TWI803629B - Equipment for cleaning coating nozzle - Google Patents
Equipment for cleaning coating nozzle Download PDFInfo
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- TWI803629B TWI803629B TW108115061A TW108115061A TWI803629B TW I803629 B TWI803629 B TW I803629B TW 108115061 A TW108115061 A TW 108115061A TW 108115061 A TW108115061 A TW 108115061A TW I803629 B TWI803629 B TW I803629B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
Abstract
Description
本發明是關於一種塗布用管嘴的清掃裝置,該塗布用管嘴的清掃裝置係在將各種塗液塗布於玻璃板等被塗布體的表面的桌上型塗布機( ,「日本註冊商標」,以下省略)所使用的塗布用管嘴當中,用來清掃設有吐出塗液用的狹縫狀吐出口的塗布用管嘴的前端部。尤其是,在使塗液從在被塗布體上方行進的塗布用管嘴的前端面所設置的狹縫狀吐出口吐出而將塗液塗布在被塗布體的表面之後,利用沿著塗布用管嘴的前端部移動的清掃構件將殘留在設有狹縫狀吐出口的塗布用管嘴的前端部的塗液去除來清掃塗布用管嘴的前端部的塗布用管嘴的清掃裝置當中,具有下列特點:在有從前述塗布用管嘴的前端部去除的一部分塗液附著於清掃構件,而進行了幾次利用清掃構件進行清掃而去除殘留在塗布用管嘴的前端部的塗液的操作的情況,可確實防止附著於清掃構件的塗液逐漸蓄積,且如此蓄積的塗液從清掃構件附著於塗布用管嘴的前端部而黏附在被塗布體或其周邊而發生塗工不良,尤其是,即使在使用黏度高的塗液的情況,也可避免附著並蓄積於清掃構件的塗液附著在塗布用管嘴的前端部而黏附在被塗布體或其周邊,可利用清掃構件穩定且充分地清掃塗布用管嘴的前端部。 The present invention relates to a cleaning device for coating nozzles. The cleaning device for coating nozzles is a desktop coating machine ( , "Japanese registered trademark", hereinafter omitted) among the coating nozzles used, it is used to clean the front end of the coating nozzle provided with the slit-shaped discharge port for discharging the coating liquid. In particular, after the coating liquid is sprayed out from the slit-shaped discharge port provided on the front end face of the coating nozzle advancing above the object to be coated to coat the surface of the object to be coated, the In the cleaning device of the coating nozzle, the cleaning member that moves the tip of the nozzle removes the coating liquid remaining at the tip of the coating nozzle provided with a slit-shaped discharge port to clean the tip of the coating nozzle. The following feature: a part of the coating liquid removed from the front end of the coating nozzle adheres to the cleaning member, and the operation of cleaning with the cleaning member to remove the coating liquid remaining on the front end of the coating nozzle is performed several times In this case, it is possible to reliably prevent the coating liquid adhering to the cleaning member from gradually accumulating, and the coating liquid accumulated in this way adheres to the object to be coated or its surroundings from the cleaning member to the front end of the coating nozzle to cause poor coating, especially Yes, even in the case of using a high-viscosity coating liquid, it is possible to prevent the coating liquid attached and accumulated on the cleaning member from adhering to the front end of the coating nozzle and adhering to the object to be coated or its surroundings, and the cleaning member can be used stably and Clean the tip of the coating nozzle sufficiently.
製造電漿顯示器面板、有機電致發光顯示器面板、液晶顯示器面板等時,過去以來是使用桌上型塗布機,這種桌上型塗布機當中,是使用在前端部設有吐出塗液用的狹縫狀吐出口的塗布用管嘴,且使該塗布用管嘴在如前述的被塗布體的上方移動,同時使塗液從設在該塗布用管嘴的前端部的狹縫狀吐出口吐出至被塗布體的表面而將塗液塗布在被塗布體的表面。 In the manufacture of plasma display panels, organic electroluminescent display panels, liquid crystal display panels, etc., desktop coaters have been used in the past. A nozzle for coating with a slit-shaped discharge port, and the nozzle for coating is moved above the object to be coated as described above, and at the same time, the coating liquid is discharged from the slit-shaped discharge port provided at the front end of the nozzle for coating The coating solution is discharged onto the surface of the object to be coated to apply the coating liquid on the surface of the object to be coated.
然而,如此將塗液塗布在被塗布體的表面時,會形成為有塗液局部殘留在前述塗布用管嘴的前端部的前述吐出口或其周邊部分的狀態。 However, when the coating liquid is applied to the surface of the object to be coated in this way, the coating liquid partially remains on the discharge port at the front end of the coating nozzle or its peripheral portion.
而且,在利用有塗液局部殘留的塗布用管嘴將塗液塗布在接下來的被塗布體的表面時,會產生因為殘留在塗布用管嘴的前端部的前述塗液而使得被塗布在接下來的被塗布體的表面的塗液發生條紋狀的塗布不均等問題。 Moreover, when the coating liquid is applied to the surface of the next object to be coated by using a coating nozzle with a partially remaining coating liquid, it may occur that the coating liquid is left on the front end of the coating nozzle and the surface of the object being coated is damaged. The coating solution on the surface of the next object to be coated has problems such as streaky coating unevenness.
因此,以往提案了一種下列技術:在如前所述從塗布用管嘴的前端部的吐出口將塗液塗布在被塗布體的表面之後,將該塗布用管嘴引導至設在與被塗布體分開的位置的清掃裝置,並且如專利文獻1至3所示,使設在該清掃裝置的清掃構件沿著塗布用管嘴的前端部移動,利用清掃構件將殘留在塗布用管嘴的前端部的塗液從塗布用管嘴的前端部刮除而予以去除。 Therefore, a kind of following technique has been proposed in the past: After the coating liquid is coated on the surface of the object to be coated from the discharge port at the front end of the coating nozzle as described above, the coating nozzle is guided to the surface of the object to be coated. The cleaning device at the position where the body is separated, and as shown in
在此,就前述塗布用管嘴而言,一般是如前述專利文獻1至3所示,使用一種在設有狹縫狀吐出口的塗布用管嘴的前端當中的細長的前端面的兩側設有朝向上方擴展成斜面狀之形成V字狀的唇弓斜面,且前端部形成大致V字狀者。另一方面,在清掃前述塗布用管嘴的前端部的清掃裝置當中,就前述清掃構件而言,是使用一種設有附有大致V字狀的切口的清掃用刮除部者,其係與塗布用管嘴的前端部當中的細長的前端面及設在其兩側的形成V字狀的唇弓斜面接觸,以去除殘留在這些部位的塗液。 Here, as for the above-mentioned coating nozzle, generally, as shown in the above-mentioned
又,專利文獻1揭示了一種不只組合有附有大致V字狀的切口的清掃用刮除部,而且組合有分別將V字狀的左右的斜面作為其他的清掃刮除部者。 Also,
而且,以往是將如前述方式將塗液塗布在被塗布體的表面之後的塗布用管嘴引導至前述清掃裝置,並將塗布用管嘴的前端部嵌入前述清掃構件當中的清掃用刮除部內的切口等,使塗布用管嘴的前端部當中的細長的前端面及設在其兩側的形成V字狀的唇弓斜面與清掃構件當中的清掃用刮除部接觸,並且在此狀態下,使前述清掃構件沿著塗布用管嘴的前端部移動,然後利用前述清掃構件將殘留在塗布用管嘴的前端部的塗液從塗布用管嘴的前端部去除。 Moreover, conventionally, the nozzle for coating after coating the surface of the object to be coated with the coating liquid as described above is guided to the cleaning device, and the front end of the nozzle for coating is inserted into the scraper for cleaning in the cleaning member. The incision etc. of the front end of the nozzle for coating and the V-shaped labial arch slopes on both sides of the front end of the coating nozzle are in contact with the cleaning scraper part of the cleaning member, and in this state , the cleaning member is moved along the front end of the coating nozzle, and then the coating liquid remaining on the front end of the coating nozzle is removed from the front end of the coating nozzle by the cleaning member.
然而,像這樣利用前述清掃構件將殘留在塗布用管嘴的前端部的塗液從塗布用管嘴的前端部去除時,從塗布用管嘴的前端部被去除的塗液會附著並殘留在前述清掃構件,尤其是在黏度高的塗液的情況,附著在清掃構件的塗液會殘留而不會從清掃構件滴落,附著並殘留在清掃構件的塗液的量會逐漸增加,且如此附著並殘留在清掃構件的塗液會逐漸固化。 However, when the coating solution remaining at the tip of the coating nozzle is removed from the tip of the coating nozzle by the cleaning member in this way, the coating solution removed from the tip of the coating nozzle will adhere and remain on the In the aforementioned cleaning member, especially in the case of a high-viscosity coating liquid, the coating liquid adhering to the cleaning member will remain without dripping from the cleaning member, and the amount of coating liquid adhering to and remaining on the cleaning member will gradually increase, and thus The coating liquid adhered and remained on the cleaning member gradually solidifies.
接下來,如此附著並殘留在清掃構件而逐漸固化的塗液會附著在塗布用管嘴的前端部當中的塗工部分或塗工部分外,在使用附著有如此固化的塗液的塗布用管嘴將新的塗液塗布在被塗布體的表面時,固化的塗液會成為異物而附著在塗工部分或塗工部分外而發生塗工不良的問題。 Next, the coating solution that adheres and remains on the cleaning member and gradually solidifies will adhere to the coating part or outside the coating part of the front end of the nozzle for coating. When the nozzle applies a new coating solution on the surface of the object to be coated, the solidified coating solution becomes foreign matter and adheres to the part to be coated or outside the part to be coated, causing a problem of defective coating.
在此,像這樣附著並殘留在清掃構件而固化的塗液會附著在塗布用管嘴的前端部當中的塗工部分或塗工部分外,而在利用這種塗布用管嘴將塗液塗布在被塗布體的表面時有異物附著在塗工部分或塗工部分外而發生塗工不良,前述專利文獻1至3當中並未特別針對此種情形揭示出解決手段。 Here, the coating liquid that adheres and remains on the cleaning member and solidifies in this way adheres to the coating part or the outside of the coating part at the front end of the coating nozzle, and when the coating liquid is applied by using this coating nozzle On the surface of the object to be coated, foreign matter adheres to or outside the coated portion, resulting in defective coating. The
[專利文獻1]日本特開2008-149247號公報 [Patent Document 1] Japanese Patent Laid-Open No. 2008-149247
[專利文獻2]日本特開2012-185404號公報 [Patent Document 2] Japanese Unexamined Patent Publication No. 2012-185404
[專利文獻3]日本特開2011-167607號公報 [Patent Document 3] Japanese Patent Laid-Open No. 2011-167607
本發明之課題在於解決塗布用管嘴的清掃裝置如前所述的問題,該塗布用管嘴的清掃裝置是在將各種塗液塗布在玻璃板等被塗布體的表面的桌上型塗布機所使用的塗布用管嘴當中,用以清掃設有吐出塗液用的狹縫狀吐出口的塗布用管嘴的前端部。 The object of the present invention is to solve the above-mentioned problems of the cleaning device for coating nozzles, which is a table-top coating machine for coating various coating liquids on the surface of a target object such as a glass plate. Among the coating nozzles used, the tip portion of the coating nozzle provided with a slit-shaped discharge port for discharging the coating liquid is used for cleaning.
而且,本發明之塗布用管嘴的清掃裝置當中之課題在於:在使塗布用管嘴相對於被塗布體移動,且將塗液從設在前述塗布用管嘴的前端面的狹縫狀吐出口塗布在被塗布體的表面之後,將該塗布用管嘴引導至清掃裝置,利用沿著塗布用管嘴的前端部移動的清掃構件將殘留在設有狹縫狀吐出口的塗布用管嘴的前端部的塗液去除來清掃塗布用管嘴的前端部時,即使有從塗布用管嘴的前端部去除的一部分塗液附著並蓄積在清掃構件,且如此蓄積的塗液從清掃構件附著在塗布用管嘴的前端部,附著的塗液也可利用清掃構件從塗布用管嘴的前端部適當去除,以確實防止塗工不良的發生,尤其即使在使用黏度高的塗液的情況,也可避免附著並蓄積在清掃構件的塗液附著在塗布用管嘴的前端部而 黏附在被塗布體或其周邊,可利用清掃構件穩定且充分地清掃塗布用管嘴的前端部。 Furthermore, the subject of the coating nozzle cleaning device of the present invention is to move the coating nozzle relative to the object to be coated and discharge the coating liquid from the slit formed on the front end surface of the coating nozzle. After the outlet is coated on the surface of the object to be coated, the coating nozzle is guided to a cleaning device, and the coating nozzle that is provided with a slit-shaped discharge port is cleaned by a cleaning member that moves along the front end of the coating nozzle. When cleaning the front end of the coating nozzle by removing the coating liquid at the front end of the coating nozzle, even if a part of the coating liquid removed from the front end of the coating nozzle adheres to and accumulates in the cleaning member, and the thus accumulated coating liquid adheres to the cleaning member At the front end of the coating nozzle, the attached coating liquid can also be properly removed from the front end of the coating nozzle by a cleaning member to prevent the occurrence of poor coating work, especially when using a high-viscosity coating liquid. It is also possible to prevent the coating liquid attached and accumulated on the cleaning member from adhering to the tip of the coating nozzle and sticking to the object to be coated or its surroundings, and the tip of the coating nozzle can be cleaned stably and sufficiently by the cleaning member.
為了解決如前所述的課題,本發明之塗布用管嘴的清掃裝置當中,係使用一種形成為在與於被塗布體上方行進的方向交叉的方向較長的塗布用管嘴,在該塗布用管嘴之與被塗布體相對向的前端面沿著塗布用管嘴的長邊方向設置有將塗液吐出的狹縫狀吐出口,且在使前述塗布用管嘴在前述被塗布體上方行進並且從前述狹縫狀的吐出口吐出塗液而將塗液塗布在被塗布體的表面之後,利用沿著塗布用管嘴的前端部在塗布用管嘴的下方移動的清掃構件去除殘留在設有狹縫狀吐出口的塗布用管嘴之包含前端面的前端部的塗液來清掃塗布用管嘴的前端部,其中:以在前述塗布用管嘴的行進方向隔著所需間隔的方式設置設有與前述塗布用管嘴的前端部的形狀對應的清掃用刮除部的第1清掃構件及第2清掃構件來作為前述清掃構件,並且使前述第1清掃構件及第2清掃構件從前述塗布用管嘴的下方朝向塗布用管嘴的前端部並相對於塗布用管嘴的長邊方向朝反方向傾斜,且以使前述第1清掃構件及第2清掃構件當中的清掃用刮除部沿著塗布用管嘴的前端部之方式使第1清掃構件及第2清掃構件依序分別沿著塗布用管嘴的前端部朝反方向移動,而清掃塗布用管嘴的前端部。 In order to solve the above-mentioned problems, in the cleaning device of the coating nozzle of the present invention, a coating nozzle formed to be long in the direction intersecting with the direction of traveling above the object to be coated is used. The front end surface of the nozzle facing the object to be coated is provided with a slit-shaped outlet for discharging the coating liquid along the longitudinal direction of the nozzle for coating, and the nozzle for coating is above the object to be coated. After advancing and discharging the coating liquid from the aforementioned slit-shaped discharge port to coat the coating liquid on the surface of the object to be coated, the cleaning member moving below the coating nozzle along the front end of the coating nozzle removes the remaining Cleaning the front end of the coating nozzle with the coating solution including the front end of the front end surface of the coating nozzle provided with a slit-shaped discharge port, wherein: the distance is separated by a required interval in the direction of travel of the coating nozzle The first cleaning member and the second cleaning member with a cleaning scraper portion corresponding to the shape of the front end of the coating nozzle are provided as the cleaning member, and the first cleaning member and the second cleaning member are From the bottom of the coating nozzle toward the front end of the coating nozzle, it is inclined in the opposite direction relative to the longitudinal direction of the coating nozzle, and the cleaning scraper in the first cleaning member and the second cleaning member The cleaning part moves the first cleaning member and the second cleaning member sequentially along the front end of the coating nozzle in opposite directions so as to clean the front end of the coating nozzle.
而且,如本發明之塗布用管嘴的清掃裝置所示,係以在塗布用管嘴的行進方向隔著所需間隔的方式設有與前述塗布用管嘴的前端部的形狀對應的清掃用刮除部的第1清掃構件及第2清掃構件來作為清掃構件,並且使第1清掃構件及第2清掃構件從前述塗布用管嘴的下方朝向塗布用管嘴的前端部並相對於塗布用管嘴的長邊方向朝反方向傾斜,且以使第1清掃構件及第2清掃構 件當中的清掃用刮除部沿著塗布用管嘴的前端部之方式使第1清掃構件及第2清掃構件依序分別沿著塗布用管嘴的前端部朝反方向移動,而清掃塗布用管嘴的前端部,此時即使有從塗布用管嘴的前端部被去除的一部分塗液附著並蓄積在一方的清掃構件,且如此蓄積的塗液從一方的清掃構件附著在塗布用管嘴的前端部,附著的塗液也可利用另一方的清掃構件從塗布用管嘴的前端部適當地去除。 And, as shown in the cleaning device of the coating nozzle of the present invention, a cleaning device corresponding to the shape of the front end of the coating nozzle is provided with a required interval in the direction of travel of the coating nozzle. The first cleaning member and the second cleaning member of the scraping part are used as cleaning members, and the first cleaning member and the second cleaning member are directed from the bottom of the coating nozzle to the front end of the coating nozzle and facing the coating nozzle. The long side direction of the nozzle is inclined in the opposite direction, and the first cleaning member and the second cleaning member are arranged so that the cleaning scraper portion of the first cleaning member and the second cleaning member is along the front end portion of the coating nozzle. The members move in the opposite direction along the front end of the coating nozzle in order to clean the front end of the coating nozzle. One cleaning member, and thus accumulated coating liquid adheres to the front end of the coating nozzle from one cleaning member, and the adhered coating liquid can also be properly removed from the front end of the coating nozzle by the other cleaning member.
在此,本發明之塗布用管嘴的清掃裝置當中,於使前述第1清掃構件及第2清掃構件在與塗布用管嘴的行進方向交叉的塗布用管嘴的前端部的長邊方向當中朝反方向傾斜時,較佳為使第1清掃構件及第2清掃構件分別朝向清掃塗布用管嘴的前端部時的移動方向而從前述塗布用管嘴的下方朝塗布用管嘴的前端部傾斜。如此一來,即使在使用如聚醯亞胺(polyimide)等黏度高的塗液的情況,殘留在塗布用管嘴的前端部的塗液也可利用如前述般朝移動方向傾斜的第1清掃構件或第2清掃構件向下方確實地刮落,而可充分去除殘留在塗布用管嘴的前端部的塗液。 Here, in the coating nozzle cleaning device of the present invention, the first cleaning member and the second cleaning member are arranged in the longitudinal direction of the front end portion of the coating nozzle intersecting with the traveling direction of the coating nozzle. When tilting in the opposite direction, it is preferable to move the first cleaning member and the second cleaning member toward the front end of the coating nozzle from below the coating nozzle toward the front end of the coating nozzle. tilt. In this way, even in the case of using a high-viscosity coating liquid such as polyimide, the coating liquid remaining at the tip of the coating nozzle can be cleaned by the first cleaning method inclined in the moving direction as described above. The member or the second cleaning member can be reliably scraped downward to sufficiently remove the coating liquid remaining at the tip of the coating nozzle.
又,本發明之塗布用管嘴的清掃裝置當中,可在前述第1清掃構件的移動方向下游側設置有用來清掃設有狹縫狀吐出口的塗布用管嘴的前端面的第1前端面清掃構件,並且在前述第2清掃構件的移動方向下游側設置有用來清掃設有狹縫狀吐出口的塗布用管嘴的前端面的第2前端面清掃構件。如此一來,使塗液從在被塗布體上方行進的塗布用管嘴的前端面所設置的狹縫狀吐出口吐出至被塗布體的表面而將塗液塗布在被塗布體的表面之後,便可利用前述第1前端面清掃構件及第2前端面清掃構件進行清掃而確實去除殘留在設有狹縫狀吐出口的塗布用管嘴的前端面的塗液。此外,設置前述第1前端面清掃構 件及第2前端面清掃構件的情況係與前述第1清掃構件及第2清掃構件的情況相同,以使其分別朝清掃塗布用管嘴的前端部時的移動方向傾斜為佳。 Also, in the cleaning device of the coating nozzle of the present invention, a first front end surface for cleaning the front end surface of the coating nozzle provided with a slit-shaped discharge port may be provided on the downstream side of the moving direction of the first cleaning member. A cleaning member is provided, and a second front end cleaning member for cleaning the front end of the coating nozzle provided with a slit-shaped discharge port is provided on the downstream side of the moving direction of the second cleaning member. In this way, after the coating liquid is discharged from the slit-shaped discharge port provided on the front end face of the coating nozzle that travels above the object to be coated to the surface of the object to be coated to apply the coating liquid on the surface of the object to be coated, The coating liquid remaining on the front end surface of the coating nozzle provided with the slit-shaped discharge port can be surely removed by cleaning with the first front end surface cleaning member and the second front end surface cleaning member. In addition, the situation of setting the above-mentioned 1st front end surface cleaning member and the 2nd front end surface cleaning member is the same as the situation of the aforementioned 1st cleaning member and the 2nd cleaning member, so that when they are respectively facing the front end portion of the nozzle for cleaning. It is better to move in an inclined direction.
又,本發明之塗布用管嘴的清掃裝置當中,在使用黏度低的塗液的情況,使第1清掃構件及第2清掃構件分別朝向與清掃塗布用管嘴的前端部時的移動方向的相反方向傾斜的方法也有效。 In addition, in the cleaning device of the coating nozzle according to the present invention, in the case of using a low-viscosity coating liquid, the first cleaning member and the second cleaning member are respectively directed to the moving direction when cleaning the front end portion of the coating nozzle. The method of tilting in the opposite direction is also effective.
又,本發明之塗布用管嘴的清掃裝置當中,利用前述第1清掃構件及第2清掃構件清掃塗布用管嘴的前端部時,可將前述塗布用管嘴設置成可相對於前述第1清掃構件及第2清掃構件相對地昇降、移動,而將前述塗布用管嘴的前端部引導至前述第1清掃構件當中的清掃用刮除部內,並利用該第1清掃構件清掃塗布用管嘴的前端部,接下來,將前述塗布用管嘴的前端部引導至第2清掃構件當中的清掃用刮除部內,並利用該第2清掃構件清掃塗布用管嘴的前端部。在此情況,除了使塗布用管嘴昇降、移動之外,亦可使第1清掃構件及第2清掃構件雙方昇降、移動,但是從操作容易度這點來看,使塗布用管嘴升降、移動為佳。 Also, in the cleaning device of the coating nozzle of the present invention, when the front end portion of the coating nozzle is cleaned by the first cleaning member and the second cleaning member, the coating nozzle can be set so as to be able to be positioned relative to the first cleaning member. The cleaning member and the second cleaning member move up and down relative to each other to guide the front end of the coating nozzle to the cleaning scraping portion of the first cleaning member, and clean the coating nozzle with the first cleaning member. Next, the front end of the coating nozzle is guided into the cleaning scraper portion of the second cleaning member, and the front end of the coating nozzle is cleaned by the second cleaning member. In this case, in addition to lifting and moving the nozzle for coating, both the first cleaning member and the second cleaning member can be lifted and moved. Mobile is best.
本發明之塗布用管嘴的清掃裝置當中,係以在前述塗布用管嘴的行進方向隔著所需間隔的方式設置設有與塗布用管嘴的前端部的形狀對應的清掃用刮除部的第1清掃構件及第2清掃構件來作為清掃構件,並且使第1清掃構件及第2清掃構件從前述塗布用管嘴的下方朝向塗布用管嘴的前端部並相對於塗布用管嘴的長邊方向朝反方向傾斜,且以使第1清掃構件及第2清掃構件當中的清掃用刮除部沿著塗布用管嘴的前端部之方式使第1清掃構件及第2清掃構件依序分別沿著塗布用管嘴的前端部朝反方向移動,而利用第1清掃構 件及第2清掃構件清掃塗布用管嘴的前端部,因此即使有從塗布用管嘴的前端部被去除的一部分塗液附著並蓄積在一方的清掃構件,且如此蓄積的塗液從一方的清掃構件附著於塗布用管嘴的前端部,附著的塗液也可利用另一方的清掃構件從塗布用管嘴的前端部適當去除。 In the coating nozzle cleaning device of the present invention, a cleaning scraper corresponding to the shape of the front end of the coating nozzle is provided at a required interval in the traveling direction of the coating nozzle. The first cleaning member and the second cleaning member are used as the cleaning members, and the first cleaning member and the second cleaning member are directed from the bottom of the coating nozzle to the front end of the coating nozzle and relative to the coating nozzle. The longitudinal direction is inclined in the opposite direction, and the first cleaning member and the second cleaning member are arranged in order so that the cleaning scraper portion of the first cleaning member and the second cleaning member is along the front end of the coating nozzle. Move in opposite directions along the front end of the coating nozzle respectively, and clean the front end of the coating nozzle with the first cleaning member and the second cleaning member, so even if there is a part removed from the front end of the coating nozzle The coating liquid adheres and accumulates on one cleaning member, and the accumulated coating liquid is attached to the front end of the coating nozzle from one cleaning member, and the adhered coating liquid can also be cleaned from the coating nozzle by the other cleaning member. The front end is appropriately removed.
在此,就使第1清掃構件及第2清掃構件依序分別沿著塗布用管嘴的前端部朝反方向移動的方法而言,是只要在使第1清掃構件移動之後使第2清掃構件移動即可,但是亦可進行複數次該動作。 Here, the method of moving the first cleaning member and the second cleaning member sequentially along the front end of the coating nozzle in the opposite direction is as long as the second cleaning member is moved after the first cleaning member is moved. Just move, but you can do this action multiple times.
結果,本發明之塗布用管嘴的清掃裝置當中,即使有附著並蓄積在清掃構件的塗液從清掃構件附著在塗布用管嘴的前端部,附著的塗液也可從塗布用管嘴的前端部適當去除,而可確實防止塗工不良的發生,尤其即使在使用黏度高的塗液的情況,附著並蓄積在清掃構件的塗液也不會附著在塗布用管嘴的前端部而黏附在被塗布體或其周邊,可利用清掃構件穩定且充分地清掃塗布用管嘴的前端部。 As a result, in the cleaning device of the coating nozzle of the present invention, even if the coating liquid attached and accumulated on the cleaning member adheres to the front end of the coating nozzle from the cleaning member, the attached coating liquid can be removed from the coating nozzle. Appropriate removal of the front end can reliably prevent the occurrence of poor coating work. Especially, even when using a high-viscosity coating liquid, the coating liquid that adheres and accumulates on the cleaning member will not adhere to the front end of the coating nozzle. The tip portion of the coating nozzle can be stably and sufficiently cleaned by the cleaning member on the object to be coated or its periphery.
10‧‧‧桌上型塗布機 10‧‧‧Table Coater
11‧‧‧工作台 11‧‧‧Workbench
12‧‧‧行進用軌道 12‧‧‧Travel track
13‧‧‧行進構件 13‧‧‧Traveling components
20‧‧‧塗布用管嘴 20‧‧‧Nozzle for coating
21‧‧‧前端面 21‧‧‧front face
22‧‧‧吐出口 22‧‧‧spit outlet
23‧‧‧唇弓斜面 23‧‧‧Lip arch slope
24‧‧‧歧管 24‧‧‧Manifold
25‧‧‧引導路 25‧‧‧Guide Road
30‧‧‧清掃裝置 30‧‧‧Cleaning device
31‧‧‧引導軌道 31‧‧‧guiding track
32‧‧‧清掃用移動台 32‧‧‧Mobile platform for cleaning
33‧‧‧第1清掃構件 33‧‧‧The first cleaning member
33a、34a‧‧‧清掃用刮除部 33a, 34a‧‧‧Cleaning scraper
34‧‧‧第2清掃構件 34‧‧‧The second cleaning member
35‧‧‧第1前端面清掃構件 35‧‧‧The first front cleaning member
36‧‧‧第2前端面清掃構件 36‧‧‧The second front cleaning member
W‧‧‧被塗布體 W‧‧‧coated body
x‧‧‧塗液 x‧‧‧coating solution
第1圖是使用了本發明之一實施形態的塗布用管嘴的清掃裝置的塗布裝置的概略說明圖。 Fig. 1 is a schematic explanatory diagram of a coating device using a coating nozzle cleaning device according to an embodiment of the present invention.
第2圖是顯示出在前述塗布裝置當中,使塗布用管嘴在裝設於工作台的被塗布體上方行進,同時使塗液從設在塗布用管嘴的前端面的狹縫狀吐出口吐出而將塗液塗布在被塗布體的表面的狀態的概略說明圖。 Fig. 2 shows that in the above-mentioned coating device, the coating nozzle is moved over the object to be coated installed on the table, and the coating liquid is discharged from the slit-shaped outlet provided on the front end surface of the coating nozzle. It is a schematic explanatory diagram of a state in which a coating liquid is sprayed out and applied to the surface of the object to be coated.
第3圖是顯示出在前述塗布裝置當中,使塗布用管嘴在裝設於工作台的被塗布體上方行進,同時使塗液從設在塗布用管嘴的前端面的狹縫狀吐出口吐出而將塗液塗布在被塗布體的整個表面的狀態的概略說明圖。 Fig. 3 shows that in the above-mentioned coating device, the coating nozzle is moved above the object to be coated installed on the table, and the coating liquid is discharged from the slit-shaped outlet provided on the front end surface of the coating nozzle. A schematic explanatory diagram of a state in which the coating liquid is discharged and applied to the entire surface of the object to be coated.
第4圖顯示出在前述塗布裝置當中,在將塗液塗布在被塗布體的表面之後的塗布用管嘴的前端部殘留有塗液的狀態,(A)是塗布用管嘴的概略側面圖,(B)是塗布用管嘴的概略剖面圖。 Fig. 4 shows a state in which the coating liquid remains at the front end of the coating nozzle after the coating liquid is applied to the surface of the object to be coated in the coating device, and (A) is a schematic side view of the coating nozzle , (B) is a schematic sectional view of a coating nozzle.
第5圖是顯示出在前述實施形態之塗布用管嘴的清掃裝置當中,將在前端部有塗液殘留的狀態的塗布用管嘴引導至清掃裝置當中的第1清掃構件的位置,然後將有塗液殘留的狀態的塗布用管嘴的前端部裝入第1清掃構件當中的清掃用刮除部內的狀態的概略說明圖。 Fig. 5 shows that in the cleaning device of the coating nozzle of the above-mentioned embodiment, the coating nozzle in the state where the coating liquid remains at the front end is guided to the position of the first cleaning member in the cleaning device, and then It is a schematic explanatory diagram of a state where the tip portion of the coating nozzle in a state where the coating liquid remains is installed in the cleaning scraper portion of the first cleaning member.
第6圖顯示出在前述實施形態之塗布用管嘴的清掃裝置當中,使前述第1清掃構件及第1前端面清掃構件沿著有塗液殘留的狀態的塗布用管嘴的前端部的長邊方向移動來清掃塗布用管嘴的前端部的狀態,(A)是顯示出使第1清掃構件及第1前端面清掃構件朝向有塗液殘留的狀態的塗布用管嘴的前端部移動的狀態的概略說明圖,(B)是顯示出使前述第1清掃構件及第1前端面清掃構件沿著塗布用管嘴的前端部移動來進行清掃而去除殘留在塗布用管嘴的前端部的塗液的情況下,有被去除的一部分塗液附著在第1清掃構件或第1前端面清掃構件的狀態的概略說明圖。 Fig. 6 shows that in the cleaning device of the coating nozzle according to the above-mentioned embodiment, the first cleaning member and the first front end surface cleaning member are arranged along the length of the front end of the coating nozzle in a state where the coating liquid remains. The state of cleaning the front end of the coating nozzle by moving sideways, (A) shows that the first cleaning member and the first front end surface cleaning member are moved toward the front end of the coating nozzle in a state where the coating liquid remains The schematic explanatory diagram of the state, (B) shows that the first cleaning member and the first front end surface cleaning member are moved along the front end of the coating nozzle to clean and remove the residue remaining on the front end of the coating nozzle. In the case of the coating liquid, there is a schematic explanatory diagram showing a state where a part of the removed coating liquid adheres to the first cleaning member or the first front end surface cleaning member.
第7圖是顯示出在前述實施形態之塗布用管嘴的清掃裝置當中,將利用第1清掃構件及第1前端面清掃構件清掃之後的塗布用管嘴從清掃裝置當中的第1清掃構件的位置引導至第2清掃構件的位置,然後將塗布用管嘴的前端部裝入第2清掃構件當中的清掃用刮除部的切口內的狀態的概略說明圖。 Fig. 7 is a view showing the coating nozzle cleaned by the first cleaning member and the first front end surface cleaning member from the first cleaning member in the cleaning device in the cleaning device of the coating nozzle according to the above-mentioned embodiment. It is a schematic explanatory diagram of the state where the position is guided to the position of the second cleaning member, and then the tip of the coating nozzle is inserted into the cutout of the cleaning scraper part of the second cleaning member.
第8圖顯示出在前述實施形態之塗布用管嘴的清掃裝置當中,使前述第2清掃構件及第2前端面清掃構件沿著塗布用管嘴的前端部的長邊方向朝前述第1清掃構件及第1前端面清掃構件的反方向移動來清掃塗布用管嘴的前端部的狀態,(A)是顯示出朝向利用第1清掃構件及第1前端面清掃構件清掃之後的塗布用管嘴的前端部而使第2清掃構件及第2前端面清掃構件朝第1清掃構件及第1前端面清掃構件的反方向移動的狀態的概略說明圖,(B)是顯示出使前述第2清掃構件及第2前端面清掃構件沿著塗布用管嘴的前端部朝第1清掃構件及第1前端面清掃構件的反方向移動來進一步清掃塗布用管嘴的前端部之後的狀態的概略說明圖。 Fig. 8 shows that in the cleaning device of the coating nozzle according to the above-mentioned embodiment, the second cleaning member and the second front end surface cleaning member are moved toward the first cleaning along the long side direction of the front end of the coating nozzle. member and the first front end face cleaning member move in the opposite direction to clean the front end of the coating nozzle, (A) shows the coating nozzle after cleaning by the first cleaning member and the first front end face cleaning member A schematic explanatory diagram of a state in which the second cleaning member and the second front end cleaning member are moved in the opposite direction to the first cleaning member and the first front cleaning member, (B) is a schematic illustration showing that the aforementioned second cleaning Schematic explanatory diagram of the state after the member and the second front end surface cleaning member move along the front end of the coating nozzle in the opposite direction to the first cleaning member and the first front end surface cleaning member to further clean the front end of the coating nozzle .
第9圖是顯示出在前述實施形態之塗布用管嘴的清掃裝置當中,將殘留在使用過幾次之後的塗布用管嘴的前端部的塗液從塗布用管嘴的前端部清掃時,在使附著有被去除的一部分塗液的狀態的第1清掃構件及第1前端面清掃構件沿著有塗液殘留的狀態的塗布用管嘴的前端部的長邊方向移動來清掃塗布用管嘴的前端部之後,使前述第2清掃構件及第2前端面清掃構件相對於附著有殘留在第1清掃構件或第1前端面清掃構件的塗液的前述塗布用管嘴的前端部沿著塗布用管嘴的前端部的長邊方向朝第1清掃構件及第1前端面清掃構件的反方向移動來進行清掃而去除殘留在塗布用管嘴的前端部的塗液的狀態,(A)是顯示出使前述第1清掃構件及第1前端面清掃構件朝向有塗液殘留的狀態的塗布用管嘴的前端部移動的狀態的概略說明圖,(B)是顯示出在使前述第1清掃構件及第1前端面清掃構件沿著塗布用管嘴的前端部移動來進行清掃而去除殘留在塗布用管嘴的前端部的塗液時,有殘留在第1清掃構件或第1前端面清掃構件的塗液附著並殘留在塗布用管嘴的前端部的狀態的概略說明圖,(C)是顯示出使 第2清掃構件及第2前端面清掃構件朝向在利用第1清掃構件及第1前端面清掃構件清掃之後有一部分塗液殘留的塗布用管嘴的前端部而朝第1清掃構件及第1前端面清掃構件的反方向移動的狀態的概略說明圖,(D)是顯示出使前述第2清掃構件及第2前端面清掃構件沿著塗布用管嘴的前端部朝第1清掃構件及第1前端面清掃構件的反方向移動來進行清掃而去除從第1清掃構件及第1前端面清掃構件附著在塗布用管嘴的前端部的塗液之後的狀態的概略說明圖。 Fig. 9 shows that in the coating nozzle cleaning device of the above-mentioned embodiment, the coating solution remaining at the tip of the coating nozzle after several times of use is cleaned from the tip of the coating nozzle, Cleaning the coating tube by moving the first cleaning member and the first front end surface cleaning member in a state where a part of the coating liquid has been removed are moved along the longitudinal direction of the front end portion of the coating nozzle in a state where the coating liquid remains. After the front end of the nozzle, make the aforementioned 2nd cleaning member and the 2nd front end face cleaning member relative to the front end of the aforementioned coating nozzle to which the coating liquid remaining on the 1st cleaning member or the 1st front end face cleaning member adheres. The state in which the front end of the coating nozzle is moved in the direction opposite to the first cleaning member and the first front end surface cleaning member in the longitudinal direction to clean and remove the coating liquid remaining on the front end of the coating nozzle, (A) It is a schematic explanatory diagram showing a state in which the first cleaning member and the first front end surface cleaning member are moved toward the front end portion of the coating nozzle in a state where the coating liquid remains, and (B) is a diagram showing a state in which the first cleaning member is moved When the cleaning member and the first front end surface cleaning member move along the front end portion of the coating nozzle to clean and remove the coating liquid remaining on the front end portion of the coating nozzle, there may be residues on the first cleaning member or the first front end surface. The schematic explanatory drawing of the state where the coating solution of the cleaning member adheres and remains on the front end of the coating nozzle, (C) shows that the second cleaning member and the second front end surface cleaning member are directed toward the first cleaning member and the second cleaning member. 1 is a schematic explanatory diagram of a state in which the front end of the coating nozzle with a part of the coating liquid remaining after cleaning by the front end surface cleaning member moves in the opposite direction to the first cleaning member and the first front end surface cleaning member, and (D) shows The second cleaning member and the second front end surface cleaning member are moved along the front end portion of the coating nozzle toward the opposite direction of the first cleaning member and the first front end surface cleaning member to clean and remove the dust from the first cleaning member and the first cleaning member. 1 is a schematic explanatory diagram of the state after the front end surface cleaning member adheres to the coating liquid at the front end portion of the coating nozzle.
以下,根據所附圖面來具體說明本發明之實施形態的塗布用管嘴的清掃裝置。此外,本發明之塗布用管嘴的清掃裝置並不限於以下實施形態所示者,而可在不變更發明之要旨的範圍當中適當變更來實施。 Hereinafter, a cleaning device for a coating nozzle according to an embodiment of the present invention will be specifically described based on the attached drawings. In addition, the cleaning device of the coating nozzle of this invention is not limited to what is shown in the following embodiment, It can change suitably in the range which does not change the gist of invention, and can implement.
在此,該實施形態當中是如第1圖所示,將玻璃板等被塗布體W裝設在桌上型塗布機10當中的工作台11上方,將塗布用管嘴20安裝在沿著行進用軌道12於以上述方式裝設的被塗布體W上方行進的行進構件13,並藉由該行進構件13使塗布用管嘴20在前述被塗布體W上方行進。 Here, in this embodiment, as shown in FIG. 1 , the object to be coated W such as a glass plate is installed above the table 11 in the
接下來,使塗液x從該塗布用管嘴20吐出至被塗布體W的表面而將塗液x塗布在被塗布體W的表面。 Next, the coating liquid x is discharged onto the surface of the object W to be coated from the
在此,如前所述利用塗布用管嘴20在被塗布體W的表面塗布塗液x時,如第2圖所示,就塗布用管嘴20而言是使用:在朝向與塗布用管嘴20之行進方向正交的方向延伸且與前述被塗布體W相對向的細長的前端面21,設有將塗液x吐出至被塗布體W的表面的狹縫狀之吐出口22,並且在該前端面21 的兩側設有朝向上方擴展成斜面狀之形成V字狀的唇弓斜面23,而使前端部形成大致V字狀者。 Here, when using the
接下來,將收容在塗液供給容器(未圖示)的塗液x供給至設在該塗布用管嘴20之內部的歧管24,並使供給至該歧管24的塗液x通過引導路25而予以引導至設在塗布用管嘴20的前端面21的前述形成狹縫狀的吐出口22,然後使塗液x從該吐出口22吐出至被塗布體W的表面而將塗液x塗布在被塗布體W的表面。 Next, the coating liquid x contained in the coating liquid supply container (not shown) is supplied to the manifold 24 provided inside the
接下來,如前所述使塗液x從設在塗布用管嘴20的前端面21的狹縫狀之吐出口22吐出至被塗布體W的表面,同時藉由行進構件13使塗布用管嘴20在前述被塗布體W上方行進,如第3圖所示,將塗液x塗布在被塗布體W的整個表面。 Next, the coating liquid x is discharged from the slit-shaped
又,前述桌上型塗布機10當中,在如前所述使塗液x從設在塗布用管嘴20的前端面21的狹縫狀之吐出口22吐出至被塗布體W的表面,同時使塗布用管嘴20行進而將塗液x塗布在被塗布體W的整個表面的情況,如第4圖(A)、(B)所示,從吐出口22吐出的一部分塗液x會附著並殘留在塗布用管嘴20的前端部。 Also, in the above-mentioned
因此,將用來去除殘留在將塗液x塗布在被塗布體W的表面之後的塗布用管嘴20的前端部的塗液x來清掃塗布用管嘴20的前端部的本實施形態的清掃裝置30,設置在比使塗布用管嘴20行進而將塗液x塗布在被塗布體W後的被塗布體W的位置更靠塗布用管嘴20的行進方向下游側的工作台11上方。 Therefore, the cleaning of this embodiment is to remove the coating liquid x remaining at the tip of the
在此,在該清掃裝置30當中,是在比被塗布體W更靠塗布用管嘴20的行進方向下游側的工作台11上方設置朝向與前述行進方向正交的方向延伸的引導軌道31,並且在往復移動於該引導軌道31上方的清掃用移動台32上方,以在塗布用管嘴20的行進方向隔著所需間隔的方式設置第1清掃構件33及第2清掃構件34來作為用來去除殘留在塗布用管嘴20的前端部的塗液x的清掃構件,且在前述第1清掃構件33及第2清掃構件34分別設置具有與前述塗布用管嘴20的前端部的形狀對應的形狀的切口的清掃用刮除部33a、34a,並且使前述第1清掃構件33及第2清掃構件34分別在塗布用管嘴20的長邊方向也就是在使清掃用移動台32往復移動的方向當中朝反方向傾斜而設置。此外,該清掃裝置30當中是使第1清掃構件33及第2清掃構件34分別朝在清掃塗布用管嘴20的前端部時所移動的方向傾斜。 Here, in the
又,在此,就清掃用刮除部33a、34a而言,雖是以設有與塗布用管嘴20的前端部的形狀對應的切口的一體型構件來說明,但是亦可分別利用其他的構件(未圖示)來刮除塗布用管嘴20的前端部之形成V字狀的唇弓斜面23的左右的斜面。 Also, here, with regard to the cleaning
又,在前述清掃裝置30當中,為了將殘留在從狹縫狀之吐出口22使塗液x塗布於被塗布體W的表面之後的塗布用管嘴20的前端面的塗液x確實去除來清掃塗布用管嘴20的前端部,係在與如前所述傾斜的第1清掃構件33的傾斜方向為相反側的位置,以朝向與第1清掃構件33相同的方向傾斜之方式設置清掃設有吐出口22的塗布用管嘴20的前端面21的第1前端面清掃構件35,並且在與第2清掃構件34的傾斜方向為相反側的位置,以朝向與第2清掃 構件34相同的方向傾斜之方式設置清掃設有吐出口22的塗布用管嘴20的前端面21的第2前端面清掃構件36。 In addition, in the
在此,在將如前所述殘留在將塗液x塗布在被塗布體W的表面之後的塗布用管嘴20的前端部的塗液x,利用前述清掃裝置30從塗布用管嘴20的前端部去除來清掃塗布用管嘴20的前端部時,首先如第5圖所示,將有塗液x殘留在對被塗布體W的表面進行塗布之後的前端部的狀態的塗布用管嘴20,引導至設在前述清掃裝置30當中的清掃用移動台32上方的第1清掃構件33,並且將塗布用管嘴20的前端部嵌入設在第1清掃構件33的清掃用刮除部33a。 Here, the coating liquid x remaining on the front end portion of the
接下來,在如此將塗布用管嘴20的前端部嵌入設在第1清掃構件33的清掃用刮除部33a內的狀態下,如第6圖(A)、(B)所示,使前述第1清掃構件33當中的清掃用刮除部33a及第1前端面清掃構件35的前端面與前述塗布用管嘴20的前端部接觸,並使前述清掃用移動台32從塗布用管嘴20的長邊方向一端側朝第1清掃構件33及第1前端面清掃構件35的傾斜方向行進至塗布用管嘴20的長邊方向另一端側,而利用前述第1清掃構件33及第1前端面清掃構件35將殘留在塗布用管嘴20的前端部的塗液x從塗布用管嘴20的前端部去除。此外,如此利用第1清掃構件33及第1前端面清掃構件35將殘留在塗布用管嘴20的前端部的塗液x去除時,在前述塗液x的黏度高的情況,有時會發生從塗布用管嘴20的前端部被去除的一部分塗液x附著在第1清掃構件33或第1前端面清掃構件35,或是有一部分塗液x局部殘留在塗布用管嘴20的前端部等情形。 Next, in the state where the front end portion of the
接下來,將如前所述使清掃用移動台32行進至塗布用管嘴20的長邊方向另一端側而利用第1清掃構件33及第1前端面清掃構件35從塗布用 管嘴20的前端部去除塗液x之後的塗布用管嘴20,如第7圖所示,從設在前述清掃用移動台32上方的第1清掃構件33的位置移動至第2清掃構件34的位置,然後將該塗布用管嘴20的前端部嵌入設在第2清掃構件34的清掃用刮除部34a內。 Next, move the cleaning moving table 32 to the other end side of the
接下來,在如此將塗布用管嘴20的前端部嵌入設在第2清掃構件34的清掃用刮除部34a內的狀態下,如第8圖(A)、(B)所示,使前述第2清掃構件34當中的清掃用刮除部34a及第2前端面清掃構件36的前端面與前述塗布用管嘴20的前端部接觸,使前述清掃用移動台32朝反方向行進而從先前移動後的塗布用管嘴20的長邊方向另一端側朝向第2清掃構件34及第2前端面清掃構件36的傾斜方向回到塗布用管嘴20的長邊方向一端側,並利用前述第2清掃構件34及第2前端面清掃構件36將殘留在塗布用管嘴20的前端部的塗液x從塗布用管嘴20的前端部去除。如此,在將殘留有塗液x的塗布用管嘴20的前端部利用第1清掃構件33及第1前端面清掃構件35清掃之後,再利用第2清掃構件34及第2前端面清掃構件36清掃,則塗布用管嘴20的前端部當中的塗液x可充分被去除。 Next, in the state where the front end portion of the
又,在如前所述對殘留有塗液x的塗布用管嘴20的前端部進行複數次清掃的情況,當有如前所述利用第1清掃構件33及第1前端面清掃構件35從塗布用管嘴20的前端部去除的一部分塗液x附著並蓄積在第1清掃構件33或第1前端面清掃構件35,且蓄積在第1清掃構件33及第1前端面清掃構件35的塗液x的量逐漸增加而變多時,則如第9圖(A)、(B)所示,在使第1清掃構件33當中的清掃用刮除部33a及第1前端面清掃構件35的前端面與塗布用管嘴20的前端部接觸,且使清掃用移動台32從塗布用管嘴20的長邊方向一端側行進 至塗布用管嘴20的長邊方向另一端側,並利用前述第1清掃構件33及第1前端面清掃構件35將殘留在塗布用管嘴20的前端部的塗液x從塗布用管嘴20的前端部去除時,蓄積在第1清掃構件33或第1前端面清掃構件35的塗液x會再度附著於塗布用管嘴20的前端部,以致殘留在塗布用管嘴20的前端部的塗液x的量變多。因此,若直接在這樣的狀態下使用這種塗布用管嘴20來進行塗工,就會發生塗工不良。 Also, in the case where the front end portion of the
又,在第9圖(A)使第1清掃構件33當中的清掃用刮除部33a及第1前端面清掃構件35的前端面與塗布用管嘴20的前端部接觸時,如該圖面所示,蓄積在第1清掃構件33或第1前端面清掃構件35的塗液x有時會再度附著於清掃用移動台32的行進方向上游側,而就這樣殘留在塗布用管嘴20的前端面21及唇弓斜面23。 Again, in Fig. 9 (A), when making the cleaning
相對於此,本實施形態當中是如前所述,使利用第1清掃構件33及第1前端面清掃構件35清掃之後的塗布用管嘴20移動至第2清掃構件34的位置,並且如第9圖(C)、(D)所示,使第2清掃構件34當中的清掃用刮除部34a及第2前端面清掃構件36的前端面與前述塗布用管嘴20的前端部接觸,然後使清掃用移動台32朝反方向行進而從先前移動後的塗布用管嘴20的長邊方向另一端側朝向第2清掃構件34及第2前端面清掃構件36的傾斜方向回到塗布用管嘴20的長邊方向一端側,因此可利用前述第2清掃構件34及第2前端面清掃構件36將附著並殘留在塗布用管嘴20的前端面21或唇弓斜面23的前述塗液x從塗布用管嘴20的前端部充分去除。 On the other hand, in the present embodiment, as described above, the
結果,即使在蓄積於第1清掃構件33或第1前端面清掃構件35的塗液x再度附著於塗布用管嘴20的前端部,以致殘留在塗布用管嘴20的前 端部的塗液x的量變多的情況,也可確實去除塗布用管嘴20的前端部當中的塗液x而充分清掃塗布用管嘴20的前端部。 As a result, even if the coating liquid x accumulated in the
此外,在使塗布用管嘴20從第1清掃構件33移動至第2清掃構件34的位置時,本實施形態是使塗布用管嘴20昇降、移動,而雖然操作麻煩,但亦可使第1清掃構件33或第2清掃構件34移動。 In addition, when moving the
又,前述實施形態說明的雖然是在將塗液x塗布在被塗布體W的表面之後再清掃塗布用管嘴20的前端部,但是在連續進行此動作的情況,亦可在將塗液x塗布於被塗布體W的表面之前清掃塗布用管嘴20的前端部。 Also, although the foregoing embodiment has been described as cleaning the front end of the
20‧‧‧塗布用管嘴 20‧‧‧Nozzle for coating
21‧‧‧前端面 21‧‧‧front face
23‧‧‧唇弓斜面 23‧‧‧Lip arch slope
31‧‧‧引導軌道 31‧‧‧guiding track
32‧‧‧清掃用移動台 32‧‧‧Mobile platform for cleaning
33‧‧‧第1清掃構件 33‧‧‧The first cleaning member
34‧‧‧第2清掃構件 34‧‧‧The second cleaning member
35‧‧‧第1前端面清掃構件 35‧‧‧The first front cleaning member
36‧‧‧第2前端面清掃構件 36‧‧‧The second front cleaning member
x‧‧‧塗液 x‧‧‧coating solution
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TW201718102A (en) * | 2015-08-18 | 2017-06-01 | 東京應化工業股份有限公司 | Cleaning member, coating apparatus and coating method |
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TW202005719A (en) | 2020-02-01 |
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KR20200103817A (en) | 2020-09-02 |
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