to descend, the gap between the lip portion 24 of the slit nozzle 2 and the nozzle cleaning member 61 is narrowed, and the end surface of the thin plate member 204A opposite to the side continuous with the main body portion 203A and the end surface of the thin plate member 204B opposite to the side continuous with the main body portion 203B contact the two inclined surfaces 26 of the lip portion 24. Further, an end surface of the thin plate member 204C opposite to the side continuous with the body portion 203C contacts the tip end surface 25 of the lip portion 24.

Then, the slit nozzle 2 is further lowered, and the nozzle cleaning member 61 is pressed downward against the urging force of the urging member 62C. Therefore, the end faces of the

thin plate members

204A and 204B are pressed against the two inclined faces 26 of the lip 24 by the urging force of the urging member 62C. Further, the end surface of the thin plate member 204C is pressed against the distal end surface 25 of the lip 24 by the urging force of the urging member 62C.

Next, the driving unit 6B drives the removing unit 6A in the cleaning direction 101 to move the nozzle cleaning member 61 in the cleaning direction 101 (step ST 104).

The nozzle cleaning member 61, which moves in the cleaning direction 101 while bringing the end surfaces of the thin plate member 204A, the thin plate member 204B, and the thin plate member 204C into contact with the lip 24, scrapes off the coating liquid discharged downward from the discharge port 21 of the slit nozzle 2, and flattens the lower portion of the coating liquid filling the discharge port 21 in the cleaning direction 101.

When the removal unit 6A reaches the cleaning end position P2 and the nozzle cleaning member 61 moves to a position on the downstream side in the cleaning direction 101 with respect to the slit nozzle 2, the drive unit 6B stops the removal unit 6A (step ST 105).

Fig. 8 is a diagram showing in detail the case where the inclined surface 26a and the thin plate member 204A are brought into contact with each other to remove the deposit (for example, the coating liquid that has adhered to the slit nozzle 2 and dried and solidified is dissolved in the coating liquid for lubrication) in step ST104 of the above-described step. The

thin plate members

204B and 204C are in contact with the lip 24 in almost the same manner.

As shown in the example of fig. 8, an end surface 214A of the thin plate member 204A opposite to the side continuous with the main body 203A is in contact with the inclined surface 26a of the lip 24 substantially in parallel with the direction 101A intersecting the cleaning direction 101.

Further, the thickness of the thin plate member 204A in the cleaning direction 101 becomes thicker as it approaches the main body 203A. In particular, a surface 234A of a portion continuous with the main body portion 203A among the surfaces 224A of the thin plate member 204A facing the cleaning direction 101 is a curved surface curved at a predetermined radius of curvature R. Further, the angle θ formed between the surface 224A and the inclined surface 26a is an obtuse angle.

As described above, when the nozzle cleaning member 61 is moved in the cleaning direction 101 in a state where the inclined surface 26a and the sheet member 204A are in contact with each other, the attached matter 300 attached to the lip 24 of the slit nozzle 2 is scraped and removed by the sheet member 204A.

At this time, the thickness of the thin plate member 204A in the cleaning direction 101 becomes thin on the side of the end surface 214A, and therefore the thin plate member 204A is slightly bent although it is formed of a hard material. On the other hand, the thickness of the thin plate member 204A in the cleaning direction 101 becomes thicker on the side continuous with the main body portion 203A, and therefore, a decrease in strength of the thin plate member 204A is suppressed. Therefore, the thin plate member 204A can suppress wear due to sliding, and can be deformed in accordance with the shape of the lip 24 of the slit nozzle 2, thereby effectively scraping off the attached matter 300. Further, according to the thin plate member 204A, damage to the lip 24 of the slit nozzle 2 can also be suppressed.

Further, since the angle θ formed between the surface 224A and the inclined surface 26a is an obtuse angle, the attached matter 300 smoothly flows from the thin plate member 204A side of the scraper 205A to the main body 203A side. Therefore, the liquid discharge property is improved.

Further, since the surface 234A is curved in accordance with the predetermined radius of curvature R, the scraped attachment 300 can be suppressed from staying at the root portion of the thin plate member 204A (i.e., the portion where the thin plate member 204A and the main body portion 203A are continuous), and the scraped attachment 300 can be made to flow smoothly. Therefore, contamination of the scraper 205A itself is suppressed and cleaning is also easy.

Fig. 9 is a view showing a state in which the lip 24 is in contact with three thin plate members in step ST104 of the above-described step.

As shown in the example of fig. 9, the two inclined surfaces 26 of the lip 24 are in contact with the corresponding

scrapers

205A and 205B, respectively, and the tip end surface 25 of the lip 24 is in contact with the scraper 205C.

Further, the width of scraper 205C (specifically, the thin plate member) in the direction intersecting cleaning direction 101 becomes narrower as it goes away from the main body portion side. Further, the width of the tip of the scraper 205C (specifically, the thin plate member) is set to be wider than the width of the ejection port provided on the tip surface 25.

In this case, when viewed in the direction along cleaning direction 101, scraper 205C is disposed so as to overlap scraper 205A and scraper 205B, and scraper 205 is disposed so as to be offset in cleaning direction 101, and therefore does not contact each other.

Here, in order to suppress the defective scraping of the coating liquid, at least one of the width D1, the width D2, and the width D3 of the end surface of the scraper 205 that contacts the lip 24 may be set to be wider than the width of the corresponding lip 24. Specifically, the width D1 of the end face of the scraper 205A may be set to be wider than the width of the inclined face 26 of the lip 24 with which the scraper 205A contacts, the width D2 of the end face of the scraper 205B may be set to be wider than the width of the inclined face 26 of the lip 24 with which the scraper 205B contacts, or the width D3 of the end face of the scraper 205C may be set to be wider than the width of the tip face 25 of the lip 24 with which the scraper 205C contacts.

< second embodiment >

The coating apparatus, the nozzle cleaning apparatus, the scraper, and the nozzle cleaning method according to the present embodiment will be described below. In the following description, the same components as those described in the above embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted as appropriate.

< Structure of nozzle cleaning device >

Fig. 10 is a perspective view showing a modification of the structure of the nozzle cleaning member used in the nozzle cleaning device. As shown in the example of fig. 10, nozzle cleaning member 61A includes base portion 201, support portion 202, scraper 205A, scraper 205B, scraper 205C, and flushing nozzle 700.

The rinse nozzle 700 supplies a rinse liquid supplied from a rinse liquid supply source, not shown, below the base portion 201 to the slit nozzle 2.

< actions relating to nozzle cleaning device >

Fig. 11 is a flowchart showing an example of the cleaning process performed by the nozzle cleaning device. The flowchart of fig. 11 is executed by the control section 8 controlling the respective operation sections of the coating apparatuses.

First, the removal unit 6A is moved to the cleaning start position P1 by the driving of the driving unit 6B (step ST101 of fig. 11). The cleaning start position P1 is set corresponding to the upstream end 20A of the lip 24 of the slit nozzle 2 in the cleaning direction 101, and the nozzle cleaning member 61 faces the upstream end 20A of the lip 24 from below (the same position as in fig. 5) in a state where the removal unit 6A is located at the cleaning start position P1.

When the movement of the removal unit 6A to the cleaning start position P1 is completed, the slit nozzle 2 is then lowered to a lower position lower than the upper position (step ST103 in fig. 11). When the slit nozzle 2 starts to descend, the gap between the lip portion 24 of the slit nozzle 2 and the nozzle cleaning member 61 is narrowed, and the end surface of the thin plate member 204A opposite to the side continuous with the main body portion 203A and the end surface of the thin plate member 204B opposite to the side continuous with the main body portion 203B contact the two inclined surfaces 26 of the lip portion 24. Further, an end surface of the thin plate member 204C opposite to the side continuous with the body portion 203C contacts the tip end surface 25 of the lip portion 24.

thin plate members

When the slit nozzle 2 is completely lowered, the rinse liquid is supplied from a rinse liquid supply source (not shown) between the lip 24 of the slit nozzle 2 and the nozzle cleaning member 61 (step ST 106). The supply amount of the rinse liquid per unit time is preferably such that the level of the rinse liquid is maintained above the tip surface 25 of the lip 24 and the rinse liquid adheres to the inclined surface 26 of the lip 24. In addition, various liquids can be used as the rinse liquid, and for example, a solvent constituting the coating liquid may be used. In this case, a solution in which a solute is dissolved in a solvent, i.e., a rinse solution, becomes a coating solution.

Next, the driving unit 6B drives the removing unit 6A in the cleaning direction 101 to move the nozzle cleaning member 61 in the cleaning direction 101 (step ST 104). During the movement of the nozzle cleaning member 61, the rinse liquid is continuously supplied between the lip 24 and the nozzle cleaning member 61.

The nozzle cleaning member 61, which moves in the cleaning direction 101 while bringing the end surfaces of the

thin plate members

204A, 204B, and 204C into contact with the lip 24, removes adhering matter (for example, a liquid in which a coating liquid that has adhered to the slit nozzle 2 and dried and cured is dissolved in the coating liquid for lubrication) from the inclined surface 26 and the tip end surface 25 of the lip 24.

When the removal unit 6A reaches the cleaning end position P2 and the nozzle cleaning member 61 moves to a position on the downstream side in the cleaning direction 101 with respect to the slit nozzle 2, the drive unit 6B stops the removal unit 6A (step ST 105). Further, the supply of the rinse solution is stopped (step ST 107).

< regarding the effects produced according to the above-described embodiment >

Next, an example of the effects produced by the above-described embodiments will be described. In the following description, the effects are described based on specific configurations of the examples shown in the above embodiments, and other specific configurations of the examples shown in the present specification may be substituted as long as the similar effects are produced.

According to the above embodiment, the nozzle cleaning device 6 includes the removing unit 6A having the nozzle cleaning member 61 and the moving mechanism. Here, the moving mechanism is, for example, a mechanism corresponding to the driving unit 6B. The nozzle cleaning member 61 can contact the end of the slit nozzle 2. The driving unit 6B moves the nozzle cleaning member 61 in the first direction, which is the direction in which the discharge port 21 of the slit nozzle 2 extends, while bringing the nozzle cleaning member 61 into contact with the end of the slit nozzle 2. Here, the first direction is, for example, the cleaning direction 101 and a direction corresponding to the opposite direction. The nozzle cleaning member 61 includes at least one first scraper, at least one second scraper, at least one third scraper, and a support portion 202. Here, the first scraper is, for example, a member corresponding to the scraper 205A. Further, the second scraper is, for example, a member corresponding to the scraper 205B. Further, the third scraper is, for example, a member corresponding to the scraper 205C. The scraper 205A includes a first body and a first thin plate member. Here, the first body portion is, for example, a member corresponding to the body portion 203A. The first thin plate member is, for example, a member corresponding to the thin plate member 204A. The thin plate member 204A extends from the body portion 203A. Further, the thin plate member 204A may contact the first side surface of the end portion of the slit nozzle 2 from a second direction which is a direction intersecting the first direction. Here, the second direction is, for example, a direction corresponding to the direction 101A. The first side surface is a surface corresponding to the inclined surface 26a, for example. The scraper 205B includes a second body and a second thin plate member. Here, the second body portion is, for example, a member corresponding to the body portion 203B. The second thin plate member is, for example, a member corresponding to the thin plate member 204B. The thin plate member 204B extends from the body portion 203B. Further, the thin plate member 204B may be in contact with a second side surface of the slit nozzle 2 opposite to the first side surface from the second direction. Here, the second side surface is a surface corresponding to the inclined surface 26b or the like, for example. Scraper 205C includes a third body and a third thin plate member. Here, the third body portion is, for example, a member corresponding to the body portion 203C. Further, the third thin plate member is, for example, a member corresponding to the thin plate member 204C. The thin plate member 204C extends from the body portion 203C. Further, the thin plate member 204C may contact the lower surface (tip surface 25) of the end of the slit nozzle 2 from the second direction. The support portion 202 supports the

scrapers

205A, 205B and 205C.

According to this configuration, even when a hard material is used as the cleaning member of the slit nozzle 2 to suppress wear due to sliding, a decrease in the follow-up performance with respect to the discharge port 21 of the slit nozzle 2 can be suppressed by the thin plate members extending from the respective main bodies. Further, specifically, since the

scrapers

205A, 205B and 205C each slide in contact with the discharge port 21 of the slit nozzle 2 to remove the adhered substance in the peripheral portion of the discharge port 21, even when the shape of the lip 24 of the slit nozzle 2 is changed, the position of each scraper with respect to the support portion 202 can be adjusted to flexibly adapt to the shape of the lip 24 to remove the adhered substance.

Further, even in the case where other structures of the examples shown in the present specification are added as appropriate to the above-described structure, that is, in the case where other structures in the present specification which are not mentioned as the above-described structure are added as appropriate, the same effect can be produced.

Further, according to the above embodiment, at least one of the thickness of the thin plate member 204A, the thickness of the thin plate member 204B, and the thickness of the thin plate member 204C becomes thicker as it approaches the

corresponding body portion

203A, 203B, or 203C. According to this structure, the thickness of the sheet member in the cleaning direction 101 becomes relatively thin on the side of the end face, and therefore the sheet member is slightly bent. On the other hand, the thickness of the thin plate member in the cleaning direction 101 is relatively increased on the side continuous with the main body, and therefore, the strength of the thin plate member is suppressed from being reduced. Therefore, the thin plate member can suppress wear caused by sliding and deform in accordance with the shape of the lip 24 of the slit nozzle 2, thereby effectively scraping off the attached matter.

Further, according to the above embodiment, at least one of the thickness of the thin plate member 204A, the thickness of the thin plate member 204B, and the thickness of the thin plate member 204C becomes thicker with a radius of curvature of 1mm or more and 5mm or less as it approaches the

corresponding body portion

203A, 203B, or 203C. According to this configuration, the scraped deposits can be prevented from remaining at the root of the thin plate member, and the scraped deposits can be made to flow smoothly. Therefore, contamination of the scraper itself is suppressed and cleaning is also easy. Further, by adjusting the curvature radius R, the strength of the sheet member and the degree of curvature of the sheet member can be adjusted. Specifically, if the radius of curvature R is large, the strength of the thin plate member is improved, and if the radius of curvature R is small, the degree of bending of the thin plate member is improved.

Further, according to the above embodiment, at least one of the thin plate member 204A, the thin plate member 204B, and the thin plate member 204C has the rockwell hardness of R110 or more and R130 or less, and the bending strength of 30 or more and 50 or less. According to this structure, the thin plate member suppresses wear caused by sliding, and is deformed in accordance with the shape of the lip 24 of the slit nozzle 2, thereby enabling attachment to be scraped off effectively.

Further, according to the above embodiment, at least one of the

scrapers

205A, 205B and 205C is provided in plurality in the first direction. According to this structure, the amount of the attached matter that can be removed can be increased by 1 sliding of the removing unit 6A.

Further, according to the above embodiment, the angle formed between the end of the slit nozzle 2 and the surface of at least one of the thin plate member 204A, the thin plate member 204B, and the thin plate member 204C facing the direction in which the nozzle cleaning member 61 moves is an obtuse angle. According to this structure, the attached matter smoothly flows from the side of the thin plate member to the side of the main body portion, thereby improving the liquid discharge performance.

Further, according to the above embodiment, the thin plate member 204C is located further upstream in the direction in which the nozzle cleaning member 61 moves than the

thin plate members

204A and 204B. With this configuration, the deposits scraped off by the

thin plate members

204A and 204B toward the distal end surface 25 of the lip 24 can be effectively removed by the thin plate member 204C located behind the removing unit 6A that advances in the cleaning direction 101.

Further, according to the above embodiment, the coating apparatus 1 includes: a slit nozzle 2 for ejecting the coating liquid from a slit-shaped ejection port 21; the nozzle cleaning device. According to this configuration, even when a hard material is used as the cleaning member of the slit nozzle 2 to suppress wear due to sliding, a decrease in the follow-up performance with respect to the discharge port 21 of the slit nozzle 2 can be suppressed by the thin plate members extending from the respective main bodies.

According to the above embodiment, the nozzle cleaning method includes the step of moving the nozzle cleaning member 61 along the first direction, which is the direction in which the discharge port 21 of the slit nozzle 2 extends, while bringing the nozzle cleaning member 61, which can be brought into contact with the end of the slit nozzle 2, into contact with the end of the slit nozzle 2. Here, nozzle cleaning member 61 includes at least one scraper 205A, at least one scraper 205B, at least one scraper 205C, and support portion 202.

According to this configuration, even when a hard material is used as the cleaning member of the slit nozzle 2 to suppress wear due to sliding, a decrease in the follow-up performance with respect to the discharge port 21 of the slit nozzle 2 can be suppressed by the thin plate members extending from the respective main bodies.

In addition, the order of performing the respective processes can be changed without particular limitation.

Further, according to the above embodiment, the scraper 205C includes: a body portion 203C; the thin plate member 204C extends from the main body 203C and can contact the end of the slit nozzle 2 from a direction intersecting the direction in which the discharge port 21 extends. According to this configuration, even when a hard material is used as the cleaning member of the slit nozzle 2 to suppress wear due to sliding, the thin plate member 204C extending from the main body 203C can suppress a decrease in the follow-up property with respect to the discharge port 21 of the slit nozzle 2.

Further, according to the above embodiment, the width of the thin plate member 204C in the direction intersecting the direction in which the ejection port 21 extends becomes narrower as it is separated from the main body portion 203C. With this configuration, it is possible to prevent the thin plate member 204C from interfering with the thin plate member 204A and the thin plate member 204B, and to suppress a decrease in strength of the thin plate member 204C by increasing the width of the thin plate member 204C on the side continuous with the main body portion 203C.

< modification of the above embodiment >

In the above-described embodiment, it is described that the

thin plate members

204A, 204B, and 204C are thicker as they approach the corresponding main body portions, but a thin plate member whose thickness is not changed as they approach the corresponding main body portions may be included.

In the above-described embodiment, it is described that the

thin plate members

204A, 204B, and 204C are thicker according to the predetermined radius of curvature R as they approach the corresponding main body portions, but a thin plate member whose thickness is not changed as they approach the corresponding main body portions may be included.

In the above-described embodiment, it is described that the angles formed between the faces of the

thin plate members

204A, 204B, and 204C facing the cleaning direction 101 and the lip 24 are obtuse angles, but a thin plate member having an angle other than the obtuse angle may be included.

In the above-described embodiment, the thin plate member 204A, the thin plate member 204B, and the thin plate member 204C are integrally supported and used, but only one of the thin plate member 204A, the thin plate member 204B, and the thin plate member 204C may be provided.

In the above-described embodiments, materials, dimensions, shapes, relative arrangement, conditions for implementation, and the like of the respective components are described in some cases, but these are merely examples in all respects and are not limited to the contents described in the present specification.

Therefore, within the technical scope disclosed in the specification of the present application, innumerable modifications and equivalents not showing examples are foreseen. For example, the case where at least one of the components is changed includes an added case or an omitted case.

In the above-described embodiment, when a material name or the like is described without being specified, it is assumed that the material contains other additives, for example, an alloy or the like, as long as no contradiction occurs.

Claims

1. A nozzle cleaning device that cleans an end of a slit nozzle provided with a slit-shaped discharge port, the nozzle cleaning device comprising:

a nozzle cleaning member contactable with an end of the slit nozzle; and

a moving mechanism that moves the nozzle cleaning member in a first direction, which is a direction in which the discharge port of the slit nozzle extends, while bringing the nozzle cleaning member into contact with an end of the slit nozzle,

the nozzle cleaning member includes:

at least one first scraper, comprising: a first body portion; and a first thin plate member extending from the first body portion and contactable with a first side surface of an end portion of the slit nozzle from a second direction that is a direction intersecting the first direction;

at least one second scraper, possess: a second body portion; and a second thin plate member extending from the second body portion and contactable from the second direction to a second side surface opposite to the first side surface of the end portion of the slit nozzle;

at least one third scraper, comprising: a third body portion; and a third thin plate member extending from the third body portion and contactable with a lower surface of an end portion of the slit nozzle from the second direction; and

a support portion supporting the first scraper, the second scraper, and the third scraper.

2. The nozzle cleaning device according to claim 1,

at least one of the thickness of the first thin plate member, the thickness of the second thin plate member, and the thickness of the third thin plate member becomes thicker as it approaches the corresponding first body portion, second body portion, or third body portion.

3. The nozzle cleaning device according to claim 1 or 2,

a portion of a surface of at least one of the first, second, and third thin plate members facing a direction in which the nozzle cleaning member moves, which is continuous with the corresponding first, second, or third main body, is a curved surface.

4. The nozzle cleaning device according to claim 2,

at least one of a thickness of the first thin plate member, a thickness of the second thin plate member, and a thickness of the third thin plate member becomes thicker with a radius of curvature of 1mm or more and 5mm or less as it approaches the corresponding first main body, second main body, or third main body.

5. The nozzle cleaning device according to claim 1 or 2,

at least one of the first, second, and third thin plate members has a rockwell hardness of R110 or more and R130 or less, and has a bending strength of 30 or more and 50 or less.

6. The nozzle cleaning device according to claim 1 or 2,

at least one of the first scraper, the second scraper, and the third scraper is provided in plurality in the first direction.

7. The nozzle cleaning device according to claim 1 or 2,

an angle formed between a surface of at least one of the first, second, and third sheet members facing a direction in which the nozzle cleaning member moves and an end of the slit nozzle is an obtuse angle.

8. The nozzle cleaning device according to claim 1 or 2,

the third thin plate member is located upstream of the first thin plate member and the second thin plate member in a direction in which the nozzle cleaning member moves.

9. A coating apparatus is provided with:

a slit nozzle that ejects a coating liquid from a slit-shaped ejection port; and

the nozzle cleaning device according to claim 1 or 2.

10. A nozzle cleaning method for cleaning an end portion of a slit nozzle provided with a slit-shaped discharge port, the nozzle cleaning method comprising:

a step of moving a nozzle cleaning member, which is capable of contacting an end of the slit nozzle, in a first direction, which is a direction in which the discharge port of the slit nozzle extends, while contacting the end of the slit nozzle with the nozzle cleaning member,

the nozzle cleaning member includes:

11. A scraper for cleaning an end of a slit nozzle provided with a slit-shaped discharge port, comprising:

a body portion; and

a thin plate member extending from the main body and contactable with an end of the slit nozzle from a direction intersecting a direction in which the ejection port extends.

12. The scraper of claim 11,

the width of the thin plate member in a direction intersecting the direction in which the ejection port extends is narrowed as it is separated from the main body.