JP2017148888A - Device having maintenance area - Google Patents

Device having maintenance area Download PDF

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Publication number
JP2017148888A
JP2017148888A JP2016031901A JP2016031901A JP2017148888A JP 2017148888 A JP2017148888 A JP 2017148888A JP 2016031901 A JP2016031901 A JP 2016031901A JP 2016031901 A JP2016031901 A JP 2016031901A JP 2017148888 A JP2017148888 A JP 2017148888A
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main power
rod
housing
panel
maintenance area
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JP6695625B2 (en
Inventor
斎藤　淳
Jun Saito
淳 斎藤
吉田　幹
Miki Yoshida
幹 吉田
武 風呂中
Takeshi Furonaka
武 風呂中
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Disco Corp
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Disco Abrasive Systems Ltd
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Priority to JP2016031901A priority Critical patent/JP6695625B2/en
Priority to TW106101027A priority patent/TWI697378B/en
Priority to KR1020170019828A priority patent/KR102493113B1/en
Priority to CN201710088953.1A priority patent/CN107104066B/en
Publication of JP2017148888A publication Critical patent/JP2017148888A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

Abstract

PROBLEM TO BE SOLVED: To provide a device having a maintenance area maintainable without removing a cover of a casing.SOLUTION: A device (2) having a maintenance area comprises a casing (4), a main power source switch (70) for switching ON and OFF of a main power source, a maintenance area formed in the casing and accessed by an operator in maintenance time, an opening-closing door (64) for covering the maintenance area, a panel fixed to the casing in a state of adjusting the main power source switch to an ON position for turning on the main power source and removable from the casing in a state of adjusting the main power source switch to an OFF position for turning off the main power source, a rod (74) for push-stopping one end by a panel and an a penetratingly installing part (82) formed in the opening-closing door and having a through-hole (82a) for inserting the other end side of the rod.SELECTED DRAWING: Figure 1

Description

本発明は、メンテナンスの際に作業者がアクセスするメンテナンス領域を有する装置に関する。   The present invention relates to an apparatus having a maintenance area that is accessed by an operator during maintenance.

半導体ウェーハを加工等する際に用いられる各種装置の筐体には、様々な構成要素が収容されている。筐体は、例えば、装置の概形を形作る骨格と、骨格を覆うカバーとで構成されており、内部の構成要素をメンテナンス等する際には、カバーの一部が作業者によって取り外される（例えば、特許文献１参照）。   Various components are accommodated in a housing of various apparatuses used when processing a semiconductor wafer. The housing is composed of, for example, a skeleton that forms the outline of the device and a cover that covers the skeleton. When maintenance is performed on internal components, a part of the cover is removed by an operator (for example, , See Patent Document 1).

特開２００７−３３１０５０号公報JP 2007-331050 A

しかしながら、メンテナンスの度に筐体のカバーを取り外すのでは、作業の効率を必ずしも十分に高めることができない。また、この場合、装置を設置するための設置スペースとは別に、取り外したカバーを一時的に保管するための保管スペースを確保しなくてはならないという問題もあった。   However, removing the cover of the housing for each maintenance does not necessarily increase the work efficiency sufficiently. In addition, in this case, there is a problem that a storage space for temporarily storing the removed cover must be secured separately from the installation space for installing the device.

本発明はかかる問題点に鑑みてなされたものであり、その目的とするところは、筐体のカバーを取り外さなくてもメンテナンスできるメンテナンス領域を有する装置を提供することである。   The present invention has been made in view of such problems, and an object of the present invention is to provide an apparatus having a maintenance area that can be maintained without removing the cover of the housing.

本発明の一態様によれば、筐体と、主電源のオンとオフとを切り替えるための主電源スイッチと、該筐体内に形成され、メンテナンスの時に作業者がアクセスするメンテナンス領域と、該メンテナンス領域を覆うための開閉扉と、該主電源がオンになるオン位置に該主電源スイッチを合わせた状態で該筐体に固定され、該主電源がオフになるオフ位置に該主電源スイッチを合わせた状態で該筐体から取り外すことのできるパネルと、一端が該パネルで押止されるロッドと、該開閉扉に形成され、該ロッドの他端側が挿入される貫通穴を有する貫装部と、を備え、該開閉扉を閉じた状態で該パネルを該筐体に固定し該ロッドの一端の位置を規制することで、該ロッドは、他端側が該貫通穴に挿入される貫装位置に位置付けられ、該主電源スイッチを該オフ位置に合わせて該パネルを該筐体から取り外すことで、該ロッドは、他端側が該貫通穴から抜去される抜去位置に位置付けられることを特徴とするメンテナンス領域を有する装置が提供される。   According to one aspect of the present invention, a housing, a main power switch for switching on and off of the main power, a maintenance area formed in the housing and accessed by an operator during maintenance, and the maintenance An open / close door for covering the area, and the main power switch in an off position where the main power supply is turned off. A panel that can be removed from the housing in a combined state, a rod that has one end held by the panel, and a through-hole that is formed in the open / close door and has a through hole into which the other end of the rod is inserted The rod is fixed to the housing with the open / close door closed, and the position of one end of the rod is regulated so that the rod is inserted into the through-hole. Position of the main power switch. By removing the panel from the housing in accordance with the off position, the rod is positioned at a removal position where the other end side is removed from the through hole. The

本発明の一態様に係るメンテナンス領域を有する装置では、筐体に形成されているメンテナンス領域を覆うための開閉扉を備えるので、この開閉扉を開くだけでメンテナンス領域にアクセスできる。つまり、筐体のカバーを取り外さなくても装置をメンテナンスできる。   In the apparatus having the maintenance area according to one aspect of the present invention, since the opening / closing door for covering the maintenance area formed in the housing is provided, the maintenance area can be accessed simply by opening the opening / closing door. That is, the apparatus can be maintained without removing the cover of the housing.

また、本発明の一態様に係るメンテナンス領域を有する装置では、開閉扉を開く際に、主電源がオフになるオフ位置に主電源スイッチを合わせてパネルを筐体から取り外し、他端側が貫通穴に挿入されているロッドを抜去位置に位置付けて、このロッドの他端側を貫通穴から抜去しなくてはならない。つまり、主電源がオンの状態では開閉扉を開くことができないので、メンテナンスの際の安全性も高くなる。   Further, in the apparatus having the maintenance area according to one aspect of the present invention, when opening the door, the main power switch is aligned with the main power switch at the off position where the main power is turned off, and the panel is removed from the housing, and the other end side is a through hole. The rod inserted into the rod must be positioned at the removal position, and the other end of this rod must be removed from the through hole. In other words, since the door cannot be opened when the main power is on, safety during maintenance is also increased.

廃液処理装置の外観を模式的に示す斜視図である。It is a perspective view which shows typically the external appearance of a waste-liquid processing apparatus. 筐体に収容される構成要素の例を模式的に示す図である。It is a figure which shows typically the example of the component accommodated in a housing | casing. 開閉扉のロック機構について説明するための一部断面平面図である。It is a partial cross section top view for demonstrating the locking mechanism of an opening-and-closing door. 図４（Ａ）及び図４（Ｂ）は、安全機構について説明するための側面図である。4A and 4B are side views for explaining the safety mechanism. 開閉扉のロックが解除された状態を模式的に示す一部断面平面図である。It is a partial cross section top view which shows typically the state by which the lock | rock of the opening / closing door was cancelled | released.

添付図面を参照して、本発明の一態様に係る実施形態について説明する。図１は、半導体ウェーハの加工時に発生する廃液等を処理するための廃液処理装置の外観を模式的に示す斜視図である。なお、本実施形態では、メンテナンス領域を有する装置として廃液処理装置を例に挙げて説明するが、本発明に係る装置は、切削装置、レーザー加工装置、研削装置、研磨装置、洗浄装置等でも良い。   Embodiments according to one aspect of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view schematically showing the external appearance of a waste liquid treatment apparatus for treating waste liquid generated during processing of a semiconductor wafer. In the present embodiment, a waste liquid processing apparatus will be described as an example of an apparatus having a maintenance area. However, the apparatus according to the present invention may be a cutting apparatus, a laser processing apparatus, a grinding apparatus, a polishing apparatus, a cleaning apparatus, or the like. .

図１に示すように、廃液処理装置（メンテナンス領域を有する装置）２は、複数の構成要素が収容、搭載される筐体４を備えている。筐体４は、代表的には、廃液処理装置２の概形を形作る骨格（不図示）と、骨格を覆う複数のカバー６とで構成される。筐体４の内部には、構成要素を収容するための収容空間が形成されている。   As shown in FIG. 1, a waste liquid treatment apparatus (an apparatus having a maintenance area) 2 includes a housing 4 in which a plurality of components are accommodated and mounted. The housing 4 is typically composed of a skeleton (not shown) that forms the outline of the waste liquid treatment apparatus 2 and a plurality of covers 6 that cover the skeleton. A housing space for housing the components is formed inside the housing 4.

図２は、筐体４に収容される構成要素の例を模式的に示す図である。筐体４の収容空間には、図２に示すように、配管８を通じて切削装置等の加工装置（不図示）に接続される廃液タンク１０が収容されている。この廃液タンク１０は、配管８を通じて加工装置から受け取った廃液を貯留する。   FIG. 2 is a diagram schematically illustrating an example of components housed in the housing 4. As shown in FIG. 2, a waste liquid tank 10 connected to a processing device (not shown) such as a cutting device is accommodated in the housing space of the housing 4 through a pipe 8. The waste liquid tank 10 stores the waste liquid received from the processing apparatus through the pipe 8.

廃液タンク１０の上部には、廃液タンク１０に貯留されている廃液を後段に送り出すための廃液ポンプ１２が設けられている。廃液ポンプ１２によって廃液タンク１０から送り出された廃液は、配管１４、電磁弁１６等を通じて濾過ユニット１８へと供給される。濾過ユニット１８は、廃液タンク１０から供給される廃液を濾過するためのフィルタ２０を備えている。   A waste liquid pump 12 is provided above the waste liquid tank 10 to send out the waste liquid stored in the waste liquid tank 10 to the subsequent stage. The waste liquid sent out from the waste liquid tank 10 by the waste liquid pump 12 is supplied to the filtration unit 18 through the pipe 14, the electromagnetic valve 16, and the like. The filtration unit 18 includes a filter 20 for filtering the waste liquid supplied from the waste liquid tank 10.

フィルタ２０の下方には、濾過後の液体（濾液）を受ける濾液受けパン２２が設置されている。この濾液受けパン２２には、配管２４等を介して濾液タンク２６が接続されており、廃液をフィルタ２０で濾過して得られた濾液は、濾液受けパン２２を通じて濾液タンク２６に貯留される。   A filtrate receiving pan 22 for receiving the filtered liquid (filtrate) is installed below the filter 20. A filtrate tank 26 is connected to the filtrate receiving pan 22 through a pipe 24 and the like, and the filtrate obtained by filtering the waste liquid through the filter 20 is stored in the filtrate tank 26 through the filtrate receiving pan 22.

なお、濾過ユニット１８へと廃液を供給する配管１４には、廃液の圧力を検出するための圧力センサ２８が設けられている。圧力センサ２８は、制御ユニット（不図示）に接続されており、圧力センサ２８で検出した圧力の情報を含む信号が制御ユニットへと送られる。   A pressure sensor 28 for detecting the pressure of the waste liquid is provided in the pipe 14 that supplies the waste liquid to the filtration unit 18. The pressure sensor 28 is connected to a control unit (not shown), and a signal including information on the pressure detected by the pressure sensor 28 is sent to the control unit.

制御ユニットは、例えば、圧力センサ２８で検出した廃液の圧力が閾値よりも大きくなると、フィルタ２０の機能が低下していると判断して作業者にその旨を通知する。このような通知は、警告灯（不図示）の発光、通知音の発生、モニタ６８（図１）への表示等の方法で行うことができる。   For example, when the pressure of the waste liquid detected by the pressure sensor 28 becomes larger than the threshold value, the control unit determines that the function of the filter 20 is deteriorated and notifies the operator of the fact. Such notification can be performed by a method such as emission of a warning lamp (not shown), generation of a notification sound, display on the monitor 68 (FIG. 1), or the like.

濾液タンク２６には、貯留されている濾液を後段に送り出すための濾液ポンプ３０が接続されている。濾液ポンプ３０によって濾液タンク２６から送り出された濾液は、配管３２等を通じて純水生成ユニット３４へと供給される。純水生成ユニット３４は、濾液タンク２６から供給される濾液に紫外線（紫外光）を照射するための紫外線光源３６を備えている。   Connected to the filtrate tank 26 is a filtrate pump 30 for sending the stored filtrate to the subsequent stage. The filtrate sent from the filtrate tank 26 by the filtrate pump 30 is supplied to the pure water generation unit 34 through the pipe 32 and the like. The pure water generation unit 34 includes an ultraviolet light source 36 for irradiating the filtrate supplied from the filtrate tank 26 with ultraviolet rays (ultraviolet light).

紫外線光源３６から照射される紫外線で殺菌された濾液は、配管３８等を通じて第１イオン交換器４０及び第２イオン交換器４２に供給される。第１イオン交換器４０は、電磁弁４４を介して配管３８に接続されており、第２イオン交換器４２は、電磁弁４６を介して配管３８に接続されている。これら２つの電磁弁４４，４６を制御することで、第１イオン交換器４０及び第２イオン交換器４２の一方に濾液を供給できる。   The filtrate sterilized with ultraviolet rays irradiated from the ultraviolet light source 36 is supplied to the first ion exchanger 40 and the second ion exchanger 42 through the pipe 38 and the like. The first ion exchanger 40 is connected to the pipe 38 via the electromagnetic valve 44, and the second ion exchanger 42 is connected to the pipe 38 via the electromagnetic valve 46. By controlling these two solenoid valves 44, 46, the filtrate can be supplied to one of the first ion exchanger 40 and the second ion exchanger 42.

第１イオン交換器４０又は第２イオン交換器４２に供給された濾液は、第１イオン交換器４０又は第２イオン交換器４２に含まれるイオン交換樹脂でイオン交換され、純水となる。一方、このような方法で生成された純水には、イオン交換樹脂から発生する微細な樹脂片等の屑が混入していることもある。そこで、第１イオン交換器４０及び第２イオン交換器４２の後段に配管４８を介して接続された精密フィルタ５０でこの屑を除去する。   The filtrate supplied to the 1st ion exchanger 40 or the 2nd ion exchanger 42 is ion-exchanged with the ion exchange resin contained in the 1st ion exchanger 40 or the 2nd ion exchanger 42, and becomes pure water. On the other hand, the pure water produced by such a method may contain debris such as fine resin pieces generated from the ion exchange resin. Therefore, the debris is removed by the precision filter 50 connected to the subsequent stage of the first ion exchanger 40 and the second ion exchanger 42 via the pipe 48.

なお、精密フィルタ５０へと純水を供給する配管４８には、純水の圧力を検出するための圧力センサ５２が設けられている。圧力センサ５２は、制御ユニットに接続されており、圧力センサ５２で検出した圧力の情報を含む信号が制御ユニットへと送られる。制御ユニットは、例えば、圧力センサ５２で検出した純水の圧力が閾値よりも大きくなると、精密フィルタ５０の機能が低下していると判断して作業者にその旨を通知する。   A pipe 48 that supplies pure water to the precision filter 50 is provided with a pressure sensor 52 for detecting the pressure of pure water. The pressure sensor 52 is connected to the control unit, and a signal including information on the pressure detected by the pressure sensor 52 is sent to the control unit. For example, when the pressure of pure water detected by the pressure sensor 52 is greater than a threshold value, the control unit determines that the function of the precision filter 50 has deteriorated and notifies the operator of the fact.

また、精密フィルタ５０へと純水を供給する配管４８には、純水の比抵抗を検出するための比抵抗計５４が設けられている。比抵抗計５４は、制御ユニットに接続されており、比抵抗計５４で検出した比抵抗の情報を含む信号が制御ユニットへと送られる。制御ユニットは、例えば、比抵抗計５４で検出した純水の比抵抗が閾値よりも低くなると、第１イオン交換器４０又は第２イオン交換器４２の機能が低下していると判断して作業者にその旨を通知する。   A specific resistance meter 54 for detecting the specific resistance of pure water is provided in the pipe 48 for supplying pure water to the precision filter 50. The specific resistance meter 54 is connected to the control unit, and a signal including information on the specific resistance detected by the specific resistance meter 54 is sent to the control unit. For example, the control unit determines that the function of the first ion exchanger 40 or the second ion exchanger 42 has deteriorated when the specific resistance of pure water detected by the specific resistance meter 54 is lower than a threshold value. Notify the person to that effect.

純水生成ユニット３４で生成された純水は、配管５６等を通じて温度調整ユニット５８へと送られる。温度調整ユニット５８で所定の温度に調整された純水は、配管６０等を通じて加工装置に供給される。   The pure water generated by the pure water generation unit 34 is sent to the temperature adjustment unit 58 through the pipe 56 and the like. The pure water adjusted to a predetermined temperature by the temperature adjustment unit 58 is supplied to the processing apparatus through the pipe 60 and the like.

図１に示すように、筐体４の上部前面側には、収容空間に通ずる第１開口部４ａが形成されている。第１開口部４ａ内には、例えば、上述した濾過ユニット１８が配置されている。また、筐体４の上面には、この第１開口部４ａを閉じるための蓋６２が取り付けられている。蓋６２を開くことで、作業者は、第１開口部４ａを通じて濾過ユニット１８のフィルタ２０を交換できる。   As shown in FIG. 1, a first opening 4 a that communicates with the accommodation space is formed on the upper front side of the housing 4. In the 1st opening part 4a, the filtration unit 18 mentioned above is arrange | positioned, for example. Further, a lid 62 for closing the first opening 4 a is attached to the upper surface of the housing 4. By opening the lid 62, the operator can replace the filter 20 of the filtration unit 18 through the first opening 4a.

また、筐体４の前面には、第１開口部４ａに隣接して、収容空間に通ずる第２開口部４ｂが形成されている。廃液処理装置２をメンテナンス等する際には、例えば、作業者は、第２開口部４ｂを通じて収容空間の一部にアクセスできる。すなわち、この収容空間の一部は、メンテナンスの際に作業者がアクセスするメンテナンス領域となる。   Further, on the front surface of the housing 4, a second opening 4 b is formed adjacent to the first opening 4 a so as to communicate with the accommodation space. When maintaining the waste liquid treatment apparatus 2, for example, the operator can access a part of the accommodation space through the second opening 4b. That is, a part of the accommodation space becomes a maintenance area that is accessed by the worker during maintenance.

メンテナンス領域には、例えば、メンテナンスの頻度が高い電装部品や配管等の構成要素が収容される。ただし、メンテナンス領域に収容される構成要素に制限はない。第２開口部４ｂの前方側には、メンテナンス領域を覆うための開閉扉６４が設けられている。開閉扉６４の一方の側部は、蝶番等で筐体４に連結されており、開閉扉６４は、この側部を中心に回転する。   In the maintenance area, for example, components such as electrical components and pipes with high maintenance frequency are accommodated. However, there are no restrictions on the components accommodated in the maintenance area. An opening / closing door 64 for covering the maintenance area is provided on the front side of the second opening 4b. One side of the open / close door 64 is connected to the housing 4 by a hinge or the like, and the open / close door 64 rotates around this side.

開閉扉６４の上部前面には、制御ユニットへの指示等を入力するための入力パッド６６が設けられている。入力パッド６６に隣接する位置には、各種の情報を表示するためのモニタ６８が設置されている。   An input pad 66 for inputting an instruction to the control unit or the like is provided on the upper front surface of the opening / closing door 64. A monitor 68 for displaying various types of information is installed at a position adjacent to the input pad 66.

筐体４の側面には、廃液処理装置２が備える主電源（不図示）のオンとオフとを切り替えるための回転式の主電源スイッチ７０が配置されている。主電源スイッチ７０の周囲には、主電源スイッチ７０を囲むパネル７２が固定されている。このパネル７２は、開閉扉６４をロックするためのロック機構の一部となる。   A rotary main power switch 70 for switching on and off a main power supply (not shown) provided in the waste liquid treatment apparatus 2 is disposed on the side surface of the housing 4. A panel 72 surrounding the main power switch 70 is fixed around the main power switch 70. The panel 72 becomes a part of a lock mechanism for locking the open / close door 64.

図３は、開閉扉６４のロック機構について説明するための一部断面平面図である。図３では、開閉扉６４をロックした状態が示されている。図３に示すように、パネル７２の裏面側（筐体４のカバー６側）には、ロック機構を構成する円柱状のロッド７４の一端側（基端側）が接触する。このロッド７４は、例えば、カバー６に形成された貫通穴（不図示）を通じて、筐体４の内部に挿入されている。   FIG. 3 is a partial cross-sectional plan view for explaining the locking mechanism of the open / close door 64. In FIG. 3, the state which locked the opening-and-closing door 64 is shown. As shown in FIG. 3, one end side (base end side) of a cylindrical rod 74 constituting the lock mechanism is in contact with the back surface side of the panel 72 (the cover 6 side of the housing 4). The rod 74 is inserted into the housing 4 through a through hole (not shown) formed in the cover 6, for example.

また、ロッド７４は、例えば、筐体４の上部等に固定された第１保持部７６及び第２保持部７８によってスライド可能な状態で保持されている。第１保持部７６及び第２保持部７８には、それぞれ貫通穴（不図示）が形成されており、ロッド７４は、この貫通穴に挿入されている。   Further, the rod 74 is held in a slidable state by, for example, a first holding unit 76 and a second holding unit 78 fixed to the upper portion of the housing 4 or the like. The first holding part 76 and the second holding part 78 are each formed with a through hole (not shown), and the rod 74 is inserted into the through hole.

ロッド７４の一端側には、ロッド７４の側面から径方向に張り出す第１フランジ部７４ａが設けられている。第１フランジ部７４ａと第１保持部７６との間に位置するロッド７４の周囲には、コイルばね８０が配置されている。このコイルばね８０によって、ロッド７４は、パネル７２の裏面側に向けて付勢される。すなわち、開閉扉６４をロックした状態では、ロッド７４の一端側がパネル７２で押さえつけるように止められている（押止される）。   A first flange portion 74 a is provided on one end side of the rod 74 so as to project radially from the side surface of the rod 74. A coil spring 80 is disposed around the rod 74 located between the first flange portion 74 a and the first holding portion 76. By this coil spring 80, the rod 74 is urged toward the back side of the panel 72. That is, in a state where the open / close door 64 is locked, one end of the rod 74 is stopped (pressed) by the panel 72.

ロッド７４の他端側（先端側）には、ロッド７４の側面から径方向に張り出す第２フランジ部７４ｂが設けられている。この第２フランジ部７４ｂによって、第２保持部７８からのロッド７４の抜けが防止される。なお、第２フランジ部７４ｂは、ロッド７４の他端から一端側に離れた位置に配置されており、ロッド７４の他端の側面は、露出している。   On the other end side (tip side) of the rod 74, a second flange portion 74 b is provided that projects radially from the side surface of the rod 74. The second flange portion 74 b prevents the rod 74 from coming off from the second holding portion 78. In addition, the 2nd flange part 74b is arrange | positioned in the position away from the other end of the rod 74 to the one end side, and the side surface of the other end of the rod 74 is exposed.

開閉扉６４の内側には、ロッド７４の他端側と係合する貫装部８２が設けられている。貫装部８２には、ロッド７４の他端側を挿入できる貫通穴８２ａが形成されている。よって、開閉扉６４を閉じた状態でロッド７４をスライドさせ、他端側が貫通穴８２ａに挿入される貫装位置にロッド７４を位置付ければ、開閉扉６４をロックできる。   A penetrating portion 82 that engages with the other end of the rod 74 is provided inside the opening / closing door 64. A through hole 82 a into which the other end of the rod 74 can be inserted is formed in the penetration part 82. Therefore, if the rod 74 is slid with the open / close door 64 closed, and the rod 74 is positioned at the insertion position where the other end is inserted into the through hole 82a, the open / close door 64 can be locked.

上述のように、ロッド７４の一端側は、パネル７２の裏面側で押さえつけるように止められており、ロッド７４の一端側の位置は、パネル７２によって規制される。例えば、開閉扉６４がロックされる貫装位置にロッド７４を位置付けるには、図３に示すように、パネル７２を筐体４（カバー６）に固定してロッド７４の一端側の位置を規制すれば良い。   As described above, one end side of the rod 74 is stopped so as to be pressed by the back side of the panel 72, and the position of the one end side of the rod 74 is regulated by the panel 72. For example, in order to position the rod 74 at the penetration position where the open / close door 64 is locked, as shown in FIG. 3, the panel 72 is fixed to the housing 4 (cover 6) and the position on one end side of the rod 74 is restricted. Just do it.

パネル７２の筐体４（カバー６）への固定は、例えば、４個の螺子８４によって行われる。一方で、開閉扉６４のロックを解除するには、パネル７２を筐体４（カバー６）から取り外し、他端側が貫通穴８２ａから抜去される抜去位置にロッド７４を位置付ければ良い。   The panel 72 is fixed to the housing 4 (cover 6) by, for example, four screws 84. On the other hand, in order to unlock the open / close door 64, the panel 72 is removed from the housing 4 (cover 6), and the rod 74 may be positioned at the removal position where the other end is removed from the through hole 82a.

なお、このロック機構には、主電源がオフになるオフ位置に主電源スイッチ７０を合わせることでロックを解除できるようにする安全機構が設けられている。つまり、主電源スイッチ７０をオフ位置に合わせない限り、螺子８４を緩めてもパネル７２を筐体４（カバー６）から取り外すことはできない。   The lock mechanism is provided with a safety mechanism that allows the lock to be released by setting the main power switch 70 to the off position where the main power is turned off. That is, unless the main power switch 70 is set to the OFF position, the panel 72 cannot be removed from the housing 4 (cover 6) even if the screw 84 is loosened.

図４（Ａ）及び図４（Ｂ）は、安全機構について説明するための側面図である。なお、図４（Ａ）では、主電源がオンになるオン位置に主電源スイッチ７０を合わせた状態を示しており、図４（Ｂ）では、主電源がオフになるオフ位置に主電源スイッチ７０を合わせた状態を示している。   4A and 4B are side views for explaining the safety mechanism. 4A shows a state in which the main power switch 70 is set to the on position where the main power is turned on, and FIG. 4B shows the main power switch in the off position where the main power is turned off. 70 shows the combined state.

図４（Ａ）及び図４（Ｂ）に示すように、安全機構は、例えば、主電源スイッチ７０の回転軸に連結、固定された棒状の回転部７０ａを含む。この回転部７０ａは、主電源スイッチ７０の回転に伴い回転する。一方で、回転部７０ａの先端に対応する位置には、パネル７２側に固定された受け部７２ａが配置されている。   As shown in FIGS. 4A and 4B, the safety mechanism includes, for example, a rod-shaped rotating portion 70a connected and fixed to the rotating shaft of the main power switch 70. The rotating unit 70a rotates as the main power switch 70 rotates. On the other hand, a receiving portion 72a fixed on the panel 72 side is disposed at a position corresponding to the tip of the rotating portion 70a.

図４（Ａ）に示すように、受け部７２ａは、主電源スイッチ７０をオン位置に合わせた状態で回転部７０ａの先端が係合する位置に配置されている。よって、主電源スイッチ７０をオン位置に合わせた状態では、回転部７０ａの先端が受け部７２ａに係合し、主電源スイッチ７０とパネル７２との位置関係が固定される。すなわち、この状態では、パネル７２を筐体４（カバー６）から取り外すことはできない。   As shown in FIG. 4A, the receiving portion 72a is arranged at a position where the tip of the rotating portion 70a engages with the main power switch 70 set to the on position. Therefore, in a state where the main power switch 70 is set to the on position, the tip of the rotating portion 70a engages with the receiving portion 72a, and the positional relationship between the main power switch 70 and the panel 72 is fixed. That is, in this state, the panel 72 cannot be removed from the housing 4 (cover 6).

一方、図４（Ｂ）に示すように、主電源スイッチ７０を回転させてオフ位置に合わせると、回転部７０ａも回転し、回転部７０ａの先端と受け部７２ａとの係合は解除される。これにより、主電源スイッチ７０とパネル７２との位置関係が固定されなくなるので、パネル７２を筐体４（カバー６）から取り外して、開閉扉６４のロックを解除できる。   On the other hand, as shown in FIG. 4B, when the main power switch 70 is rotated to the OFF position, the rotating portion 70a also rotates, and the engagement between the tip of the rotating portion 70a and the receiving portion 72a is released. . As a result, the positional relationship between the main power switch 70 and the panel 72 is not fixed, so that the panel 72 can be removed from the housing 4 (cover 6) and the lock of the open / close door 64 can be released.

図５は、開閉扉６４のロックが解除された状態を模式的に示す一部断面平面図である。図５に示すように、主電源スイッチ７０をオフ位置に合わせた状態で螺子８４を緩めれば、パネル７２を筐体４（カバー６）から取り外すことができる。   FIG. 5 is a partial cross-sectional plan view schematically showing a state in which the door 64 is unlocked. As shown in FIG. 5, if the screw 84 is loosened with the main power switch 70 set to the off position, the panel 72 can be removed from the housing 4 (cover 6).

パネル７２を筐体４（カバー６）から取り外すと、ロッド７４は抜去位置に位置付けられ、ロッド７４の他端側は貫通穴８２ａから抜去される。これにより、作業者は、開閉扉６４を開いてメンテナンス領域にアクセスできるようになる。なお、この状態では、主電源がオフになっているので、安全性が高い。   When the panel 72 is removed from the housing 4 (cover 6), the rod 74 is positioned at the removal position, and the other end side of the rod 74 is removed from the through hole 82a. As a result, the operator can access the maintenance area by opening the door 64. In this state, since the main power supply is turned off, the safety is high.

以上のように、本実施形態に係る廃液処理装置（メンテナンス領域を有する装置）２では、筐体４に形成されているメンテナンス領域を覆うための開閉扉６４を備えるので、この開閉扉６４を開くだけでメンテナンス領域にアクセスできる。つまり、筐体４のカバー６を取り外さなくても廃液処理装置２をメンテナンスできる。   As described above, the waste liquid treatment apparatus (an apparatus having a maintenance area) 2 according to the present embodiment includes the opening / closing door 64 for covering the maintenance area formed in the housing 4. Just access the maintenance area. That is, the waste liquid treatment apparatus 2 can be maintained without removing the cover 6 of the housing 4.

また、本実施形態に係る廃液処理装置２では、開閉扉６４を開く際に、主電源がオフになるオフ位置に主電源スイッチ７０を合わせてパネル７２を筐体４（カバー６）から取り外し、他端側が貫通穴８２ａに挿入されているロッド７４を抜去位置に位置付けて、このロッド７４の他端側を貫通穴８２ａから抜去しなくてはならない。つまり、主電源がオンの状態では開閉扉６４を開くことができないので、メンテナンスの際の安全性も高くなる。   Further, in the waste liquid treatment apparatus 2 according to the present embodiment, when the open / close door 64 is opened, the main power switch 70 is adjusted to the off position where the main power is turned off to remove the panel 72 from the housing 4 (cover 6). The rod 74 whose other end is inserted into the through hole 82a is positioned at the removal position, and the other end of the rod 74 must be removed from the through hole 82a. That is, since the open / close door 64 cannot be opened when the main power is on, the safety during maintenance is also increased.

なお、本発明は上記実施形態の記載に限定されず、種々変更して実施可能である。例えば、上記実施形態では、回転式の主電源スイッチ７０に対応する安全機構の一例について説明しているが、安全機構の構成に特段の制限はない。例えば、プッシュ式の主電源スイッチに連動して、電気的に回転部を回転させる安全機構等を用いることもできる。もちろん、回転式の主電源スイッチに、電気的に動作する安全機構等を組み合わせても良い。   In addition, this invention is not limited to description of the said embodiment, A various change can be implemented. For example, in the above-described embodiment, an example of a safety mechanism corresponding to the rotary main power switch 70 has been described. However, the configuration of the safety mechanism is not particularly limited. For example, a safety mechanism or the like that electrically rotates the rotating portion in conjunction with the push-type main power switch can be used. Of course, an electrically operated safety mechanism may be combined with the rotary main power switch.

その他、上記実施形態に係る構造、方法等は、本発明の目的の範囲を逸脱しない限りにおいて適宜変更して実施できる。   In addition, the structure, method, and the like according to the above-described embodiment can be appropriately modified and implemented without departing from the scope of the object of the present invention.

２ 廃液処理装置（メンテナンス領域を有する装置）
４ 筐体
４ａ 第１開口部
４ｂ 第２開口部
６ カバー
８ 配管
１０ 廃液タンク
１２ 廃液ポンプ
１４ 配管
１６ 電磁弁
１８ 濾過ユニット
２０ フィルタ
２２ 濾液受けパン
２４ 配管
２６ 濾液タンク
２８ 圧力センサ
３０ 濾液ポンプ
３２ 配管
３４ 純水生成ユニット
３６ 紫外線光源
３８ 配管
４０ 第１イオン交換器
４２ 第２イオン交換器
４４ 電磁弁
４６ 電磁弁
４８ 配管
５０ 精密フィルタ
５２ 圧力センサ
５４ 比抵抗計
５６ 配管
５８ 温度調整ユニット
６０ 配管
６２ 蓋
６４ 開閉扉
６６ 入力パッド
６８ モニタ
７０ 主電源スイッチ
７０ａ 回転部
７２ パネル
７２ａ 受け部
７４ ロッド
７４ａ 第１フランジ部
７４ｂ 第２フランジ部
７６ 第１保持部
７８ 第２保持部
８０ コイルばね
８２ 貫装部
８２ａ 貫通穴
８４ 螺子 2 Waste liquid treatment equipment (equipment with maintenance area)
DESCRIPTION OF SYMBOLS 4 Case 4a 1st opening part 4b 2nd opening part 6 Cover 8 Piping 10 Waste liquid tank 12 Waste liquid pump 14 Piping 16 Solenoid valve 18 Filtration unit 20 Filter 22 Filtrate receiving pan 24 Piping 26 Filtrating tank 28 Pressure sensor 30 Filtration pump 32 Piping 34 Pure Water Generation Unit 36 Ultraviolet Light Source 38 Piping 40 First Ion Exchanger 42 Second Ion Exchanger 44 Solenoid Valve 46 Solenoid Valve 48 Piping 50 Precision Filter 52 Pressure Sensor 54 Resistivity Meter 56 Piping 58 Temperature Control Unit 60 Piping 62 Lid 64 Opening / closing door 66 Input pad 68 Monitor 70 Main power switch 70a Rotating part 72 Panel 72a Receiving part 74 Rod 74a First flange part 74b Second flange part 76 First holding part 78 Second holding part 80 Coil spring 82 Inserting part 82a Through hole 84 Screw

Claims (1)

筐体と、
主電源のオンとオフとを切り替えるための主電源スイッチと、
該筐体内に形成され、メンテナンスの時に作業者がアクセスするメンテナンス領域と、
該メンテナンス領域を覆うための開閉扉と、
該主電源がオンになるオン位置に該主電源スイッチを合わせた状態で該筐体に固定され、該主電源がオフになるオフ位置に該主電源スイッチを合わせた状態で該筐体から取り外すことのできるパネルと、
一端が該パネルで押止されるロッドと、
該開閉扉に形成され、該ロッドの他端側が挿入される貫通穴を有する貫装部と、を備え、
該開閉扉を閉じた状態で該パネルを該筐体に固定し該ロッドの一端の位置を規制することで、該ロッドは、他端側が該貫通穴に挿入される貫装位置に位置付けられ、
該主電源スイッチを該オフ位置に合わせて該パネルを該筐体から取り外すことで、該ロッドは、他端側が該貫通穴から抜去される抜去位置に位置付けられることを特徴とするメンテナンス領域を有する装置。 A housing,
A main power switch for switching the main power on and off;
A maintenance area formed in the housing and accessed by an operator during maintenance;
An open / close door for covering the maintenance area;
Fixed to the housing with the main power switch in the on position where the main power is on, and removed from the housing with the main power switch in the off position where the main power is off A panel that can
A rod whose one end is held by the panel;
A through-hole formed in the open / close door and having a through-hole into which the other end of the rod is inserted,
By fixing the panel to the housing with the open / close door closed and regulating the position of one end of the rod, the rod is positioned at a penetration position where the other end is inserted into the through hole,
By having the main power switch in the off position and removing the panel from the housing, the rod has a maintenance area characterized in that the other end side is positioned at a removal position where the other end side is removed from the through hole. apparatus.
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KR1020170019828A KR102493113B1 (en) 2016-02-23 2017-02-14 Apparatus having maintenance area
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