JP2018187597A - Application device, application method, and nozzle - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an application technology and a nozzle which can apply a coating liquid in an appropriate range by a nozzle while suppressing wear and breakage of a nozzle and a nozzle abutting member in nozzle cleaning processing.SOLUTION: A nozzle discharges a coating liquid from a slit-like discharge port arranged on a tip end part of a nozzle main body part. A nozzle abutting member has a recessed part which can be abutted on the tip end part. A drive part relatively moves the nozzle abutting member with respect to the nozzle from one side to the other side of an extension direction of the discharge port. The tip end part includes a discharge port forming part on which the discharge port is formed, and an inclined part extending from one side end part of the discharge port forming part to one side of the extension direction and to an opposite side to a direction the coating liquid is discharged. The drive part makes the recessed part of the nozzle abutting member abut on the inclined part, moves the nozzle abutting member to the discharge port forming part along the inclined part, and then moves the nozzle abutting member while the recessed part is being abutted on the discharge port forming part.SELECTED DRAWING: Figure 6

Description

  The present invention is for precision electronic devices such as glass substrates for liquid crystal display devices, semiconductor substrates, glass substrates for PDPs, glass substrates for photomasks, substrates for color filters, substrates for recording disks, substrates for solar cells, substrates for electronic paper, etc. Coating apparatus for discharging and applying a coating liquid from a discharge port provided at the tip of a nozzle to a substrate, a rectangular glass substrate, a flexible substrate for film liquid crystal, and an organic EL substrate (hereinafter simply referred to as “substrate”) The present invention relates to a coating method and a nozzle.

  Conventionally, in order to apply a coating liquid to a substrate, for example, a nozzle that discharges the coating liquid from a discharge port as described in Patent Document 1 is generally used. In such a nozzle, there are cases where deposits such as a coating liquid that adheres to the side surface of the tip portion where the discharge port is provided and is dried and hardened fall to contaminate the substrate. Thus, for example, a coating liquid removal technique described in Patent Document 2 is used. In the slit coater (coating device) described in Patent Document 2, the nozzle cleaning process is executed before the start of coating by the nozzle. In this nozzle cleaning process, the coating liquid adhering to the side surface of the nozzle tip is moved by moving the wiping head relative to the nozzle while the nozzle contact member provided on the wiping head is in contact with the nozzle tip. Remove.

Japanese Patent No. 5346663 Japanese Patent No. 5766990 JP2013-184085A

  By the way, in the slit coater, the width of the discharge port provided at the tip of the nozzle is set in accordance with the size of the application region to be applied on the substrate. Then, at the start of coating, after the nozzle is disposed so that the discharge port is close to the position immediately above the coating region of the substrate, the coating liquid is discharged from the discharge port. At this time, the part adjacent to the discharge port in the tip of the nozzle is also close to the substrate. For this reason, a part of the coating liquid deposited on the substrate spreads outside the coating region due to capillary action, and the coating liquid may reach the side surface or the back surface of the substrate. Such a liquid spill phenomenon may contaminate the slit coater.

  Therefore, for example, as described in Patent Document 3, a portion adjacent to the discharge port is cut away from the position of the discharge port of the nozzle toward the nozzle body (on the opposite side to the direction facing the substrate), and a cutout portion, a stepped portion, etc. A measure to establish a However, before the application by the nozzle is started, it is necessary to move the wiping head from the outside on the extension line of the discharge port to the tip portion of the nozzle to bring the nozzle contact member into contact, and to slide along the tip portion. . At this time, there is a possibility that the nozzle contact member provided in the wiping head contacts the notch or stepped portion, and the nozzle contact member or nozzle is severely worn or damaged. As a result, the replacement cycle of the nozzle and the nozzle contact member is shortened, and this becomes one of the main factors that reduce running cost and maintainability.

  The present invention has been made in view of the above problems, and provides an application technique and a nozzle capable of applying an application liquid to an appropriate range with the nozzle while suppressing wear and breakage of the nozzle and the nozzle contact member in the nozzle cleaning process. The purpose is to provide.

  1st aspect of this invention is a coating device, Comprising: The nozzle which discharges a coating liquid from the slit-shaped discharge port provided in the front-end | tip part of a nozzle main-body part, and the nozzle which has a recessed part which can contact | abut a front-end | tip part An abutting member, and a driving unit that moves the nozzle abutting member relative to the nozzle from one side to the other side in the extending direction of the ejection port, and the distal end portion of the ejection port is formed with the ejection port And a driving portion that is a concave portion of the nozzle contact member. The inclined portion extends from one end of the discharge port forming portion to one side in the extending direction and opposite to the direction in which the coating liquid is discharged. The nozzle contact member is moved relative to the discharge port forming portion along the inclined portion and the nozzle contact member is moved relative to the discharge port forming portion. It is characterized by being moved to.

  Further, a second aspect of the present invention is a coating method, comprising: a coating step of spraying a coating liquid from a slit-shaped discharge port provided at a tip portion of a nozzle body, and a nozzle contact member. A cleaning step of cleaning the tip portion with a nozzle abutting member by moving it relatively from one side to the other side in the extending direction of the discharge port while being in contact with the tip portion. The discharge port forming portion is formed using a nozzle provided at the tip portion thereof and an inclined portion extending from one side of the discharge port forming portion to one side in the extending direction and opposite to the direction in which the coating liquid is discharged. In the cleaning step, the concave portion of the nozzle contact member is brought into contact with the inclined portion and the nozzle contact member is moved relative to the discharge port forming portion along the inclined portion, and then the concave portion is moved to the discharge port forming portion. This is done by relatively moving the nozzle abutting member while abutting against It is characterized by a door.

  Furthermore, in the third aspect of the present invention, after the coating liquid is discharged from the slit-like discharge port provided at the tip of the nozzle body, the discharge port is relatively extended from one side to the other side in the extending direction. The nozzle abutting member that moves to the nozzle is used to scrape off the coating liquid adhering to the tip portion, and the tip portion is formed from the discharge port forming portion in which the discharge port is formed, and one end portion of the discharge port forming portion. An inclined portion extending on one side of the extending direction and on the opposite side of the direction in which the coating liquid is discharged, and the inclined portion is in contact with a nozzle abutting member that moves relatively along the extending direction. It is characterized by being guided to the forming part.

  In the invention thus configured, the inclined portion is provided on one side of the discharge port forming portion in the extending direction of the discharge port provided in the discharge port forming portion. The inclined portion extends to one side in the extending direction and opposite to the discharge direction of the coating liquid, and prevents the coating liquid from spreading due to a capillary phenomenon at one end of the discharge port forming portion. Moreover, the inclined portion smoothly guides the nozzle contact member to the discharge port forming portion while contacting the nozzle contact member.

  As described above, since the inclined portion is provided on one side of the discharge port forming portion, that is, on the side where the nozzle cleaning is started by the nozzle contact member, the wear and breakage of the nozzle and the nozzle contact member are suppressed in the nozzle cleaning process. In addition, the spread of the coating solution at one end of the discharge port forming portion can be suppressed, and the coating solution can be applied in an appropriate range.

It is a figure which shows typically the whole structure of one Embodiment of the coating device concerning this invention. It is the perspective view seen from the slanting lower part of the nozzle. It is a perspective view which shows the structure of a nozzle cleaner. FIG. 3B is a partially enlarged perspective view of the nozzle cleaner shown in FIG. 3A. It is a perspective view which shows the spreader of a nozzle cleaner. It is a flowchart which shows an example of the nozzle cleaning process by a nozzle cleaner. It is a front view which shows typically the operation | movement performed according to the flowchart of FIG. It is a figure which shows typically the positional relationship of the lip | rip part of a nozzle and a scraper when it sees from the downstream of a cleaning direction.

  FIG. 1 is a diagram schematically showing the overall configuration of an embodiment of a coating apparatus according to the present invention. The coating apparatus 1 is a slit coater that applies a coating solution to the upper surface Wf of the substrate W that is transported in a horizontal posture from the left hand side to the right hand side in FIG. In the following drawings, in order to clarify the arrangement relationship of each part of the apparatus, the transport direction of the substrate W is referred to as “X direction”, and the horizontal direction from the left hand side to the right hand side in FIG. 1 is referred to as “+ X direction”. The reverse direction is referred to as the “−X direction”. Further, among the horizontal direction Y orthogonal to the X direction, the front side of the apparatus is referred to as “−Y direction” and the back side of the apparatus is referred to as “+ Y direction”. Further, the upward direction and the downward direction in the vertical direction Z are referred to as “+ Z direction” and “−Z direction”, respectively.

  First, an outline of the configuration and operation of the coating apparatus 1 will be described with reference to FIG. 1, and then a more detailed structure of the maintenance unit will be described. The basic configuration and operation principle of the coating apparatus 1 are the same as those described in Patent Document 1 previously disclosed by the applicant of the present application. Therefore, in the present specification, among the configurations of the coating apparatus 1, configurations similar to those described in these known documents can be applied, and structures can be easily understood from the descriptions of these documents. Detailed description will be omitted, and the characteristic part of this embodiment will be mainly described.

  In the coating apparatus 1, the input conveyor 100, the input transfer unit 2, the floating stage unit 3, the output transfer unit 4, and the output conveyor 110 are arranged close to each other in this order along the transport direction Dt (+ X direction) of the substrate W. Thus, as will be described in detail below, a transport path for the substrate W extending in a substantially horizontal direction is formed. In the following description, when the positional relationship is shown in association with the transport direction Dt of the substrate W, “upstream side in the transport direction Dt of the substrate W” is simply referred to as “upstream side”, and “downstream in the transport direction Dt of the substrate W”. "Side" may be simply abbreviated as "Downstream". In this example, the (−X) side relatively corresponds to “upstream side” and the (+ X) side corresponds to “downstream side” when viewed from a certain reference position.

  The substrate W to be processed is carried into the input conveyor 100 from the left hand side of FIG. The input conveyor 100 includes a roller conveyor 101 and a rotation driving mechanism 102 that rotationally drives the roller conveyor 101, and the substrate W is transported in a horizontal posture downstream, that is, in the (+ X) direction by the rotation of the roller conveyor 101. The input transfer unit 2 includes a roller conveyor 21 and a rotation / elevation drive mechanism 22 having a function of rotationally driving the roller conveyor 21 and a function of elevating and lowering the roller conveyor 21. As the roller conveyor 21 rotates, the substrate W is further transported in the (+ X) direction. Moreover, the vertical direction position of the board | substrate W is changed because the roller conveyor 21 raises / lowers. The substrate W is transferred from the input conveyor 100 to the floating stage unit 3 by the input transfer unit 2 configured as described above.

  The levitation stage unit 3 includes a flat stage divided into three along the substrate transport direction Dt. That is, the levitation stage unit 3 includes an inlet levitation stage 31, a coating stage 32, and an outlet levitation stage 33, and the upper surfaces of these stages are part of the same plane. The upper surfaces of the inlet levitation stage 31 and the outlet levitation stage 33 are provided with a large number of ejection holes for ejecting compressed air supplied from the levitation control mechanism 35 in a matrix, and the buoyancy imparted from the ejected airflow The substrate W rises. Thus, the lower surface Wb of the substrate W is supported in a horizontal posture in a state of being separated from the upper surface of the stage. The distance between the lower surface Wb of the substrate W and the upper surface of the stage, that is, the flying height can be, for example, 10 micrometers to 500 micrometers.

  On the other hand, on the upper surface of the coating stage 32, ejection holes for ejecting compressed air and suction holes for sucking air between the lower surface Wb of the substrate W and the upper surface of the stage are alternately arranged. The distance between the lower surface Wb of the substrate W and the upper surface of the coating stage 32 is precisely controlled by the levitation control mechanism 35 controlling the amount of compressed air ejected from the ejection holes and the amount of suction from the suction holes. Thereby, the vertical position of the upper surface Wf of the substrate W passing over the coating stage 32 is controlled to a specified value. As a specific configuration of the levitation stage unit 3, for example, the one described in Japanese Patent No. 5346663 (Patent Document 1) can be applied. The flying height on the coating stage 32 is calculated by the control unit 9 based on detection results by sensors 61 and 62, which will be described in detail later, and can be adjusted with high accuracy by airflow control.

  The entrance levitation stage 31 is provided with lift pins not shown in the drawing, and the levitation stage portion 3 is provided with a lift pin drive mechanism 34 for raising and lowering the lift pins.

  The substrate W carried into the levitation stage unit 3 via the input transfer unit 2 is given a propulsive force in the (+ X) direction by the rotation of the roller conveyor 21 and is conveyed onto the inlet levitation stage 31. The inlet floating stage 31, the coating stage 32, and the outlet floating stage 33 support the substrate W in a floating state, but do not have a function of moving the substrate W in the horizontal direction. The transport of the substrate W in the levitation stage unit 3 is performed by the substrate transport unit 5 disposed below the entrance levitation stage 31, the coating stage 32, and the exit levitation stage 33.

  The substrate transport unit 5 is provided on a chuck mechanism 51 that supports the substrate W from below by partially abutting on the peripheral edge of the lower surface of the substrate W, and a suction pad (not shown) provided on the suction member at the upper end of the chuck mechanism 51. A suction / running control mechanism 52 having a function of sucking and holding the substrate W by applying a negative pressure and a function of reciprocating the chuck mechanism 51 in the X direction are provided. In a state where the chuck mechanism 51 holds the substrate W, the lower surface Wb of the substrate W is positioned higher than the upper surface of each stage of the levitation stage unit 3. Therefore, the substrate W maintains the horizontal posture as a whole by the buoyancy applied from the levitation stage unit 3 while the peripheral portion is sucked and held by the chuck mechanism 51. A plate thickness measuring sensor 61 is disposed in the vicinity of the roller conveyor 21 in order to detect the vertical position of the upper surface of the substrate W when the lower surface Wb of the substrate W is partially held by the chuck mechanism 51. . By positioning a chuck (not shown) in a state where the substrate W is not held immediately below the sensor 61, the sensor 61 can detect the upper surface of the suction member, that is, the vertical position of the suction surface.

  The chuck mechanism 51 holds the substrate W carried into the floating stage unit 3 from the input transfer unit 2, and the substrate W moves above the entrance floating stage 31 by moving the chuck mechanism 51 in the (+ X) direction in this state. From above the coating stage 32 and then conveyed above the outlet floating stage 33. The transported substrate W is transferred to the output transfer unit 4 disposed on the (+ X) side of the outlet floating stage 33.

  The output transfer unit 4 includes a roller conveyor 41, and a rotation / lift drive mechanism 42 having a function of rotating and driving the roller conveyor 41. By rotating the roller conveyor 41, a propulsive force in the (+ X) direction is applied to the substrate W, and the substrate W is further transported along the transport direction Dt. Further, the vertical position of the substrate W is changed by moving the roller conveyor 41 up and down. The operation realized by raising and lowering the roller conveyor 41 will be described later. The substrate W is transferred to the output conveyor 110 from above the outlet floating stage 33 by the output transfer unit 4.

  The output conveyor 110 includes a roller conveyor 111 and a rotation driving mechanism 112 that rotates and drives the substrate. The substrate W is further transported in the (+ X) direction by the rotation of the roller conveyor 111, and finally the outside of the coating apparatus 1. To be paid out. The input conveyor 100 and the output conveyor 110 may be provided as part of the configuration of the coating apparatus 1, but may be separate from the coating apparatus 1. Further, for example, a separate unit substrate dispensing mechanism provided on the upstream side of the coating apparatus 1 may be used as the input conveyor 100. Further, a substrate receiving mechanism of another unit provided on the downstream side of the coating apparatus 1 may be used as the output conveyor 110.

  A coating mechanism 7 for coating the coating liquid on the upper surface Wf of the substrate W is disposed on the transport path of the substrate W transported in this manner. The coating mechanism 7 has a nozzle 71 that is a slit nozzle. A coating liquid is supplied to the nozzle 71 from a coating liquid supply unit (not shown), and the coating liquid is discharged from a discharge port that opens downward in the lower part of the nozzle.

  The nozzle 71 can be moved and positioned in the X direction and the Z direction by a positioning mechanism 79. The positioning mechanism 79 positions the nozzle 71 at a coating position (position indicated by a dotted line) above the coating stage 32. The coating liquid is discharged from the nozzle positioned at the coating position, and is applied to the substrate W transported between the coating stage 32. Thus, the coating liquid is applied to the substrate W.

  A maintenance unit 8 for performing maintenance on the nozzle 71 is provided. The maintenance unit 8 includes a cleaning liquid storage tank 8b, a nozzle cleaner 8c, and a maintenance control mechanism 8d that controls the operations of the cleaning liquid storage tank 8b and the nozzle cleaner 8c, which are provided in the bat 8a.

  In a state where the nozzle 71 is located above the nozzle cleaner 8c (nozzle cleaning position), the coating liquid adhering to the periphery of the discharge port of the nozzle 71 is removed by the nozzle cleaner 8c. In this way, by performing the cleaning process on the nozzle 71 before being moved to the application position, the discharge of the application liquid at the application position can be stabilized from the initial stage. The detailed configuration of the nozzle 71 and the nozzle cleaner 8c and the nozzle cleaning process of the nozzle 71 by the nozzle cleaner 8c will be described in detail later.

  In addition, the positioning mechanism 79 can position the nozzle 71 at a position (standby position) where the lower end of the nozzle contacts the cleaning liquid stored in the cleaning liquid storage tank 8b. When the coating process using the nozzle 71 is not executed, the nozzle 71 is positioned at this standby position. In addition, it is good also as a structure which provides an ultrasonic wave to the said washing | cleaning liquid and wash | cleans a nozzle lower end.

  In addition, the coating apparatus 1 is provided with a control unit 9 for controlling the operation of each part of the apparatus. The control unit 9 is a storage means for storing a predetermined control program and various data, a calculation means such as a CPU for executing a predetermined operation in each part of the apparatus by executing this control program, and is responsible for exchanging information with a user and an external device. Interface means are provided. In this embodiment, as will be described later, the calculation means controls each part of the apparatus to execute the nozzle cleaning process.

  FIG. 2 is a perspective view of the nozzle as viewed obliquely from below. On the same surface, the dimensions of the nozzle tip are shown differently from the actual dimensions in order to clarify the configuration in the vicinity of the discharge port 711 of the nozzle 71 to be cleaned. This also applies to FIGS. 3A and 3B described later.

  The nozzle 71 has a discharge port 711 which is an elongated slit-like opening extending in the Y direction. The discharge port 711 opens in a discharge port range 71 </ b> R shorter than the entire length of the nozzle 71 in the Y direction, and is a main configuration of the discharge port forming unit 72. On the other hand, the discharge port 711 does not open at both ends in the Y direction of the nozzle 71, the inclined portion 73 is provided on the (+ Y) side of the discharge port forming portion 72, and the stepped portion 74 is provided on the (−Y) side. Yes.

  The nozzle 71 has a configuration capable of discharging the coating liquid vertically downward, that is, in the (−Z) direction from the discharge port 711 toward the upper surface Wf of the substrate W which is transported in the X direction while being lifted by the floating stage unit 3. Specifically, the nozzle 71 includes a nozzle main body portion 75 that is fixedly supported by a nozzle support that is not shown, and a lip portion 76 that projects downward from the nozzle main body portion 75. Then, when the coating liquid is pumped to the nozzle 71 from a supply mechanism (not shown), the liquid is fed to the discharge port 711 via an internal flow path formed inside the nozzle main body 75, and from the discharge port 711. It is discharged in the (−Z) direction.

  The lip portion 76 has a tapered convex shape in a side view from the Y direction, which is the longitudinal direction thereof, and is formed on the tip surface 761 provided at the tip (lower end) and the (+ X) side of the tip surface 761. A lip side surface 762a and a lip side surface 762b formed on the (−X) side. In the following description, when the lip side surface 762a and the lip side surface 762b are not distinguished, they are simply referred to as the lip side surface 762. The lip portion 76 is provided with the discharge port forming portion 72, the inclined portion 73, and the stepped portion 74 described above.

  In the discharge port forming portion 72, a flat tip surface 721 is provided vertically downward (−Z direction) at the center of the tip surface 761, and a discharge port 711 having a discharge port range 71R is provided on the tip surface 721. It has been.

  Further, the inclined portion 73 extends from the (+ Y) side end portion P2 of the discharge port forming portion 72 to the (+ Y) side in the extending direction Y of the discharge port 711 and on the opposite side of the discharge direction of the coating liquid, that is, the (+ Z) side. It is extended. More specifically, the (+ Y) side end portion of the lip portion 76 is cut out obliquely from above, and the inclined portion 73 is provided so as to exhibit a substantially triangular shape (or trapezoidal shape) when viewed from vertically below. For this reason, the X direction dimension of the inclined surface 731 that faces the vertically lower side of the inclined portion 73 becomes narrower as it approaches the discharge port 711, and the X direction of the distal end surface 721 is connected to the distal end surface 721 of the discharge port forming portion 72. Match the dimensions.

  On the other hand, on the opposite side of the inclined portion 73 across the discharge port forming portion 72, a stepped portion 74 is provided extending from the (−Y) side end portion P3 of the discharge port forming portion 72 to the (+ Z) side. That is, the surface 741 of the stepped portion 74 is retracted in the (+ Z) direction with respect to the virtual horizontal plane obtained by extending the tip end surface 721 of the discharge port forming portion 72 in the (−Y) direction, and between the surface 741 and the tip end surface 721. A step is formed.

  2 is an inclined surface contact position where the scraper of the nozzle cleaner 8c, which will be described next, first contacts in the nozzle cleaning operation, and P2 is the nozzle cleaning operation of the discharge port forming portion 72 by the nozzle cleaner 8c. Indicates the cleaning start position at which the discharge is started, that is, the position of the (+ Y) side end of the discharge port 711, and the reference symbol P3 indicates the discharge port end position of the discharge port forming portion 72 by the nozzle cleaner 8 c, that is, the (−Y ) Indicates the position of the side edge.

  3A is a perspective view showing the configuration of the nozzle cleaner, and FIG. 3B is a partially enlarged perspective view of the nozzle cleaner shown in FIG. 3A. FIG. 4 is a perspective view showing a spreader of the nozzle cleaner. The nozzle cleaner 8c moves along with the nozzle cleaning member 81 in the cleaning direction Dc along the lip portion 76 of the nozzle 71, thereby cleaning the removal unit 8c1 that removes deposits adhering to the lip portion 76, and the removal unit 8c1. And a drive unit 8c2 for driving in the direction Dc. Here, the cleaning direction Dc means a direction parallel to the extending direction Y of the discharge port 711 and going from the (+ Y) side to the (−Y) side, and the drive unit 8c2 reciprocates the removal unit 8c1 in the Y direction. It is possible to make it. Examples of deposits to be removed by the removal unit 8c1 include various substances that can adhere to the lip portion 76 of the nozzle 71. For example, there are those in which the solute of the coating solution is dried and solidified. For example, when the coating liquid is a color filter photoresist, the pigment contained in the coating liquid adheres to the lip portion 76 of the nozzle 71 as a deposit.

  Although not shown, the nozzle cleaner 8c includes a cleaning unit and a rinse liquid supply unit in addition to the above-described removal unit 8c1 and drive unit 8c2. The cleaning unit cleans the nozzle cleaning member 81 inside the sealed space formed by sealing the nozzle cleaning member 81. That is, the cleaning unit supplies the cleaning liquid in the sealed space to the nozzle cleaning member 81 that has been removed by wiping off the deposits attached to the lip portion 76 of the nozzle 71, so that the attachment is attached to the nozzle cleaning member 81. Wash off the kimono. As this washing | cleaning part, what was described in Unexamined-Japanese-Patent No. 2014-176812 can be used, for example. The rinse liquid supply unit has a function of supplying the rinse liquid to the removal unit 8c1 through a flexible rinse liquid supply pipe attached to the removal unit 8c1 at the tip.

  The removal unit 8c1 mainly includes a nozzle cleaning member 81 having a concave portion (substantially V-shaped V-shaped groove in this embodiment) corresponding to the lip portion 76 of the nozzle 71, and a support portion 82 that supports the nozzle cleaning member 81. Have. 3A shows the configuration of the nozzle 71 and the removal unit 8c1 when the removal unit 8c1 is positioned further upstream in the cleaning direction Dc than the upstream end of the nozzle 71 in the cleaning direction Dc. .

  The removal unit 8c1 has two types of nozzle cleaning members 81, a spreader 81A and a scraper 81B. Among these nozzle cleaning members 81, the spreader 81A has a function of supplying a rinsing liquid to spread the rinsing liquid on the lip 76 of the nozzle 71, and the scraper 81B extends from the lip 76 of the nozzle 71 on the upstream side in the cleaning direction Dc of the spreader 81A. Responsible for removing the rinse liquid. Thereby, the deposit on the lip portion 76 of the nozzle 71 can be removed together with the rinse liquid. That is, when a deposit such as a coating liquid dried and solidified adheres to the lip side surface 762, the rinsing liquid spread by the spreader 81A dissolves the deposit to some extent and includes this dissolved matter (attached matter). The rinse liquid is removed by the scraper 81B. As described above, the nozzle cleaning member 81 performs the nozzle cleaning process for removing the deposits from the lip 76 of the nozzle 71 using the spreader 81A and the scraper 81B. The spreader 81A and the scraper 81B have a common outer shape except for the presence or absence of the liquid supply hole 810 for supplying the rinse liquid. Therefore, in FIG. 4, the outer shape of the spreader 81 </ b> A is shown representatively of two types of nozzle cleaning members 81.

  As shown in FIG. 4, the nozzle cleaning member 81 includes a main body 811 that can be supported by a support portion 82. The main body 811 of the scraper 81B is formed of an elastic body having an elastic modulus of 900 to 4000 MPa (megapascals), for example, and the main body 811 of the spreader 81A is formed of a hard body harder than the main body 811 of the scraper 81B. The central portion of the main body 811 is a supported portion 812 supported by the support portion 82. The main body 811 has an extended portion 813 extending from the supported portion 812, and a V-shaped groove 814 that is a substantially V-shaped groove is formed at the tip of the extended portion 813. The V-shaped groove 814 has a shape corresponding to the lip portion 76 of the nozzle 71, and has an inner side surface 815a having an inclination corresponding to the lip side surface 762a, and an inner side surface 815b having an inclination corresponding to the lip side surface 762b. Have The inner surface 815a, 815b of the spreader 81A is formed with a liquid supply hole 810 to which a rinse liquid supply pipe of a rinse liquid supply unit is attached, and the rinse liquid supplied through the rinse liquid supply pipe is It is discharged from the liquid supply hole 810. On the other hand, the liquid supply hole 810 is not formed in each inner surface 815a, 815b of the scraper 81B. In the following, when the inner side surfaces 815a and 815b are not distinguished, they are simply referred to as the inner side surfaces 815.

  Each nozzle cleaning member 81 configured in this manner is detachably fixed to the support portion 82 by two fasteners, for example, bolts 84, as shown in FIGS. 3A and 3B. That is, the support portion 82 includes an elevating portion 821 that can be moved up and down in the Z direction, and two column portions 822A and 822B that are erected on the upper surface of the elevating portion 821 in the Z direction and are arranged in the X direction. Of the column portions 822A and 822B, the spreader 81A is fastened to the upper end of the column portion 822A downstream of the cleaning direction Dc, and the scraper 81B is fastened to the upper end of the column portion 822B upstream of the cleaning direction Dc. Has been. More specifically, the supported portion 812 of each nozzle cleaning member 81 is finished in a shape that can be engaged with the upper end portions of the corresponding column portions 822A and 822B. Each nozzle cleaning member 81 is in a state where the column portion 822A is inclined at a predetermined inclination angle with respect to the slit nozzle 2 extending in the X direction, with each V-shaped groove 814 facing the slit nozzle 2 side. , 822B. Note that the upper end of the column portion 822B is higher than the upper end of the column portion 822A, and the scraper 81B is supported at a position higher than the spreader 81A.

  The support part 82 has a base part 823 below the elevating part 821 to which the nozzle cleaning members 81 are fixed as described above. And the raising / lowering part 821 is supported by the base part 823 so that raising / lowering is possible. That is, in the support portion 82, a guide rail 824 erected in the Z direction from the upper surface of the base portion 823, and an urging member 825 (for example, a compression spring) provided between the base portion 823 and the elevating portion 821. Is provided. The urging member 825 urges the elevating part 821 upward with respect to the base part 823 while the guide rail 824 guides the movement of the elevating part 821 in the Z direction. Therefore, each nozzle cleaning member 81 fixed to the elevating part 821 is urged upward by the urging force of the urging member 825.

  Further, the base portion 823 of the support portion 82 is attached to the drive unit 8c2. The drive unit 8c2 includes a pair of rollers 851 and 851 disposed on both outer sides of the nozzle 71 in the Y direction, and an endless belt 852 stretched over the rollers 851 and 851, and is supported on the upper surface of the endless belt 852. A base portion 823 of the portion 82 is attached. The drive unit 8 c 2 configured as described above rotates the rollers 851 and 851 to drive the upper surface of the endless belt 852 in the Y direction, and moves each nozzle cleaning member 81 in the Y direction along with the support portion 82.

  The nozzle cleaner 8c configured as described above is configured such that when each nozzle cleaning member 81 is brought close to the lip portion 76 of the nozzle 71 located at the inclined surface contact position P1 corresponding to the nozzle cleaning position described above, Of the cleaning member 81, only the scraper 81 </ b> B comes into contact with the inclined surface 731 of the nozzle 71 and is pressed by the biasing member 825. That is, the V-shaped groove 814 of the scraper 81B comes into contact with the nozzle 71. In this embodiment, in order to control the contact state between the V-shaped groove 814 and the nozzle 71 at this time, an opening adjusting portion 86 is provided corresponding to the scraper 81B.

  As shown in FIG. 3B, the opening adjusting portion 86 includes a base plate 861 extending in parallel with the width direction X of the V-shaped groove 814 on the elevating portion 821, and the (+ X) side and (−X) side of the scraper 81B. Are provided with pressing members 862 and 863 arranged on the base plate 86, and fastening members 864 and 864 for fixing the pressing members 862 and 863 to the base plate 861. The base plate 861 is fixed to the elevating part 821. The pressing members 862 and 863 are movable in the width direction X with respect to the base plate 861. At the upper end of the pressing member 862, a protruding portion 862a is provided toward the scraper 81B. For this reason, when the user or the operator slides the pressing member 862 along the base plate 861 in the (−X) direction, the protruding portion 862a presses a part of the scraper 81B.

  More specifically, in the scraper 81B, two shoulder portions 816a and 816b are formed in the extending portion 813 in the width direction X by forming the V-shaped groove 814. Among these, the protrusion part 862a applies a pressing force (stress) in the (−X) direction to the shoulder part 816a located on the (+ X) side. Thereby, the shoulder part 816a is deformed to the (−X) side, and the inclination of the inner side surface 815a constituting the V-shaped groove 814 is changed. Similarly to the pressing member 862, a protruding portion 863a is provided at the upper end portion of the pressing member 863 toward the scraper 81B. Therefore, when the users slide the pressing member 863 along the base plate 861 in the (+ X) direction, the protruding portion 863a is pressed in the (+ X) direction against the shoulder portion 816b located on the (−X) side. Apply (stress). As a result, the shoulder portion 816b is deformed to the (+ X) side, and the inclination of the inner side surface 815b constituting the V-shaped groove 814 is changed. Thus, the opening shape of the V-shaped groove 814 is changed. When the opening shape becomes a desired shape, the pressing members 862 and 863 are fixed to the base plate 861 by fastening members 864 and 864 such as bolts. Here, the aperture adjustment is performed from both the (+ X) side and the (−X) side, but the adjustment may be performed from only one side. The reason for changing the opening shape and the mode of change will be described in detail later.

  As described above, each nozzle cleaning member 81 is moved in the cleaning direction Dc while the V-shaped groove 814 of the scraper 81B is pressed against the lip 76 of the nozzle 71 while separating the spreader 81A from the lip 76 of the nozzle 71. Then, the lip 76 of the nozzle 71 is cleaned.

  FIG. 5 is a flowchart showing an example of nozzle cleaning processing by the nozzle cleaner. FIG. 6 is a front view schematically showing an operation executed according to the flowchart of FIG. In the coating apparatus 1, the nozzle 71 cleaning operation is performed by the nozzle cleaning member 81 by the calculation means controlling each part of the apparatus as follows in accordance with the control program stored in the storage means of the control unit 9.

  In step S101, the removal unit 8c1 moves to the inclined surface contact position P1 in response to driving by the drive unit 8c2. Accordingly, the removal unit 8c1 is positioned below the inclined portion 73 of the nozzle 71 positioned at the inclined surface contact position P1, and the spreader 81A and the scraper 81B face the inclined surface 731 of the inclined portion 73 from below (see “ S101 "column). At this time, the spreader 81 </ b> A and the scraper 81 </ b> B are both positioned upstream of the discharge port forming portion 72 having the discharge port 711 in the cleaning direction Dc. In step S101, the inclined portion 73 of the nozzle 71 is separated from the spreader 81A and the scraper 81B in the Z direction.

  When the movement of the removal unit 8c1 to the inclined surface contact position P1 is completed in this way, the nozzle 71 discharges a predetermined amount of the coating liquid La from the discharge port 711 as shown in the column “S102” in FIG. 6 (step S102). . The discharge of the coating liquid La here is performed with the main purpose of discharging the air or the cleaning liquid partially entering the discharge port 711. Therefore, although exaggerated in FIG. 6, the coating liquid La is discharged to the extent that it slightly comes out from the discharge port 711.

  In the next step S103, as indicated by the arrow in the column “S103” in FIG. 6, the nozzle 71 descends to a lower position lower than the upper position. Specifically, when the nozzle 71 starts to descend, the distance between the inclined portion 73 of the nozzle 71 and the scraper 81B decreases, and the lip side surface 762 and the inner surface 815 of the scraper 81B come into contact with each other at the inclined portion 73. The nozzle 71 is further lowered to push down the scraper 81B against the urging force of the urging member 825. Further, the spreader 81A moves downward together with the scraper 81B while maintaining a certain distance between the inner side surface 815 and the lip side surface 762 entering between the inner side surfaces 815. In this manner, the inner surface 815 of the scraper 81B is pressed against the lip side surface 762 by the biasing force of the biasing member 825 in the inclined portion 73, and a certain distance is secured between the inner surface 815 and the lip side surface 762 of the spreader 81A. The Although the scraper 81B abuts on the lip side surface 762, a space is formed between each of the spreader 81A and the scraper 81B and the inclined surface 731 of the inclined portion 73, and each of the spreader 81A and the scraper 81B is formed on the inclined surface 731. Do not touch the center in the width direction. However, as long as the inner surface 815 of the scraper 81B contacts the lip side surface 762 by executing step S103, the scraper 81B may be configured to contact the central portion of the inclined surface 731.

  As described above, the spreader 81A and the scraper 81B have a common outer shape, and the scraper 81B is supported at a position higher than the spreader 81A. As a result, the inner surface 815 of the scraper 81B is pressed against and contacts the lip side surface 762, while the inner surface 815 of the spreader 81A is opposed to the lip side surface 762 with a certain distance. Thus, by setting the spreader 81A and the scraper 81B to have a common outer shape (particularly, by making the V-shaped groove 814 have the same shape), the interval can be formed reliably. Note that the interval may be secured by making the V-shaped groove 814 of the spreader 81A larger than the V-shaped groove 814 of the scraper 81B.

  When the lowering of the nozzle 71 is thus completed, the rinse liquid Lb is discharged from the liquid supply hole 810 of the spreader 81A, and the supply of the rinse liquid between the inclined portion 73 of the nozzle 71 and the spreader 81A is started (step S104). . In the present embodiment, not only the coating liquid La but also the rinsing liquid Lb is discharged. This is because it corresponds to the high-speed movement of the scraper 81B. That is, it is possible to use the coating liquid La as a lubricating liquid when cleaning the nozzle by the scraper 81B. However, if the moving speed of the scraper 81B at that time increases, it is difficult to obtain a sufficient lubricating action only with the coating liquid. May be. Therefore, in the present embodiment, in order to increase the moving speed of the scraper 81B and reduce the time required for the nozzle cleaning process, the coating liquid La and the rinse liquid Lb are used in combination as lubricants during the nozzle cleaning process. However, the discharge amount of the rinsing liquid Lb is kept below a certain level. More specifically, only the liquid mixture of the rinsing liquid and the coating liquid (the coating liquid diluted with the rinsing liquid to the extent that the coating process is not affected) or the coating liquid is only applied to the discharge port 711 after the nozzle cleaning process. It is preferable to adjust the supply amount (discharge amount) per unit time of the rinse liquid Lb so that it remains. Various liquids can be used as the rinsing liquid Lb. For example, a solvent for forming a coating liquid may be used. In this case, a solution obtained by dissolving a solute in a rinsing liquid that is a solvent is a coating liquid.

  Subsequently, the drive unit 8c2 drives the removal unit 8c1 in the cleaning direction Dc, thereby starting a member moving operation for moving the spreader 81A and the scraper 81B in the cleaning direction Dc (step S105). In the initial stage of this member moving operation, the scraper 81B moves along the inclined surface 731 toward the discharge port forming portion 72 together with the spreader 81A while being gradually pushed down against the urging force of the urging member 825. The spreader 81 </ b> A and the scraper 81 </ b> B have the same positional relationship as the inclined surface 731 even when moving to the discharge port forming portion 72 in this way. That is, since each of the spreader 81A and the scraper 81B is in a positional relationship in contact with the lip side surface 762, a gap is formed between each of the spreader 81A and the scraper 81B and the front end surface 721 of the discharge port forming portion 72. On the other hand, each of the spreader 81 </ b> A and the scraper 81 </ b> B does not contact the front end surface 721. However, as long as the inner side surface 815 of the scraper 81B contacts the lip side surface 762, the scraper 81B may be configured to contact the front end surface 721.

  Thus, even after the spreader 81A and the scraper 81B move from the inclined surface contact position P1 to the cleaning start position P2, the member moving operation is continued, and the cleaning operation of the discharge port forming portion 72 is started at the cleaning start position P2. Furthermore, as shown in the column of “S104-S105” in FIG. 6, the supply of the rinse liquid Lb from the liquid supply hole 810 is continued while moving in the cleaning direction Dc from the cleaning start position P2. Accordingly, also in the discharge port forming portion 72, the spreader 81A moves in the cleaning direction Dc while spreading the rinse liquid Lb supplied from the liquid supply hole 810 to the lip side surface 762. As a result, the rinsing liquid Lb is spread on the lip side surface 762 between the spreader 81A and the scraper 81B in the cleaning direction Dc.

  Further, in the member moving operation, the scraper 81B that moves in the cleaning direction Dc while abutting on the inner side surface 815 removes the rinsing liquid Lb spread by the spreader 81A from the lip side surface 762. At this time, the rinsing liquid Lb spread from the spreader 81A enters the slight gap between the inner surface 815 and the lip side 762 of the scraper 81B by capillary action. Thus, the rinsing liquid Lb fills the space between the inner side surface 815 of the scraper 81B and the lip side surface 762 of the nozzle 71, and reduces the frictional force generated between them. Further, in parallel with the removal of the rinsing liquid Lb, the scraper 81B scrapes the coating liquid La protruding downward from the discharge port 711 of the nozzle 71 so that the lower part of the coating liquid La filling the discharge port 711 is placed in the cleaning direction Dc. Level along. Such a series of operations is executed up to the discharge port end position P3, which is the position of the (−Y) side end of the discharge port 711. Further, while passing through the stepped portion 74, the discharge port forming unit 72 and Similarly, the nozzle cleaning process is continued.

  When the removal unit 8c1 reaches the step passing position P4 and the spreader 81A and the scraper 81B move to the downstream side in the cleaning direction Dc from the nozzle 71, the drive unit 8c2 stops the removal unit 8c1 (step S106). Further, the supply of the rinsing liquid from the liquid supply hole 810 is stopped (step S107).

  When the nozzle cleaning process of the nozzle 71 is completed in this way, the positioning mechanism 79 moves the nozzle 71 to the application position above the application stage 32 (position indicated by the dotted line). And a coating liquid is discharged from the nozzle positioned in the application position, and is apply | coated to the board | substrate W conveyed between the application | coating stages 32 (application | coating process).

  In the first embodiment configured as described above, the inclined portion 73 is provided on the (+ Y) side of the discharge port forming portion 72 and the stepped portion 74 is provided on the (−Y) side. For this reason, it is possible to prevent the coating liquid from spreading due to capillary action at both ends of the discharge port forming portion 72 in the extending direction Y of the discharge port 711, and the coating solution can be applied in an appropriate range. In addition, after the scraper 81B contacts the nozzle 71 at the inclined surface contact position P1, the inclined portion 73 guides the scraper 81B to the discharge port forming portion 72 and performs nozzle cleaning while maintaining the contact state. For this reason, wear and breakage of the nozzle 71 by the scraper 81B can be effectively suppressed. As a result, the life of the nozzle 71 and the scraper 81B can be extended, and running cost and maintainability can be improved.

  By the way, the nozzle cleaning member 81 is worn while the nozzle cleaning process described above is repeated. In particular, the V-shaped groove 814 of the scraper 81B slides while coming into contact with the lip portion 76 (= the inclined portion 73, the discharge port forming portion 72, and the stepped portion 74) of the nozzle 71, and therefore is more easily worn than the spreader 81A. Moreover, when the scraper 81B is configured so that the V-shaped groove 814 fits the lip portion 76 of the nozzle 71, as in the device described in the above-mentioned Patent Document 2, local wear proceeds and the nozzle cleaning ability is improved. May decrease. Therefore, in the present embodiment, the opening shape of the V-shaped groove 814 until the inner surface 815 of the scraper 81B is pressed against the lip side surface 762 is adjusted as follows.

  FIG. 7 is a diagram schematically showing the positional relationship between the lip portion of the nozzle and the scraper when viewed from the downstream side in the cleaning direction. In the figure, columns (a-1) to (a-4) show examples of fitting the V-shaped groove 814 to the lip 76 of the nozzle 71 (hereinafter referred to as “comparative example”), while (b- The above embodiments are shown in the columns 1) to (b-4). In the (a-1) and (b-1) columns in the same figure, the state where the lip portion 76 of the nozzle 71 and the scraper 81B are separated in the Z direction is shown. A one-dot chain line in the column is a virtual line parallel to the proximity direction of the nozzle 71 and the scraper 81B, that is, the Z direction, and symbols θa1 and θb1 indicate inclination angles of the lip side surface 762 with respect to the proximity direction Z, and symbols θa2, θb2 indicates the inclination angle of the inner surface 815 of the V-shaped groove 814 with respect to the proximity direction Z.

  Also, in the (a-2) and (b-2) columns, the stress that is assumed to be applied to the scraper 81B in a state where the scraper 81B is in contact with the lip portion of the nozzle 71 is indicated by a solid line arrow (a In the columns -3) and (b-3), solid arrows indicate the stress estimated to be applied to the scraper 81B in a state where the scraper 81B is pressed against the lip portion 76 of the nozzle 71. The lengths of these solid arrows indicate the magnitude of stress. Further, in the columns (a-4) and (b-4), the shape of the V-shaped groove 814 of the scraper 81B after the nozzle cleaning process is repeatedly performed is schematically shown.

  Here, a comparative example will be described first. In the comparative example, the inclination angles θa1 and θa2 are the same, and the lip side surface 762 of the nozzle 71 and the inner side surface 815 of the V-shaped groove 814 are configured to be parallel. For this reason, when the nozzle 71 is lowered and the lip side surface 762 is brought into contact with the inner side surface 815 of the scraper 81B, force is uniformly applied in a relatively wide range as shown in the column (a-2). Then, by further lowering the nozzle 71, the scraper 81B is pushed downward while being elastically deformed against the urging force of the urging member 825. At this time, the dotted line in the column (a-3) As indicated by the drawn circles, the force applied to the inner surface 815 of the scraper 81B concentrates on the tip of the nozzle 71, that is, the tip corner of the lip 76. In the nozzle cleaning process, since the scraper 81B slides with respect to the nozzle 71 in this state, as shown in the column (a-4), the portion in contact with the tip of the nozzle 71 is greatly worn and a wear part 816 is generated. Then, the opening shape of the V-shaped groove 814 changes. As a result, sufficient liquid draining performance may not be obtained. Further, since the wear part is close to the discharge port 711, the wear powder enters the discharge port 711 and may be mixed into the coating liquid applied to the substrate W during the coating process.

  Therefore, in the present embodiment, as shown in the column (b-1) of FIG. 7, the inclination angle θb2 of the inner surface 815 that forms the V-shaped groove 814 by the opening adjustment portion 86 is the inclination angle of the lip side surface 762 of the nozzle 71. The inclination angle is adjusted so as to be smaller than θb1, and the lip side surface 762 of the nozzle 71 and the inner side surface 815 of the V-shaped groove 814 are adjusted in a non-parallel state. When the nozzle 71 is lowered and the lip side surface 762 is brought into contact with the inner side surface 815 of the scraper 81B while the opening shape of the V-shaped groove 814 is changed in this way, the contact is V as shown in the column (b-2). Only the end on the opening side of the groove 814 is provided. At this stage, the scraper 81B is not pressed against the lip side surface 762. In this state, the lip portion 76 of the nozzle 71 is locked at the end of the inner surface 815 on the opening side of the V-shaped groove 814. Yes. Then, by further lowering the nozzle 71, the scraper 81B is pushed downward while being elastically deformed against the biasing force of the biasing member 825. At this time, the scraper 81B is applied to the inner surface 815 of the scraper 81B. The range over which the force is applied, that is, the pressing range of the lip 76 by the inner surface 815 gradually widens and is dispersed without being concentrated on the tip corner of the lip 76. In this embodiment, since the scraper 81B slides with respect to the nozzle 71 in this state to perform the nozzle cleaning process, the amount of wear is small, and the wear site 816 is a comparative example as shown in the column (b-4). The change in the V-shaped groove 814 is suppressed. As a result, it is possible to suppress a decrease in the liquid draining performance and extend the life of the scraper 81B. Moreover, generation | occurrence | production of abrasion powder can be suppressed effectively and a coating process can be performed favorably.

  Further, it is possible to flexibly cope with a change in the specifications of the nozzle 71 and the V-shaped groove 814 of the scraper 81B. That is, in the coating apparatus 1 that does not have the opening adjustment portion 86 (see the column “Comparative Example” in FIG. 7), it is necessary to remanufacture the scraper 81B having an opening shape corresponding to the changed specification. It is difficult to respond quickly to changes. In particular, when the scraper 81B is provided as a molded product, it often takes time to provide a new scraper 81B in order to eliminate the problems of burrs and parting lines. In addition, while the nozzle cleaning process is repeated, the opening shape of the V-shaped groove 814 may be deformed due to wear and a desired nozzle cleaning effect may not be obtained, and the scraper 81B may need to be replaced. On the other hand, in the coating apparatus 1 having the opening adjusting portion 86 (see the column “Embodiment” in FIG. 7), from the direction intersecting the extending direction Y of the discharge port 711 (X direction in the present embodiment). The opening shape of the V-shaped groove 814 can be adjusted by applying stress to the scraper 81B. As a result, it is possible to flexibly respond to changes in the nozzle specifications, and it is possible to extend the life of the nozzle contact member by adjusting the opening shape according to the wear of the nozzle contact member, and high versatility is obtained. It is done.

  As described above, in the above-described embodiment, the drive unit 8c2 corresponds to an example of the “drive unit” of the present invention. Further, the lip portion 76 corresponds to an example of the “tip end portion of the nozzle body portion” of the present invention, and the (+ Y) side end portion of the discharge port forming portion 72 is “one end portion of the discharge port forming portion” of the present invention. It corresponds to an example. Further, the scraper 81B corresponds to an example of the “nozzle contact member” of the present invention, and the V-shaped groove 814 of the scraper 81B corresponds to an example of the “concave portion” of the present invention. The Y direction corresponds to the “extending direction of the discharge port” of the present invention, and the (+ Y) side and the (−Y) side are “one side of the extending direction” and “the other side of the extending direction” of the present invention, respectively. The (+ Z) direction and the (−Z) direction correspond to the “opposite direction in which the coating liquid is discharged” and the “direction in which the coating liquid is discharged” of the present invention, respectively. Furthermore, the nozzle cleaning process shown in FIG. 5 corresponds to an example of the “cleaning process” of the present invention, and the coating process for applying the coating liquid to the substrate W using the nozzle 71 after the nozzle cleaning process is the “coating process” of the present invention. Is equivalent to an example.

  The present invention is not limited to the above-described embodiment, and various modifications other than those described above can be made without departing from the spirit of the present invention. For example, in the embodiment described above, the spreader 81A is provided on the downstream side in the cleaning direction Dc (the left hand side in FIG. 3A) with respect to the scraper 81B. . Further, the present invention can be applied to a coating apparatus and a coating method that are not equipped with a spreader.

  In the above embodiment, the rinsing liquid Lb is used as the liquid spread on the lip portion 76 of the nozzle 71. However, the coating liquid La is spread on the lip portion 76, and the scraper 81B drains the liquid to perform the nozzle cleaning process. You may comprise as follows.

  Moreover, in the said embodiment, although a coating liquid and a rinse liquid are used together as a lubricant at the time of the high-speed movement of the scraper 81B, you may use only a coating liquid as a lubricant according to a moving speed.

  Moreover, in the said embodiment, step S102 which discharges the coating liquid La from the discharge outlet 711 of the nozzle 71 was provided. However, this step S102 may be omitted.

  In the above embodiment, the spreader 81A and the scraper 81B are integrally moved in the cleaning direction Dc. However, the spreader 81A and the scraper 81B may be moved individually in the cleaning direction Dc.

  Further, it is not essential that the spreader 81A and the scraper 81B have the same outer shape, and when a plurality of spreaders are provided, it is not essential that the spreaders have the same outer shape.

  In the above-described embodiment, the inclined surface 731 is provided so that the shape of the inclined portion 73 viewed from the downstream side (vertically below) in the direction Z in which the coating liquid is discharged is substantially triangular or trapezoidal. The shape of the inclined surface 731 is not limited to this. For example, the V-shaped groove 814 of the scraper 81B that is in contact with the inclined surface contact position P1 is connected to the discharge port forming portion 72 by finishing it from the (+ Y) side end of the discharge port forming portion 72 toward the (+ Y) side. You may be guided. Moreover, in the said embodiment, although the inclined surface 731 is provided in planar shape, you may provide in curved shape.

  Further, in the above embodiment, the step portion 74 is provided on the (−Y) side of the discharge port forming portion 72, thereby preventing the coating liquid from spreading to the (−Y) side due to the capillary phenomenon. The shape of the part 74 is arbitrary. However, considering the film thickness uniformity of the coating film, it is preferable to make the step as small as possible.

  In the above embodiment, the removal unit 8c1 is moved from the (+ Y) side in the extending direction Y to the (−Y) side. However, the removal unit 8c1 is fixed and the nozzle 71 is moved in the extending direction Y. Alternatively, the nozzle 71 may be moved in the extending direction Y together with the removal unit 8c1. In short, the present invention can be applied to all coating techniques in which the scraper 81B is moved relative to the nozzle 71 from the (+ Y) side in the extending direction Y to the (−Y) side to perform the nozzle cleaning process. .

  Moreover, in the said embodiment, although this invention is applied with respect to the coating device 1 which conveys the said board | substrate W in the state which sprayed gas on the lower surface of the board | substrate W and the board | substrate W floated from the coating stage 32, others The present invention can also be applied to a coating apparatus that transports a substrate by this method. Further, the present invention can also be applied to a coating apparatus that performs coating with a plate fixed to a stage.

  Further, in the above embodiment, the opening adjusting portion 86 is provided to adjust the opening shape of the V-shaped groove 814 of the scraper 81B, but the present invention is also applied to a coating apparatus and a coating method that do not have the opening adjusting portion 86. can do. Further, as shown in the column “Comparative Example” in FIG. 7, the nozzle cleaning process is performed using a scraper 81B in which the inclination angle θa1 of the lip side surface 762 and the inclination angle θa2 of the inner side surface 815 of the V-shaped groove 814 coincide. The present invention can also be applied to an apparatus.

  The present invention can be applied to a coating apparatus, a coating method, and a nozzle in general that discharge and apply a coating liquid from a discharge port provided at the tip of a nozzle.

DESCRIPTION OF SYMBOLS 1 ... Coating apparatus 8 ... Maintenance unit 8c ... Nozzle cleaner 8c1 ... Removal unit 8c2 ... Drive unit (drive part)
71 ... Nozzle 71R ... Discharge port range 72 ... Discharge port forming part 73 ... Inclined part 74 ... Step part 75 ... Nozzle body part 76 ... Lip part (tip part of nozzle body part)
81B ... scraper (nozzle contact member)
731 ... Inclined surface (of the inclined part) 762 ... Lip side surface 814 ... V-shaped groove (concave part)
815, 815a, 815b ... inner surface P1 ... inclined surface contact position P2 ... cleaning start position P3 ... discharge port end position W ... substrate X ... width direction Y ... extension direction Z ... proximity direction θa1, θb1 ... (relative to proximity direction Z) Inclination angle θa2, θb2,... (Inclination angle of inner surface 815 of V-shaped groove 814 with respect to proximity direction Z)

Claims (7)

A nozzle that discharges the coating liquid from a slit-like discharge port provided at the tip of the nozzle body, and
A nozzle contact member having a recess capable of contacting the tip,
A drive unit that moves the nozzle contact member relative to the nozzle from one side to the other side in the extending direction of the discharge port;
The tip portion includes a discharge port forming portion in which the discharge port is formed,
An inclined portion extending from one end of the discharge port forming portion to one side in the extending direction and opposite to the direction in which the coating liquid is discharged;
The drive unit causes the concave portion of the nozzle contact member to contact the inclined portion and moves the nozzle contact member relative to the discharge port forming portion along the inclined portion. The coating apparatus, wherein the nozzle abutting member is relatively moved while a concave portion is brought into contact with the discharge port forming portion. The coating apparatus according to claim 1,
The coating device according to claim 1, wherein the tip has a stepped portion extending on the other side of the discharge port forming portion on the opposite side of the direction in which the coating liquid is discharged. The coating apparatus according to claim 1 or 2,
The said inclination part is a coating device which has a shape which spreads toward the one side of the said extending direction from the said one side edge part of the said discharge port formation part seeing from the downstream of the direction in which the said coating liquid is discharged. The coating apparatus according to claim 3,
The coating apparatus in which the shape of the inclined portion viewed from the downstream side in the direction in which the coating liquid is discharged is substantially triangular. A coating step of discharging and applying a coating liquid from a slit-like discharge port provided at the tip of the nozzle body; and
A cleaning step of cleaning the tip by the nozzle abutting member by moving the nozzle abutting member relatively from one side to the other side in the extending direction of the discharge port while abutting the tip abutting member. ,
The coating step includes a discharge port forming portion in which the discharge port is formed,
An inclined portion extending from one side of the discharge port forming portion to one side of the extending direction and opposite to the direction in which the coating liquid is discharged is performed using a nozzle provided at the tip portion,
In the cleaning step, the concave portion of the nozzle contact member is brought into contact with the inclined portion, and the nozzle contact member is moved relative to the discharge port forming portion along the inclined portion. The coating method is performed by relatively moving the nozzle abutting member while bringing the nozzle abutting against the discharge port forming portion. After the discharge of the coating liquid from the slit-like discharge port provided at the tip of the nozzle body, the tip is moved by the nozzle abutting member that moves relatively from one side to the other side in the extending direction of the discharge port. A nozzle that scrapes off the coating liquid adhering to the part,
The tip portion includes a discharge port forming portion in which the discharge port is formed,
An inclined portion extending from one end of the discharge port forming portion to one side in the extending direction and opposite to the direction in which the coating liquid is discharged;
The nozzle, wherein the inclined portion abuts on the nozzle abutting member that relatively moves along the extending direction and guides the nozzle to the discharge port forming portion. The nozzle according to claim 6,
The nozzle has a step portion extending on the opposite side of the direction in which the coating liquid is discharged on the other side of the discharge port forming portion.

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