JP2017195266A - ガス供給配管構造を有する加熱ヒータ - Google Patents
ガス供給配管構造を有する加熱ヒータ Download PDFInfo
- Publication number
- JP2017195266A JP2017195266A JP2016084283A JP2016084283A JP2017195266A JP 2017195266 A JP2017195266 A JP 2017195266A JP 2016084283 A JP2016084283 A JP 2016084283A JP 2016084283 A JP2016084283 A JP 2016084283A JP 2017195266 A JP2017195266 A JP 2017195266A
- Authority
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- Japan
- Prior art keywords
- flow path
- mounting table
- heater
- support member
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims abstract description 31
- 239000011261 inert gas Substances 0.000 claims abstract description 28
- 238000010438 heat treatment Methods 0.000 claims abstract description 19
- 238000007599 discharging Methods 0.000 claims abstract description 9
- 239000004065 semiconductor Substances 0.000 abstract description 21
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract description 9
- 230000003647 oxidation Effects 0.000 abstract description 6
- 238000007254 oxidation reaction Methods 0.000 abstract description 6
- 238000005260 corrosion Methods 0.000 abstract description 5
- 230000007797 corrosion Effects 0.000 abstract description 5
- 235000012431 wafers Nutrition 0.000 description 64
- 238000000034 method Methods 0.000 description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 239000012298 atmosphere Substances 0.000 description 8
- 229910001873 dinitrogen Inorganic materials 0.000 description 8
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000010926 purge Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000012299 nitrogen atmosphere Substances 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 238000005238 degreasing Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 230000001953 sensory effect Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000001694 spray drying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
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- Chemical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Abstract
Description
2 ウエハ加熱ヒータ
21 ウエハ載置台
21a ウエハ載置面
21b 抵抗発熱体
21c 端子部
22 支持部材
23 引出線
24 導入流路
25 排出流路
26 2重配管構造
W 半導体ウエハ
Claims (5)
- 被加熱物の載置面を上面に備えた載置台と、前記載置台を下側から支持する筒状の支持部材とを有する加熱ヒータであって、前記筒状支持部の内側に、不活性ガスを前記内側に導入する流路と前記内側のガスを排出する流路とが設けられており、これら2つの流路が少なくとも部分的に接して熱交換器を構成している加熱ヒータ。
- 前記2つの流路が少なくとも部分的に接する部分が2重配管構造を構成している、請求項1に記載の加熱ヒータ。
- 前記不活性ガスを導入する流路が前記2重配管構造の内側流路であり、前記内側のガスを排出する流路が前記2重配管構造の外側流路である、請求項2に記載の加熱ヒータ。
- 前記不活性ガスを導入する流路が前記2重配管構造の外側流路であり、前記内側のガスを排出する流路が前記2重配管構造の内側流路である、請求項2に記載の加熱ヒータ。
- 前記2重配管構造の内側流路と外側流路のそれぞれの先端開口部が、前記内側流路の流路方向に離間している、請求項2〜請求項4のいずれか1項に記載の加熱ヒータ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2016084283A JP6631383B2 (ja) | 2016-04-20 | 2016-04-20 | ガス供給配管構造を有する加熱ヒータ |
Applications Claiming Priority (1)
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---|---|---|---|
JP2016084283A JP6631383B2 (ja) | 2016-04-20 | 2016-04-20 | ガス供給配管構造を有する加熱ヒータ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017195266A true JP2017195266A (ja) | 2017-10-26 |
JP6631383B2 JP6631383B2 (ja) | 2020-01-15 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016084283A Active JP6631383B2 (ja) | 2016-04-20 | 2016-04-20 | ガス供給配管構造を有する加熱ヒータ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6631383B2 (ja) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011222931A (ja) * | 2009-12-28 | 2011-11-04 | Tokyo Electron Ltd | 載置台構造及び処理装置 |
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2016
- 2016-04-20 JP JP2016084283A patent/JP6631383B2/ja active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011222931A (ja) * | 2009-12-28 | 2011-11-04 | Tokyo Electron Ltd | 載置台構造及び処理装置 |
Also Published As
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JP6631383B2 (ja) | 2020-01-15 |
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