JP2017157458A - Ultraviolet irradiation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ultraviolet irradiation device that can properly cool a lamp while suppressing deterioration in uniformity of temperature distributions in a length direction on a surface of the lamp.SOLUTION: The ultraviolet irradiation device comprises: a pair of slit plates which form an opening between opposite edges opposing to each other; a lamp, arranged close to the opening, in which is provided a light-emitting tube extending in the same direction as the opposite edges of the slit plates; and a cooling mechanism that supplies cooling air to the lamp. Between both side edges of a front surface area in a light extraction direction in the light-emitting tube of the lamp and each of the opposite edges of the pair of slit plates is formed a slit extending in a length direction of the lamp, so that the cooling air is supplied by the cooling mechanism through the slit from the opposite side of the lamp, across the pair of slit plates.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an ultraviolet irradiation device including, for example, an excimer lamp as a light source.

Conventionally, in a curing process or a drying process of an ultraviolet curable ink or paint or an ultraviolet curable resin, an ultraviolet irradiation apparatus including, for example, a high pressure mercury lamp or a long arc type metal halide lamp has been used.
In such an ultraviolet irradiation device, the light emitted from the high-pressure mercury lamp or the metal halide lamp includes light other than light in the wavelength range necessary for the intended processing, for example, light in the infrared region. For example, in the resin curing process, there is a problem that light in the infrared region does not contribute to the curing of the resin, but may cause damage to the base material or material.

  In order to solve such a problem, use of a fluorescent excimer lamp capable of obtaining only light in a required wavelength range as a light source has been studied. A fluorescent excimer lamp irradiates a phosphor coated in an arc tube with light emitted from an excimer generated by a dielectric barrier discharge as excitation light, and emits light in a specific wavelength range obtained by exciting the phosphor. The configuration emits ultraviolet light as radiation. Therefore, an ultraviolet light source that selectively emits light in a wavelength region suitable for a target process can be realized by appropriately selecting a phosphor. For example, Patent Document 1 discloses a light irradiation apparatus including a fluorescent excimer lamp as a light source.

JP 2012-212576 A

Thus, although it cannot be compared with a high-pressure mercury lamp or a metal halide lamp, even in a fluorescent excimer lamp, the fluorescent excimer lamp itself generates heat and its surface temperature rises when the lamp is turned on. Since the surface temperature and temperature distribution of the lamp affect the life characteristics and the illuminance distribution, it is necessary to cool the lamp appropriately.
For example, in the light irradiation apparatus described in Patent Document 1, an outer tube made of a light transmissive material is provided on the outer periphery of the excimer lamp, and cooling formed between the outer peripheral surface of the excimer lamp and the inner peripheral surface of the outer tube. In the air passage, the air cooled by the radiator is supplied as a cooling air by a cooling fan, and the cooling air is circulated in the axial direction from one end of the excimer lamp to the other end, thereby excimer. The lamp is cooled.

  However, in such a lamp cooling method, the temperature distribution in the length direction on the surface of the excimer lamp becomes non-uniform. Specifically, the one end side portion of the lamp into which the cooling air is introduced is sufficiently cooled by the cooling air and the temperature is lowered. On the other hand, the other end portion of the lamp from which the cooling air is discharged contributes to the cooling of the lamp and the high-temperature cooling air is circulated, so that a sufficient cooling effect cannot be obtained. The temperature becomes higher than that of the one end side portion. In this way, when the temperature distribution in the lamp length direction becomes non-uniform, the discharge characteristics of excimer discharge and the light emission characteristics due to the temperature characteristics of the phosphor partially change, resulting in an influence on the illumination distribution of ultraviolet light. It will be.

  The present invention has been made based on the circumstances as described above, and is an ultraviolet ray capable of appropriately cooling the lamp while suppressing the deterioration of the uniformity of the temperature distribution in the length direction on the lamp surface. An object is to provide an irradiation apparatus.

An ultraviolet irradiation device of the present invention includes a pair of slit plates that form an opening between opposing edges that face each other, and an arc tube that is disposed close to the opening and extends in the same direction as the opposing edges of the slit plate. And a cooling mechanism for supplying cooling air to the lamp,
A slit extending in the lamp length direction is formed between both side edges of the front region in the light extraction direction of the arc tube of the lamp and each of the opposing edges of the pair of slit plates. Cooling air is supplied through the slit from the opposite side of the lamp across the slit plate.

  In the ultraviolet irradiation device of the present invention, it is preferable that at least one of the pair of slit plates is provided so as to be movable in a direction in which the slit plate is separated from or in contact with the other.

Furthermore, in the ultraviolet irradiation device of the present invention, the pair of slit plates, the inner casing in which the lamp is arranged, and an air passage surrounding the periphery of the inner casing are formed. An outer housing having a light exit opening at a position facing the slit plate;
An exhaust vent is formed in the wall facing the pair of slit plates and the lamp in the inner casing,
It is preferable that the cooling air supplied by the cooling mechanism is introduced into the inner casing through the air passage and the slit and exhausted through the exhaust air vent.

  According to the ultraviolet irradiation device of the present invention, the cooling air supplied through the slits formed between the both side edges of the front region in the light extraction direction in the arc tube of the lamp and each of the opposing edges of the pair of slit plates. Since it flows in the circumferential direction along the peripheral surface of the arc tube, the lamp can be appropriately cooled while suppressing the deterioration of the uniformity of the temperature distribution in the length direction on the lamp surface.

It is sectional drawing perpendicular | vertical to the central axis of a lamp | ramp which shows the outline of a structure in an example of the ultraviolet irradiation device of this invention. FIG. 2 is a perspective view showing a state in which a part of the ultraviolet irradiation apparatus shown in FIG. 1 is broken. It is a perspective view in the state where a part was broken showing the holding structure of a lamp. It is sectional drawing for description which shows the positional relationship of a lamp | ramp and a pair of slit board. It is explanatory drawing which shows roughly the flow of the cooling air in the inside of an inner housing | casing in case the slit width of one slit and the slit width of the other slit are the mutually same magnitude | sizes. It is explanatory drawing which shows roughly the flow of the cooling air in the inside of an inner side housing | casing in case the slit width of one slit and the slit width of the other slit are mutually different sizes.

Hereinafter, embodiments of the present invention will be described in detail.
FIG. 1 is a cross-sectional view perpendicular to the central axis of the lamp, showing an outline of the configuration of an example of the ultraviolet irradiation apparatus of the present invention. FIG. 2 is a perspective view showing a state in which a part of the ultraviolet irradiation apparatus shown in FIG. 1 is broken. In the following, for the sake of convenience, the left-right direction in FIG. 1 is referred to as “width direction”, and the direction perpendicular to the paper surface in FIG. 1 is referred to as “length direction”.
This ultraviolet irradiation device includes a light source unit 10 and a cooling unit 50 connected integrally with the light source unit 10.

  The light source unit 10 is formed by an inner casing 11 having a pair of slit plates 15 a and 15 b that form openings between opposing edges facing each other, and a pair of slit plates 15 a and 15 b inside the inner casing 11. A lamp 20 having an arc tube 21 arranged close to the opening and extending in the same direction as the opposing edges of the slit plates 15a and 15b, and an outer casing 30 forming an air passage 45 surrounding the inner casing 11. And.

The inner housing 11 includes a flat box-shaped base portion 12 and a box-shaped air tunnel portion 13 that is continuous through a step portion at the upper end of the base portion 12. The wind tunnel portion 13 has a smaller dimension in the width direction than the base body portion 12 and is located at the center in the width direction.
A prismatic support member 36 having a plurality of rollers provided on the upper surface and the outer surface is fixed to the outer surface of the step portion in the inner housing 11, and a suspension roller 37 provided on the outer surface of the support member 36. Are supported by a rail member 35 having a U-shaped cross section fixed to the upper wall of the outer casing 30, whereby the inner casing 11 is suspended from the outer casing 30 so as to be movable in the length direction. ing.

  An opening extending in the length direction is formed at the center portion in the width direction on the lower wall of the base portion 12 in the inner housing 11, and an opening is formed between the inner edges facing each other on the outer surface of the lower wall. A pair of flat slit plates 15a and 15b are provided in a state in which the inner edge protrudes inward from the opening edge of the opening in the lower wall.

Further, on the wall facing the pair of slit plates 15a, 15b and the lamp 20 in the inner casing 11, that is, on the upper wall of the wind tunnel portion 13 in the inner casing 11, exhaust of cooling air for cooling the lamp is provided. An opening for use is formed.
The exhaust opening in this example is configured by arranging a plurality of exhaust ventilation holes 14 in parallel in the length direction of the inner housing 11 at equal intervals. By adopting such a configuration, a wind regulation effect is obtained by the exhaust opening, and therefore it is possible to avoid a difference in the degree of cooling of the lamp 20 in the length direction.

The lamp 20 in this example includes a rectangular arc tube 21 having a flat cross section perpendicular to the lamp center axis, and the lamp center axis extends horizontally in the same direction as the inner edges of the pair of slit plates 15a and 15b. Have been placed. Then, slits 16a and 16b are formed between both side edges of the flat surface on the front side in the light extraction direction of the arc tube 21 and the inner edges of the pair of slit plates 15a and 15b.
The slits 16 a and 16 b are located on the outer side in the width direction from the wind tunnel portion 13 in the inner housing 11. With such a configuration, the flow of cooling air in the width direction is generated inside the inner housing 11, so that the lamp 20 can be efficiently cooled.

  The holding structure of the lamp 20 will be described in detail. As shown in FIG. 3, base members 22 are provided at both ends of the lamp 20, and a lamp holder 25 in which the base member 22 is fixed to the inner housing 11. It is fixed by holding. In FIG. 3, only the holding structure on the one end side of the lamp is shown, but the holding structure on the other end side of the lamp is the same.

  As the lamp 20, for example, light emitted from an excimer generated by dielectric barrier discharge is emitted as excitation light to the phosphor, and ultraviolet rays in a specific wavelength range obtained by the excitation of the phosphor are emitted. An excimer lamp can be used. Specifically, a xenon excimer lamp (peak wavelength: 172 nm) in which a discharge gas mainly containing xenon gas is enclosed in an arc tube can be used.

Various phosphors such as those using lanthanum phosphate as a crystal matrix, those using yttrium aluminum borate as a crystal matrix, and those using magnesium aluminate as a crystal matrix can be used as the phosphor.
For example, if La _0.75 Ce _0.25 PO ₄ (call name: LCP) activated by trivalent Ce having lanthanum phosphate as a crystal matrix is used as a phosphor, the half-value width is around 320 nm by excitation with 172 nm ultraviolet rays. Ultraviolet light having a broad emission peak can be obtained. In addition, when La _0.97 Pr _0.03 PO ₄ activated with trivalent Pr having lanthanum phosphate as a crystal matrix is used, ultraviolet light having a broad emission peak at about 230 nm can be obtained by excitation with 172 nm ultraviolet light. Can do. Further, if Y _0.997 Bi _0.003 Al ₃ B ₄ O ₁₂ activated with trivalent Bi having yttrium aluminum borate as a crystal matrix is used as a phosphor, a half-wave near 290 nm by excitation with ultraviolet light at 172 nm. Ultraviolet light having an emission peak with a wide value range can be obtained. Furthermore, when Ce _0.8 La _0.06 (Mg _0.8 Ba _0.1 ) Al ₁₁ O _18.69 activated by trivalent Ce with magnesium aluminate as a crystal matrix is used as the phosphor, the vicinity of 350 nm is excited by excitation with 172 nm ultraviolet rays. In addition, an ultraviolet ray having an emission peak with a wide half-value width can be obtained.

In this ultraviolet irradiation apparatus, it is preferable that at least one of the pair of slit plates 15a and 15b is provided so as to be movable in a direction in which the other slit plate is separated from and contacted with the other slit plate. Thereby, by adjusting the width of each slit 16a, 16b formed between the both side edges of the front region in the light extraction direction of the arc tube 21 of the lamp 20 and the inner edges of the pair of slit plates 15a, 15b. Since the flow of the cooling air can be appropriately controlled, the lamp 20 can be appropriately cooled while maintaining the uniformity of the surface temperature of the lamp 20.
As shown in FIG. 4 (b), the slit width Sa of one slit 16a and the slit width Sb of the other slit 16b are the same size as shown in FIG. 4 (a). The slit widths Sa and Sb of the two slits 16a and 16b are preferably different from each other, although the sizes may be different from each other. Thereby, the uniformity of the surface temperature of the lamp can be further increased as shown in the result of an experimental example described later. Here, the slit width refers to the closest distance between the lamp 20 and the slit plates 15a and 15b.
The movable amount of the slit plate is, for example, within a range of 5 mm.
The slit plates 15a and 15b are fixed to the lower wall of the base portion 12 in the inner housing 11 by, for example, screws, but the slit width is, for example, a resin or metal T-shaped jig having a predetermined thickness. Adjustment can be made by applying a slit plate to a T-shaped jig while the tool is sandwiched between the lamp 20 and the lower wall of the base portion 12 in the inner housing 11.

The outer casing 30 has a substantially box shape having a light emitting opening 31 that opens downward, and cools the lamp 20 between both side walls of the outer casing 30 and both side walls of the inner casing 11. The air passage 45 through which the cooling air is circulated is formed. The width direction dimension of the air path 45 (one side) is 20-30 mm, for example.
In this ultraviolet irradiation apparatus, a flat window member 40 is provided so as to close the light emitting opening 31. The window member 40 is held by a holding member 41 whose periphery is fixed to the outer housing 30. As the window member 40, for example, optical filter glass such as quartz glass or a heat ray cut filter can be used.
With such a configuration, it is possible to block the radiant heat from the lamp 20 and increase the speed of the cooling air, so that the cooling efficiency of the lamp 20 can be further improved.

  Further, the upper wall of the outer casing 30 is formed with a cooling air exhaust opening at the center in the width direction, and the inner space (air channel) of the outer casing 30 at a position close to each of both side walls. 45) and an opening for circulating the cooling air that communicates the internal space of the casing 51 constituting the cooling unit 50 is formed. In this example, the cooling air exhaust openings are arranged such that a plurality of exhaust ventilation holes 32 continuing to each of the plurality of exhaust ventilation holes 14 in the inner casing 11 are arranged at equal intervals in the length direction of the outer casing 30. It is installed and configured. Further, the cooling air circulation opening is configured by arranging a plurality of circulation holes 33 in parallel in the length direction of the outer casing 30 at equal intervals.

  The cooling unit 50 includes a substantially box-shaped casing 51, an exhaust pressure buffering chamber 55 formed by partitioning an inner space of the casing 51 by a partition wall 56, and an exhaust duct 58 connected to the exhaust pressure buffering chamber 55. And an exhaust fan (not shown) composed of, for example, an axial fan that constitutes a cooling mechanism, and is connected to a partition wall 56 that defines an exhaust pressure buffer chamber 55 and each of both side walls of the casing 51. A cooling airflow passage 60 is formed therebetween. In FIG. 1, 59 is an exhaust port.

A cooling wind introduction opening (not shown) is formed in the upper wall of the casing 51.
In addition, an opening for cooling air exhaust is formed at the center in the width direction on the lower wall of the housing 51, and the internal space of the housing 51 (cooling air flow passage 60 is located near each side wall. ) And an internal space (air passage 45) of the outer housing 30 in the light source unit 10 are formed.
In this example, the cooling air exhaust opening has a plurality of ventilation holes 52 that are continuous with the plurality of exhaust ventilation holes 32 in the outer casing 30 of the light source unit 10 and the plurality of exhaust ventilation holes 14 in the inner casing 11. Are arranged side by side at equal intervals in the length direction. In addition, the cooling air circulation openings are formed by arranging a plurality of circulation ventilation holes 53 continuous to each of the plurality of circulation ventilation holes 33 in the outer housing 30 of the light source unit 10 in parallel in the length direction at equal intervals. It is configured. Thereby, as described above, since the rectifying action of the cooling air is obtained, the cooling air can be distributed uniformly in the length direction of the lamp 20.

  In the exhaust pressure buffer chamber 55, the exhaust amount from the exhaust vent 32 of the light source unit 10 located in the vicinity of the exhaust duct 58 located substantially in the center in the length direction is increased, and the length of the slits 16a and 16b in the length direction is increased. It has a function of preventing the air volume distribution of the cooling air from being biased to a position near the duct. Therefore, by providing the exhaust pressure buffering chamber 55, the suction pressure by the exhaust fan in each of the plurality of exhaust ventilation holes 32 can be equalized, so that it is introduced into the inner housing 11 through the slits 16a and 16b. The flow rate of the cooling air can be made uniform in the length direction.

  In the above ultraviolet irradiation device, when the exhaust fan is driven, the inside of the inner casing 11 in the exhaust pressure buffer chamber 55 and the light source unit 10 becomes negative with respect to the pressure outside the device, and the cooling air in the cooling unit 50 is cooled. Air in the atmosphere outside the apparatus is introduced as cooling air through the introduction opening. The introduced cooling air flows through the cooling air flow passage 60 formed in the cooling unit 50 and passes through the ventilation holes 53 and 33 for circulation in the casing 51 of the cooling unit 50 and the outer casing 30 of the light source unit 10. It is introduced into the light source unit 10. The cooling air introduced into the light source unit 10 is introduced into the inner housing 11 through the air passage 45 and the slits 16a and 16b formed in the light source unit 10, whereby the lamp 20 is cooled.

  The flow of the cooling air inside the inner housing 11 will be specifically described. For example, when the slit width Sa of one slit 16a and the slit width Sb of the other slit 16b are the same size, FIG. As shown in FIG. 5, the cooling air forms a symmetric flow around the center position in the width direction. That is, the cooling air introduced through the one slit 16 a flows in the circumferential direction along the peripheral surface of the arc tube 21 of the lamp 20, and a part of the cooling air flows outward in the width direction toward the side wall of the inner housing 11. Flowing. A part of the cooling air flowing in the circumferential direction along the peripheral surface of the arc tube 21 flows away from the surface of the arc tube 21 toward the exhaust ventilation hole 14, and all the others are introduced through the other slit 16b. The cooling air flowing along the peripheral surface of the light emitting tube 21 collides with the vicinity of the central position in the width direction, thereby flowing toward the exhaust ventilation hole 14. The cooling air flowing toward the side wall of the inner housing 11 flows toward the exhaust ventilation hole 14 along the inner surface of the inner housing 11.

Next, a case where the slit width Sa of one slit 16a and the slit width Sb of the other slit 16b are different from each other will be described. For example, when the slit width Sb of the other slit 16b is larger than the slit width Sa of the one slit 16a, the side on which the one slit plate 15a is positioned with respect to the center position in the width direction as shown in FIG. A part of the cooling air from the air passage 45 flows toward one slit 16a and the other all flows toward the other slit 16b along the lower surface of the lamp 20 (the flat surface on the front side in the light extraction direction). Flowing. Further, the cooling air from the air passage 45 on the side where the other slit plate 15b is located with respect to the center position in the width direction flows toward the other slit 16b. Therefore, the air volume of the cooling air introduced through the other slit 16b is larger than the air volume of the cooling air introduced through the one slit 16a.
The cooling air introduced through the other slit 16 b flows in the circumferential direction along the peripheral surface of the arc tube 21 of the lamp 20 and partly flows outward in the width direction toward the side wall of the inner housing 11. A part of the cooling air flowing in the circumferential direction along the peripheral surface of the arc tube 21 flows away from the peripheral surface of the arc tube 21 toward the exhaust ventilation hole 14, and the rest of the cooling air flows along the top surface of the arc tube 21. Flowing. The cooling air flowing along the upper surface of the arc tube 21 collides with the flow of the cooling air flowing in the circumferential direction along the peripheral surface of the arc tube 21 of the lamp 20 introduced through one slit 16a, so that the exhaust ventilation It flows toward the hole 14. The cooling air introduced through one slit 16 a and the other slit 16 b and flowing toward the side wall of the inner casing 11 flows toward the exhaust ventilation hole 14 along the inner surface of the inner casing 11.

  The cooling air used for cooling the lamp 20 is exhausted through the exhaust ventilation holes 14 and 32 in the inner casing 11 and the outer casing 30 of the light source unit 10 and the ventilation holes 52 in the casing 51 of the cooling unit 50. It is discharged into the buffer chamber 55. The cooling air discharged into the exhaust pressure buffer chamber 55 is discharged from the exhaust port 59 to the outside of the apparatus via the exhaust duct 58.

  Thus, according to the ultraviolet irradiation device, the slits 16a formed between the both side edges of the front region in the light extraction direction of the arc tube 21 of the lamp 20 and the inner edges of the pair of slit plates 15a and 15b. Since the cooling air supplied through 16b flows in the circumferential direction along the peripheral surface of the arc tube 21, the lamp 20 is suppressed while suppressing the uniformity of the temperature distribution in the length direction on the surface of the lamp 20. Can be cooled properly.

As mentioned above, although embodiment of this invention was described, this invention is not limited to said embodiment, A various change can be added.
For example, in the above embodiment, the slit plate is configured by a member separate from the inner casing, but may be configured such that the lower wall of the inner casing functions as a slit plate, for example.
Further, the exhaust opening formed in each of the inner housing and the outer housing of the light source unit and the housing of the cooling unit may be configured by an opening extending in the length direction. Since the uniformity of the flow of the cooling air can be increased, it is preferable that a plurality of openings are arranged in parallel in the length direction at equal intervals as in the above embodiment. The same applies to the opening for distribution formed in each of the outer casing of the light source unit and the casing of the cooling unit.
Furthermore, it is not necessary that the light emitting opening in the light source unit is closed by the window member. In this case, it is possible to adopt a configuration in which air in the atmosphere outside the apparatus is introduced as cooling air from the light emission opening, and the cooling air is supplied through the slit. For this reason, a cooling unit and a light source unit can also be set as the structure which does not have a cooling wind flow path and an air path.
Furthermore, the lamp is not limited to a rectangular cross-sectional shape, and may have a circular cross-sectional shape.

  Hereinafter, experimental examples performed for confirming the effects of the present invention will be described.

[Experimental Example 1]
With reference to the configuration shown in FIGS. 1 to 4, an ultraviolet irradiation device having the following specifications was produced.
Ultraviolet irradiation device external dimensions (length x width x height): 2430 mm x 160 mm x 360 mm
Dimensions (length × width) of the light emission opening (31): 1660 mm × 100 mm
Width direction dimension of air passage (45): 29mm
Size (length × width) of ventilation holes (33 × 53) for circulation: 10 mm × 100 mm, pitch in length direction of ventilation holes for circulation (distance between centers of openings): 150 mm
Dimensions of exhaust vent holes (14, 32) and vent holes (52) (length x width): 100 mm x 20 mm, pitch in length direction (distance between centers of openings): 150 mm
Lamp (20): Xenon excimer lamp provided with LCP as phosphor Lamp dimensions (length x width): 1960 mm x 43 mm (cross-sectional shape: rectangular shape)
Lamp input power: 800W
One slit width (Sa): 1 mm
The other slit width (Sb): 1mm
Volume of exhaust pressure buffer chamber (55): 23.6 liters Cooling air volume: 7 m ³ / min

  This ultraviolet irradiation device was driven to measure the temperature at any of a plurality of locations on the upper surface and the lower surface (front surface in the light emission direction) of the arc tube of the lamp. The results are shown in Table 1 below.

[Experimental example 2]
Except that the other slit width (Sb) was changed to 2 mm, the temperature at any of a plurality of locations on the upper surface and the lower surface (front surface in the light emission direction) of the arc tube of the lamp was measured in the same manner as in Experimental Example 1. The results are shown in Table 1 below.

Also in Experimental Example 1 and Experimental Example 2, when the temperature distribution on the surface of the arc tube of the lamp was confirmed, the lamp was appropriately cooled while suppressing the decrease in the uniformity of the temperature distribution in the lamp length direction. It was confirmed that it was possible.
Further, as shown in Table 1, by making the slit width (Sa) of one slit and the slit width (Sb) of the other slit different from each other, both on the upper surface and the lower surface of the lamp It was confirmed that the uniformity of the surface temperature could be further increased.
From the above results, according to the ultraviolet irradiation device according to the present invention, it is possible to prevent the change in the light emission characteristic and the change in the lamp life characteristic due to the non-uniform temperature distribution in the lamp length direction. It is expected to be possible.

DESCRIPTION OF SYMBOLS 10 Light source unit 11 Inner housing | casing 12 Base | substrate part 13 Wind tunnel part 14 Exhaust ventilation hole 15a Slit board 15b Slit board 16a Slit 16b Slit 20 Lamp 21 Light emission tube 22 Base member 25 Lamp holder 30 Outer housing 31 Light emission opening 32 Exhaust ventilation Hole 33 Ventilation hole for circulation 35 Rail member 36 Support member 37 Suspension roller 40 Window member 41 Holding member 45 Air passage 50 Cooling unit 51 Housing 52 Ventilation hole 53 Ventilation hole for circulation 55 Exhaust pressure buffering chamber 56 Partition wall 58 Exhaust duct 59 Exhaust port 60 Cooling air flow passage

Claims (3)

A pair of slit plates that form openings between opposed edges facing each other, a lamp that is disposed close to the openings and that has an arc tube extending in the same direction as the opposed edges of the slit plates, and cooling the lamp A cooling mechanism for supplying wind,
A slit extending in the lamp length direction is formed between both side edges of the front region in the light extraction direction of the arc tube of the lamp and each of the opposing edges of the pair of slit plates. An ultraviolet irradiation apparatus, wherein cooling air is supplied through the slit from the opposite side of the lamp across the slit plate.   The ultraviolet irradiation device according to claim 1, wherein at least one of the pair of slit plates is provided so as to be movable in a direction in which the slit plate is separated from and contacting the other. An inner casing having the pair of slit plates, in which the lamp is disposed, and an air passage surrounding the periphery of the inner casing, and a light emitting opening at a position facing the pair of slit plates. An outer housing having
An exhaust vent is formed in the wall facing the pair of slit plates and the lamp in the inner casing,
The cooling air supplied by the cooling mechanism is introduced into the inner casing through the air passage and the slit, and is exhausted through the exhaust vent. UV irradiation equipment.

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