KR101328730B1 - Slit Coater - Google Patents

Abstract

Start the slit coater.
The slit coater includes a work table on which a substrate is placed, a nozzle lip on which the chemical liquid is discharged, a slit nozzle portion formed to apply the chemical liquid to a substrate placed on the work table side, and a nozzle lip on the work table. A transfer part having a fixed block formed to move along the longitudinal direction, and a plurality of blades disposed in a state capable of scraping off the chemical liquid on the outer surface of the nozzle lip while moving along the fixed block of the transfer part; The blades corresponding to both side surfaces of the nozzle lip in the width direction of the plurality of blades may include a chemical liquid removing part having a guide end formed to guide the chemical liquid removing direction.

Description

Slit Coater {Slit Coater}

The present invention relates to a slit coater for use in the work of applying various chemical liquids to the substrate side.

In the substrate manufacturing process for flat panel display elements, various chemical liquids are applied to the substrate side, and among the apparatuses used for the chemical liquid application, there is a slit coater.

The slit coater has a slit nozzle portion in which the nozzle lip to which the chemical liquid is discharged is formed in a slit type and is formed to sequentially apply the chemical liquid from one side of the substrate toward the other side.

The slit coater should be able to uniformly apply the chemical to the substrate, in particular, it is important to proceed with the application in a state in which all the chemical liquid on the nozzle lip portion of the slit nozzle after removing the chemical on the substrate side.

As such a slit coater having a structure capable of removing the chemical liquid on the nozzle lip, there is a slit coater having a cleaning device of Patent No. 10-0897240, which was filed and registered in 2007 by the present applicant.

The slit coater equipped with the cleaning device of Patent No. 10-0897240 has a clean, suction and dry atmosphere while injecting a cleaning fluid between the moving blocks disposed on both sides with the nozzle lip of the slit nozzle interposed therein and generating suction force. It is provided with the washing | cleaning means which can wash | clean a lip (chemical liquid removal).

However, the method of cleaning the nozzle lip using the cleaning fluid as described above requires additional fluid lines and driving sources for injecting and suctioning the fluid, which is complicated in structure and excessively expensive to manufacture and maintain. There are disadvantages.

Furthermore, if the cleaning operation is performed in a wet manner in which the cleaning fluid is injected and suctioned as described above, the cleaning fluid may be reduced while the cleaning fluid (liquid) may be splashed irregularly during the cleaning operation. Since it is difficult to fundamentally prevent the occurrence of secondary contamination by (liquid), satisfactory cleaning reliability and operational stability cannot be expected.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems occurring in the prior art,

An object of the present invention, in particular, to provide a slit coater having a structure that can be easily removed by directly removing the chemical liquid buried around the nozzle lip (Nozzle Lip).

In order to realize the object of the present invention as described above,

A work table on which the substrate is placed;

A slit nozzle unit having a nozzle lip for discharging the chemical liquid and formed to apply the chemical liquid to the substrate placed on the work table side;

A conveying part having a fixed block formed to move along the nozzle lip longitudinal direction of the slit nozzle part on the work table;

A plurality of blades disposed in a state capable of scraping off the chemical liquid on the outer surface of the nozzle lip while moving along the fixed block of the transfer part, and corresponding to both side surfaces of the nozzle lip in the width direction among the plurality of blades; The blade is a chemical liquid removal unit formed with a guide end to guide the chemical liquid removal direction;

It provides a slit coater comprising a.

The present invention can proceed with the chemical liquid application to the substrate side by the slit (slit) coating method using the slit nozzle portion, in particular by removing the method by scraping off the chemical liquid irregularly around the nozzle lip of the slit nozzle portion. Since the transfer part and the chemical liquid removing unit are formed to be able to remove the chemical liquid buried around the nozzle lip more easily and stably.

1 and 2 are diagrams schematically showing the overall structure of the slit coater according to an embodiment of the present invention.
3 to 6 are views for explaining the detailed structure and operation of the slit coater according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

The embodiments of the present invention will be described by those skilled in the art to which the present invention is applicable.

Therefore, the embodiments of the present invention can be modified into various other forms, so that the claims of the present invention are not limited by the embodiments described below.

1 and 2 are diagrams schematically showing the overall structure of the slit coater according to an embodiment of the present invention, Figures 3 to 5 illustrate the detailed structure and operation of the slit coater according to an embodiment of the present invention For reference, reference numeral 2 denotes a work table and reference numeral 4 denotes a slit nozzle part.

1 and 2, the work table 2 may be provided in the form of a table having a work surface A on which the substrate G is placed, as shown in FIG. 1.

The working surface A is formed so that one surface of both surfaces of the substrate G may be placed in a flat state while being supported.

Although the work table 2 is not shown in the drawings, the substrate G placed on the work surface A may be moved from one side to the other side in, for example, a conventional conveyor transfer method or a floating transfer method. It may be provided in a structure that can be transported.

The slit nozzle part 4 is formed on the substrate G so as to apply various chemical liquids W such as a photoresist by a slit coating method.

The slit nozzle part 4 has a nozzle lip (N) formed with a nozzle N1 through which the chemical liquid W is discharged, and has a slit type extending to a length corresponding to the size of the substrate G. Is formed.

That is, the slit nozzle portion 4 has a slit from one side to the other side while forming a shape in which both sides of the width direction of the nozzle lip N gradually become downward as shown in FIGS. 1 and 2. It may be provided in a structure extending in the form.

The slit nozzle part 4 may be set on the work table 2 to have a transfer structure capable of applying the chemical liquid W to the substrate G side by a slit coating method while moving from one side of the substrate G to the other side. Can be.

For example, the slit nozzle portion 4 is fixed to the gantry (B, gantry) side installed to be movable toward the other side from one side of the work surface (A) of the work table 2, as shown in Figs. It can be provided in a structure that can be moved in the application direction by the gantry (B) on the work table (2).

And, when the slit nozzle portion 4 is installed on the gantry (B) side, for example, moving along the rail (B1) as shown in Figs. 1 and 2, the working surface (A) of the work table (2) It may be provided in a structure capable of moving in the vertical direction toward ().

Although not shown in the drawings, the gantry B may be formed in a conventional structure that moves along a rail such as an LM guide by receiving power from a driving source such as a motor or a cylinder.

Then, the slit nozzle unit 4 is moved from one side of the working surface A toward the other side by the movement of the gantry B on the work table 2 as shown in FIG. The chemical liquid W can be uniformly applied to G).

In the above description, the structure in which the slit nozzle portion 4 is applied and the chemical liquid W is applied by the gantry B installed on the work table 2 is illustrated in the description and drawings as an example, but the present invention is limited to such a structure. It doesn't happen.

For example, although not shown in the drawing, the substrate G placed on the work surface A while the slit nozzle portion 4 is fixed to one side of the work table 2 is a conventional conveyor transfer method or floating. When moving in the state passing through the installation point of the slit nozzle portion 4 by the transfer method may be provided in a structure in which the application of the chemical liquid (W) is made by the slit coating method.

On the other hand, the slit coater according to an embodiment of the present invention, the chemical liquid removal unit 6 and the transfer unit for removing the chemical liquid (W) buried on the nozzle lip (N) side of the slit nozzle portion 4 ).

Particularly, the chemical liquid removing unit 6 and the transfer unit 8 adhere to the outer surface of the nozzle lip N when the coating operation is performed while discharging the chemical liquid W to the slit nozzle unit 4. It is formed so that it can be removed by scraping (W) directly.

The chemical liquid removing unit 6 may be installed at one side of the work table 2 so as to correspond to the moving section of the slit nozzle unit 4 as shown in FIGS. 1 and 2, for example. Then, the chemical liquid (W) removal operation may be performed while the slit nozzle portion 4 is moved toward the chemical liquid removing unit 6 on the work table 2.

4 to 6, the chemical liquid removing unit 6 may include a blade, and the blade may be installed at one or more points to correspond to the nozzle lip N of the slit nozzle unit 4. have.

For example, as shown in FIGS. 4 and 5, the first blade C1, the second blade C2, and the end of the nozzle lip N that correspond to both side surfaces of the nozzle lip N in the width direction are formed. It may be composed of a corresponding third blade (C3).

The blades (C1, C2, C3) may be made of a thin plate shape having an elastic force, the material may be used among metals or synthetic resins excellent in durability, corrosion resistance, chemical resistance and the like.

The blades (C1, C2, C3) is set so that the other side is elastically in close contact with both sides and the end side of the width direction of the nozzle lip (N), one side is fixed to each side of the transfer section 8 to be described later.

The transfer unit 8 is provided with a fixed block (D), the fixed block (D) may be provided in a state installed on a separate support (D1) on one side of the worktable (2).

In addition, the fixing block D may be formed so that the blades C1, C2, and C3 may be fixed in a state in which position adjustment is possible toward the nozzle lip N.

For example, as shown in FIG. 4, a slot groove E is formed at one side (fixing part) of the blades C1, C2, and C3, and the fixed block D is formed in a direction penetrating the slot groove E. Fasten the tightening screw (E1) on the side) to properly adjust the position of the blades (C1, C2, C3) in the longitudinal direction of the slot groove (E) by the operation of tightening or loosening the tightening screw (E1). Can be.

The blades C1, C2, and C3 may be installed on the fixed block D in a state where they are mounted on quick shoes D1.

The quick shoe (D1) is the free end of the blade (C1, C2, C3) on the fixed block (D) side elastically in close contact with both sides and ends of the nozzle lip (N) in the width direction of the slit nozzle portion (4) It serves to hold one side of the blade (C1, C2, C3) in a state capable of guiding.

The fixed block (D) is provided in a structure that is movable to move the blades (C1, C2, C3) along the longitudinal direction of the nozzle lip (N) of the slit nozzle portion (4) on the work table (2).

For example, as shown in FIG. 6, the fixing block D may be movable on a transport rail D3 disposed to correspond to the longitudinal direction of the nozzle lip N under the slit nozzle part 4. Can be.

In addition, although not shown in the drawing, the fixed block D may be set to move along the transfer rail D3 by receiving the power of a driving source such as a motor or a cylinder in a conventional manner.

If the fixed block (D) is provided in a structure moving along the transfer rail (D3) as described above, the chemical liquid (W) buried on both sides of the nozzle lip (N) in the width direction of the slit nozzle portion 4 is the first and The second blades C1 and C2 may be scraped off and the chemical liquid W buried at the end of the nozzle lip N may be scraped off by the third blade C3.

Therefore, the chemical liquid removing unit 6 can easily remove the chemical liquid W, which is buried on the outer surface of the nozzle lip N, by directly scraping off the three blades C1, C2, and C3. have.

The blades C1, C2, and C3 may be set to be spaced apart from each other in the advancing direction when the chemical liquid W is removed while moving together with the fixed block D.

For example, referring to FIG. 4, the first and second blades C1 and C2 corresponding to both side surfaces in the width direction of the nozzle lip N may correspond to the ends of the nozzle lip N, respectively. 3 Can be installed so that the blade (C3) is placed in the rear. The first and second blades C1 and C2 may also be installed in a state in which the first and second blades C1 and C2 are spaced apart from each other before and after.

Then, the chemical liquid W buried on both side surfaces in the width direction among the outer surfaces of the nozzle lip N is first rolled out by the first and second blades C1 and C2 and then the third blade C3 by the third blade C3. The chemical liquid W can be removed by removing the chemical liquid W buried at the end of the nozzle lip N.

According to this effect, during the chemical liquid W removal operation, in particular, the phenomenon in which the chemical liquid W, which has been buried on both sides in the width direction of the nozzle lip N, is pushed to the end of the nozzle lip N (secondary contamination). ) Can be prevented.

In addition, the chemical liquid removing unit 6 is formed to have a blade structure capable of more smoothly scraping off the chemical liquid W from the outer surface of the nozzle lip N of the slit nozzle unit 4.

In particular, the first blade (C1) and the second blade (C2) can be separated and removed in a state that the chemical liquid (W) buried on both sides in the width direction from the outer surface of the nozzle lip (N) is pushed downward. Guide end (H) is formed on the free end side to guide easily.

Referring back to FIG. 4, the guide end H may be provided in a state of forming a circumferential portion that is inclined at the free ends of the first blade C1 and the second blade C2.

That is, as shown in FIG. 6, the guide end H moves toward the lower portion of the nozzle lip N when the first blade C1 and the second blade C2 are scratched while moving in a horizontal direction. The free ends of the first and second blades C1 and C2 are formed to form end portions in the inclined state so as to be able to roll out W).

For example, when the guide end H is based on FIGS. 4 and 6, an end portion of the connected state in which the free end upper and lower edges of the first and second blades C1 and C2 are inclined. It can be formed to achieve. That is, the free end upper edges of the first and second blades C1 and C2 are provided in an end structure in a state located further forward than the lower edges.

The guide end H may further include a departure prevention groove H1.

The release preventing groove H1 may, in particular, lift an upper portion of the nozzle lip N when the chemical liquid W of the nozzle lip N is removed by the first blade C1 and the second blade C2. The chemical liquid W is formed to be prevented from moving toward.

For example, the separation preventing groove H1 may be formed in a groove shape as shown in FIG. 6 on the guide end H.

The separation prevention groove H1 is a portion of the chemical liquid W along the inclined portion of the guide end H when the chemical liquid W is rolled out by the first blade C1 and the second blade C2. Even if it moves up to the inside of the groove (W) to act as a solution to stay together.

Therefore, according to the structure of the guide end (H), the nozzle lip (N) as shown in Figure 6 when scraping off the chemical liquid (W) with the first blade (C1) and the second blade (C2) Toward the bottom of the chemical liquid (W) can be removed to be stably moved and separated.

In the above, while the slit nozzle portion 4 on the work table (2) is moved by the gantry (B) while moving to a position corresponding to the chemical liquid removing portion 6 as shown in the description and drawings as an example, The invention is not limited to this structure.

For example, although not shown in the drawings, the chemical liquid removing unit 6 may be formed to have a structure in which the chemical liquid W is moved toward the slit nozzle unit 4 in a state where the chemical liquid W can be removed.

And, the chemical liquid removal unit 6, as shown in Figure 4 may further comprise a contact control opening (F) corresponding to the blade (C1, C2, C3).

The contact control opening (F) is formed so as to adjust the contact force when the free end of the blade (C1, C2, C3) is in contact with the outer surface of the nozzle lip (N).

The contact control mechanism (F) may be provided in a structure capable of adjusting the contact force by the screw adjustment method.

For example, the contact control device (F) can be used for the screw, as shown in Figure 4 is fitted into the screw coupling on the fixed block (D) side of the transfer section 8, respectively, the ends of the blade (C1, C2) , C3) may be set to be in contact with one side.

Then, the contact force may be adjusted by pushing one side of the first to third blades C1, C2, and C3 to the screw end by the forward and reverse rotation operation of the contact control device F.

If the contact control device (F) is further provided as described above, the first to third blades (C1, C2, C3) can be properly removed according to the amount or state of the chemical liquid (W) buried in the nozzle lip (N). You can proceed to remove the chemical (W) in a state of adjusting and setting the contact force of) easily.

The slit coater according to an embodiment of the present invention, may further comprise a chemical solution portion 10.

The chemical liquid solution part 10 provides a structure in which the chemical liquid W buried in the nozzle lip N of the slit nozzle part 4 can be separated more smoothly from the outer surface of the nozzle lip N. do.

In particular, the chemical liquid solution part 10 is formed to melt the chemical liquid W of the nozzle lip N so that the chemical liquid W can be separated smoothly during the operation of the chemical liquid removing part 6.

Referring back to FIG. 4, the chemical liquid solvent part 10 includes an injector T for injecting a solvent T1, and the injectors T are, for example, the fixed block D as shown in the drawing. At least one side may be installed so as to spray the solvent (T1) toward the outer surface of the nozzle lip (N).

Although not shown in the drawings, the injectors T are set to be sprayed by receiving the solvent T1 in a conventional manner, and the solvent T1 may use thinners.

The chemical liquid solution part 10 is an outer surface of the nozzle lip N before removing the chemical liquid W of the nozzle lip N with the blades C1, C2, C3 of the chemical liquid removing part 6. Since the chemical liquid (W) can be melted by spraying the solvent (T1) toward the surface, the chemical liquid (W) can be more smoothly scraped off by the blades (C1, C2, C3).

Although not shown in the drawings on the work table 2, for example, cleaning formed to clean and dry the blades C1, C2, and C3 of the chemical removing unit 6 by spraying and suctioning a fluid. You can also install more spheres.

Then, even if the chemical liquid (W) is stuck to the blade (C1, C2, C3) side during the removal of the chemical liquid (W), the blades (C1, C2, C3) can be easily cleaned and dried.

Therefore, the slit coater according to an embodiment of the present invention, not only can apply the chemical liquid (W) to the substrate (G) side using the slit nozzle portion 4 on the work table (2), Although a portion of the chemical liquid W is applied to the outer surface of the nozzle lip N of the slit nozzle portion 4 during the coating operation, the chemical liquid W is formed using the blades C1, C2, and C3 of the chemical liquid removing portion 6. It can be easily removed by scraping it off.

In particular, the present invention, when scraping the chemical liquid (W) of the outer surface of the nozzle lip (N) with the blades (C1, C2, C3) of the chemical liquid removal unit 6, the chemical liquid (W) is the nozzle lip (N) Since the guide end (H) is formed to guide the direction of removal of the chemical liquid (W) so that it can be stably moved and separated toward the lower part, the chemical liquid (W) can be further removed, and the chemical liquid ( Secondary contamination of the nozzle lip N caused by W) can also be prevented.

2: work table 4: slit nozzle part 6: chemical removing part
8: transfer part 10: chemical liquid part G: substrate
W: chemical liquid C1: first blade C2: second blade
C3: third blade

Claims (6)

A work table on which the substrate is placed;
A slit nozzle unit having a nozzle lip for discharging the chemical liquid and formed to apply the chemical liquid to the substrate placed on the work table side;
A conveying part having a fixed block formed to move along the nozzle lip longitudinal direction of the slit nozzle part on the work table;
A plurality of blades disposed in a state capable of scraping off the chemical liquid on the outer surface of the nozzle lip while moving along the fixed block of the transfer part, and corresponding to both side surfaces of the nozzle lip in the width direction among the plurality of blades; The blade is a chemical liquid removal unit formed with a guide end to guide the chemical liquid removal direction;
Including;
The plurality of blades,
One end is fixed to each side of the fixing block side is provided with a free end on the other side of the slit nozzle portion is installed in a state that can contact the nozzle lip width direction side and the nozzle lip end. delete The method according to claim 1,
The guide group,
When the blade is scraped along the longitudinal direction of the nozzle lip between the free edge upper edge and the lower edge of the blade so that the chemical liquid buried in the widthwise side of the nozzle lip can be pushed out gradually downwardly. Slit coater, characterized in that formed to form the end of the inclined connection state. The method according to claim 1,
The guide end further includes a departure prevention groove,
The departure prevention groove,
Slit coater, characterized in that formed on the side of the guide end so that the chemical liquid which is moved upward when collecting the chemical liquid of the width direction side of the nozzle lip to the guide end. The method according to claim 1,
The slit nozzle further comprises a contact control device,
The contact control device,
Slit coater is installed on the fixed block side of the transfer unit is set to adjust the free end contact force of the blade by pushing the one side of the blade while moving in the forward and backward direction during forward and reverse rotation. The method according to claim 1,
The slit coater further comprises a chemical solution portion,
The chemical liquid solvent portion,
And an injector capable of injecting a solvent, wherein the injector is set to inject the solvent into the injector toward the outer surface of the nozzle lip of the slit nozzle unit.

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