JP2017201045A5 - - Google Patents
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- Publication number
- JP2017201045A5 JP2017201045A5 JP2016033893A JP2016033893A JP2017201045A5 JP 2017201045 A5 JP2017201045 A5 JP 2017201045A5 JP 2016033893 A JP2016033893 A JP 2016033893A JP 2016033893 A JP2016033893 A JP 2016033893A JP 2017201045 A5 JP2017201045 A5 JP 2017201045A5
- Authority
- JP
- Japan
- Prior art keywords
- titanium oxide
- oxide layer
- semiconductor electrode
- conductive titanium
- oxynitride film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 17
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims 17
- 239000004065 semiconductor Substances 0.000 claims 14
- 229910052758 niobium Inorganic materials 0.000 claims 11
- 239000010955 niobium Substances 0.000 claims 11
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims 10
- 230000003287 optical effect Effects 0.000 claims 7
- 239000007788 liquid Substances 0.000 claims 6
- 238000000034 method Methods 0.000 claims 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 5
- 239000001257 hydrogen Substances 0.000 claims 5
- 229910052739 hydrogen Inorganic materials 0.000 claims 5
- 239000000126 substance Substances 0.000 claims 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000004544 sputter deposition Methods 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 239000007864 aqueous solution Substances 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 229910052793 cadmium Inorganic materials 0.000 claims 1
- 239000003792 electrolyte Substances 0.000 claims 1
- 239000008151 electrolyte solution Substances 0.000 claims 1
- 229910052740 iodine Inorganic materials 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 229910000484 niobium oxide Inorganic materials 0.000 claims 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 238000005477 sputtering target Methods 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 229910052727 yttrium Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016033893A JP6578989B2 (ja) | 2016-02-25 | 2016-02-25 | 光半導体電極 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016033893A JP6578989B2 (ja) | 2016-02-25 | 2016-02-25 | 光半導体電極 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017201045A JP2017201045A (ja) | 2017-11-09 |
| JP2017201045A5 true JP2017201045A5 (https=) | 2018-08-16 |
| JP6578989B2 JP6578989B2 (ja) | 2019-09-25 |
Family
ID=60264615
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016033893A Active JP6578989B2 (ja) | 2016-02-25 | 2016-02-25 | 光半導体電極 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6578989B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10162278B2 (en) * | 2017-02-28 | 2018-12-25 | Canon Kabushiki Kaisha | Electrophotographic photosensitive member, process cartridge and electrophotographic apparatus |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011204667A (ja) * | 2010-03-04 | 2011-10-13 | Sumitomo Chemical Co Ltd | 酸化チタン系透明導電性基板の製造方法 |
| WO2012090390A1 (ja) * | 2010-12-28 | 2012-07-05 | パナソニック株式会社 | 光半導体およびその製造方法、並びに、光半導体デバイス、光触媒、水素生成デバイスおよびエネルギーシステム |
| US9353449B2 (en) * | 2011-08-02 | 2016-05-31 | Panasonic Intellectual Property Management Co., Ltd. | Method for producing NbON film |
| JP2015227503A (ja) * | 2014-05-09 | 2015-12-17 | パナソニックＩｐマネジメント株式会社 | 水を分解することによって水素を発生させる方法、ならびにそのために用いられる光電気化学セルおよび半導体電極 |
-
2016
- 2016-02-25 JP JP2016033893A patent/JP6578989B2/ja active Active
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