WO2021187242A1

WO2021187242A1 - Light irradiation device

Info

Publication number: WO2021187242A1
Application number: PCT/JP2021/009312
Authority: WO
Inventors: 将人大図; 法隆竹添; 一樹有川; 将志山口
Original assignee: ウシオ電機株式会社
Priority date: 2020-03-16
Filing date: 2021-03-09
Publication date: 2021-09-23
Also published as: KR20220124745A; CN114902375A; JPWO2021187242A1; JP7283629B2

Abstract

Provided is a light irradiation device which enables more efficient cooling of an excimer lamp.　The present invention comprises a light emitting tube that extends in a first direction and that has transmissivity with respect to ultraviolet light, and a pair of electrodes that are opposite each other with the wall surfaces of the light emitting tube therebetween, and comprises: an excimer lamp that has, as a light emission surface, one wall surface among the wall surfaces of the light emitting tube which are opposite each other in a second direction; a pair of side wall plates that extend in the first direction and that, in a third direction, are opposite each other with the light emitting tube therebetween; a blower mechanism that has a jet opening which is formed to extend in the first direction so as to be, in the second direction, between the light emitting tube and one of the side wall plates, and which jets cooling gas toward the outer wall surface of the light emitting tube on the opposite side from the light emission surface; a suction mechanism that has a suction opening which is formed to extend in the first direction so as to be, in the second direction, between the light emitting tube and the side wall plate on the opposite side from the blower mechanism; and a divider plate that extends in the first direction, that in the second direction is disposed on the opposite side from the light emission surface of the light emitting tube and away from the light emitting tube, and that directly or indirectly connects the pair of side wall plates.

Description

Light irradiation device

The present invention relates to a light irradiation device.

Conventionally, ultraviolet light has been used for manufacturing semiconductors and liquid crystal panels and for generating ozone for air purification. As a light source that emits ultraviolet light, for example, an excimer lamp as described in Patent Document 1 below is used.

JP-A-2015-230838 Japanese Patent No. 5534344

In addition to excimer lamps, ultraviolet light sources include, for example, low-pressure mercury lamps. The arc tube forming these light emitting spaces is made of quartz glass, which is a material having transparency to ultraviolet light. As the temperature of quartz glass rises, its transparency to light having a short wavelength gradually decreases. Therefore, in order to maintain the irradiation amount of ultraviolet light above a certain level, the low-pressure mercury lamp is provided with a cooling mechanism so that the temperature does not rise above a predetermined temperature when lit.

Excimer lamps generate much less heat when lit than low-pressure mercury lamps. Therefore, in the conventional excimer lamp, the above-mentioned problem due to heat generation hardly occurs even if the cooling mechanism is not taken into consideration.

In recent years, there has been an increasing demand for larger excimer lamps and higher output in order to cope with larger LCD panels and shorter processing time due to ultraviolet light. Therefore, excimer lamps are gradually increasing in size, and the voltage applied to the electrodes is also increasing.

In excimer lamps, the heat capacity of the arc tube increases as the size of the arc tube increases. Further, when the voltage applied to the electrodes is increased, the energy of the discharge is increased and the amount of ultraviolet light generated is increased, but at the same time, the amount of heat generated by the discharge is also increased. For this reason, the temperature at which the excimer lamp is lit has gradually become an issue in response to the demand for larger size and higher output.

Therefore, even in excimer lamps, consideration is being given to providing a cooling mechanism in order to maintain the irradiation amount of ultraviolet light above a certain level. For example,

Patent Documents

1 and 2 disclose a light irradiation device configured to inject cooling gas onto an excimer lamp from a side surface to cool the entire arc tube and lower the temperature at which the excimer lamp is lit. There is.

However, the present inventors have been diligently studying the increase in size and output of the excimer lamp, and in order to cool the excimer lamp more efficiently, the heat is absorbed from the excimer lamp and the temperature becomes high. It has been found that the gas needs to be more reliably exhausted to the outside of the light irradiation device without remaining around the excimer lamp.

In view of the above problems, an object of the present invention is to provide a light irradiation device capable of cooling an excimer lamp more efficiently.

The light irradiation device of the present invention
An excimer tube extending in the first direction and having transparency to ultraviolet light and a pair of electrodes facing each other via the wall surface of the excimer tube are provided and face each other in a second direction orthogonal to the first direction. An excimer lamp having one wall surface of the wall surface of the arc tube as a light emitting surface,
A pair of side wall plates extending in the first direction and facing each other via the arc tube in the first direction and the third direction orthogonal to the second direction.
In the second direction, the arc tube has a shape extending in the first direction between the arc tube and one of the side wall plates, and toward the outer wall surface of the arc tube on the side opposite to the light emitting surface. A blower mechanism with an injection port that injects cooling gas,
An intake mechanism having an intake port extending in the first direction between the arc tube and the side wall plate on the side opposite to the ventilation mechanism in the second direction.
It extends in the first direction and is arranged in the second direction on the side of the arc tube opposite to the light emitting surface so as to be separated from the arc tube, and the pair of side wall plates can be directly attached or other members can be attached. It is characterized by being provided with a partition plate that is indirectly contacted via a partition plate.

The ventilation mechanism is a mechanism that injects the cooling gas to be sent toward the excimer lamp. The "injection port extending in the first direction" means that the openings functioning as the injection port are continuously formed in the first direction or discretely formed in the first direction. Including the case where there is. The injection port only needs to be formed between the arc tube and one side wall plate in the third direction, and the entire ventilation mechanism fits between the arc tube and the side wall plate in the third direction. It doesn't have to be.

The intake mechanism is a mechanism that extends in the first direction and has an intake port that takes in gas around the excimer lamp. The "intake port extending in the first direction" means that the openings functioning as the intake ports are continuously formed in the first direction or discretely formed in the first direction. Including the case where there is. The intake port may be formed between the arc tube and the side wall plate on the side opposite to the injection port of the blower mechanism in the third direction, and the entire intake mechanism may be formed with the arc tube in the third direction. It does not have to fit between the side wall plate and the side wall plate.

With the above configuration, the cooling gas hits the outer wall surface on the side opposite to the light emitting surface of the arc tube extending in the first direction over a wide range, and the entire excimer lamp is cooled. Further, the cooling gas injected from one side wall plate side toward the outer wall surface on the side opposite to the light emitting surface of the arc tube is the other side wall along the outer wall surface on the opposite side of the light emitting surface of the arc tube. It flows toward the plate side and is sucked out by the intake mechanism. Therefore, the hot gas does not remain around the excimer lamp and is cooled by the cooling gas sent one after another by the ventilation mechanism.

Further, the cooling gas is injected toward the outer wall surface opposite to the light emitting surface of the arc tube, passes through the outer wall surface opposite to the light emitting surface of the arc tube, and is taken in by the intake mechanism. , It becomes difficult to go around to the light emitting surface side, and the amount of heat propagated to the irradiation target is minimized. In the configuration of the present invention, the flow rate of the cooling gas injected from the blower mechanism and the intake amount of the intake mechanism so as not to wrap around to the light emitting surface side or to draw in gas from the light emitting surface side. It is preferable that the amounts of and are substantially the same. The term "almost the same" as used herein means that the flow rate of the gas that can be taken in by the intake mechanism is within ± 20% of the flow rate of the cooling gas that is injected from the ventilation mechanism within a predetermined time.

The above light irradiation device
A windshield may be provided that projects from the side wall plate toward the arc tube and is arranged so that the tip end portion is in close proximity to or in contact with the arc tube.

With the above configuration, the cooling gas injected from the ventilation mechanism is shielded from the wind, and it is possible to further suppress the progress toward the light emitting surface side. The term "proximity" as used herein means that the separation distance is 3.0 mm or less.

Further, in the manufacture of semiconductors and liquid crystal panels, an ultraviolet light source that emits short ultraviolet light having a wavelength of 200 nm or less is used. In particular, ultraviolet light having a main emission wavelength of 172 nm is encapsulated with xenon gas as a light emitting gas. An excimer lamp that emits light is used.

Since ultraviolet light of 172 nm is easily absorbed by oxygen in the air, the oxygen concentration between the light emitting surface and the irradiation target is as low as possible in order to sufficiently irradiate the irradiation target with ultraviolet light. It is preferable that Therefore, for example, the oxygen concentration of nitrogen gas or the like is set between the light emitting surface and the irradiation target at a predetermined flow rate so that the oxygen concentration between the light emitting surface and the irradiation target is equal to or less than a predetermined concentration. Control is usually performed to allow low inert gas to flow through.

However, if the flow rate or flow velocity of the cooling gas injected from the ventilation mechanism is increased in order to increase the cooling capacity, the intake mechanism may not be able to reliably suck out the cooling gas or turbulence may occur. For this reason, the gas existing on the side opposite to the light emitting surface of the arc tube is mixed, or the nitrogen gas flows into a region different from the light emitting surface and the irradiation target, and the light emitting surface and the light emitting surface. It becomes difficult to control the oxygen concentration with the irradiation target.

With the above configuration, the cooling gas toward the light irradiation surface side is shielded from wind, so that the influence on the oxygen concentration between the light emission surface and the irradiation target is suppressed, and the flow rate and flow velocity of the cooling gas are conventionally reduced. Can be larger than.

Further, in the above light irradiation device,
The cooling gas may be air taken in from the outside.

As described above, by providing the windshield, the influence of the cooling gas on the oxygen concentration between the light emitting surface and the irradiation target is suppressed. Therefore, as the cooling gas, various gases can be adopted as long as they are inert gases, and as described above, air taken in from the outside can be adopted at low cost.

In the above light irradiation device
The ventilation mechanism includes a first retention portion extending in the first direction and a second retention portion extending in the first direction downstream of the first retention portion and having a volume smaller than that of the first retention portion. It may have and.

With the above configuration, the cooling gas does not flow directly from the first retention portion toward the second retention portion, but gradually fills the entire first retention portion. Then, the air pressure in the first stagnant part rises due to the cooling gas sent one after another from the inflow port that introduces the cooling gas toward the inside of the blower mechanism, and the cooling gas filling the first stagnant part gradually stays in the second stagnant part. Pass through so that it is pushed out toward the part. Therefore, even when the cooling gas flows in from a part of the inflow port, the cooling gas can be guided to the entire light emitting surface extending in the first direction.

Note that each retention portion means a part of the space through which the cooling gas flows, which is formed between the inflow port and the injection port, and the cooling gas does not necessarily have to stay inside. Further, "the second retaining portion extends in the first direction" means that the second retaining portion is continuously formed in the first direction or is formed discretely in the first direction. Including the case of. When a plurality of second retention portions are formed, the volume of the first retention portion is configured to be larger than the total volume of the second retention portions.

In the above light irradiation device
The ventilation mechanism may have a plurality of inlets for the cooling gas along the first direction.

The temperature of the excimer lamp extending in the first direction is higher on the central side in the first direction than on the end side. Therefore, with the above configuration, the flow rate of the cooling gas introduced from each inflow port can be adjusted so as to match the temperature distribution of the excimer lamp.

The above light irradiation device
A plurality of the blower mechanisms may be arranged along the first direction.

With the above configuration, the flow rate and flow velocity of the cooling gas flowing into each ventilation mechanism can be adjusted.

Therefore, the flow rate and direction of the cooling gas injected onto the light emitting surface can be finely adjusted according to the respective positions in the first direction. Therefore, the central portion of the arc tube in the first direction, which tends to be hot, can be cooled more strongly, and uneven irradiation of ultraviolet light to the irradiation target can be suppressed.

According to the present invention, a light irradiation device capable of cooling an excimer lamp more efficiently is realized.

It is a perspective view which shows one Embodiment of a light irradiation apparatus typically. It is a perspective view which removed the partition plate from the light irradiation apparatus of FIG. It is sectional drawing when the light irradiation apparatus of FIG. 1 is seen in the Z direction. It is sectional drawing when one Embodiment of an excimer lamp is seen in the Y direction. It is sectional drawing when the excimer lamp of FIG. 3 is seen in the Z direction. It is a side view when the excimer lamp of FIG. 3 is seen in the X direction. It is a drawing which disassembled one Embodiment of a blast mechanism for each member. It is sectional drawing when one Embodiment of a blowing mechanism is cut in the XY plane. It is a drawing which disassembled one Embodiment of an intake mechanism for each member. It is sectional drawing when one Embodiment of an intake mechanism is cut in the XY plane. It is an enlarged cross-sectional view around one excimer lamp of FIG. It is an enlarged cross-sectional view around the ventilation mechanism of FIG. It is a drawing which disassembled another embodiment of a blowing mechanism for each member. It is sectional drawing when another embodiment of a blowing mechanism is cut in the XY plane. It is a drawing which disassembled another embodiment of a blowing mechanism for each member. It is a perspective view which shows another embodiment of a light irradiation apparatus schematically. It is a perspective view which shows another embodiment of a light irradiation apparatus schematically. It is sectional drawing when the excimer lamp of FIG. 17 is seen in the Z direction. It is an enlarged cross-sectional view around one excimer lamp of FIG. It is sectional drawing when the excimer lamp is seen in the Z direction.

Hereinafter, the light irradiation device of the present invention will be described with reference to the drawings. In addition, each of the following drawings is schematically illustrated, and the dimensional ratio and the number on the drawings do not always match the actual dimensional ratio and the number.

FIG. 1 is a perspective view schematically showing an embodiment of the light irradiation device 1, and FIG. 2 is a perspective view in which the partition plate 6 is removed from the light irradiation device 1 of FIG. FIG. 3 is a cross-sectional view of the light irradiation device 1 of FIG. 1 when viewed in the Z direction. As shown in FIGS. 1 to 3, the light irradiation device 1 of the present embodiment includes an excimer lamp 2, a blower mechanism 3, an intake mechanism 4 between the excimer lamps 2, and each excimer in the Y direction. A side wall plate 5 for partitioning the lamp 2 in the Y direction, a partition plate 6 for partitioning the space in the X direction, and a windbreak plate 7 protruding from the side wall plate 5 toward the excimer lamp 2 are provided.

As shown in FIG. 3, the light irradiation device 1 is equipped with two identical excimer lamps 2, and emits light to an irradiation target object W1 arranged on the light emitting surface 13 side of each excimer lamp 2. It irradiates ultraviolet light emitted from the space 10c.

In the following description, as shown in FIG. 1, the direction in which the excimer lamp 2 extends (tube axis direction) is the Z direction (first direction), and the direction in which the electrodes 11 of the excimer lamp 2 face each other is the X direction (second direction). Direction), the direction orthogonal to the X direction and the Z direction is defined as the Y direction (third direction). When expressing the direction, when distinguishing between the positive and negative directions, it is described with positive and negative signs such as "+ Z direction" and "-Z direction", and the positive and negative directions are not distinguished. When expressing the direction in, it is simply described as "Z direction". As shown in FIG. 1, each direction of the ventilation mechanism 3 and the intake mechanism 4 is defined corresponding to a direction determined by the state in which the excimer lamp 2 is mounted on the light irradiation device 1.

First, the configuration of the excimer lamp 2 will be described. FIG. 4 is a cross-sectional view of an embodiment of the excimer lamp 2 when viewed in the Y direction. As shown in FIG. 4, the excimer lamp 2 includes an arc tube 10, a pair of electrodes 11, and a reflective film 12.

The arc tube 10 is made of a material that is transparent to ultraviolet light, for example, quartz glass, and extends in the Z direction as shown in FIG. Further, a light emitting space 10c in which the light emitting gas G1 is sealed is provided inside the light emitting tube 10. In the present embodiment, the wall surface on the −X side of the arc tube 10 is the light emitting surface 13 for extracting ultraviolet light radiated from the light emitting space 10c, and the outer wall surface on the + X side of the arc tube 10 is the surface to be cooled 14. Is.

As described above, the light irradiation device 1 used in the manufacturing process of the liquid crystal panel or the like has a very large excimer lamp 2 having a length in the Z direction of about 500 mm to 3000 mm in order to cope with the increase in size of the liquid crystal panel. Is installed. In the present embodiment, the length of the arc tube 10 in the Z direction is 1500 mm.

In the excimer lamp 2 of the present embodiment, the light emitting gas G1 is xenon gas and emits ultraviolet light having a main light emitting wavelength of 172 nm. However, using a light emitting gas G1 other than xenon gas, the main light emitting wavelength is ultraviolet light other than 172 nm. It may be configured to emit light.

FIG. 5 is a cross-sectional view of the excimer lamp 2 of FIG. 4 when viewed in the Z direction. As shown in FIG. 4, the arc tube 10 is formed so that the cross section of the arc tube 10 when cut in the XY plane is rectangular when viewed from the Z direction. However, the cross-sectional shape of the arc tube 10 may be, for example, an oval shape in which the wall surface facing the Y direction has an arc shape, or another polygonal shape such as a hexagon or an octagon.

FIG. 6 is a side view of the excimer lamp 2 of FIG. 4 when viewed in the X direction. As shown in FIG. 6, the electrodes 11 are formed in a mesh shape on the outer wall surface 10a of the arc tube 10. When a voltage required for light emission is applied to the electrode 11, a discharge is generated in the light emitting space 10c, and ultraviolet light is emitted.

The ultraviolet light generated in the light emitting space 10c is emitted to the outside of the light emitting tube 10 through the mesh of the electrode 11 with the wall surface on the −X side as the light emitting surface 13. Although only the + X side electrode 11 is shown in FIG. 6, the −X side electrode 11 is formed so as to face the same shape as the illustrated electrode 11.

The shape of the electrodes 11 may be different from each other, and the electrodes 11 on the + X side do not need to pass ultraviolet light, and may be formed in a solid shape. Further, the electrode 11 on the −X side may have a shape that allows light to pass through, and may be, for example, an electrode 11 provided with a slit.

Further, the pair of electrodes 11 of the present embodiment are all made of the same material, printed on the outer wall surface 10a of the arc tube 10 by screen printing, and formed by firing. It may be formed. Further, as the material for forming the electrode 11, for example, gold, platinum, or the like, or an alloy containing these, or the like can be adopted.

As shown in FIG. 3, the reflective film 12 is formed on the inner wall surface 10b on the side (+ X side) opposite to the light emitting surface 13 of the arc tube 10, is generated in the light emitting space 10c, and faces the + X side. The ultraviolet light that travels is reflected toward the -X side.

As the material for forming the reflective film 12, for example, a material formed by _{applying a suspension containing particulate silica (SiO 2} ), alumina (Al ₂ O ₃ ), or the like and firing the film is adopted. obtain.

The reflective film 12 of the present embodiment is formed only on the inner wall surface 10b on the + X side, but may be formed on the inner wall surface 10b facing the Y direction on which the electrode 11 is not formed, or is formed at all. It doesn't have to be.

Next, the configuration of the ventilation mechanism 3 will be described. In the light irradiation device 1, as shown in FIGS. 1 and 2, two ventilation mechanisms 3 arranged along the Z direction are separately arranged for each excimer lamp 2. That is, the light irradiation device 1 is equipped with a total of four ventilation mechanisms 3.

FIG. 7 is a drawing of the blower mechanism 3 disassembled for each member. As shown in FIG. 7, the ventilation mechanism 3 includes a flow pipe 30, a blow pipe 31, a bottom plate 32, and a flow path limiting plate 33 provided with a plurality of notches 33a.

FIG. 8 is a cross-sectional perspective view of one embodiment of the blower mechanism 3 cut along the XY plane. A plurality of flow pipes 30 are arranged in the Z direction with respect to one ventilation mechanism 3, and a flow path for passing the cooling gas C1 is formed inside. A pipe, a hose, or the like is connected to each of the flow pipes 30, and air taken in from the outside of the light irradiation device 1 as the cooling gas C1 is sent into the ventilation mechanism 3 through the inflow port 34. In the present embodiment, the flow pipe 30 is configured to penetrate the partition plate 6, but the partition plate 6 is not shown in FIGS. 7 and 8 for the sake of explanation.

Note that the number of through pipes 30 provided in one ventilation mechanism 3 may be one. Further, the cooling gas C1 may be other than air as long as it is an inert gas.

The blow pipe 31 extends in the Z direction and forms a first retention portion 35 in which the cooling gas C1 that has passed through the flow pipe 30 stays. Further, the blow pipe 31 is provided with a protruding portion 31a that protrudes in a direction away from the pipe shaft 31c and forms a part of the injection port 37.

The bottom plate 32 has a plurality of second retaining portions 36 on which the blow pipe 31 and the flow path limiting plate 33 are placed and which are discretely extended in the Z direction between the bottom plate 32 and the notch 33a of the flow path limiting plate 33. To form. Further, the bottom plate 32 is formed with a wind guide portion 32a that is slightly separated from the protruding portion 31a of the blow pipe 31 and is parallel to the blow pipe 31 when the blow pipe 31 is placed. When the blow pipe 31 is placed on the bottom plate 32, the gap formed by the protruding portion 31a of the blow pipe 31 and the air guiding portion 32a of the bottom plate 32 extending in the Z direction is an injection port 37 for ejecting the cooling gas C1. It becomes.

In the present embodiment, the total value of the volumes of each second retaining portion 36 is configured to be smaller than the volume of the first retaining portion 35.

The cooling gas C1 sent from the flow pipe 30 into the ventilation mechanism 3 passes through the flow pipe 30 and flows into the first retention portion 35.

Since the volume of the cooling gas C1 that has flowed into the first retention portion 35 is smaller than that of the first retention portion 35, the cooling gas C1 does not flow directly toward the second retention portion 36, and the first retention portion 35 It spreads in the Z direction so as to diffuse inside.

When the pressure in the first stagnant portion 35 rises due to the cooling gas C1 flowing in, each of the second stagnant portions 36 gradually pushes out the cooling gas C1 that has spread in the first stagnant portion 35. Flow into.

The cooling gas C1 that has flowed into the second retention portion 36 flows from the second retention portion 36 toward the injection port 37, and is injected from the injection port 37 toward the cooled surface 14 (see FIG. 11) of the excimer lamp 2. NS.

Next, the configuration of the intake mechanism 4 will be described. As shown in FIGS. 1 and 2, two light irradiation devices 1 are arranged between the excimer lamps 2 along the Z direction.

FIG. 9 is a drawing in which one embodiment of the intake mechanism 4 is disassembled for each member. As shown in FIG. 9, the intake mechanism 4 includes an exhaust pipe 40 and an intake box 41. In the present embodiment, the exhaust pipe 40 is integrally configured with the partition plate 6, but may be configured separately from the partition plate 6.

FIG. 10 is a cross-sectional perspective view of one embodiment of the intake mechanism 4 cut along the XY plane. As shown in FIG. 10, the exhaust pipe 40 is formed with an exhaust port 42, and the exhaust port 42 is connected to a pipe, a hose, or the like to exhaust the cooling gas C1 taken into the outside of the light irradiation device 1.

As shown in FIG. 9, the intake box 41 is formed so that the intake port 41a for sucking the cooling gas C1 is discretely extended in the Z direction on the surface on the −X side. As shown in FIG. 10, a partition plate 6 is placed on the + X side of the intake box 41 to communicate with the opening 40a of the exhaust pipe 40.

As shown in FIG. 10, the intake box 41 is mounted on the side wall plate 5, and the intake ports 41a that are discretely extended in the Z direction are provided at the intake port 41a on the −Y side and the intake port 41a on the + Y side. Divided. As a result, as shown in FIG. 3, the intake mechanism 4 absorbs heat from the excimer lamp 2 arranged on the −Y side and the cooling gas C1 arranged on the + Y side, and cools by absorbing heat from the excimer lamp 2 arranged on the + Y side. The gas C1 and the gas C1 are collectively taken in and exhausted from the exhaust port 42. The intake mechanism 4 may be individually provided on each excimer lamp 2.

FIG. 11 is an enlarged cross-sectional view of the periphery of one excimer lamp 2 of FIG. 2, and FIG. 12 is an enlarged cross-sectional view of the periphery of the blower mechanism 3 of FIG. As shown in FIG. 11, the blower mechanism 3 has a cooling surface of the arc tube 10 between the arc tube 10 of the excimer lamp 2 and the side wall plate 5 on the Y side when viewed from the excimer lamp 2 in the Y direction. An injection port 37 for injecting the cooling gas C1 toward the 14 is arranged. Further, in the intake mechanism 4, the intake port 41a of the intake mechanism 4 is arranged between the arc tube 10 of the excimer lamp 2 and the side wall plate 5 on the + Y side when viewed from the excimer lamp 2 in the Y direction.

The side wall plates 5 are arranged so as to divide the excimer lamps 2 mounted on the light irradiation device 1 in the Y direction, and for each excimer lamp 2, a pair of side wall plates 5 are the arc tubes 10. They are arranged so as to face each other via. Further, the side wall plate 5 between the two excimer lamps 2 also functions as a support base for supporting the intake box 41 of the intake mechanism 4.

The partition plate 6 is arranged so as to face the cooled surface 14 of the arc tube 10, and indirectly communicates with the side wall plate 5 sandwiched between the two excimer lamps 2 via the intake mechanism 4, and the other side walls. It is arranged so as to be in direct contact with the board 5.

As shown in FIG. 2, the windshield 7 extends in the Z direction, and as shown in FIG. 12, the excimer lamp 2 has a side wall plate 5 on the + Y side and −Y side of the excimer lamp 2. It is configured to project toward the outer wall surface 10a of the arc tube 10.

The windbreak plate 7 of the present embodiment projects parallel to the Y direction toward the outer wall surface 10a of the arc tube 10, but is not parallel to the Y direction so as to go from the side wall plate 5 to the arc tube 10. It does not matter if it protrudes into. Further, the windshield 7 projects toward the −X side end of the arc tube 10, but is configured to project toward the + X side end of the arc tube 10 and the central portion in the X direction. It doesn't matter if it is done.

As shown in FIG. 12, the tip portion 7a of the windbreak plate 7 is arranged close to the outer wall surface 10a of the arc tube 10. With this configuration, the cooling gas C1 is shielded from wind so as not to flow into the light emitting surface 13 side. The term "proximity" as used herein means that the separation distance is 3.0 mm or less, as described above. Specifically, in the light irradiation device 1 of the present embodiment, the separation distance d1 between the windshield 7 and the arc tube 10 is 2.0 mm. The separation distance d2 between the blow pipe 31 and the bottom plate 32 at the injection port 37 of the blower mechanism 3 is 1.5 mm. The tip portion 7a of the windshield 7 and the outer wall surface 10a of the arc tube 10 may be arranged so as to be in contact with each other.

With the above configuration, as shown in FIG. 11, the cooling gas C1 injected from the blower mechanism 3 does not flow to the light emitting surface 13 side, and heat is transferred along the cooled surface 14 of the arc tube 10. While absorbing, it flows in the + Y direction, that is, toward the intake mechanism 4 side, and cools the entire surface to be cooled 14.

Further, since the cooling gas C1 hardly flows into the space between the light emitting surface 13 of the excimer lamp 2 and the irradiation target W1 by the windshield 7, the control of the oxygen concentration in the space is not affected. , The excimer lamp 2 can be cooled.

Further, in the light irradiation device 1 of the present embodiment, as shown in FIG. 2, since a plurality of blower mechanisms 3 are arranged in the Z direction, the flow rate and the flow velocity of the cooling gas C1 are individually set in each blower mechanism 3. Can be adjusted. For example, it can be adjusted so that the flow rate and the flow velocity of the cooling gas C1 injected on the central portion side of the excimer lamp 2 in the Z direction, which tends to be higher in temperature, are larger than those on the end portion side.

If the flow rate of the cooling gas C1 injected from the blower mechanism 3 within a certain period of time is larger than the flow rate of the intake mechanism 4 inhaling within a certain period of time, the intake mechanism 4 takes in the high temperature cooling gas C1. Therefore, the excimer lamp 2 cannot be cooled efficiently.

When the flow rate of the cooling gas C1 injected from the blower mechanism 3 within a certain period of time is smaller than the flow rate of the cooling gas C1 injected by the intake mechanism 4 within a certain period of time, the cooling gas C1 is formed through a gap between the excimer lamp 2 and the windshield 7. It takes in a gas other than the above, and reduces the cooling effect of the cooling gas C1. Further, the oxygen concentration between the arc tube 10 and the irradiation target W1 is affected.

That is, in the light irradiation device 1 of the present invention, the flow rate of the cooling gas C1 injected from the blower mechanism 3 within a fixed time and the flow rate taken by the intake mechanism 4 within a fixed time are adjusted to be substantially the same. Is preferable. Therefore, the flow pipe 30 of the ventilation mechanism 3 and the exhaust pipe 40 of the intake mechanism 4 may be provided with cocks, valves, and the like for adjusting the flow rate, respectively.

Further, by adjusting the number and flow rate of the flow pipe 30 provided in the ventilation mechanism 3 and the exhaust pipe 40 provided in the intake mechanism 4, the cooling gas C1 is between the light emitting surface 13 and the irradiation target W1. It can also be configured to have little effect on the oxygen concentration. In such a case, the light irradiation device 1 may not include the windshield 7.

[Another Embodiment]
Hereinafter, another embodiment will be described.

<1> FIG. 13 is an exploded view of another embodiment of the blower mechanism 3 for each part, and FIG. 14 is a cross-sectional perspective view of another embodiment of the blower mechanism 3 cut in an XY plane. As shown in FIGS. 13 and 14, the ventilation mechanism 3 is not provided with the flow path limiting plate 33, and is formed with a flow pipe 30, a blow pipe 31 having a protruding portion 31a, and a groove 32b extending in the Y direction. It may be composed of the bottom plate 32.

In the case of this configuration, the space formed by the protruding portion 31a and the groove 32b of the blow pipe 31 constitutes the second retention portion 36. Further, at each end in the ± Y direction, the injection port 37 having the bottom surface of the groove 32b as the air guide portion 32a is formed so as to extend discretely in the Z direction.

FIG. 15 is a drawing in which another embodiment of the ventilation mechanism 3 is disassembled for each member. The groove 32b formed in the bottom plate 32 may be formed so as to extend continuously in the Z direction. With this configuration, although not shown, a second retention portion 36 extending in the Z direction and an injection port 37 are formed.

<2> FIG. 16 is a perspective view schematically showing another embodiment of the light irradiation device 1. As shown in FIG. 16, the blower mechanism 3 may be configured such that the partition plate 6 is provided with the through hole 6a and the through hole 6a is simply connected to the through pipe 30 without providing the blow pipe 31 or the like. No. Further, the intake mechanism 4 may also have a configuration in which the partition plate 6 is similarly provided with a through hole 6a and the exhaust pipe 40 is simply connected.

<3> FIG. 17 is a perspective view schematically showing another embodiment of the light irradiation device 1, and FIG. 18 is a cross-sectional view of the excimer lamp 2 of FIG. 17 when viewed in the Z direction. As shown in FIG. 18, the excimer lamp 2 included in the light irradiation device 1 has an inner tube (referred to as an inner tube 10p) and an outer tube (outer tube 10q) having a cross section when the arc tube 10 is cut in the XY plane. It may be a configuration also referred to as a double tube shape, which is composed of (referred to as).

A pair of electrodes 11 are formed on the inner wall surface 10d of the inner tube 10p and the outer wall surface 10e of the outer tube 10q so as to face each other via an arc tube (10p, 10q). In the excimer lamp 2 provided with the double tube-shaped arc tube (10p, 10q) shown in FIG. 18, the inner electrode 11 is formed in a solid shape, and the outer electrode 11 emits ultraviolet light generated in the light emitting space 10c. It is formed in a mesh shape so that it can be used.

Further, in the excimer lamp 2 of the present embodiment, the reflective film 12 is formed on the inner wall surface 10f on the + X side of the outer tube 10q, and the ultraviolet light generated between the arc tubes (10p, 10q) is emitted to the −X side. It is configured to emit toward. As a result, of the wall surfaces of the outer tube 10q facing each other in the X direction, the wall surface on the −X side becomes the light emitting surface 13.

FIG. 19 is an enlarged cross-sectional view of the periphery of one excimer lamp 2 of FIG. As shown in FIG. 19, the cooling gas C1 injected from the blower mechanism 3 does not flow to the light emitting surface 13 side, and absorbs heat from the outer wall surface 10e of the outer tube 10q in the + Y direction, that is, intake air. The outer pipe 10q is cooled by flowing toward the mechanism 4 side. In this way, the heat generated by the excimer lamp 2 is sequentially exhausted from the outer tube 10q, so that the entire excimer lamp 2 is cooled.

FIG. 20 is a cross-sectional view of an excimer lamp 2 having a configuration different from that of FIG. 18 when viewed in the Z direction. As shown in FIG. 20, the excimer lamp 2 is also referred to as a single tube shape in which a pair of electrodes 11 facing each other via the wall surface of the arc tube 10 are provided in the outer wall surface 10a of the arc tube 10 and the light emitting space 10c. It may be configured to be used.

<4> In each of the above-mentioned light irradiation devices 1, two excimer lamps 2 are arranged, but only one excimer lamp 2 may be arranged, or three or more excimer lamps 2 may be arranged.

Further, in the light irradiation device 1 of the present embodiment, two ventilation mechanisms 3 are arranged along the Z direction for each excimer lamp 2, but one may be used, and three or more may be provided. It doesn't matter. Further, the two excimer lamps 2 may be configured to share the same ventilation mechanism 3. Any number of intake mechanisms 4 may be arranged along the Z direction, and may be arranged separately for each excimer lamp 2.

<5> Since the excimer lamps 2 are arranged in the ± Y direction in the light irradiation device 1, the intake mechanism 4 of the present embodiment is discretely extended in the Z direction on each of the + Y side and the −Y side. An intake port 41a is provided. However, when there is only one excimer lamp 2 arranged, the intake port 41a of the intake mechanism 4 may be only one of them. Further, the intake port 41a may be one opening continuously formed in the Z direction.

<6> The total value of the respective volumes of the second retention portion 36 may be formed to be larger than the volume of the first retention portion 35. Further, the volume of the second retention portion 36 may be formed to be larger than the volume of the first retention portion 35.

<7> The configuration provided in the light irradiation device 1 described above is merely an example, and the present invention is not limited to each of the illustrated configurations.

1: Light irradiation device 2: Excimer lamp 3: Blower mechanism 4: Intake mechanism 5: Side wall plate 6: Partition plate 6a: Through hole 7: Windshield plate 7a: Tip part 10: Light emitting tube 10a: Outer wall surface 10b: Inner wall surface 10c: Light emitting space 10d: Inner wall surface 10e: Outer wall surface 10f: Inner wall surface 10p: Inner tube 10q: Outer tube 11: Electrode 12: Reflective film 13: Light emitting surface 14: Cooled surface 30: Flow tube 31: Blow tube 31a: Protruding part 32: Bottom plate 32a: Air guide part 32b: Groove 33: Flow path limiting plate 33a: Notch 34: Inflow port 35: First stagnant part 36: Second stagnant part 37: Injection port 40: Excimer pipe 40a : Opening 41: Intake box 41a: Intake port 42: Exhaust port C1: Cooling gas G1: Luminous gas W1: Irradiated object d1, d2: Separation distance

Claims

An excimer tube extending in the first direction and having transparency to ultraviolet light and a pair of electrodes facing each other via the wall surface of the excimer tube are provided and face each other in a second direction orthogonal to the first direction. An excimer lamp having one wall surface of the wall surface of the arc tube as a light emitting surface,
A pair of side wall plates extending in the first direction and facing each other via the arc tube in the first direction and the third direction orthogonal to the second direction.
In the second direction, it exhibits a shape extending in the first direction between the arc tube and one of the side wall plates, and toward the outer wall surface of the arc tube on the side opposite to the light emitting surface. A blower mechanism with an injection port that injects cooling gas,
An intake mechanism having an intake port extending in the first direction between the arc tube and the side wall plate on the side opposite to the ventilation mechanism in the second direction.
It extends in the first direction and is arranged in the second direction on the side of the arc tube opposite to the light emitting surface so as to be separated from the arc tube, and the pair of side wall plates can be directly attached or other members can be attached. A light irradiation device including a partition plate that indirectly communicates with the light irradiation device.
The light irradiation device according to claim 1, further comprising a windshield plate that protrudes from the side wall plate toward the light emitting tube and whose tip is arranged so as to be close to or in contact with the light emitting tube.
The light irradiation device according to claim 2, wherein the cooling gas is air taken in from the outside.
The ventilation mechanism includes a first retention portion extending in the first direction and a second retention portion extending in the first direction downstream of the first retention portion and having a volume smaller than that of the first retention portion. The light irradiation device according to any one of claims 1 to 3, wherein the light irradiation device has.
The light irradiation device according to any one of claims 1 to 3, wherein the ventilation mechanism has a plurality of inlets for the cooling gas along the first direction.
The light irradiation device according to any one of claims 1 to 3, wherein the plurality of blower mechanisms are arranged along the first direction.