CN101204687A - Sweeping device of coating head for coating - Google Patents

Sweeping device of coating head for coating Download PDF

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Publication number
CN101204687A
CN101204687A CNA2007101280387A CN200710128038A CN101204687A CN 101204687 A CN101204687 A CN 101204687A CN A2007101280387 A CNA2007101280387 A CN A2007101280387A CN 200710128038 A CN200710128038 A CN 200710128038A CN 101204687 A CN101204687 A CN 101204687A
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CN
China
Prior art keywords
coating
head
coating head
cleaning member
lip
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Granted
Application number
CNA2007101280387A
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Chinese (zh)
Other versions
CN101204687B (en
Inventor
土井敏也
甲田正纪
永井久也
黑木贵史
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chugai Ro Co Ltd
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Chugai Ro Co Ltd
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Publication date
Application filed by Chugai Ro Co Ltd filed Critical Chugai Ro Co Ltd
Publication of CN101204687A publication Critical patent/CN101204687A/en
Application granted granted Critical
Publication of CN101204687B publication Critical patent/CN101204687B/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0283Flat jet coaters, i.e. apparatus in which the liquid or other fluent material is projected from the outlet as a cohesive flat jet in direction of the work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02Cleaning by the force of jets or sprays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00Cleaning by methods involving the use of air flow or gas flow
    • B08B5/04Cleaning by suction, with or without auxiliary action

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  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

The present invention provides a cleaning device of the coating head for coating, having an attraction part, when the front end of the cleaning device is contact with the front end of the coating head for coating equipped with a slit outlet for supplying coating liquid, the coated liquid attached on the lip of the coating head for coating is removed by making the cleaning device move in the length direction along of the coating head for coating, the attraction part makes the cleaning device attract the coating liquid after removing from the coating head for coating, and the back side of the moving direction of the cleaning device is set with a cleaning liquid supplying nozzle, the cleaning liquid supplying nozzle moves together with the cleaning device, and supplying the cleaning liquid to the front end of the cleaning device after removing the coating liquid from the coating head for coating. When the front end of the cleaning device moves along the length direction of the coating head for coating under the contacting state with the coating head for coating, and removes the coating liquid attached on the lip of the coating liquid for coating, the coating liquid attached on the cleaning device is removed simply and credibly.

Description

The clearing apparatus of coating head for coating
The application is a priority with Japanese patent application No. 2006-337686 number.
Technical field
The present invention relates to after coating fluid is supplied to various bodies to be coated such as glass substrate, resin film, metal forming from the outlet of the elongate slit shape that is located at coating head for coating lip front end face, remove the clearing apparatus of employed coating head for coating for residual coating fluid on will lip attached to described coating head for coating.Relate in particular to a kind of like this clearing apparatus of coating head for coating: the direction that the length direction with coating head for coating intersects make the cleaning member leading section be provided with under the coating head for coating lip front end face state of contact of described outlet, this cleaning member is moved along the length direction of coating head for coating, will lip attached to coating head for coating on residual coating fluid remove.
In the past, when making plasma display panel, organic electroluminescent display board, LCD panel etc., the coating fluid that makes the front end face of lip be provided with elongated slit-shaped outlet relatively moves with respect to various bodies to be coated such as glass substrate, resin film, metal formings with dispense tip, simultaneously coating fluid is supplied to described body to be coated from the outlet of this coating head for coating, thereby coating fluid is coated on the surface of body to be coated.
Here, as described above coating fluid is being supplied to described body to be coated and coating fluid is coated on occasion on the body to be coated from the outlet of coating head for coating, coating fluid adheres on the inclined plane of the front end face of the lip that remains in described coating head for coating and these front end face both sides.And, so residual coating fluid rises its concentration in drying to the stand-by time that is coated with operation next time, under this state, if be coated with operation next time, then the crawling of strip takes place or intermittently situation takes place in the coating fluid because of high concentrationization on the body to be coated.
Therefore, in recent years, as Japanese kokai publication hei 11-147062 communique and special opening the 2002-177848 communique discloses, following a kind of technical scheme has been proposed: contacting with the front end face of the lip of the coating head for coating that is provided with outlet along the leading section that makes cleaning member such as blade with direction that the length direction of coating head for coating intersects, under this state, this cleaning member is moved along the length direction of coating head for coating, to remove the coating fluid after so removing by attractions such as attracting nozzle attached to the coating fluid on the lip of coating head for coating.
In addition, as mentioned above, in the time will removing attached to the coating fluid on the lip of coating head for coating by the cleaning member, remain on this cleaning member in order to prevent that coating fluid from adhering to, in described Japanese kokai publication hei 11-147062 communique, as mentioned above, by cleaning member will attached to the coating fluid lip of coating head for coating on remove on one side, detergent remover is supplied to the face of the moving direction side of this cleaning member on one side from the detergent remover supply nozzle.In addition, open in the 2002-177848 communique described spy, utilize described cleaning member to remove attached to the coating fluid on the lip of coating head for coating after, this cleaning member is directed to the assigned position that is provided with decontaminating apparatus it cleaned.
But, as mentioned above, to remove on one side detergent remover when the detergent remover supply nozzle supplies to the face of moving direction of this cleaning member attached to the coating fluid on the lip of coating head for coating on one side, and definitely can not make detergent remover flow into the inside of coating head for coating from being located at outlet on the coating head for coating front end face by the cleaning member.Therefore, in the method, the leading section that is difficult to detergent remover is supplied to the cleaning member that contacts with the coating head for coating front end face is cleaned it, exists coating fluid and adheres to problem on the leading section that remains in the cleaning member.
In addition, after will removing attached to the coating fluid on the lip of coating head for coating by the cleaning member, will clean member be directed to be provided with decontaminating apparatus assigned position with it when clean, need and make described cleaning member suitably place the mechanism of the position that is provided with decontaminating apparatus, exist operation spended time, the problem that production efficiency is also low cleaned.
Summary of the invention
For addressing the above problem, the invention provides a kind of clearing apparatus of coating head for coating, make in the direction of intersecting under the front end face state of contact of leading section that cleans member and the coating head for coating that is provided with elongated slit-shaped outlet along length direction with coating head for coating, this cleaning member is moved along the length direction of coating head for coating, will remove attached to the coating fluid on the lip of coating head for coating.
That is, in the present invention, in the time will removing attached to the coating fluid on the lip of coating head for coating, can simply and reliably will remove attached to this coating fluid that cleans on the member by the cleaning member.
In the present invention, for achieving the above object, with direction that the length direction of coating head for coating intersects on the leading section of cleaning member is contacted with the lip front end face of the coating head for coating of the elongated slit-shaped outlet that is provided with the supply coating fluid, under this state, this cleaning member is moved along the length direction of coating head for coating, to remove attached to the coating fluid on the lip of coating head for coating, be characterized in, be provided with the attraction portion that the coating fluid after being removed from the lip of coating head for coating by described cleaning member is attracted, and be provided with cleaning the detergent remover supply nozzle that member moves at the moving direction rear side of cleaning member, after removing end, supply with detergent remover to the leading section of described cleaning member from this detergent remover supply nozzle attached to the coating fluid on the lip of coating head for coating.
Here, when being provided with to the attraction portion that attracts by the coating fluid of described cleaning member after the lip of coating head for coating is removed, can constitute described cleaning member by 2 vane members that separate predetermined distance, with the gap between these 2 vane members as the attraction portion that coating fluid is attracted.
In addition, in the clearing apparatus of described coating head for coating, moving direction front side at described cleaning member is provided with cleaning the 2nd detergent remover supply nozzle that member moves, in the way that will remove attached to the coating fluid on the lip of coating head for coating in that the cleaning member is moved, can detergent remover be supplied in the inclined plane of the lip front end face both sides of coating head for coating from described the 2nd detergent remover supply nozzle.
In addition, in the clearing apparatus of described coating head for coating, can a pair of auxiliary cleaning member that contact with each inclined plane of the lip front end face both sides that are positioned at described coating head for coating and move be set dividually with described cleaning member.
In the clearing apparatus of coating head for coating of the present invention, as mentioned above, when being provided with to the attraction portion that attracts by the coating fluid of cleaning member after the lip of coating head for coating is removed, moving direction rear side at the cleaning member is provided with cleaning the detergent remover supply nozzle that member moves, after removing end attached to the coating fluid on the lip of coating head for coating, supply with detergent remover from this detergent remover supply nozzle to the leading section of described cleaning member, to clean member cleans, therefore, do not need as conventional art, should clean and clean by decontaminating apparatus after member is directed to assigned position, can be simply and clean cleaning of member effectively, simultaneously, also can fully remove attached to the coating fluid on the cleaning member leading section by described detergent remover.
In addition, moving direction front side at described cleaning member is provided with cleaning the 2nd detergent remover supply nozzle that member moves, in the way that will remove attached to the coating fluid on the lip of coating head for coating in that the cleaning member is moved, when from described the 2nd detergent remover supply nozzle when detergent remover is supplied with on the inclined plane of the lip front end face both sides that are positioned at coating head for coating, remove from the inclined plane because of detergent remover attached to the coating fluid on the described inclined plane, be directed into the front end face of the lip of coating head for coating.And, so the coating fluid that is directed with detergent remover by the cleaning member with being removed attached to the coating fluid on the lip front end face of coating head for coating.In addition, in this occasion, detergent remover do not supply to coating head for coating lip front end face but be supplied in the inclined plane of its both sides, so this detergent remover can not flow into the inside of coating head for coating from outlet.
In addition, be provided with a pair of auxiliary cleaning member dividually with described cleaning member, should contact and move with each inclined plane of the lip front end face both sides that are positioned at described coating head for coating by auxiliary cleaning member, under the state that utilizes detergent remover to dissolve attached to the coating fluid on the inclined plane like that as mentioned above, be removed by this a pair of auxiliary cleaning member, if make above-mentioned this structure, then can will remove attached to the coating fluid on the described inclined plane more reliably.
Purpose of the present invention, advantage and feature can obtain understanding by following description, accompanying drawing and the embodiment of the invention.
Description of drawings
Fig. 1 is in the clearing apparatus of the coating head for coating of the present invention's one example, represents to remove the general description figure of state attached to the coating fluid on the inclined plane of the front end face of the lip of coating head for coating and both sides thereof from the side of coating head for coating.
Fig. 2 is in the clearing apparatus of the coating head for coating of this example, represents to remove the general description figure of state attached to the coating fluid on the inclined plane of the lip front end face of coating head for coating and both sides thereof from the face side of coating head for coating.
Fig. 3 be in the clearing apparatus of the coating head for coating of this example, the leading section of the auxiliary cleaning of expression member respectively with the general description figure of the inclined plane contact condition of the front end face both sides that are positioned at coating head for coating.
Fig. 4 be in the clearing apparatus of the coating head for coating of this example, expression removes the detergent remover state is supplied with in the back to the leading section of cleaning member from the detergent remover supply nozzle of the moving direction rear side that is located at the cleaning member general description figure attached to the coating fluid on the coating head for coating by the cleaning member.
The specific embodiment
Below, specify the clearing apparatus of the coating head for coating of the invention process form with reference to the accompanying drawings.The clearing apparatus of coating head for coating of the present invention is not limited to following example, in the scope that does not change the invention aim, can do suitably change and implement.
In the clearing apparatus of the coating head for coating of this example, as Fig. 1~shown in Figure 3, after the elongate slit shape outlet 12 from the lip 11 front end face 11a that are located at coating head for coating 10 supplies to body to be coated (not shown) with coating fluid 1, will go up residual coating fluid 1 attached to the front end face 11a of the lip 11 of this coating head for coating 10 and the inclined plane 11b that is positioned at this front end face 11a both sides and remove.
And, in the clearing apparatus of the coating head for coating of this example, the leading section of cleaning member 20 is contacted with the front end face 11a of the coating head for coating 10 that is provided with described outlet 12 along the direction that the length direction of coating head for coating 10 intersects, under this state, utilize mobile device 30 that this cleaning member 20 is moved along the length direction of coating head for coating 10.
In addition, moving direction rear side at this cleaning member 20, be provided with utilize this mobile device 30 and move with cleaning member 20, to the detergent remover supply nozzle 21 of the leading section supply detergent remover 2 of this cleaning member 20, and, be provided with a pair of the 2nd detergent remover supply nozzle 22,22 of each inclined plane 11b, 11b that detergent remover 2 is supplied in the front end face 11a both sides of the coating head for coating 10 that is provided with outlet 12 at the moving direction front side of this cleaning member 20.
In addition, in the clearing apparatus of the coating head for coating of this example, as described cleaning member 20,2 vane member 20a, 20b are set as relatively with separating predetermined distance, and the gap between these 2 vane member 20a, 20b is used as the attraction portion 23 that the coating fluid of removing from the lip 11 of coating head for coating 10 1 is attracted.So, 2 vane member 20a, 20b are set as the occasion of coming relatively as attraction portion 23 separating predetermined distance, for the interval that makes these 2 vane member 20a, 20b narrow one can obtain stronger attraction, preferably the interval of these 2 vane member 20a, 20b is made the scope of 0.5~1mm.
In addition, in the clearing apparatus of the coating head for coating of this example, position at its moving direction rear side of described cleaning member 20, contact with each inclined plane 11b, 11b of the front end face 11a both sides of the lip 11 that is positioned at coating head for coating 10 respectively along the leading section that makes the auxiliary cleaning member 41,41 that constitutes by blade with direction that the length direction of coating head for coating 10 intersects, utilize mobile device 31,31 that these are assisted and clean member 41,41 length directions and move along coating head for coating 10.
And, in the clearing apparatus of the coating head for coating of this example, to and be positioned at each inclined plane 11b of its both sides attached to the front end face 11a of the lip 11 of coating head for coating 10, when the coating fluid 1 on the 11b is removed, as shown in Figure 1, with detergent remover 2 from being located at a pair of the 2nd detergent remover supply nozzle 22 of moving direction front side of cleaning member 20,22 are supplied in each inclined plane 11b of the front end face 11a both sides of coating head for coating 10,11b, and the leading section that makes cleaning member 20 as mentioned above utilizes mobile device 30 that this cleaning member 20 is moved along the length direction of coating head for coating 10 under the direction state of contact that the length direction with coating head for coating 10 intersects.
Like this, the detergent remover of supplying with 1 reason of the coating fluid on each inclined plane 11b, 11b of 10 the 2nd detergent remover supply nozzle 22,22 attached to coating 2 and flow and be directed into front end face 11a from inclined plane 11b, 11b, the mixture of this coating fluid 1 and detergent remover 2 is with identical attached to the coating fluid 1 on the front end face 11a of coating head for coating 10, scrape off and be removed together by described cleaning member 20, and attract by the attraction portion in the described cleaning member 20 23.
In addition, in the clearing apparatus of the coating head for coating of this example, position at its moving direction rear side of described cleaning member 20, utilize mobile device 31,31, each auxiliary cleaning member 41,41 that leading section is contacted with each inclined plane 11b, 11b of the front end face 11a both sides that are positioned at coating head for coating 10 moves along the length direction of coating head for coating 10 respectively.And the coating fluid 1 and the detergent remover 2 that utilize described each auxiliary cleaning member 41,41 will remain on described inclined plane 11b, the 11b are removed.
Like this, be removed, also suitably removed attached to the coating fluid 1 on each inclined plane 11b, 11b simultaneously from coating head for coating 10 with detergent remover 2 attached to the coating fluid 1 on the front end face 11a of coating head for coating 10.
And, as mentioned above, utilizing the cleaning member 20 will be after detergent remover 2 is removed attached to the front end face 11a of coating head for coating 10 and the coating fluid 1 on each inclined plane 11b, 11b, as shown in Figure 4, leave on the appropriate location of coating head for coating 10 at described each mobile device 30,31, supply with detergent remover 2 to the leading section of cleaning member 20 from the described detergent remover supply nozzle 21 of the moving direction rear side that is located at this cleaning member 20.
Like this, when utilizing cleaning member 20 to remove as mentioned above like that attached to the coating fluid on the coating head for coating 10 1, even on this cleaning member 20, adhere to the residual coating fluid 1 that is removed that has, this coating fluid 1 is the detergent remover 2 supplied with of the described detergent remover supply nozzle of reason 21 and suitably being removed from cleaning member 20 also, and coating fluid 1 can not adhere on the leading section that remains in this cleaning member 20.In addition, also can attract the detergent remover 2 of generation this moment and the mixture of coating fluid 1 by the attraction portion 23 of described cleaning member 20.
In addition, in the clearing apparatus of the coating head for coating of this example, mobile device 30,31 separates in the horizontal direction, but also can separate at above-below direction.
In the clearing apparatus of the coating head for coating of this example, owing to be that the leading section of auxiliary cleaning member 41,41 is contacted with each inclined plane 11b, 11b of the front end face 11a both sides that are positioned at coating head for coating 10 respectively, the coating fluid 1 that remains on each inclined plane 11b, 11b is removed, so might be directed to the front end face 11a that has cleaned the coating head for coating 10 that finishes once more utilizing these auxiliary cleaning members 41,41 will remain in the coating fluid 1 that will remain on these inclined planes 11b, the 11b when coating fluid 1 on each inclined plane 11b, 11b is removed.Therefore, though it is not shown, but the 2nd cleaning member that contacts with the front end face 11a of coating head for coating 10 can be set in these auxiliary positions of cleaning its moving direction rear side of members 41,41, the leading section contact of the 2nd cleaning member is moved, also the coating fluid 1 that is directed to the front end face 11a of coating head for coating 10 once more can be removed as mentioned above.
The described auxiliary cleaning member of removing for the coating fluid 1 on each inclined plane 11b, the 11b that will remain in the front end face 11a both sides that are positioned at coating head for coating 10 41,41, though it is not shown, but also can be identical with described cleaning member 20, setting separates required interval and 2 relative vane members, the gap between these 2 vane members is used as the attraction portion that attracts from the inclined plane 11b of coating head for coating 10, coating fluid 1 that 11b removes.
In these auxiliary positions of cleaning the moving direction rear side of members 41,41, the detergent remover supply nozzle that moves and supply with to these auxiliary leading sections that clean members 41,41 detergent remover with these auxiliary cleaning members 41,41 can be set also.
Although the present invention is described by embodiment, present technique personnel do various changes and variation is conspicuous.
Therefore, unless this change and variation break away from the scope of the invention, otherwise they are interpreted as comprising in the present invention.

Claims (7)

1. the clearing apparatus of a coating head for coating, with direction that the length direction of coating head for coating intersects on the leading section of cleaning member is contacted with the lip front end face of the coating head for coating of the elongated slit-shaped outlet that is provided with the supply coating fluid, under this state, this cleaning member is moved along the length direction of coating head for coating, to remove attached to the coating fluid on the lip of coating head for coating, it is characterized in that, be provided with the attraction portion that the coating fluid after being removed from the lip of coating head for coating by described cleaning member is attracted, and be provided with cleaning the detergent remover supply nozzle that member moves at the moving direction rear side of this cleaning member, after removing end, supply with detergent remover to the leading section of described cleaning member from this detergent remover supply nozzle attached to the coating fluid on the lip of coating head for coating.
2. the clearing apparatus of coating head for coating as claimed in claim 1 is characterized in that, described cleaning member is made of 2 vane members that separate required interval, and the gap between these 2 vane members is as described attraction portion.
3. the clearing apparatus of coating head for coating as claimed in claim 1, it is characterized in that, moving direction front side at described cleaning member is provided with cleaning the 2nd detergent remover supply nozzle that member moves, in that the cleaning member is moved in the way that to remove attached to the coating fluid on the lip of coating head for coating, detergent remover is supplied in the inclined plane of front end face both sides of the lip of coating head for coating from described the 2nd detergent remover supply nozzle.
4. the clearing apparatus of coating head for coating as claimed in claim 2, it is characterized in that, moving direction front side at described cleaning member is provided with cleaning the 2nd detergent remover supply nozzle that member moves, in that the cleaning member is moved in the way that to remove attached to the coating fluid on the lip of coating head for coating, detergent remover is supplied in the inclined plane of front end face both sides of the lip of coating head for coating from described the 2nd detergent remover supply nozzle.
5. the clearing apparatus of coating head for coating as claimed in claim 1, it is characterized in that, be provided with a pair of auxiliary cleaning member that contacts with each inclined plane of the front end face both sides of the lip that is positioned at described coating head for coating and move dividually with described clearing apparatus.
6. the clearing apparatus of coating head for coating as claimed in claim 2, it is characterized in that, be provided with a pair of auxiliary cleaning member that contacts with each inclined plane of the front end face both sides of the lip that is positioned at described coating head for coating and move dividually with described clearing apparatus.
7. the clearing apparatus of coating head for coating as claimed in claim 3, it is characterized in that, be provided with a pair of auxiliary cleaning member that contacts with each inclined plane of the front end face both sides of the lip that is positioned at described coating head for coating and move dividually with described clearing apparatus.
CN2007101280387A 2006-12-15 2007-06-22 Sweeping device of coating head for coating Active CN101204687B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006337686A JP4808147B2 (en) 2006-12-15 2006-12-15 Coating die cleaning device
JP2006-337686 2006-12-15
JP2006337686 2006-12-15

Publications (2)

Publication Number Publication Date
CN101204687A true CN101204687A (en) 2008-06-25
CN101204687B CN101204687B (en) 2010-06-02

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JP (1) JP4808147B2 (en)
KR (1) KR100839781B1 (en)
CN (1) CN101204687B (en)
TW (1) TW200824798A (en)

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CN104923448A (en) * 2015-05-13 2015-09-23 加通汽车内饰(常熟)有限公司 Online glue removing system, glue removing assembly and online glue removing method
CN107899822A (en) * 2017-12-10 2018-04-13 天长市金陵电子有限责任公司 A kind of cleaning device being used in electrostatic spraying device
CN110252598A (en) * 2019-06-27 2019-09-20 京东方科技集团股份有限公司 Doctor die group and scraper device
CN113145363A (en) * 2020-01-22 2021-07-23 株式会社斯库林集团 Nozzle cleaning device, coating device, nozzle cleaning method, and scraper

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JP4850680B2 (en) * 2006-12-15 2012-01-11 中外炉工業株式会社 Discharge nozzle cleaning device
KR102263229B1 (en) * 2018-11-29 2021-06-10 (주)동성화인텍 Spray apparatus for automatic foaming
CN112007826A (en) * 2019-05-29 2020-12-01 夏普株式会社 Coating device

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JP3914311B2 (en) * 1997-11-18 2007-05-16 中外炉工業株式会社 Method and apparatus for removing coating liquid at lip portion of die coater
JP4521505B2 (en) * 1999-10-19 2010-08-11 東レ株式会社 Coating head cleaning method and cleaning apparatus, and plasma display member manufacturing method and apparatus
JP4645926B2 (en) 2000-03-09 2011-03-09 東レ株式会社 Coating head cleaning method and cleaning apparatus, and color filter manufacturing method and manufacturing apparatus using them
JP2003236438A (en) * 2002-02-14 2003-08-26 Matsushita Electric Ind Co Ltd Device for removing coating liquid and method for manufacturing plasma display panel
JP4188043B2 (en) * 2002-09-18 2008-11-26 中外炉工業株式会社 Coating die cleaning device and coating device
JP4451175B2 (en) 2004-03-19 2010-04-14 大日本スクリーン製造株式会社 Nozzle cleaning apparatus and substrate processing apparatus
JP4489480B2 (en) * 2004-03-25 2010-06-23 東京応化工業株式会社 Slit nozzle cleaning device
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Cited By (4)

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Publication number Priority date Publication date Assignee Title
CN104923448A (en) * 2015-05-13 2015-09-23 加通汽车内饰(常熟)有限公司 Online glue removing system, glue removing assembly and online glue removing method
CN107899822A (en) * 2017-12-10 2018-04-13 天长市金陵电子有限责任公司 A kind of cleaning device being used in electrostatic spraying device
CN110252598A (en) * 2019-06-27 2019-09-20 京东方科技集团股份有限公司 Doctor die group and scraper device
CN113145363A (en) * 2020-01-22 2021-07-23 株式会社斯库林集团 Nozzle cleaning device, coating device, nozzle cleaning method, and scraper

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TW200824798A (en) 2008-06-16
JP2008149224A (en) 2008-07-03
KR100839781B1 (en) 2008-06-19
JP4808147B2 (en) 2011-11-02
CN101204687B (en) 2010-06-02
TWI322039B (en) 2010-03-21

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